Adjusting device and optical detection equipment

Abstract

The utility model discloses an adjusting device and optical detection equipment, the adjusting device comprises a translation adjusting assembly and a bearing assembly with a guide structure, the translation adjusting assembly comprises a linear motor, a flexible adapter and a first optical element, and the first optical element is fixed on the flexible adapter; and the flexible adapter is connected between the mover part of the linear motor and the guide structure to guide the mover part to do linear reciprocating motion along the direction crossed with the light path direction of the adjusting device, so that the first optical element is moved and cut into the light path of the adjusting device. The linear motor is used as a motion driving device of the first optical element, and the linear motor is guided by means of the cooperation of the flexible adapter and the guide structure, so that the motion speed, precision and structural stability of the motion part can be ensured, and different positions of the first optical element can be quickly switched to an optical path in a short time. The optical characteristics, transmission performance and the like of incident light can be quickly and flexibly adjusted.

Description

Technical Field

[0001] The utility model relates to the technical field of optical detection, in particular to an adjustment device and optical detection equipment. Background Art

[0002] Existing optical inspection equipment is usually equipped with a light source adjustment device, which can be used to adjust the optical properties, transmission performance, etc. of the inspection light emitted by the light source; due to the limitations of the structure and function of the light source adjustment device itself, the adjustment speed of the inspection light is mostly slow. Since it is impossible to complete the rapid adjustment of the inspection light in a short time, it can only meet the actual needs of the inspection operation in some scenarios.

[0003] Taking the overlay measurement equipment used in the semiconductor industry as an example, the position of the linear gradient filter in the optical path is switched by the light source adjustment device, so that the detection light band can be adjusted or selected. Since the linear gradient filter is usually long, the light source adjustment device is usually unable to quickly switch the position of the linear gradient filter in a short time (for example, completing a stroke of 60-110 mm within 100 milliseconds). Therefore, in each measurement process, only the detection light of the same band can be used to measure all the marks on the object under test, which not only reduces the flexibility of the detection light band selection, but also places restrictions on the entire measurement process. Utility Model Content

[0004] The main technical problem solved by the utility model is to provide an adjustment device and optical detection equipment using the adjustment device, which can improve the speed of optical adjustment.

[0005] According to the first aspect, an embodiment provides an adjustment device, including a bearing assembly and an adjustment assembly, the bearing assembly having a guide structure, the adjustment assembly including a translation adjustment assembly, and the translation adjustment assembly including:

[0006] A linear motor having a stator member and a mover member that cooperate with each other; the stator member is fixed to the bearing assembly to drive the mover member to reciprocate linearly in a first direction, and the first direction intersects with the optical path direction of the adjustment device;

[0007] a flexible adapter connected between the guide structure and the movable member; the flexible adapter and the guide structure cooperate with each other to guide the movable member to move in the first direction; and

[0008] The first optical element is fixed to the flexible adapter and / or the movable element; the first optical element can move synchronously with the flexible adapter and / or the movable element to move the first optical element into the optical path of the adjusting device.

[0009] In one embodiment, the flexible transition member has:

[0010] a deformable portion configured to be deformable in a second direction intersecting the first direction;

[0011] A first connecting portion, disposed at one end of the deformable portion in the second direction, the guide structure being connected to the first connecting portion; and

[0012] The second connection portion is arranged at the other end of the deformable portion in the second direction, and the movable member is fixed to the second connection portion.

[0013] In one embodiment, the deformable portion has a plurality of connecting arms arranged side by side and spaced apart in the second direction, and three adjacent connecting arms of the plurality of connecting arms are sequentially a first connecting arm, a second connecting arm and a third connecting arm;

[0014] One end of the second connecting arm in the third direction is connected to the first connecting arm, and the other end is connected to the third connecting arm to form a deformation gap between adjacent connecting arms; wherein the first direction, the second direction and the third direction are perpendicular to each other.

[0015] In one embodiment, the flexible adapter is an integrated structure;

[0016] And / or the translation adjustment assembly further includes a support member, the support member is fixed to the second connecting portion, and the first optical element is fixed to the support member.

[0017] In one embodiment, the guide structure includes a ball linear guide rail, a slide rail of the ball linear guide rail extends along the first direction and is fixedly arranged, and a slider of the ball linear guide rail is fixedly connected to the flexible adapter.

[0018] In one embodiment, the bearing assembly further has a limiting structure, which is fixedly arranged at one end or both ends of the ball linear guide in the first direction; the limiting structure is used to resist the slider of the ball linear guide to limit the movement stroke of the movable component in the first direction.

[0019] In one embodiment, the bearing assembly includes:

[0020] A bottom plate member, used for connecting the mounting carrier;

[0021] a base member, arranged on a side of the bottom plate member facing away from the mounting carrier, the adjustment assembly and the guide structure being arranged on the base member; and

[0022] A vibration isolating member is disposed between the bottom plate member and the base member, and is used to isolate the propagation of vibration between the mounting carrier and the adjusting device.

[0023] In one embodiment, a protective component is further included; the protective component is fixed to the bottom plate to form a protective space between the protective component and the bottom plate to accommodate the adjustment component.

[0024] In one embodiment, the number of the translation adjustment components is set to be multiple, and the first optical elements in the multiple translation adjustment components are arranged side by side in the direction of the optical path; wherein:

[0025] The first optical elements in at least two of the translation adjustment assemblies have optical property changes in the first direction, so as to form different optical properties when the first optical elements cut into the optical path of the adjustment device.

[0026] In one embodiment, the first optical elements in at least two of the translation adjustment assemblies each include a filter, and the optical density of the filter linearly changes from one end of the filter toward the other end opposite to the filter in the first direction.

[0027] In one embodiment, the adjustment assembly further comprises a rotation adjustment assembly, and the rotation adjustment assembly comprises:

[0028] Turntable;

[0029] A second optical element is disposed on the turntable, wherein the second optical element and the first optical element are arranged side by side in the direction of the optical path; and

[0030] A turntable driver is fixed to the bearing assembly; a power end of the turntable driver is coupled to the turntable for driving the turntable to rotate so as to rotate the second optical element into the optical path of the adjustment device.

[0031] In one embodiment, the number of the rotation adjustment components is set to be multiple, wherein:

[0032] The second optical element of at least one of the plurality of rotation adjustment assemblies comprises a plurality of attenuation sheets with different light transmittances, and the plurality of attenuation sheets are evenly arranged around the rotation axis of the turntable; when the turntable driving member drives the turntable to rotate, the plurality of attenuation sheets can be selectively cut into the optical path of the adjustment device;

[0033] and / or

[0034] The second optical element of at least one of the multiple rotating adjustment components includes multiple filters with different optical densities, and the multiple filters are evenly arranged around the rotation axis of the turntable; when the turntable driving member drives the turntable to rotate, the multiple filters can be selectively cut into the optical path of the adjustment device.

[0035] In one embodiment, it also includes a receiving component and an output component disposed on the supporting component, and the receiving component and the output component are arranged on opposite sides of the adjusting component in the direction of the optical path; wherein the receiving component is used to output the light emitted by the light source to the adjusting component, and the output component is used to output the light adjusted by the adjusting component.

[0036] In one embodiment, the output component includes:

[0037] A light splitter is arranged in the optical path of the adjusting device; the light splitter is used to split the light adjusted by the adjusting component to form a first path light and a second path light;

[0038] A first output element, arranged in the optical path of the first path light, the first output element being used to receive and output the first path light; and

[0039] The second output element is arranged in the optical path of the second path light, and the second output element is used to receive and output the second path light.

[0040] According to a second aspect, an embodiment provides an optical detection device, comprising:

[0041] A light source, used for generating detection light;

[0042] The adjustment device according to the first aspect is at least used to adjust the optical characteristics of the detection light; and

[0043] The detection device is used to receive the detection light adjusted by the adjustment device to detect the object to be detected.

[0044] The adjustment device according to the above embodiment includes a translation adjustment component and a bearing component with a guide structure, the translation adjustment component includes a linear motor, a flexible adapter and a first optical element; the flexible adapter is connected between the movable component of the linear motor and the guide structure, and the first optical element is fixed to the flexible adapter and / or the movable component; the flexible adapter and the guide structure cooperate with each other to guide the movable component to reciprocate in a straight line in a direction intersecting with the optical path direction of the adjustment device, thereby moving the first optical element into the optical path of the adjustment device.

[0045] First, by using a linear motor as the motion driving device of the first optical element, the characteristics of the linear motor such as fast response speed and smooth movement can be fully utilized, and different positions of the first optical element can be quickly switched to the optical path in a short time, thereby realizing fast and flexible adjustment of the optical characteristics and transmission performance of the incident light.

[0046] Secondly, by guiding the moving parts of the linear motor with the help of the cooperation between the flexible adapter and the guide structure, it is possible to avoid movement failure caused by the self-rotation of the moving parts during movement, thereby enhancing the stability and reliability of the movement of related components; at the same time, the use of flexible adapters can reduce the friction resistance caused by assembly errors in the connecting chain between the guide structure and the moving parts, thereby providing guarantees for the movement speed, accuracy and structural stiffness of the related components.

[0047] Third, the use of flexible adapters can unload the pressure caused by the installation error between the linear motor's moving parts and the guide structure, reduce the friction during the movement process, and ensure the performance of the linear motor and the load movement speed; at the same time, the flexible adapter is inflexible in the direction of movement to ensure the position stability of the optical element under high acceleration during the start-stop process. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] Figure 1 The figure is a schematic diagram of the planar structure of an adjusting device according to an embodiment.

[0049] Figure 2 FIG1 is a schematic diagram of the three-dimensional structure of an adjusting device according to an embodiment of the present invention (I).

[0050] Figure 3 This is a schematic diagram of the three-dimensional structure of an adjusting device according to an embodiment (II).

[0051] Figure 4 The figure is a schematic diagram of the planar structure of a flexible adapter in an adjusting device according to an embodiment.

[0052] Figure 5 The figure is a schematic diagram of the three-dimensional structure of a flexible adapter in an adjusting device according to an embodiment.

[0053] Figure 6 The figure is a schematic diagram of the outer contour structure of an adjusting device according to an embodiment.

[0054] In the figure:

[0055] 10. Bearing assembly; 11. Ball linear guide; 12. Limiting structure; 13. Bottom plate; 14. Base; 15. Vibration isolation; 20. Receiving assembly; 30. Output assembly; 31. Spectral element; 32. First output element; 33. Second output element; 40. Translation adjustment assembly; 41. First optical element; 42. Flexible adapter; 42a. Deformable part; 42b. First connecting part; 42c. Second connecting part; 42d. Mounting surface; 43. Stator; 44. Moving part; 45. Support; 50. Rotation adjustment assembly; 50a. First rotation adjustment part; 50b. Second rotation adjustment part; 51. Second optical element; 52. Turntable; 53. Turntable driving part; 60. Protection assembly. DETAILED DESCRIPTION

[0056] Wherein similar elements in different embodiments have adopted associated similar element numbers.In the following embodiments, many detailed descriptions are for making the present application better understood.However, those skilled in the art can effortlessly recognize that some features can be omitted in different situations, or can be replaced by other elements, materials, methods.In some cases, some operations related to the present application are not shown or described in the specification, and this is to avoid the core part of the present application from being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations according to the description in the specification and the general technical knowledge in the art.

[0057] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0058] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings).

[0059] See also Figures 1 to 6The embodiment of the present application provides an adjustment device, for example, a light source adjustment device that can be installed in an optical detection device. By adjusting the position of the switching optical element, the optical characteristics and transmission performance of the detection light emitted by the light source can be adjusted to meet the requirements of the optical detection operation. The adjustment device includes a bearing component 10, a receiving component 20, an output component 30, an adjustment component, and other functional components that exist as needed, which are described in detail below.

[0060] See also Figures 1 to 3 and Figure 5 The supporting component 10 is mainly used as a mounting carrier for other components of the adjusting device. With the help of the supporting component 10, the adjusting device can be installed at a preset position of the optical detection equipment as a relatively independent and complete combined structure (wherein, the component used for positioning and installing the adjusting device in the optical detection equipment can be understood as a mounting carrier).

[0061] See also Figures 1 to 3 and Figure 5 , the receiving component 20, the adjusting component and the output component 30 are sequentially arranged on the carrying component 10 roughly along the light transmission path (or the direction of the light path); it can also be understood that the receiving component 20 and the output component 30 are arranged on opposite sides of the adjusting component in the direction of the light path. Among them, the receiving component 20 may include an optical fiber, which is mainly used to receive the detection light emitted by the light source and output the received detection light to the adjusting component; the adjusting component is mainly used to adjust the position of the optical element to adjust the optical characteristics, transmission performance, etc. of the detection light through the optical element; the output component 30 may include an optical fiber, which is mainly used to output the detection light adjusted by the adjusting component, for example, output the detection light to the object to be measured, so as to cooperate with the detection device in the optical detection equipment to finally complete the detection operation of the object to be measured.

[0062] Exemplarily, the optical element may include a filter that can adjust or select the wavelength band of the detection light. The adjustment component can select or adjust the light band by cutting different positions of the filter into the light path of the adjustment device or the optical detection equipment.

[0063] Exemplarily, the optical element may include an attenuation sheet that can adjust the brightness of the detection light, and the adjustment component can adjust the brightness of the detection light by cutting the attenuation sheet into the light path at different positions.

[0064] Exemplarily, the optical element may include optical lenses such as a reflector and a beam splitter, and the adjustment component may adjust the transmission performance (eg, transmission path) of the detection light by inserting the optical lens into the light path.

[0065] It should be noted that, in some embodiments, the receiving component 20 or the output component 30 may not be a component of the adjusting device, but a functional component configured in the optical detection device and used in conjunction with the adjusting device.

[0066] In order to explain the adjusting device more clearly and in detail, the following defines three mutually perpendicular directions based on the structural construction and working principle of the adjusting device, namely: a first direction, a second direction and a third direction; for example, the first direction may refer to Figure 2 The front and rear direction of the adjustment device shown, the second direction can refer to Figure 2 The left and right directions of the adjustment device shown, the third direction can refer to Figure 2 The up and down directions of the adjusting device are shown. The direction of the light transmission path of the adjusting device (ie, the light path direction of the adjusting device) refers to a direction intersecting the first direction, for example, the light path direction is parallel to the second direction.

[0067] In one embodiment, see Figures 1 to 3 The adjustment component includes a translation adjustment component 40, which includes a first optical element 41, a flexible adapter 42 and a linear motor (for example, a cylindrical linear motor); wherein the linear motor is arranged on the supporting component 10 roughly along the first direction, and the linear motor has a stator component 43 and a mover component 44; the stator component 43 is fixedly arranged on the supporting component 10 (for example, arranged in the space area between the receiving component 20 and the output component 30 along the optical path direction); the stator component 43 can be understood as a collection of coil windings and related components in the linear motor, and the mover component 44 can be understood as a collection of magnetic rods and related components in the linear motor.

[0068] When current passes through the stator member 43 (specifically the coil winding), a magnetic field is generated, and the magnetic field interacts with the mover member 44 (specifically the magnetic rod), that is, a magnetic force is generated to cause the mover member 44 to perform rapid linear motion along the first direction relative to the stator member 43. It can be understood that the stator member 43 is equivalent to being able to drive the mover member 44 to perform linear reciprocating motion in the first direction.

[0069] It should be noted that those skilled in the art should be aware of the general structural structure and basic working principle of the linear motor, so they will not be elaborated here.

[0070] See also Figure 2The supporting component 10 has a guide structure extending along a first direction, a flexible adapter 42 is connected between the guide structure and the movable component 44, and a first optical element 41 is fixedly arranged on the flexible adapter 42; wherein, the first optical element 41 has an optical property change in the first direction, for example, the first optical element 41 may include a filter, and the filtering wavelength or optical density of the filter at different positions in the first direction is different; for another example, the first optical element 41 may include an attenuation plate, and the attenuation plate has different optical transmittances at different positions in the first direction.

[0071] In the process that the stator component 43 drives the movable component 44 to perform linear reciprocating motion in the first direction, with the help of the structural connection relationship established between the movable component 44 and the guide structure by the flexible adapter 42, the movable component 44 can be guided to drive the flexible adapter 42 and the first optical element 41 to move synchronously in the first direction, so that the first optical element 41 is cut into the optical path at different positions in the first direction, so as to realize the adjustment of the optical properties of the detection light (such as light band, light brightness, etc.).

[0072] In some embodiments, the first optical element 41 may also be fixedly disposed on the movable component 44 , or connected and fixed to the movable component 44 and the flexible adapter 42 at the same time.

[0073] Firstly, by using a linear motor as the motion driving device of the first optical element 41, the characteristics of the linear motor, such as fast response speed (for example, a common linear motor can usually provide a thrust of 105N throughout the stroke and a maximum movement speed of 4.9 m / s), smooth movement, etc., can be fully utilized to quickly switch different positions of the first optical element 41 into the optical path in a short time, thereby quickly and flexibly adjusting the optical characteristics, transmission performance, etc. of the detection light incident on or passing through the first optical element 41.

[0074] Secondly, since common linear motors usually do not have their own guide structures, the mover 44 is prone to spin during movement, causing the linear motor to be unable to output linear motion; with the cooperation of the flexible adapter 42 and the guide structure, the mover 44 of the linear motor can be guided or constrained, so that the mover 44 can drive the flexible adapter 42 and the first optical element 41 to perform synchronous linear motion smoothly, reliably, and quickly in a short time.

[0075] Thirdly, the use of the flexible adapter 42 can effectively reduce the friction force caused by assembly errors in the connection chain between the linear motor (specifically the mover 44) and the supporting component 10 (specifically the guide structure), thereby ensuring the movement speed and movement accuracy of the mover 44 and the first optical element 41, and enhancing the structural stiffness of the relevant components in the movement direction, ensuring that the position switching and adjustment of the first optical element 41 can be achieved quickly and accurately under large acceleration.

[0076] Fourthly, the flexible adapter 42 can be used to unload the pressure caused by the installation error between the linear motor's moving component 44 and the guide structure, reduce the friction during the movement process, and ensure the performance of the linear motor and the load movement speed; at the same time, the flexible adapter 42 is not flexible in the direction of movement to ensure the position stability of the optical element under high acceleration during the start-stop process.

[0077] In one embodiment, see Figure 2 and Figure 3 The first optical element 41 includes a filter, which may be a linear variable edge filter, that is, the optical density of the filter changes linearly from one end of the filter in the first direction to the other end opposite thereto.

[0078] Taking the overlay measurement equipment used for wafer inspection and measurement as an example, different bands of inspection light have different reflection effects on different wafer materials and different overlay mark heights; therefore, the inspection accuracy of the overlay measurement equipment (such as the recognition accuracy of the overlay mark) mainly depends on the selection of the inspection light band. The more common way to select the inspection light band is to cut different positions of the linear variable edge filter into the optical path.

[0079] Since linear variable edge filters are usually long, the movement speed of the filter motion drive mechanism in the related technology (such as a rotating motor with a gear rack, etc.) cannot quickly switch the position of the filter in a short time (for example, completing a 60-110mm stroke within 100 milliseconds); therefore, existing overlay measurement equipment can usually only use the same band of detection light for all marks on a certain wafer, and cannot provide detection light of suitable bands for different marks.

[0080] In this embodiment, a linear motor is used as the motion drive mechanism of the linear variable edge filter. Based on the characteristics of the linear motor such as fast movement speed, different positions of the filter can be quickly switched to the optical path in a short time (for example, a stroke of 60-110 mm can be completed within 100 milliseconds), so that detection light of suitable bands can be provided for different marks of the same wafer, so that the light band can be switched and adjusted for each image acquisition and measurement, creating favorable conditions for improving the flexibility and detection accuracy of the detection operation.

[0081] In some embodiments, depending on the role of the adjustment device in the optical detection equipment or the configuration of the functional requirements of the optical detection equipment itself, the first optical element 41 may also be an attenuation plate or other optical element. A linear motor may be used to quickly switch different positions of the first optical element 41 into the optical path, or to quickly cut the first optical element into and out of the optical path.

[0082] In one embodiment, see Figure 3 The number of translation adjustment components 40 is set to two, and the first optical elements 41 in the two translation components 40 are arranged side by side between the receiving component 20 and the output component 30 in the direction of the optical path, and the first optical elements 41 of the two translation components 40 have optical property changes in the first direction; in this way, when the first optical elements 41 of the two translation components 40 cut into the optical path, they can be combined to form different optical properties, so that the detection light can be adjusted more accurately to meet the requirements of the detection operation.

[0083] Exemplarily, the first optical elements 41 of the two translation assemblies 40 both include linear variable edge filters. By combining the two linear variable edge filters at different positions, the adjustment accuracy of the light band can be improved to 1 nanometer level.

[0084] Exemplarily, the first optical elements of the two translation assemblies 40 both include attenuation plates, and the accuracy of light transmittance can be improved by combining and matching the two attenuation plates at different positions.

[0085] In some embodiments, the number of translation adjustment components 40 may also be set to more than two, such as three, four or other greater numbers, and the first optical elements 41 of at least two of the multiple translation adjustment components 40 have optical property changes in the first direction.

[0086] It should be noted that different optical characteristics formed by combinations of different first optical elements 41 refer to different optical performances, such as different filter bandpass ranges or different precisions of optical transmittance.

[0087] In one embodiment, see Figure 2 , Figure 4 and Figure 5 The flexible transition member 42 has a deformable portion 42a, a first connecting portion 42b and a second connecting portion 42c; wherein the first connecting portion 42b is arranged at one end of the deformable portion 42a in the second direction, and the second connecting portion 42c is arranged at the other end of the deformable portion 42a in the second direction; the guide structure is connected to the first connecting portion 42b, for example, a fixed connection or a linear sliding fit connection; the movable member 44 is fixedly connected to the second connecting portion 42c, for example, the movable member 44 is passed through and fixed to the second connecting portion 42c.

[0088] The first optical element 41 can be fixed to the second connecting portion 42c; illustratively, the translation adjustment assembly 40 also includes a support member 45 whose outline shape is roughly a frame structure, and the support member 45 is fixed to the second connecting portion 42c by gluing, locking, snapping, etc., and the first optical element 41 (such as a linear variable edge filter, an attenuation plate, a spectrometer, etc.) is fixed to the support member 45 in the form of a window covering the support member 45, thereby forming a structural form in which the first optical element 41 is fixedly arranged on the second connecting portion 42.

[0089] As for the deformable portion 42a, the deformable portion 42a is configured to be able to generate deformation in the second direction (for example, elastic telescopic deformation occurs in the second direction, elastic torsional deformation occurs in a plane perpendicular to the second direction, etc.), so that the flexible adapter 42 can adapt to the relative position between the movable component 44 and the guide structure (for example, spacing, height difference, etc.), thereby reducing the interaction force between the guide structure, the flexible adapter 42 and the movable component 44 due to assembly errors, and then reducing the friction force during the movement of the flexible adapter 42 driven by the movable component 44, which can not only ensure that the first optical element 41 can be quickly cut into the optical path, but also help to increase the service life of the adjustment device or the linear motor.

[0090] In one embodiment, see Figure 4 and Figure 5 The deformable portion 42a has a plurality of connecting arms arranged side by side in the second direction, and three adjacent connecting arms among the plurality of connecting arms are defined as a first connecting arm, a second connecting arm and a third connecting arm in sequence; wherein, one end of the second connecting arm in the third direction is connected to the first connecting arm, and the other end of the second connecting arm in the third direction is connected to the third connecting arm; in this way, a deformation gap can be formed between two adjacent connecting arms, thereby ensuring that the deformable portion 42a can be deformed in the second direction by an external force.

[0091] For some examples, see Figure 4 and Figure 5 The flexible adapter 42 can be an integrated structure made of elastic material, that is, the deformable portion 42a, the first connecting portion 42b and the second connecting portion 42c are integrally formed; this can reduce the number of components of the adjustment device and enhance the overall mechanical strength of the flexible adapter 42.

[0092] Of course, the flexible adapter 42 may also adopt a split combination structure, for example, the first connection portion 42b or the second connection portion 42c is fixedly disposed at the end of the deformable portion 42a, so as to meet different structural configuration requirements of the adjustment device or the translation adjustment component 40.

[0093] In one embodiment, see Figure 2The guide structure includes a ball linear guide 11 , the slide rail of which extends along a first direction and is fixed to the bearing assembly 10 , and the flexible adapter 42 (specifically the first connecting portion 42 b ) is fixed to the slide block of the ball linear guide 11 .

[0094] By using the ball linear guide 11 as the guiding structure of the movable member 44, the guiding accuracy can be ensured and the friction coefficient can be reduced with the cooperation of the flexible adapter 42, thereby effectively avoiding wear between relatively moving parts and helping to increase the service life of the adjusting device.

[0095] In some embodiments, the guide structure may also adopt other suitable structures, for example, the guide structure is a guide rail structure or a slide groove structure arranged along the first direction, and the flexible transition member 42 (such as the first connecting portion 42b) is slidably connected to the guide structure.

[0096] In one embodiment, see Figure 2 and Figure 3 The bearing assembly 10 is also provided with a limiting structure 12, which is fixedly arranged at one end or two opposite ends of the ball linear guide 11 in the first direction; when the movable component 44 drives the first optical element 41, the flexible adapter 42 and the slider of the ball linear guide 11 to move to a preset position in the first direction, the limiting structure 12 can be used to support the slider of the ball linear guide 11, thereby limiting or constraining the movement stroke of the movable component 44 in the first direction to prevent structural interference or collision of related components, and preventing the slider of the ball linear guide 11 from detaching from the slide rail, thereby ensuring the stability of the structural connection or cooperation of related components.

[0097] In one embodiment, see Figure 4 , the second connecting portion 42c is provided with a mounting surface 42d on the side facing away from the first connecting portion 42b in the second direction, and the mounting surface 42d is a plane structure parallel to the moving direction of the moving member 44 or the arrangement direction of the ball linear guide 11; the first optical element 41 can be directly fixed to the mounting surface 42d, or indirectly fixed to the mounting surface 42d by means of a support member 45. Thus, the parallelism between the first optical element 41 and the moving member 44 and the ball linear guide 11 can be improved, so that the detection light can be incident vertically on the first optical element 41.

[0098] In one embodiment, see Figures 1 to 3The adjustment component also includes a rotation adjustment component 50, which includes a second optical element 51, a turntable 52 and a turntable driver 53; wherein the second optical element 51 is fixedly arranged on the turntable 52, and the second optical element 51 and the first optical element 41 are arranged side by side in the direction of the optical path, for example, the second optical element 51 can be arranged on the side of the first optical element 41 facing or close to the receiving component 20; the turntable driver 53 is fixedly arranged on the supporting component 10, and the turntable driver 53 can include a rotating motor, etc.; the power end of the turntable driver 53 is coupled to the turntable 53, and by driving the turntable 53 to rotate, the second optical element 51 can be rotated to cut into the optical path of the adjustment device.

[0099] By cooperating with the rotation adjustment component 50 and the translation adjustment component 40, two optical element adjustment mechanisms with different structural forms and movement modes can be constructed in the adjustment device. The first optical element 41 and the second optical element 51 can be used to adjust the same optical characteristics or different optical characteristics of the detection light, so as to enrich the optical adjustment function of the adjustment device or improve the adjustment accuracy of the detection light, thereby meeting the needs of the detection operation.

[0100] Exemplarily, the second optical element 51 may include multiple filters with different optical densities, and the multiple filters are evenly arranged around the rotation axis of the turntable 52; when the turntable driver 53 drives the turntable 52 to rotate, the multiple filters can be selectively cut into the optical path of the adjustment device, so that the adjustment device can be endowed with different filtering capabilities by utilizing the cooperation between the filter of the second optical element 51 and the linear variable edge filter in the first optical element 41, which is conducive to improving the selection accuracy and flexibility of the detection light band.

[0101] Exemplarily, the second optical element 51 may include a plurality of attenuation plates with different light transmittances, and the plurality of attenuation plates are evenly arranged around the rotation axis of the turntable 52; when the turntable driving member 53 drives the turntable 52 to rotate, the plurality of attenuation plates may be selectively cut into the optical path of the adjustment device, thereby achieving adjustment of the detection light brightness.

[0102] Exemplarily, the second optical element 51 may also include optical lenses such as a reflector and a beam splitter. With the cooperation of the turntable driver 53 and the turntable 52, the second optical element 51 may be rotated into or out of the optical path of the adjustment device.

[0103] In one embodiment, see Figures 1 to 3, the number of the rotation adjustment components 50 is set to be multiple, and the multiple rotation adjustment components 50 include a first rotation adjustment component 50a and a second rotation adjustment component 50b; wherein the second optical element 51 in the first rotation adjustment component 50a is a plurality of filters with different optical densities, and the second optical element 51 in the second rotation adjustment component 50b is a plurality of attenuation plates with different light transmittances. The second optical element 51 of the first rotation adjustment component 50a can be arranged on the side of the first optical element 41 facing the receiving component 20 or the output component 30 in the optical path direction, and the second optical element 51 of the second rotation adjustment component 50b is arranged on the side of the first optical element 41 facing the receiving component 30 in the optical path direction.

[0104] Thus, the brightness of the detection light input through the receiving component 30 can be adjusted with the help of the second rotation adjustment component 50b, and then the band of the detection light can be selected by utilizing the cooperation of the first rotation adjustment component 50a and the translation adjustment component 40, and finally the adjusted detection light is output to the adjustment device through the output component 30; this can roughly conform to the adjustment process of the detection light by the overlay measurement equipment.

[0105] In one embodiment, see Figures 1 to 3 The number of the second rotation adjustment components 50b is set to two, and the turntables 52 of the two second rotation adjustment components 50b are arranged side by side in the optical path direction of the adjustment device. In this way, with the help of the cooperation of the second optical elements 51 of the two second rotation adjustment components 50b, the brightness of the detection light can be adjusted more accurately and the flexibility of adjusting the brightness of the detection light can be enhanced.

[0106] In one embodiment, see Figure 1 The output component 30 includes a spectrometer 31, a first output component 32 and a second output component 33; wherein the spectrometer 31 is arranged in the optical path of the adjustment device (for example, arranged on the light output side of the first optical element 41), and the spectrometer 31 may include a spectroscope, which is mainly used to perform spectroscopic processing on the detection light adjusted by the adjustment component to form a first path light and a second path light.

[0107] The first output element 32 is arranged in the optical path of the first path light, and the first output element 32 may include an optical fiber, and is mainly used to receive and output the first path light. The second output element 33 is arranged in the optical path of the second path light, and the second output element 33 may include an optical fiber, and is mainly used to receive and output the second path light.

[0108] With the help of the splitter 31, the detection light adjusted by the adjustment component can be divided into two paths (namely: first path light and second path light); wherein, the first path light can be outputted by the first output element 32 and finally participate in the optical detection of the surface features of the object to be measured, for example, the first output element 32 is connected to the shaping light path of the optical detection equipment, and the first path light is finally involved in the optical detection of the object to be measured after being shaped in the shaping light path; the second path light can be outputted by the second output element 33 and participate in spectral detection, for example, the second output element 33 is connected to the spectral detector.

[0109] Therefore, by configuring the structure and function of the output component 30, the practical functions of the regulating device can be enriched and the applicability of the regulating device can be enhanced.

[0110] It should be noted that Figure 1 The bold solid line with an arrow in the middle represents the direction of the light path or the light transmission path.

[0111] In some embodiments, the light splitter 31 and the first output element 32 or the light splitter 31 and the second output element 33 may be omitted, so that the detection light adjusted by the adjustment component is directly output to the adjustment device, thereby meeting different application requirements.

[0112] In one embodiment, see Figure 2 , Figure 3 and Figure 6 The bearing assembly 10 includes a bottom plate member 13, a base member 14 and a vibration isolator 15; wherein the bottom plate member 13 is used to connect to the mounting carrier of the optical detection equipment so as to mount the adjustment device as a whole on the optical detection equipment; the base member 14 is arranged on the side of the bottom plate member 13 away from the mounting carrier, and the adjustment assembly, the receiving assembly 20, the output assembly 30, the guide structure, the limiting structure, etc. are arranged on the base member 14; the vibration isolator 15 can be a damping material with a certain thickness, and the vibration isolator 15 is connected and arranged between the base member 13 and the base member 14.

[0113] By configuring the structure of the bearing assembly 10, the vibration isolation member 15 can be used to isolate the propagation of vibration between the mounting carrier and the adjusting device; on the one hand, the impact of the moving parts in the adjusting device on other components of the optical detection device during movement (such as acceleration and deceleration) can be reduced, thereby avoiding affecting other functional components of the optical detection device; on the other hand, the vibration generated by the optical detection device can be avoided from being transmitted to the adjusting device and causing adverse effects on the performance of the adjusting device itself, thereby reducing the setting time of the adjusting device or the optical element.

[0114] In some embodiments, the base member 14 or the vibration isolating member 15 may be omitted, and a vibration isolating device may be provided between the mounting carrier and the bottom plate member 14 to isolate the vibration between the adjusting device and the optical detection device.

[0115] In one embodiment, see Figure 6 The adjusting device also includes a protective component 60; the protective component 60 is fixed to the bottom plate 13 in a detachable manner to enclose a protective space between the protective component 60 and the bottom plate 13; the adjusting component, the receiving component 20, the output component 30, the guide structure, the limiting structure, etc. are accommodated and arranged in the protective space.

[0116] The protective component 60 can be used to isolate the optical system or related components of the adjusting device from the outside of the adjusting device, which can not only prevent stray light or particles from entering the inside of the adjusting device to ensure the optical adjustment performance of the adjusting device, but also help improve the integrity of the adjusting device structure.

[0117] Please combine Figures 1 to 6 , an embodiment of the present application also provides an optical inspection device, such as an overlay measurement device; the optical inspection device includes a light source, a detection device and an adjustment device of the aforementioned embodiment; wherein the light source is mainly used to generate detection light, and the adjustment device is used to adjust the optical properties (such as brightness, band, etc.), transmission performance, etc. of the detection light; the detection device is mainly used to receive the detection light adjusted by the adjustment device to detect the object to be tested (such as a wafer, etc.).

[0118] It should be noted that, based on the adjustment device of the aforementioned embodiment, the optical detection device can quickly and flexibly complete the adjustment of the optical characteristics, transmission performance, etc. of the detection light in a short time, thereby effectively improving the efficiency of the optical detection operation and the accuracy of the detection. At the same time, those skilled in the art should know that the light source, the detection device, etc. can adopt the existing technology; therefore, no further description is given here.

[0119] The above specific examples are used to illustrate the present invention, which are only used to help understand the present invention and are not intended to limit the present invention. For those skilled in the art of the present invention, some simple deductions, deformations or substitutions can be made based on the idea of ​​the present invention.

Claims

1. A regulating device, characterized in that: It includes a bearing assembly and an adjustment assembly, wherein the bearing assembly has a guide structure, and the adjustment assembly includes a translation adjustment assembly, and the translation adjustment assembly includes: A linear motor having a stator member and a mover member that cooperate with each other; the stator member is fixed to the bearing assembly to drive the mover member to reciprocate linearly in a first direction, and the first direction intersects with the optical path direction of the adjustment device; a flexible adapter connected between the guide structure and the movable member; the flexible adapter and the guide structure cooperate with each other to guide the movable member to move in the first direction; and The first optical element is fixed to the flexible adapter and / or the movable element; the first optical element can move synchronously with the flexible adapter and / or the movable element to move the first optical element into the optical path of the adjusting device.

2. The adjusting device according to claim 1, characterized in that The flexible adapter has: a deformable portion configured to be deformable in a second direction intersecting with the first direction; A first connecting portion, disposed at one end of the deformable portion in the second direction, the guide structure being connected to the first connecting portion; as well as The second connection portion is arranged at the other end of the deformable portion in the second direction, and the movable member is fixed to the second connection portion.

3. The adjusting device according to claim 2, characterized in that: The deformable portion has a plurality of connecting arms arranged side by side and spaced apart in the second direction, and three adjacent connecting arms of the plurality of connecting arms are sequentially a first connecting arm, a second connecting arm and a third connecting arm; One end of the second connecting arm in the third direction is connected to the first connecting arm, and the other end is connected to the third connecting arm to form a deformation gap between adjacent connecting arms; wherein the first direction, the second direction and the third direction are perpendicular to each other.

4. The adjusting device according to claim 2, characterized in that: The flexible adapter is an integrated structure; And / or the translation adjustment assembly further includes a support member, the support member is fixed to the second connecting portion, and the first optical element is fixed to the support member.

5. The adjusting device according to claim 1, characterized in that: The guide structure comprises a ball linear guide rail, a slide rail of the ball linear guide rail extends along the first direction and is fixedly arranged, and a slider of the ball linear guide rail is fixedly connected to the flexible adapter.

6. The adjusting device according to claim 5, characterized in that The bearing assembly also has a limiting structure, which is fixedly arranged at one end or both ends of the ball linear guide in the first direction; the limiting structure is used to resist the slider of the ball linear guide to limit the movement stroke of the movable component in the first direction.

7. The adjusting device according to claim 1, characterized in that: The bearing assembly comprises: A bottom plate member, used for connecting the mounting carrier; a base member, arranged on a side of the bottom plate member facing away from the mounting carrier, the adjustment assembly and the guide structure being arranged on the base member; and A vibration isolating member is disposed between the bottom plate member and the base member, and is used to isolate the propagation of vibration between the mounting carrier and the adjusting device.

8. The adjusting device according to claim 7, characterized in that It also includes a protection component; the protection component is fixed to the bottom plate to form a protection space for accommodating the adjustment component between the protection component and the bottom plate.

9. The adjusting device according to claim 1, characterized in that: The number of the translation adjustment components is set to be multiple, and the first optical elements in the multiple translation adjustment components are arranged side by side in the direction of the optical path; wherein: The first optical elements in at least two of the translation adjustment assemblies have optical property changes in the first direction, so as to form different optical properties when the first optical elements cut into the optical path of the adjustment device.

10. The adjustment device according to claim 9, characterized in that The first optical elements in at least two of the translation adjustment assemblies each include a filter, and the optical density of the filter linearly changes from one end of the filter toward the other end opposite to the filter in the first direction.

11. The regulating device according to any one of claims 1 to 10, characterized in that: The adjustment assembly further includes a rotation adjustment assembly, and the rotation adjustment assembly includes: Turntable; A second optical element is disposed on the turntable, wherein the second optical element and the first optical element are arranged side by side in the direction of the optical path; and A turntable driver is fixed to the bearing assembly; a power end of the turntable driver is coupled to the turntable for driving the turntable to rotate so as to rotate the second optical element into the optical path of the adjustment device.

12. The adjustment device according to claim 11, characterized in that The number of the rotation adjustment components is set to be multiple, wherein: The second optical element of at least one of the plurality of rotation adjustment assemblies comprises a plurality of attenuation sheets with different light transmittances, and the plurality of attenuation sheets are evenly arranged around the rotation axis of the turntable; when the turntable driving member drives the turntable to rotate, the plurality of attenuation sheets can be selectively cut into the optical path of the adjustment device; and / or The second optical element of at least one of the multiple rotating adjustment components includes multiple filters with different optical densities, and the multiple filters are evenly arranged around the rotation axis of the turntable; when the turntable driving member drives the turntable to rotate, the multiple filters can be selectively cut into the optical path of the adjustment device.

13. The regulating device according to any one of claims 1 to 10, characterized in that: It also includes a receiving component and an output component arranged on the supporting component, and the receiving component and the output component are arranged on two opposite sides of the adjusting component in the direction of the optical path; wherein the receiving component is used to output the light emitted by the light source to the adjusting component, and the output component is used to output the light adjusted by the adjusting component.

14. The adjustment device according to claim 13, characterized in that The output component comprises: A light splitter is arranged in the optical path of the adjusting device; the light splitter is used to split the light adjusted by the adjusting component to form a first path light and a second path light; A first output element, arranged in the optical path of the first path light, the first output element being used to receive and output the first path light; and The second output element is arranged in the optical path of the second path light, and the second output element is used to receive and output the second path light.

15. An optical detection device, characterized in that: include: A light source, used for generating detection light; The adjustment device according to any one of claims 1 to 14, at least for adjusting the optical properties of the detection light; as well as The detection device is used to receive the detection light adjusted by the adjustment device to detect the object to be detected.

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