Sealing device and vacuum operation equipment

Abstract

The utility model discloses a sealing device and vacuum operation equipment, and the sealing device comprises a base which comprises a first fixing part and a second fixing part, the first fixing part covers the second fixing part, and the first fixing part and the second fixing part are provided with hollow structures; the cover body comprises a first gland and a second gland, the first gland and the second gland are provided with hollow structures, the first gland is connected with the side, deviating from the second fixing piece, of the first fixing piece to jointly define a first mounting groove, and the second gland is connected with the side, deviating from the first fixing piece, of the second fixing piece to jointly define a second mounting groove; the first sealing piece is arranged in the first mounting groove and provided with a first through hole, and a first inner wall is defined by surrounding the first through hole; the second sealing piece is arranged in the second mounting groove and provided with a second through hole, and a second inner wall is defined by surrounding the second through hole; the hollow structures of all the components, the first through holes and the second through holes jointly define a movable channel in the first direction. The sealing device is simple in structure and low in manufacturing and mounting requirements, and the influence of manufacturing and mounting on the sealing effect is small.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum sealing, in particular to a sealing device and vacuum operation equipment. Background Art

[0002] During partial vacuum operation, a movable shaft is required to transmit power in the vacuum environment. Since the movable shaft needs to move axially during the power transmission process, the movable shaft needs to cooperate with a sealing device to avoid damaging the vacuum environment.

[0003] In the related technology, a bellows sealing device is often used in combination with a movable shaft. When sealing, the movable shaft needs to be wrapped in a bellows pipe, and flanges are connected at both ends of the bellows as sealing points to achieve sealing. However, the structure of the bellows sealing device is complex, and the manufacturing and installation technologies are required to be high, and the manufacturing and installation technologies have a great impact on the sealing effect. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a sealing device, which can make the overall structure of the sealing device simple and have low requirements on manufacturing and installation technology, thereby reducing the influence of manufacturing and installation technology on the sealing effect.

[0005] The utility model also provides a vacuum operation equipment with the sealing device.

[0006] According to the first aspect of the present invention, the sealing device is used to seal the peripheral wall of the movable shaft, and includes:

[0007] The base includes a first fixing member and a second fixing member, wherein the first fixing member and the second fixing member have a hollow structure, and the first fixing member covers the second fixing member;

[0008] The cover body comprises a first gland and a second gland, wherein the first gland and the second gland have a hollow structure, the first gland is connected to a side of the first fixing member facing away from the second fixing member, and defines a first mounting groove with the first fixing member, and the second gland is connected to a side of the second fixing member facing away from the first fixing member, and defines a second mounting groove with the second fixing member;

[0009] a first sealing member, disposed in the first mounting groove and provided with a first through hole, wherein the first sealing member defines a first inner wall around the first through hole for abutting against the movable shaft; and

[0010] A second sealing member is disposed in the second mounting groove and is provided with a second through hole, wherein the second sealing member defines a second inner wall around the second through hole for abutting against the movable shaft;

[0011] The hollow structures of the first fixing member and the second fixing member, the hollow structures of the first pressure cover and the second pressure cover, the first through hole and the second through hole together define a movable channel suitable for passing the movable shaft along the first direction.

[0012] The sealing device according to the embodiment of the utility model has at least the following beneficial effects: the first seal and the second seal are in contact with the movable shaft to achieve sealing of the movable shaft, thereby preventing gas and impurities from entering the working chamber when the movable shaft moves, and the first seal and the second seal are directly arranged in the installation groove formed by the base and the cover body, which simplifies the overall connection structure of the sealing device, so that the sealing device has the advantages of simple structure and easy installation when sealing the peripheral wall of the movable shaft, and reduces the influence of manufacturing and installation technology on the sealing effect.

[0013] According to some embodiments of the utility model, the first fixing member includes a recessed structure, which is formed by the first fixing member being recessed toward the second fixing member along the first direction, and the recessed structure defines a supporting surface and an abutting surface, and the supporting surface is arranged around the movable channel, and the supporting surface is connected to the abutting surface.

[0014] According to some embodiments of the present invention, at least a portion of the first pressure cover is arranged opposite to the abutting surface to jointly define a first installation groove, and the first sealing member is connected to the abutting surface and the supporting surface.

[0015] According to some embodiments of the utility model, the inner wall of the hollow structure of the second fixing member extends along the second direction to form a limiting portion, and the limiting portion and the second pressure cover are spaced apart along the first direction to form the second installation groove; the first direction is perpendicular to the second direction.

[0016] According to some embodiments of the utility model, a supporting portion is protruded from one side of the second pressure cover toward the limiting portion along the first direction, the supporting portion is arranged opposite to the limiting portion, and the supporting portion abuts against the second sealing member along the first direction.

[0017] According to some embodiments of the present invention, the first sealing member includes a main body and a raised portion, wherein the raised portion is connected to a side of the main body facing away from the first fixing member and protrudes relative to the main body toward the first gland.

[0018] According to some embodiments of the utility model, the first pressure cover and the main body are spaced apart along the first direction and define a accommodating cavity, and the first pressure cover and the raised portion are spaced apart along the second direction to form a guide channel, and the guide channel is connected to the accommodating cavity; the first direction is perpendicular to the second direction.

[0019] According to some embodiments of the present invention, the cover body includes at least two first pressure covers, and at least two first pressure covers are spaced apart to form a guide groove, and the guide groove is connected to the accommodating cavity.

[0020] The vacuum operation equipment according to the second embodiment of the utility model includes:

[0021] A box body defines a cavity and has an outer wall surface and an inner wall surface opposite to each other. The box body is provided with a mounting hole, and the mounting hole passes through the outer wall surface and the inner wall surface and communicates with the cavity;

[0022] In the sealing device described in any of the above embodiments, the first fixing member is disposed on a side of the mounting hole away from the cavity and connected to the outer wall surface, and the second fixing member is disposed on a side of the mounting hole facing the cavity and connected to the inner wall surface;

[0023] The movable shaft passes through the movable channel and the mounting hole and abuts against the first sealing member and the second sealing member.

[0024] The vacuum operation equipment according to the embodiment of the utility model has at least the following beneficial effects: the movable shaft is inserted into the sealing device to prevent gas and impurities from entering the vacuum chamber and affecting the vacuum operation when the movable shaft moves in the vacuum chamber; at the same time, the connection structure between the sealing device and the movable shaft is simple, and the installation technology has little effect on the sealing effect.

[0025] According to some embodiments of the utility model, a sealing ring is further included, the inner wall surface is provided with a sealing groove, the sealing groove is formed by the inner wall surface being recessed toward the outer wall surface, the sealing ring is accommodated in the sealing groove, and the second fixing member abuts against the sealing ring.

[0026] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0028] Figure 1 This is a schematic diagram of a sealing device in an embodiment of the utility model;

[0029] Figure 2 This is a schematic diagram of the connection between the first fixing member and the first gland in the embodiment of the utility model;

[0030] Figure 3 This is a schematic diagram of the connection between the second fixing member and the second gland in the embodiment of the utility model;

[0031] Figure 4It is a top view schematic diagram of the sealing device in the embodiment of the utility model;

[0032] Figure 5 In the embodiment of the utility model Figure 4 A schematic cross-sectional view at AA of FIG.

[0033] Figure 6 In the embodiment of the utility model Figure 5 An enlarged schematic diagram of point B;

[0034] Figure 7 It is a schematic diagram of the vacuum operation equipment in the embodiment of the utility model;

[0035] Figure 8 In the embodiment of the utility model Figure 7 Enlarged schematic diagram of point C.

[0036] Reference numerals:

[0037] Sealing device 100;

[0038] Base 110; first fixing member 111; recessed structure 1110; supporting surface 1111; abutting surface 1112; second fixing member 112; limiting portion 1121; movable channel 113;

[0039] First sealing member 121; main body 1210; accommodating cavity 1211; protruding portion 1220; flow guiding channel 1221; first inner wall 1230; second sealing member 124; second inner wall 1240;

[0040] Cover body 130; first pressure cover 131; first mounting groove 1311; guide groove 1312; second pressure cover 132; supporting portion 1321; second mounting groove 1322;

[0041] Vacuum operation equipment 200;

[0042] Box body 210 ; outer wall surface 211 ; inner wall surface 212 ; sealing groove 2121 ; sealing ring 213 ; movable shaft 220 . DETAILED DESCRIPTION

[0043] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0044] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0045] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0046] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0047] In the description of the utility model, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0048] An embodiment of the utility model provides a sealing device and a vacuum operating equipment. It should be noted that the first direction in the embodiment of the present application is a direction parallel to the central axis of the movable shaft. In the accompanying drawings, the up and down direction is the first direction. The second direction is a direction perpendicular to the central axis of the movable shaft. In the accompanying drawings, the left and right direction is the second direction.

[0049] The sealing device 100 of the first embodiment of the present invention is described below with reference to the accompanying drawings. The present invention provides a sealing device 100 for sealing the peripheral wall of a movable shaft 220. Figures 1 to 3As shown, the sealing device 100 includes a base 110, a cover 130, a first sealing member 121 and a second sealing member 124. The base 110 includes a first fixing member 111 and a second fixing member 112. The first fixing member 111 and the second fixing member 112 both have a hollow structure, that is, the first fixing member 111 and the second fixing member 112 have a structure that penetrates both sides along the first direction so that the movable shaft 220 can be inserted into the first fixing member 111 and the second fixing member 112, and the first fixing member 111 is covered on the second fixing member 112.

[0050] See also Figure 1 and Figure 2 As shown, the cover body 130 includes a first pressure cover 131 and a second pressure cover 132, and the first pressure cover 131 and the second pressure cover 132 also have a hollow structure, that is, the first pressure cover 131 and the second pressure cover 132 have a structure that penetrates both sides along the first direction, so that the movable shaft 220 can be inserted into the first pressure cover 131 and the second pressure cover 132. When the first fixing member 111 is covered on the second fixing member 112, one side of the first fixing member 111 faces the second fixing member 112, and the other side faces away from the second fixing member 112, and the first pressure cover 131 is connected to the side of the first fixing member 111 facing away from the second fixing member 112, and the first pressure cover 131 and the first fixing member 111 jointly define a first installation groove 1311. Similarly, the second fixing member 112 also has a side facing the first fixing member 111 and a side facing away from the first fixing member 111. The second gland 132 is connected to the side of the second fixing member 112 facing away from the first fixing member 111, and the second gland 132 and the second fixing member 112 jointly define a second installation groove 1322. The first installation groove 1311 is used to accommodate the first sealing member 121, and the second installation groove 1322 is used to accommodate the second sealing member 124.

[0051] The first sealing member 121 is disposed in the first installation groove 1311, and the first sealing member 121 has a first through hole, and the first sealing member 121 further defines a first inner wall 1230, the first inner wall 1230 is formed around the first through hole, and the first inner wall 1230 is used to abut against the peripheral wall of the movable shaft 220 to achieve sealing of the movable shaft 220. Similarly, the second sealing member 124 is disposed in the second installation groove 1322, and the second sealing member 124 has a second through hole, and the second sealing member 124 further defines a second inner wall 1240, the second inner wall 1240 is formed around the second through hole, and the second inner wall 1240 is used to abut against the peripheral wall of the movable shaft 220 to achieve sealing of the movable shaft 220.

[0052] Specifically, when the base 110, the cover 130, the first seal 121 and the second seal 124 are assembled, the first seal 121 is arranged in the first mounting groove 1311, and the first pressure cover 131 limits the first seal 121 to prevent the first seal 121 from being separated from the first mounting groove 1311. Similarly, the second seal 124 is arranged in the second mounting groove 1322, and the second pressure cover 132 limits the second seal 124 to prevent the second seal 124 from being separated from the second mounting groove 1322. At the same time, the hollow structure of the first fixing member 111 and the hollow structure of the second fixing member 112, the hollow structure of the first pressure cover 131 and the hollow structure of the second pressure cover 132, the first through hole and the second through hole cooperate with each other to define the movable channel 113, and the first mounting groove 1311 and the second mounting groove 1322 are connected to the movable channel 113. The movable channel 113 is suitable for passing the movable shaft 220. When the movable shaft 220 passes through the movable channel 113 , the first inner wall 1230 and the second inner wall 1240 abut against the peripheral wall of the movable shaft 220 to seal the peripheral wall of the movable shaft 220 .

[0053] The sealing device 100 provided by the embodiment of the utility model is used in working scenarios that require sealing performance. For example: vacuum working environment. When it is necessary to transmit power to the working sealed cavity, the movable shaft 220 needs to be inserted into the working sealed cavity for power transmission. When the movable shaft 220 transmits power, the sealing device 100 abuts against the movable shaft 220 through the first seal 121 and the second seal 124 to achieve sealing of the movable shaft 220, thereby preventing gas and impurities from entering the working cavity when the movable shaft 220 moves. At the same time, the first seal 121 and the second seal 124 are directly arranged in the installation groove formed by the base 110 and the cover body 130, which simplifies the overall connection structure of the sealing device 100. The sealing device 100 has the advantages of simple structure and easy installation when sealing the peripheral wall of the movable shaft 220, and reduces the influence of manufacturing and installation technology on the sealing effect.

[0054] In some embodiments, see Figure 2As shown, the first fixing member 111 includes a recessed structure 1110, which is formed by the first fixing member 111 being recessed toward the second fixing member 112 along the first direction, and the recessed structure 1110 defines a support surface 1111 and an abutting surface 1112, wherein the support surface 1111 is arranged around the movable channel 113, and the support surface 1111 is connected to the abutting surface 1112. Specifically, the recessed structure 1110 has a bottom surface and a side wall, wherein the bottom surface is the support surface 1111, the support surface 1111 is arranged around the movable channel 113, and the side wall is the abutting surface 1112, and the support surface 1111, the abutting surface 1112 and the first gland 131 jointly form a first mounting groove 1311, the support surface 1111 is used to support the first sealing member 121, and the abutting surface 1112 and the first gland 131 are used to fix the first sealing member 121 to prevent the first sealing member 121 from being separated when the movable shaft 220 moves.

[0055] In some embodiments, see Figure 2 As shown, at least a portion of the first gland 131 is arranged opposite to the abutting surface 1112, and the two together define a first installation groove 1311, and the first sealing member 121 is connected to the abutting surface 1112 and the supporting surface 1111. Specifically, in this embodiment, the first sealing member 121 is installed in the first installation groove 1311 with interference fit, and the first sealing member 121 abuts against the abutting surface 1112 and the supporting surface 1111, and the abutting surface 1112 restricts the first sealing member 121 to prevent the first sealing member 121 from making circumferential movement relative to the first fixing member 111 along the second direction, and the first gland 131 and the supporting surface 1111 restrict the first sealing member 121 to prevent the first sealing member 121 from making axial movement relative to the first fixing member 111 along the first direction. In other embodiments (not shown in the figures), the first sealing member 121 may also be connected to the abutting surface 1112 and the supporting surface 1111 by other connection methods, such as: the first sealing member 121 may also be connected to the abutting surface 1112 and the supporting surface 1111 by bonding, or blocks are respectively provided on the opposite sides of the supporting surface 1111 and the first pressure cover 131, and the first sealing member 121 is connected to the abutting surface 1112 and the supporting surface 1111 by snapping, etc.

[0056] In this embodiment, the first gland 131 and the first fixing member 111 are detachably connected by bolts. The bolt connection can facilitate the connection and disassembly of the first gland 131 and the first fixing member 111. At the same time, since the movable shaft 220 needs to reciprocate during operation, the bolt connection can provide better connection strength. In other embodiments, the first gland 131 and the first fixing member 111 can also be connected by other means, such as: snap connection, or mortise and tenon connection, or pin connection, or other connection methods such as integral molding.

[0057] In some embodiments, see Figure 3 As shown, the inner wall of the hollow structure of the second fixing member 112 extends along the second direction to form a limiting portion 1121, that is, the inner wall of the second fixing member 112 extends toward the direction of the movable channel 113 to form the limiting portion 1121, the limiting portion 1121 and the second gland 132 are arranged in a first direction to form a second mounting groove 1322, and the second sealing member 124 is arranged in the second mounting groove 1322, wherein the inner wall of the second fixing member 112 is used to limit the second sealing member 124, to prevent the second sealing member 124 from generating circumferential movement relative to the second fixing member 112 along the second direction, the second gland 132 and the limiting portion 1121 are used to limit the second sealing member 124, to prevent the second sealing member 124 from generating axial movement relative to the second fixing member 112 along the first direction, thereby fixing the second sealing member 124 in the second mounting groove 1322. At the same time, making the first direction perpendicular to the second direction can facilitate the assembly of the various components of the sealing device 100, so that the structure of the sealing device 100 is more compact.

[0058] In some embodiments, see Figures 3 to 5 As shown, a supporting portion 1321 is protruded along the first direction on one side of the second gland 132 facing the second sealing member 124, the supporting portion 1321 is arranged opposite to the limiting portion 1121, and the supporting portion 1321 abuts against the second sealing member 124. Specifically, when the second gland 132 is connected to the second fixing member 112, at least a portion of the second gland 132 is arranged opposite to the limiting portion 1121 along the first direction, and the supporting portion 1321 is protruded along the first direction and toward the second limiting portion 1121 on the portion of the second gland 132, the supporting portion 1321 is used to abut against the second sealing member 124 along the first direction to fix the second sealing member 124 in the second mounting groove 1322, and the second sealing member 124 is used to prevent the leakage of lubricating oil in the sealing device 100 and prevent external impurities from entering the working cavity.

[0059] In some embodiments, see Figure 5 and Figure 6As shown, the first sealing member 121 is used to isolate dust and impurities from the working environment and the atmospheric environment and to perform a sealing function. The first sealing member 121 includes a main body 1210 and a protruding portion 1220. The protruding portion 1220 is connected to a side of the main body 1210 that is away from the first fixing member 111, that is, the protruding portion 1220 is connected to a side of the main body 1210 that faces the movable channel 113. The protruding portion 1220 protrudes relative to the main body 1210 toward the first gland 131. Specifically, the side of the protrusion 1220 facing away from the first fixing member 111 and the side of the main body 1210 facing away from the first fixing member 111 together constitute the first inner wall 1230 of the first sealing member 121. The protrusion 1220 protrudes relative to the main body 1210 toward the first pressure cover 131, which can increase the area of ​​the side of the protrusion 1220 facing away from the first fixing member 111 to increase the area of ​​the first inner wall 1230, thereby increasing the contact area between the first inner wall 1230 and the peripheral wall of the movable shaft 220, thereby enhancing the sealing performance of the first sealing member 121 and improving the sealing effect of the first sealing member 121.

[0060] In some embodiments, see Figure 5 and Figure 6 As shown, the first gland 131 and the main body 1210 are spaced apart along the first direction and define a receiving chamber 1211, and the first gland 131 and the raised portion 1220 are spaced apart along the second direction to form a guide channel 1221, and the guide channel 1221 is connected to the receiving chamber 1211, and the first direction is perpendicular to the second direction. Specifically, when the first gland 131 is connected to the first fixing member 111 and the first sealing member 121 is arranged in the first mounting groove 1311, the main body 1210 of the first gland 131 and the first sealing member 121 are spaced apart to form a receiving chamber 1211, and the receiving chamber 1211 is used to store dust and impurities to prevent dust and impurities from entering the working chamber when the movable shaft 220 moves. At the same time, the first gland 131 is also spaced apart from the raised portion 1220 and forms a guide channel 1221, and one end of the guide channel 1221 is connected to the receiving chamber 1211, and the other end is connected to the outside. Dust and impurities will enter the accommodating cavity 1211 through the guide channel 1221 for storage.

[0061] In some embodiments, see Figures 4 to 6As shown, the cover body 130 includes at least two first glands 131, and at least two first glands 131 are arranged at intervals to form a guide groove 1312, and the guide groove 1312 is connected to the accommodating chamber 1211. Specifically, in this embodiment, the number of the first glands 131 is two, and the two first glands 131 are arranged at intervals on the first fixing member 111 along the first direction, so as to form a guide groove 1312 connected to the accommodating chamber 1211. Since the accommodating chamber 1211 is used to accommodate dust and impurities, the dust and impurities in the accommodating chamber 1211 can be cleaned out of the sealing device 100 through the guide groove 1312, so as to avoid the dust and impurities from accumulating in the accommodating chamber 1211 and entering the working chamber through the connection gap between the first sealing member 121 and the first fixing member 111. At the same time, the guide groove 1312 can provide an operating space for the assembly and disassembly of the first gland 131. After the sealing device 100 completes the operation, the first gland 131 and the first fixing member 111 can be easily disassembled and cleaned through the guide groove 1312.

[0062] In some embodiments (not shown in the figure), the first gland 131 can also be other quantity characteristics, such as: three, three first glands 131 are arranged on the first fixing member 111 at intervals along the first direction, so as to form a guide groove 1312 connecting the accommodating cavity 1211; or four or other multiple quantity characteristics. In some embodiments (not shown in the figure), the number of the first gland 131 can also be one, and the first gland 131 does not have a guide groove 1312. The first gland 131 is directly covered on the first fixing member 111. Among them, the dust and impurities in the accommodating cavity 1211 can also be cleaned by disassembling the first gland 131 and the first fixing member 111.

[0063] The vacuum operation equipment 200 of the second embodiment of the utility model is described below with reference to the accompanying drawings. Figure 7 As shown, the vacuum operation equipment 200 includes a box body 210, a sealing device 100 described in any of the above embodiments, and a movable shaft 220. The box body 210 defines a cavity, and the box body 210 has an outer wall surface 211 and an inner wall surface 212 that are arranged opposite to each other. At the same time, a mounting hole is provided on the box body 210, and the mounting hole penetrates the outer wall surface 211 and the inner wall surface 212, and the mounting hole is connected to the cavity so that the cavity has an opening connected to the outside. The mounting hole is a hollow structure with a thickness. The mounting hole is used to connect and install the sealing device 100.

[0064] The sealing device 100 is connected to the box body 210, wherein the first fixing member 111 is arranged at the mounting hole and is located on the side of the mounting hole away from the cavity, that is, the outside of the cavity, and the first fixing member 111 is connected to the outer wall surface 211 of the box body 210. The second fixing member 112 is arranged on the side of the mounting hole facing the cavity, that is, the second fixing member 112 is arranged in the cavity of the box body 210. The second fixing member 112 is connected to the inner wall surface 212 of the box body 210. The sealing device 100 forms a movable channel 113 for the movable shaft 220 to move at the mounting hole, and the movable shaft 220 is inserted in the movable channel 113 and the mounting hole, and abuts against the first sealing member 121 and the second sealing member 124.

[0065] Specifically, see Figure 7 As shown, when the sealing device 100 is installed on the box body 210, the first fixing member 111 is arranged on the outer wall surface 211 of the box body 210, and the second fixing member 112 is arranged on the inner wall surface 212 of the box body 210. The first fixing member 111 and the second fixing member 112 are respectively arranged on both sides of the mounting hole, and the hollow structure of the first fixing member 111 and the hollow structure of the second fixing member 112 match the position of the mounting hole, so that the sealing device 100 can form a movable channel 113 at the position of the mounting hole.

[0066] When performing vacuum operation, the cavity will be configured as a vacuum environment, and the first fixing member 111 and the second fixing member 112 are located in different air pressure environments. At this time, the first fixing member 111 is located in the atmospheric environment, and the second fixing member 112 is located in the vacuum environment. The movable shaft 220 is arranged in the movable channel 113 and the mounting hole, at least a part of the movable shaft 220 is located in the cavity, and the movable shaft 220 can perform telescopic movement relative to the box body 210, so as to facilitate the transmission of power in the cavity. Among them, the first inner wall 1230 of the first sealing member 121 and the second inner wall 1240 of the second sealing member 124 are used to abut against the peripheral wall of the movable shaft 220 to achieve a sealing effect, so as to prevent the gas and impurities in the atmosphere from entering the cavity through the movable channel 113 when the movable shaft 220 moves, thereby affecting the vacuum operation.

[0067] In some embodiments, see Figure 8As shown, the vacuum operation equipment 200 also includes a sealing ring 213, and the inner wall surface 212 of the box body 210 is provided with a sealing groove 2121, and the sealing groove 2121 is formed by the inner wall surface 212 of the box body 210 being recessed toward the outer wall surface 211 of the box body 210, and the sealing ring 213 is accommodated in the sealing groove 2121, and the second fixing member 112 abuts against the sealing ring 213. Specifically, the sealing groove 2121 is arranged around the mounting hole, and the sealing ring 213 is installed in the sealing groove 2121 with interference fit. When the second fixing member 112 is connected to the inner wall surface 212 of the box body 210, the second fixing member 112 will abut against the sealing ring 213, and the sealing ring 213 will seal the second fixing member 112 and the inner wall surface 212 of the box body 210, so as to prevent the gas from entering the cavity through the connection gap between the box body 210 and the sealing device 100.

[0068] The embodiments of the utility model are described in detail above in conjunction with the accompanying drawings, but the utility model is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the utility model. In addition, the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.

Claims

1. A sealing device, used to seal the peripheral wall of the movable shaft, characterized in that: include: The base includes a first fixing member and a second fixing member, wherein the first fixing member and the second fixing member have a hollow structure, and the first fixing member covers the second fixing member; The cover body comprises a first gland and a second gland, wherein the first gland and the second gland have a hollow structure, the first gland is connected to a side of the first fixing member facing away from the second fixing member, and defines a first mounting groove with the first fixing member, and the second gland is connected to a side of the second fixing member facing away from the first fixing member, and defines a second mounting groove with the second fixing member; a first sealing member, disposed in the first mounting groove and provided with a first through hole, wherein the first sealing member defines a first inner wall around the first through hole for abutting against the movable shaft; and A second sealing member is disposed in the second mounting groove and is provided with a second through hole, wherein the second sealing member defines a second inner wall around the second through hole for abutting against the movable shaft; The hollow structures of the first fixing member and the second fixing member, the hollow structures of the first pressure cover and the second pressure cover, the first through hole and the second through hole together define a movable channel suitable for passing the movable shaft along the first direction.

2. The sealing device according to claim 1, characterized in that: The first fixing member includes a recessed structure, which is formed by the first fixing member being recessed toward the second fixing member along the first direction, and the recessed structure defines a supporting surface and an abutting surface, the supporting surface is arranged around the movable channel, and the supporting surface is connected to the abutting surface.

3. The sealing device according to claim 2, characterized in that: At least a portion of the first pressure cover is disposed opposite to the abutting surface to jointly define a first installation groove, and the first sealing member is connected to the abutting surface and the supporting surface.

4. The sealing device according to claim 1, characterized in that: The inner wall of the hollow structure of the second fixing member extends along the second direction to form a limiting portion, and the limiting portion and the second pressure cover are spaced apart along the first direction to form the second installation groove; the first direction is perpendicular to the second direction.

5. The sealing device according to claim 4, characterized in that: A supporting portion is protruded from the second pressure cover toward the limiting portion along the first direction. The supporting portion is arranged opposite to the limiting portion and abuts against the second sealing member along the first direction.

6. The sealing device according to claim 1, characterized in that: The first sealing member includes a main body and a protruding portion. The protruding portion is connected to a side of the main body away from the first fixing member and protrudes relative to the main body toward the first gland.

7. The sealing device according to claim 6, characterized in that: The first pressure cover and the main body are spaced apart along the first direction and define a receiving cavity, and the first pressure cover and the raised portion are spaced apart along the second direction to form a guide channel, and the guide channel is connected to the receiving cavity; the first direction is perpendicular to the second direction.

8. The sealing device according to claim 7, characterized in that: The cover body includes at least two first pressure covers, and at least two first pressure covers are spaced apart to form a guide groove, and the guide groove is connected to the accommodating cavity.

9. Vacuum operation equipment, characterized in that: include: A box body defines a cavity and has an outer wall surface and an inner wall surface opposite to each other. The box body is provided with a mounting hole, and the mounting hole passes through the outer wall surface and the inner wall surface and communicates with the cavity; The sealing device according to any one of claims 1 to 8, wherein the first fixing member is disposed on a side of the mounting hole away from the cavity and connected to the outer wall surface, and the second fixing member is disposed on a side of the mounting hole facing the cavity and connected to the inner wall surface; The movable shaft passes through the movable channel and the mounting hole and abuts against the first sealing member and the second sealing member.

10. The vacuum operation equipment according to claim 9, characterized in that: It also includes a sealing ring. The inner wall surface is provided with a sealing groove. The sealing groove is formed by the inner wall surface being recessed toward the outer wall surface. The sealing ring is accommodated in the sealing groove. The second fixing member abuts against the sealing ring.

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