Air exhaust assembly and coating equipment

Abstract

The utility model provides an air exhaust assembly and coating equipment, the air exhaust assembly comprises an air exhaust cavity, a dust board and an air exhaust pump, the air exhaust cavity is provided with an air inlet and an air outlet, the air inlet is used for being connected with the coating cavity, the dust board shields the air inlet, the dust board is obliquely arranged relative to the axis of the air inlet, and the air exhaust pump is connected with the air exhaust pump from the near end of the dust board to the far end of the dust board. The distance between the dust blocking plate and the air outlet is gradually increased, the air extracting pump is located outside the air extracting cavity, the air extracting pump is connected with the air outlet, and the air extracting pump is used for driving air to sequentially flow through the air inlet, the dust blocking plate and the air outlet. According to the air exhaust assembly, dust accumulated in the air exhaust pump can be reduced, and therefore the risk that the air exhaust pump breaks down is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, in particular to an air extraction component and film coating equipment. Background Art

[0002] At present, many coating processes require coating the workpiece in a vacuum environment. In order to create or maintain the vacuum environment of the coating chamber, a pump (such as a vacuum pump) is required to evacuate the coating chamber. During the coating process, the target particles that are not deposited on the workpiece will form dust and adhere to the wall of the chamber. When the pump draws out the gas in the coating chamber, the dust will mix into the airflow. After a large amount of dust accumulates inside the pump, the pump may malfunction. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides an air extraction component, which can reduce dust accumulated in a pump.

[0004] The utility model also provides a coating device comprising the above-mentioned exhaust assembly.

[0005] According to the first aspect of the present invention, the vacuum assembly includes: a vacuum chamber, the vacuum chamber is provided with an air inlet and an air outlet, the air inlet is used to connect to the coating chamber; a dust shield, located in the vacuum chamber, the dust shield blocks the air inlet, the dust shield is inclined relative to the axis of the air inlet, the end of the dust shield close to the air inlet is the proximal end, the end of the dust shield away from the air inlet is the distal end, and the distance between the dust shield and the air outlet gradually increases from the proximal end to the distal end; an vacuum pump, the vacuum pump is located outside the vacuum chamber, the vacuum pump is connected to the air outlet, and the vacuum pump is used to drive the gas to flow through the air inlet, the dust shield and the air outlet in sequence.

[0006] According to the vacuum assembly of the first embodiment of the utility model, there are at least the following beneficial effects: the dust in the air flow will also adhere to the dust shield, and the dust shield can reduce the dust that eventually flows to the vacuum pump, thereby reducing the dust accumulated in the vacuum pump. Since the dust shield is inclined and gradually moves away from the air outlet, the gas entering the vacuum chamber from the air inlet will first flow to the side wall of the vacuum chamber away from the air outlet under the guidance of the dust shield, and then the gas will be rebounded by the wall of the vacuum chamber and flow to the air outlet. The flow path of the gas from the air inlet to the air outlet is long and tortuous. This is conducive to increasing the contact time between the gas and the vacuum chamber, thereby increasing the dust adsorbed by the vacuum chamber, reducing the dust content in the gas that eventually flows into the vacuum pump, and further reducing the dust accumulated in the vacuum pump.

[0007] According to some embodiments of the utility model, the air suction cavity is in the shape of a rectangular parallelepiped or a cube, and includes a first side wall, a second side wall and a third side wall, either of the first side wall and the third side wall is arranged adjacent to the second side wall, the first side wall and the third side wall are arranged facing each other, the air inlet is arranged on the second side wall, the air outlet is arranged on the first side wall, and the distal end faces the third side wall.

[0008] According to some embodiments of the utility model, the dust shield includes: a mounting portion, the mounting portion includes the proximal end, the mounting portion is relatively fixed to the exhaust cavity; a flange portion, the flange portion includes the distal end, and a side surface of the flange portion facing the air inlet is perpendicular to the axis; an inclined portion, the two ends of the inclined portion are respectively connected to the mounting portion and the flange portion, and the inclined portion is inclined relative to the axis.

[0009] According to some embodiments of the present invention, the inclined portion is in the shape of a flat plate.

[0010] According to some embodiments of the utility model, the air extraction assembly includes a plurality of the dust shields, two adjacent dust shields are arranged at intervals, and any two inclined portions are parallel to each other.

[0011] According to some embodiments of the utility model, the air extraction assembly includes a plurality of the dust shields, and two adjacent dust shields are spaced apart from each other. For any two adjacent dust shields, a portion of one of the dust shields overlaps with a portion of the other dust shield in the axial direction of the air inlet.

[0012] According to some embodiments of the utility model, the exhaust assembly also includes: a mounting plate, the dust shield is connected to the mounting plate, the mounting plate is located in the exhaust cavity, the mounting plate is provided with a through hole for allowing gas to pass through, and the through hole is located between the air inlet and the dust shield; a cooling pipe, the cooling pipe includes a cooling section, the cooling section is located in the exhaust cavity, and the cooling section is thermally connected to the mounting plate, the tube cavity of the cooling pipe is used to allow cooling medium to flow so that the cooling medium absorbs heat from the mounting plate.

[0013] According to some embodiments of the present invention, the cooling section is arc-shaped or ring-shaped, and the cooling section surrounds the through hole.

[0014] According to some embodiments of the present utility model, the air extraction component further includes an adsorption plate, the adsorption plate is located in the air extraction cavity, and the adsorption plate is detachably connected to the inner wall surface of the air extraction cavity.

[0015] The coating equipment according to the embodiment of the second aspect of the utility model includes the exhaust assembly described in the embodiment of the first aspect.

[0016] The coating equipment according to the second aspect of the present invention has the same beneficial effects as the vacuum assembly of the first aspect, and both can reduce the dust accumulated in the vacuum pump, which will not be elaborated here.

[0017] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0019] Figure 1 This is a front view of an air extraction component according to an embodiment of the utility model;

[0020] Figure 2 for Figure 1 A cross-sectional view of the exhaust assembly along section AA;

[0021] Figure 3 for Figure 1 An exploded view of the exhaust assembly;

[0022] Figure 4 A three-dimensional diagram of a dust shield, a mounting plate and a cooling pipe;

[0023] Figure 5 The dust shield, mounting plate and cooling pipe are shown in top view.

[0024] Reference numerals:

[0025] 100-exhaust assembly, 101-exhaust cavity, 102-main body, 103-door, 104-air inlet, 105-exhaust pump, 106-air outlet, 107-dust shield, 108-cooling pipe, 109-mounting plate, 110-through hole, 111-opening, 112-adsorption plate, 113-cooling section, 114-vertical section, 115-flanged portion, 116-inclined portion, 117-mounting portion, 118-first side wall, 119-second side wall, 120-third side wall, 121-proximal end, 122-distal end, 123-axis line, 124-first straight line, 125-second straight line. DETAILED DESCRIPTION

[0026] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0027] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0028] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0029] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0030] Figures 1 to 3 FIG. 1 shows an air extraction assembly 100 according to an embodiment of the present invention. Figure 2 for Figure 1 The sectional view of the air extraction assembly 100 along the AA section is shown. Figure 2 The vacuum pump 105 is not cut. The vacuum assembly 100 includes a vacuum chamber 101, a dust shield 107 and a vacuum pump 105. The vacuum chamber 101 is provided with an air inlet 104 and an air outlet 106. The air inlet 104 is used to connect with the coating chamber (the coating chamber is not shown). The vacuum pump 105 is located outside the vacuum chamber 101, and the vacuum pump 105 is connected with the air outlet 106. The vacuum pump 105 can be set as a molecular pump, a vacuum pump, etc. The dust shield 107 is arranged in the vacuum chamber 101, and the dust shield 107 blocks the air inlet 104. The dust shield 107 is inclined relative to the axis 123 of the air inlet 104. Specifically, if the end of the dust shield 107 close to the air inlet 104 is called the proximal end 121, and the end of the dust shield 107 far from the air inlet 104 is called the distal end 122, then the distance between the dust shield 107 and the air outlet 106 gradually increases from the proximal end 121 to the distal end 122. The "distance between the dust shield 107 and the air outlet 106" in this application refers to: the distance between the dust shield 107 and the air outlet 106 in the axial direction of the air outlet 106. For example, Figure 2As shown, the axial direction of the air outlet 106 is the left-right direction, the proximal end 121 of the dust shield 107 is the front end of the dust shield 107, and the distal end 122 of the dust shield 107 is the rear end of the dust shield 107. From the front end to the rear end of the dust shield 107, the dust shield 107 is farther and farther away from the air outlet 106.

[0031] The vacuum pump 105 is used to drive the gas flow, so that the gas flows through the air inlet 104, the dust shield 107 and the air outlet 106 in sequence. When the vacuum pump 105 is running and the air inlet 104 is connected to the coating chamber, the gas extracted by the vacuum pump 105 is mainly the gas originally located in the coating chamber. The vacuum pump 105 extracts the gas in the coating chamber to form a vacuum environment in the coating chamber. During the vacuum pump 105 exhausting the gas, the dust remaining in the coating chamber will be mixed into the air flow.

[0032] Figure 2 The dotted arrows in the figure indicate the main flow path of the gas. Driven by the vacuum pump 105, the gas in the coating chamber leaves the coating chamber and enters the vacuum chamber 101 from the air inlet 104, and then the gas contacts the dust shield 107, and the flow of the gas is guided by the dust shield 107. Under the guidance of the dust shield 107, the gas first gradually moves away from the gas outlet 106, and then the gas is rebounded by the wall of the vacuum chamber 101 and flows to the gas outlet 106.

[0033] from Figure 2 It can be seen from the gas flow path that, since the dust shield 107 is inclined and gradually moves away from the air outlet 106, the gas entering the air extraction chamber from the air inlet 104 will first flow to the side wall of the air extraction chamber away from the air outlet 106 under the guidance of the dust shield 107, and the gas flow path from the air inlet 104 to the air outlet 106 is longer and more tortuous. This is conducive to increasing the contact time between the gas and the air extraction chamber, thereby increasing the dust adsorbed by the air extraction chamber, reducing the dust content in the gas that finally flows into the air extraction pump 105, and further reducing the dust accumulated in the air extraction pump 105. In addition, the dust in the air flow will also adhere to the dust shield 107, and the dust shield 107 can also reduce the dust accumulated in the air extraction pump 105. In this way, the risk of failure of the air extraction pump 105 is lower, and the frequency of the air extraction pump 105 requiring shutdown for maintenance is lower.

[0034] like Figure 2As shown, in some embodiments, the air extraction chamber 101 includes a first side wall 118, a second side wall 119 and a third side wall 120, and any one of the first side wall 118 and the third side wall 120 is disposed adjacent to the second side wall 119, and the first side wall 118 and the third side wall 120 are disposed opposite to each other. The air inlet 104 is disposed on the second side wall 119, and the air outlet 106 is disposed on the first side wall 118, with the distal end 122 facing the third side wall 120. In this way, the design of "the distance between the dust shield 107 and the air outlet 106 gradually increases from the proximal end 121 to the distal end 122" can be realized. If Figure 2 For example, the first side wall 118 is the left inner wall surface of the air extraction cavity 101, the second side wall 119 is the front inner wall surface of the air extraction cavity 101, and the third side wall 120 is the right inner wall surface of the air extraction cavity 101. Figure 2 In the illustrated embodiment, the air extraction chamber 101 includes a main body 102 and a door 103. The main body 102 is provided with an opening 111 so that the user can maintain the air extraction chamber 101. The door 103 and the main body 102 are connected by screws, and the door 103 blocks the opening 111. The first side wall 118 and the second side wall 119 can be located on the main body 102, and the third side wall 120 can be located on the door 103. In some embodiments, in order to reduce the structural complexity of the air extraction chamber 101, the air extraction chamber 101 is in the shape of a cuboid or a cube, and the first side wall 118, the second side wall 119 and the third side wall 120 are all set to be planes.

[0035] like Figure 3 As shown, in some embodiments, the suction component 100 also includes an adsorption plate 112, which is located in the suction cavity 101, and the adsorption plate 112 is detachably connected to the inner wall surface of the suction cavity 101. When the adsorption plate 112 is provided, the dust in the air flow can adhere to the surface of the adsorption plate 112, thereby reducing the dust accumulated inside the pump. The adsorption plate 112 can also be provided with a plurality of adsorption holes (the adsorption holes are not shown), and dust can enter the adsorption holes and adhere to the hole walls of the adsorption holes. Therefore, the provision of adsorption holes can increase the total area of ​​the adsorption plate 112 for adsorbing dust.

[0036] After the air extraction assembly 100 has been used for a period of time, a lot of dust may have accumulated on the adsorption plate 112. If the adsorption plate 112 with a lot of dust accumulated continues to be used, the dust in the air flow may not be effectively attached to the adsorption plate 112 during the subsequent air extraction process, and dust is likely to accumulate in the air extraction pump 105. To avoid this problem, the adsorption plate 112 can be replaced or cleaned regularly, and the adsorption plate 112 can enter and exit the air extraction chamber 101 through the opening 111.

[0037] In addition, if the adsorption plate 112 is not provided in the air extraction cavity 101, the dust in the air flow directly adheres to the inner wall surface of the air extraction cavity 101. In this case, the dust on the inner wall surface of the air extraction cavity 101 can be cleaned regularly.

[0038] The structure of the dust shield 107 is described below. Figure 5 As shown, in some embodiments, the dust shield 107 includes a mounting portion 117, a flange portion 115 and an inclined portion 116, the two ends of the inclined portion 116 are respectively connected to the mounting portion 117 and the flange portion 115, and the inclined portion 116 is inclined relative to the axis 123 of the air inlet 104. The mounting portion 117 is relatively fixed to the air extraction cavity 101. For example, the air extraction component 100 also includes a mounting plate 109, the mounting plate 109 is located in the air extraction cavity 101, the mounting plate 109 is fixed to the inner wall surface of the air extraction cavity 101 by screws, and the mounting portion 117 is fixed to the mounting plate 109 by screws. Alternatively, the mounting portion 117 is directly fixedly connected to the inner wall surface of the air extraction cavity 101 by screws. The mounting portion 117 includes a proximal end 121, and the proximal end 121 can be the side surface of the mounting portion 117 facing the air inlet 104, that is, the proximal end 121 can be the front side surface of the mounting portion 117. The flange portion 115 includes a distal end 122, and the distal end 122 may be the side surface of the flange portion 115 facing away from the air inlet 104, that is, the distal end 122 may be the rear side surface of the flange portion 115. The side surface of the flange portion 115 facing the air inlet 104 (the front side surface of the flange portion 115) is perpendicular to the axis 123 of the air inlet 104. The flange portion 115 is conducive to strengthening the guiding effect on the gas, thereby effectively guiding most of the gas to the third side wall 120, so as to ensure that the airflow flowing from the air inlet 104 to the air outlet 106 has a longer and more tortuous path.

[0039] like Figure 5 As shown, in order to reduce the difficulty of processing the dust shield 107, the inclined portion 116 can be set to be a flat plate. In other embodiments not shown, the inclined portion 116 can also be in an arc shape or other shapes, as long as the dust shield 107 as a whole meets the condition that "the distance between the dust shield 107 and the air outlet 106 gradually increases from the proximal end 121 to the distal end 122". In addition, in order to reduce the difficulty of processing the dust shield 107, the mounting portion 117 and the flange portion 115 can also be set to be a flat plate.

[0040] like Figure 5As shown, in some embodiments, the air extraction assembly 100 may include a plurality of dust shields 107, two adjacent dust shields 107 are arranged at intervals, and any two inclined portions 116 are parallel to each other. As described above, a portion of the dust will adhere to the dust shield 107; therefore, compared with only one dust shield 107, shielding the air inlet 104 by a plurality of dust shields 107 can further reduce the dust that eventually enters the air extraction pump 105. In addition, since any two inclined portions 116 are parallel to each other, the dust shields 107 are basically evenly distributed, and it is not easy for the air inlet 104 to have excessive local resistance.

[0041] In some embodiments, for any two adjacent dust shields 107, a portion of one dust shield 107 overlaps with a portion of the other dust shield 107 in the axial direction of the air inlet 104. For example, refer to Figure 5 The flange portion 115 of the left dust shield 107 and the mounting portion 117 of the middle dust shield 107 overlap each other, and the overlapping area is located between the first straight line 124 and the second straight line 125. Since the adjacent dust shields 107 overlap each other, if the inside of the air extraction chamber is observed from the air inlet 104 (the observed situation is roughly as follows): Figure 1 As shown), the gaps between adjacent dust shields 107 are small, and the gas entering the air extraction chamber from the air inlet 104 is not easy to flow straight backwards. Most of the gas can be effectively guided to the third side wall 120 by the dust shield 107, thereby forming Figure 2 The flow path of the gas is shown.

[0042] like Figure 4 As shown, in some embodiments, the air extraction assembly 100 further includes a mounting plate 109 and a cooling tube 108. The mounting plate 109 is located in the air extraction chamber 101, and the dust shield 107 is connected to the mounting plate 109. In order to prevent the mounting plate 109 from obstructing the gas from flowing to the dust shield 107, the mounting plate 109 is provided with a through hole 110 for allowing the gas to pass through, and the through hole 110 is located between the air inlet 104 and the dust shield 107 (as shown in FIG. Figure 2As shown). The through hole 110 can be set to a circular, rectangular or other regular polygon. The cooling tube 108 includes a cooling section 113, and the cooling section 113 is located in the vacuum cavity 101, and the cooling section 113 is thermally connected to the mounting plate 109. "The cooling section 113 is thermally connected to the mounting plate 109" can specifically be: the outer surface of the cooling section 113 is directly in contact with the outer surface of the mounting plate 109. Alternatively, "the cooling section 113 is thermally connected to the mounting plate 109" can also be: the outer surface of the cooling section 113 is in contact with a heat conductive part, and the heat conductive part is also in contact with the outer surface of the mounting plate 109, and the heat conductive part can be a heat-conducting silicone pad, heat-conducting glue, etc. The tube cavity of the cooling tube 108 is used to allow the cooling medium to flow, so that the cooling medium absorbs the heat of the mounting plate 109. The cooling medium can be water, refrigerant or other fluid that can be used for cooling.

[0043] Since the cooling pipe 108 can cool the mounting plate 109, the temperature of the gas decreases after passing through the cooling pipe 108 and / or the mounting plate 109, the activity of the dust in the gas decreases, and the dust is more likely to adhere to the mounting plate 109, the dust shield 107, the wall of the exhaust chamber 101, and the adsorption plate 112. In addition, since the gas entering the exhaust chamber 101 from the air inlet 104 will be cooled by the cooling pipe 108, the temperature of the gas finally entering the exhaust pump 105 is lower, and the risk of the exhaust pump 105 being damaged by the high-temperature gas is lower.

[0044] like Figure 4 As shown, in some embodiments, the cooling section 113 is arc-shaped or ring-shaped, and the cooling section 113 surrounds the through hole 110 of the mounting plate 109. Compared with setting the cooling section 113 as a straight pipe section, setting the cooling section 113 as an arc-shaped or ring-shaped section is conducive to increasing the heat exchange area between the cooling section 113 and the mounting plate 109, thereby improving the cooling effect of the cooling section 113 on the mounting plate 109. In addition, the cooling section 113 surrounding the through hole 110 is also conducive to increasing the heat exchange area between the cooling section 113 and the air flowing through the through hole 110, thereby improving the direct cooling effect of the cooling section 113 on the air. Figure 4 As shown, the cooling pipe 108 further includes a vertical section 114, which is connected to the cooling section 113 and can extend out of the air extraction cavity 101. The vertical section 114 is used to connect to a cooling system outside the air extraction cavity 101 so that the cooling system can deliver cooling medium to the cooling section 113.

[0045] The utility model also provides a coating device, which includes the exhaust assembly 100 in any of the above embodiments. More specifically, the coating device also includes a coating chamber, a substrate stage and a coating assembly (not shown in the drawings). The coating chamber is connected to the air inlet 104, and the substrate stage is arranged in the coating chamber, and the substrate stage is used to carry the workpiece to be coated. The workpiece can be a silicon wafer, a wafer or other sheet material that needs to be coated. The coating assembly can be a magnetron sputtering coating assembly, a reactive plasma coating assembly, an atomic layer deposition coating assembly, etc. At least a part of the coating assembly is accommodated in the coating chamber, and the coating assembly is used to coat the workpiece. The magnetron sputtering process, the reactive plasma process and the atomic layer deposition process are well-known technologies in the art, and the specific structure of the coating assembly required for these processes is also well-known technologies in the art, and will not be described in detail here.

[0046] In the description of the utility model, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

Claims

1. A vacuum assembly, characterized in that: include: An air extraction cavity, wherein the air extraction cavity is provided with an air inlet and an air outlet, and the air inlet is used to be connected to the coating cavity; A dust shield is located in the air extraction cavity, the dust shield blocks the air inlet, the dust shield is tilted relative to the axis of the air inlet, the end of the dust shield close to the air inlet is the proximal end, the end of the dust shield away from the air inlet is the distal end, and the distance between the dust shield and the air outlet gradually increases from the proximal end to the distal end; An air pump is located outside the air extraction cavity, the air pump is connected to the air outlet, and the air pump is used to drive the gas to flow through the air inlet, the dust baffle and the air outlet in sequence.

2. The air extraction assembly according to claim 1, characterized in that: The vacuum chamber is in the shape of a rectangular parallelepiped or a cube, and includes a first side wall, a second side wall and a third side wall. Either the first side wall or the third side wall is arranged adjacent to the second side wall, the first side wall and the third side wall are arranged facing each other, the air inlet is arranged on the second side wall, the air outlet is arranged on the first side wall, and the distal end faces the third side wall.

3. The air extraction assembly according to claim 1, characterized in that: The dust shield comprises: A mounting portion, the mounting portion including the proximal end, the mounting portion being relatively fixed to the air extraction cavity; A flange portion, the flange portion including the distal end, and a side surface of the flange portion facing the air inlet is perpendicular to the axis; An inclined portion, both ends of which are respectively connected to the mounting portion and the flange portion, and the inclined portion is inclined relative to the axis.

4. The air extraction assembly according to claim 3, characterized in that: The inclined portion is in a flat plate shape.

5. The air extraction assembly according to claim 4, characterized in that: The air extraction assembly comprises a plurality of dust shields, two adjacent dust shields are arranged at intervals, and any two inclined portions are parallel to each other.

6. The air extraction assembly according to claim 1, characterized in that: The air extraction assembly includes a plurality of dust shields, and two adjacent dust shields are spaced apart from each other. For any two adjacent dust shields, a portion of one dust shield overlaps a portion of another dust shield in the axial direction of the air inlet.

7. The air extraction assembly according to claim 1, characterized in that: The air extraction assembly also includes: A mounting plate, the dust shield is connected to the mounting plate, the mounting plate is located in the air extraction cavity, the mounting plate is provided with a through hole for allowing gas to pass through, and the through hole is located between the air inlet and the dust shield; A cooling pipe, wherein the cooling pipe comprises a cooling section, wherein the cooling section is located in the air extraction cavity and is thermally connected to the mounting plate, and the tube cavity of the cooling pipe is used to allow a cooling medium to flow so that the cooling medium absorbs the heat of the mounting plate.

8. The air extraction assembly according to claim 7, characterized in that: The cooling section is arc-shaped or ring-shaped, and surrounds the through hole.

9. The air extraction assembly according to any one of claims 1 to 8, characterized in that: The air extraction component further includes an adsorption plate, which is located in the air extraction cavity and is detachably connected to the inner wall surface of the air extraction cavity.

10. A coating device, characterized in that: Comprising the air extraction assembly as claimed in any one of claims 1 to 9.

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