Spraying device with lifting function

Abstract

The utility model discloses a spraying device with a lifting function, which comprises a longitudinal movement mechanism, a rotating mechanism and a nozzle mechanism, the rotating mechanism is mounted on the longitudinal movement mechanism, the rotating mechanism is in transmission connection with the nozzle mechanism, and the nozzle mechanism is mounted on the longitudinal movement mechanism. The longitudinal movement mechanism drives the rotating mechanism and the nozzle mechanism to move in the longitudinal direction together, and the rotating mechanism drives the nozzle mechanism to rotate. The longitudinal movement mechanism comprises a first driving part and a ball screw assembly, the first driving part is in transmission connection with the ball screw assembly, the rotating mechanism is installed on the ball screw assembly, and the ball screw assembly drives the rotating mechanism to move in the longitudinal direction. The device is more stable in fixation, more stable in movement speed and distance, and easy to adjust.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer cleaning, in particular to a spray device with a lifting function. Background Art

[0002] The chemical liquid of semiconductor single-wafer cleaning equipment is sprayed onto the wafer by the spray device in the process chamber. The wafer rotates at high speed in the process chamber to achieve the cleaning effect. Because the cleaning of the wafer requires multiple chemical liquids and multiple spray devices, the entire spray device needs to have the function of rotation and lifting to avoid interference and collision during the cleaning process.

[0003] At present, the spray device generally consists of a rotating mechanism, an up-and-down movement mechanism, and a nozzle. The up-and-down movement mechanism uses a cylinder as an actuator to drive the up-and-down movement of the entire spray device. The up-and-down movement of the spray device is achieved through the cylinder.

[0004] When cleaning, the nozzle is at a certain distance from the wafer, and the change in distance will affect the cleaning effect. Therefore, the spray device needs to ensure stability and position accuracy during the lifting process. When the cylinder module is installed, one end must be movable, and the movement of the cylinder is affected by the air pressure. Its speed has a large error after the entire reciprocating process, and the stability of the distance from the nozzle to the wafer surface cannot be guaranteed. Utility Model Content

[0005] In view of the above problems existing in the existing wafer cleaning, the present invention aims to provide a spray device with a lifting function, which is more stably fixed, and the speed and distance of movement are more stable and easy to adjust.

[0006] The specific technical solutions are as follows:

[0007] A spray device with lifting function, comprising: a longitudinal motion mechanism, a rotating mechanism and a nozzle mechanism, wherein the rotating mechanism is mounted on the longitudinal motion mechanism, the rotating mechanism is in transmission connection with the nozzle mechanism, the longitudinal motion mechanism drives the rotating mechanism and the nozzle mechanism to move longitudinally together, and the rotating mechanism drives the nozzle mechanism to rotate;

[0008] The longitudinal motion mechanism comprises: a first driving member and a ball screw assembly, the first driving member is drivingly connected to the ball screw assembly, the rotating mechanism is mounted on the ball screw assembly, and the ball screw assembly drives the rotating mechanism to move longitudinally.

[0009] The above-mentioned spray device with lifting function, wherein the ball screw assembly comprises:

[0010] Frame;

[0011] A ball screw, the ball screw is mounted on the frame, and the first driving member is drivingly connected to the ball screw;

[0012] A slider is movably connected to the ball screw through a first connecting plate, and the slider is fixedly connected to the rotating mechanism through a second connecting plate.

[0013] In the above-mentioned spray device with lifting function, the ball screw assembly further includes: a slide rail, the slide rail is installed on the frame, and the slider is slidably arranged on the slide rail.

[0014] In the above-mentioned spray device with lifting function, the ball screw assembly further includes: a cable protection chain and a mounting plate, the mounting plate is arranged on the frame, and the cable protection chain is arranged on the mounting plate.

[0015] The above-mentioned spray device with lifting function, wherein at least one photoelectric switch is provided on the mounting plate.

[0016] In the above-mentioned spray device with lifting function, the first driving member is drivingly connected to the ball screw through a coupling.

[0017] In the above-mentioned spray device with lifting function, the first driving member and the rotating mechanism are both servo motors.

[0018] In the above-mentioned spray device with lifting function, a sensor sheet and the photoelectric switch are provided at the connection between the rotating mechanism and the nozzle mechanism.

[0019] In the above-mentioned spray device with lifting function, a fixing seat is provided on the frame, and the first driving member is installed on the fixing seat.

[0020] Compared with the prior art, the above technical solution has the following positive effects:

[0021] The power module of the longitudinal motion mechanism of the utility model is replaced by a combination of a screw rod and a motor from a cylinder module. The spray device is controlled by the motor during the up and down movement. The position accuracy of the up and down movement of the entire spray device is more stable and is no longer affected by air pressure, etc. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the overall structure of a spray device with lifting function according to the utility model;

[0023] Figure 2 This is a schematic diagram of the overall structure of a spray device with lifting function according to the utility model;

[0024] Figure 3This is a schematic diagram of the structure of a longitudinal motion mechanism of a spray device with lifting function according to the utility model;

[0025] In the accompanying drawings: 1. longitudinal motion mechanism; 2. rotation mechanism; 3. nozzle mechanism; 11. first driving member; 12. ball screw assembly; 13. frame; 14. ball screw; 15. slider; 16. first connecting plate; 17. second connecting plate; 18. slide rail; 19. cable protection chain; 20. mounting plate; 21. photoelectric switch; 22. coupling; 23. sensor sheet; 24. fixing seat. DETAILED DESCRIPTION

[0026] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but they are not intended to limit the present invention.

[0027] like Figures 1 to 3 As shown, a preferred embodiment of a spray device with a lifting function is shown, comprising: a longitudinal motion mechanism 1, a rotating mechanism 2 and a nozzle mechanism 3, the rotating mechanism 2 is installed on the longitudinal motion mechanism 1, the rotating mechanism 2 is transmission-connected with the nozzle mechanism 3, the longitudinal motion mechanism 1 drives the rotating mechanism 2 and the nozzle mechanism 3 to move longitudinally together, and the rotating mechanism 2 drives the nozzle mechanism 3 to rotate.

[0028] Further, as a preferred embodiment, the longitudinal motion mechanism 1 includes: a first driving member 11 and a ball screw assembly 12, the first driving member 11 is transmission-connected to the ball screw assembly 12, the rotating mechanism 2 is mounted on the ball screw assembly 12, and the ball screw assembly 12 drives the rotating mechanism 2 to move longitudinally.

[0029] Furthermore, as a preferred embodiment, the ball screw assembly 12 includes: a frame 13, a ball screw 14 and a slider 15, the ball screw 14 is installed on the frame 13, the first driving member 11 is transmission-connected to the ball screw 14, the slider 15 is movably connected to the ball screw 14 via a first connecting plate 16, and the slider 15 is fixedly connected to the rotating mechanism 2 via a second connecting plate 17.

[0030] The above are only preferred embodiments of the present invention, and are not intended to limit the implementation methods and protection scope of the present invention.

[0031] The utility model also has the following implementation methods based on the above:

[0032] In further embodiments of the present invention, please continue to refer to Figures 1 to 3 As shown, the ball screw assembly 12 further includes a slide rail 18 , which is mounted on the frame 13 , and the slider 15 is slidably disposed on the slide rail 18 .

[0033] In a further embodiment of the utility model, the ball screw assembly 12 further includes: a cable protection chain 19 and a mounting plate 20 , the mounting plate 20 is disposed on the frame 13 , and the cable protection chain 19 is disposed on the mounting plate 20 .

[0034] In a further embodiment of the present invention, at least one photoelectric switch 21 is disposed on the mounting plate 20 .

[0035] In a further embodiment of the present invention, the first driving member 11 is transmission-connected to the ball screw 14 via a coupling 22 .

[0036] In a further embodiment of the present invention, the first driving member 11 and the rotating mechanism 2 are both servo motors.

[0037] In a further embodiment of the present invention, a sensor sheet 23 and a photoelectric switch 21 are provided at the connection between the rotating mechanism 2 and the nozzle mechanism 3 .

[0038] In a further embodiment of the present invention, a fixing seat 24 is disposed on the frame 13 , and the first driving member 11 is mounted on the fixing seat 24 .

[0039] Preferably, the fixing seat 24 is L-shaped.

[0040] Preferably, one end of the frame 13 abuts against the step of the fixing seat 24, so that the installation is more stable and firm.

[0041] The cable protection chain can protect the cables of the servo motor and the photoelectric switch 21 from being damaged during movement.

[0042] The slide rail 18 can make the movement more stable and accurate.

[0043] The power module of the longitudinal motion mechanism of the utility model is replaced by a combination of a screw rod and a motor from a cylinder module. The spray device is controlled by the motor during the up and down movement. The position accuracy of the up and down movement of the entire spray device is more stable and is no longer affected by air pressure, etc.

[0044] It is easier for technicians to adjust and operate the machine than the cylinder module. The movement of the entire module will not be affected by air pressure, and the entire equipment has a higher degree of electrification.

[0045] The above description is only a preferred embodiment of the present invention, and does not limit the implementation mode and protection scope of the present invention. For those skilled in the art, it should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the description and illustrations of the present invention should be included in the protection scope of the present invention.

Claims

1. A spray device with lifting function, characterized in that: include: A longitudinal movement mechanism, a rotation mechanism and a nozzle mechanism, wherein the rotation mechanism is mounted on the longitudinal movement mechanism, the rotation mechanism is in transmission connection with the nozzle mechanism, the longitudinal movement mechanism drives the rotation mechanism and the nozzle mechanism to move longitudinally together, and the rotation mechanism drives the nozzle mechanism to rotate; The longitudinal motion mechanism comprises: a first driving member and a ball screw assembly, the first driving member is drivingly connected to the ball screw assembly, the rotating mechanism is mounted on the ball screw assembly, and the ball screw assembly drives the rotating mechanism to move longitudinally.

2. The spray device with lifting function according to claim 1, characterized in that: The ball screw assembly comprises: Frame; A ball screw, the ball screw is mounted on the frame, and the first driving member is drivingly connected to the ball screw; A slider is movably connected to the ball screw through a first connecting plate, and the slider is fixedly connected to the rotating mechanism through a second connecting plate.

3. The spray device with lifting function according to claim 2, characterized in that: The ball screw assembly further comprises a slide rail, wherein the slide rail is mounted on the frame, and the slider is slidably disposed on the slide rail.

4. The spray device with lifting function according to claim 3, characterized in that: The ball screw assembly further comprises: a cable protection chain and a mounting plate, wherein the mounting plate is arranged on the frame, and the cable protection chain is arranged on the mounting plate.

5. The spray device with lifting function according to claim 4, characterized in that: At least one photoelectric switch is arranged on the mounting plate.

6. The spray device with lifting function according to claim 5, characterized in that: The first driving member is drivingly connected to the ball screw via a coupling.

7. The spray device with lifting function according to claim 6, characterized in that: The first driving member and the rotating mechanism are both servo motors.

8. The spray device with lifting function according to claim 7, characterized in that: A sensor sheet and the photoelectric switch are provided at the connection between the rotating mechanism and the nozzle mechanism.

9. The spray device with lifting function according to claim 8, characterized in that: A fixing seat is provided on the frame, and the first driving member is installed on the fixing seat.

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