Furnace door device and machining equipment

Abstract

The utility model belongs to the technical field of semiconductors, and discloses a furnace door device and processing equipment, the furnace door device comprises a furnace door body and a purging pipeline, the inner side of the furnace door body is provided with a sealing element, the furnace door body is provided with an air exhaust hole, the purging pipeline comprises an air inlet pipe and a purging pipe, and the air inlet pipe penetrates through the furnace door body; the end, extending into the inner side of the furnace door body, of the air inlet pipe is connected with a purging pipe which is used for spraying purging gas towards the sealing piece. One of the purging pipe and the air exhaust hole is located on the radial inner side of the sealing piece, and the other one is located on the radial outer side of the sealing piece. The furnace door device can automatically clean the sealing element, and is high in cleaning efficiency and good in cleaning effect.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a furnace door device and processing equipment. Background Art

[0002] Semiconductor or photovoltaic materials are widely used in electronics, new energy and other industries. Semiconductor and photovoltaic materials usually need to undergo chemical vapor deposition before they can be applied to products. Currently, a common pain point of chemical deposition equipment in the industry is that the ineffective coating on the inner wall of the cavity (the coating deposited on the inner wall of the cavity during the process) is easy to fall off, thereby generating tiny dust particles. Since the cavity of these chemical deposition equipment is in a vacuum environment during the process, if the dust generated by the coating falling off adheres to the sealing ring at the furnace door of the equipment, it will affect the vacuum degree of the cavity, making the process impossible to proceed.

[0003] The traditional way to clean the sealing ring is to use a vacuum cleaner or wipe it with a dust-free cloth. The cleaning efficiency is low, the cleaning effect is limited, and the furnace door needs to be opened for cleaning, which is very inconvenient. Utility Model Content

[0004] The first object of the utility model is to provide a furnace door device, which can realize automatic cleaning of the sealing member, has high cleaning efficiency and good cleaning effect.

[0005] The second purpose of the utility model is to provide a processing device, which can automatically clean the dust attached to the sealing component, ensure the vacuum degree of the cavity of the processing equipment, and thus ensure that the processing equipment can stably perform the processing process.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] The utility model discloses a furnace door device, comprising: a furnace door body, a sealing member is arranged on the inner side of the furnace door body, and an exhaust hole is arranged on the furnace door body; a purge pipeline, the purge pipeline comprises an air inlet pipe and a purge pipe, the air inlet pipe is passed through the furnace door body, and one end of the air inlet pipe extending into the inner side of the furnace door body is connected to the purge pipe, and the purge pipe is used for spraying purge gas toward the sealing member; wherein: one of the purge pipe and the exhaust hole is located on the radial inner side of the seal, and the other is located on the radial outer side of the seal.

[0008] The beneficial effects of the furnace door device of the utility model: in the actual working process, the purge pipe can blow the gas output by the external air pump onto the seal, and blow the dust particles attached to the seal away from the seal; because the furnace door body is also provided with an exhaust hole, the exhaust hole is connected to the external exhaust pump, and the dust particles blown off by the purge gas can be extracted, thereby realizing automatic cleaning of the seal and improving the cleaning efficiency and cleaning effect.

[0009] In some embodiments, the purge pipe includes: a connecting pipe, one end of which is connected to the air inlet pipe; an annular tube, which is extended along the circumference of the seal, and a purge structure is provided on the side of the annular tube facing the seal, and the purge structure is used to spray out purge gas.

[0010] In some specific embodiments, the purge structure includes a plurality of purge holes, and the plurality of purge holes are arranged at intervals along the circumference of the annular tube; or: the purge structure includes a purge groove extending along the circumference of the annular tube.

[0011] In some specific embodiments, the furnace door device further includes a pipe joint, one end of which is connected to the air inlet pipe, and the other end of which is connected to the connecting pipe.

[0012] In some more specific embodiments, the connecting pipe includes a first pipe segment, a second pipe segment, a third pipe segment and a fourth pipe segment connected in sequence; wherein: the first pipe segment is connected to the pipe joint, the first pipe segment and the third pipe segment are arranged in parallel and extend along the axial direction of the furnace door body; the second pipe segment and the fourth pipe segment are arranged at intervals along the axial direction of the furnace door body, and the second pipe segment and the fourth pipe segment are both extended along the radial direction of the furnace door body, and the fourth pipe segment is connected to the annular pipe.

[0013] In some embodiments, the furnace door device further includes a blocking member, which is installed on the inner side of the furnace door body, and the blocking member is extended along the circumference of the sealing member and is located radially outside the sealing member.

[0014] In some specific embodiments, the blocking member includes: a first annular baffle plate, which is spaced apart from the inner side wall of the furnace door body; and a second annular baffle plate, whose two ends along the axial direction of the furnace door body are respectively connected to the first annular baffle plate and the inner side wall of the furnace door body; wherein a collection space is jointly defined between the first annular baffle plate, the second annular baffle plate and the inner side wall of the furnace door body.

[0015] In some specific embodiments, the air extraction hole is provided corresponding to the first annular baffle plate and is located radially inward of the second annular baffle plate.

[0016] In some specific embodiments, the furnace door device further includes a plurality of connecting members, which are arranged at intervals along the circumference of the blocking member and are used to connect the blocking member to the furnace door body.

[0017] The utility model discloses a processing device, comprising the furnace door device and a furnace tube as mentioned above, wherein the furnace door device is installed at the furnace mouth of the furnace tube.

[0018] The beneficial effects of the processing equipment of the utility model are as follows: due to the furnace door device described above, during the actual process, before the furnace door device is closed, a purging and exhaust process is added. Specifically, the gas output by the external air pump is purged onto the seal through the purging pipe to blow the dust particles attached to the seal away from the seal, and the external exhaust pump extracts the dust particles blown off by the purging gas from the exhaust hole. Thus, the current action of manually cleaning dust is reduced, thereby achieving the effect of automatically cleaning dust particles of the processing equipment. After the cleaning is completed, the furnace door device is closed, and the inside of the furnace tube is vacuumed through the vacuum port on the furnace door device. Since the seal has been cleaned, the vacuum sealing performance of the processing equipment is guaranteed, which is conducive to improving the process yield.

[0019] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of a furnace door device according to an embodiment of the utility model;

[0021] Figure 2 It is a schematic structural diagram of the outer side wall of the furnace door device of an embodiment of the utility model;

[0022] Figure 3 It is a schematic structural diagram of the inner side wall of the furnace door device of an embodiment of the utility model;

[0023] Figure 4 is a top view of a furnace door device according to an embodiment of the utility model;

[0024] Figure 5 It is a schematic structural diagram of the furnace door device of the utility model embodiment from another direction;

[0025] Figure 6 It is a simplified structural diagram of the processing equipment of the embodiment of the utility model.

[0026] Reference numerals:

[0027] 100. Furnace door device;

[0028] 110. furnace door body; 111. exhaust hole; 112. vacuum port; 120. sealing member; 131. air inlet pipe; 132. purge pipe; 1321. connecting pipe; 13211. first pipe section; 13212. second pipe section; 13213. third pipe section; 13214. fourth pipe section; 1322. annular pipe; 13221. purge structure; 140. pipe joint; 150. blocking member; 151. first annular baffle plate; 152. second annular baffle plate; 160. sealing flange; 200. furnace tube. DETAILED DESCRIPTION

[0029] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0030] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0032] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0033] refer to Figure 1-Figure 5The specific structure of the furnace door device 100 according to the embodiment of the present utility model is described.

[0034] The utility model discloses a furnace door device 100, referring to Figure 1-Figure 3 as well as Figure 5 As shown, the furnace door device 100 includes a furnace door body 110 and a purge pipeline. A seal 120 is provided on the inner side of the furnace door body 110. A vacuum port 112 and an exhaust hole 111 are provided on the furnace door body 110. The vacuum port 112 is connected to a vacuum pump. A sealing flange 160 is also provided on the outer side of the furnace door body 110. A sealing gasket is provided between the sealing flange 160 and the furnace door body 110. The purge pipeline includes an air inlet pipe 131 and a purge pipe 132. The air inlet pipe 131 is penetrated through the furnace door body 110, and one end of the air inlet pipe 131 extending into the inner side of the furnace door body 110 is connected to the purge pipe 132. The purge pipe 132 is used to spray purge gas toward the seal 120. One of the purge pipe 132 and the exhaust hole 111 is located radially inside the seal 120, and the other is located radially outside the seal 120.

[0035] First of all, it should be noted that the inner side of the furnace door body 110 is the side where the furnace door body 110 cooperates with the furnace mouth of the furnace tube 200. And the radial direction mentioned above is the direction from the center to the periphery of the furnace door body 110. In the present utility model, there are two distribution modes of the purge pipe 132, the exhaust hole 111 and the seal 120. The first mode is that the purge pipe 132, the seal 120 and the exhaust hole 111 are arranged in sequence along the direction from the center to the periphery of the furnace door body 110, that is, the purge pipe 132 is located on the radial inner side of the seal 120, and the exhaust hole 111 is located on the radial outer side of the seal 120; the second mode is that the exhaust hole 111, the seal 120 and the purge pipe 132 are arranged in sequence along the direction from the center to the periphery of the furnace door body 110, that is, the purge pipe 132 is located on the radial outer side of the seal 120, and the exhaust hole 111 is located on the radial inner side of the seal 120.

[0036] It can be understood that, in the actual working process, the purge pipe 132 can blow the gas output by the external air pump onto the seal 120, and blow the dust particles attached to the seal 120 away from the seal 120. Since the furnace door body 110 is also provided with an exhaust hole 111, the exhaust hole 111 is connected to the external exhaust pump, and the dust particles blown off by the purge gas can be extracted, thereby realizing automatic cleaning of the seal 120 and improving the cleaning efficiency and cleaning effect.

[0037] Optionally, the air inlet pipe 131 is welded to the furnace door body 110. Thus, the connection between the air inlet pipe 131 and the furnace door body 110 is convenient, and the connection stability between the two can be ensured, thereby avoiding air leakage caused by the unreliable connection between the air inlet pipe 131 and the furnace door body 110.

[0038] refer to Figure 3 As shown, the purge pipe 132 includes a connecting pipe 1321 and an annular pipe 1322, one end of the connecting pipe 1321 is connected to the air inlet pipe 131, the annular pipe 1322 is extended along the circumference of the seal 120, and a purge structure 13221 is provided on the side of the annular pipe 1322 facing the seal 120, and the purge structure 13221 is used to spray out the purge gas. It can be understood that the seal 120 is usually an annular sealing ring, and the purge pipe 132 is provided with the annular pipe 1322. In the actual working process, the purge gas can be blown out from the purge structure 13221, so that the seal 120 is purged without dead angles, which can improve the purge effect of the seal 120, thereby improving the cleaning effect of the seal 120. The annular tube 1322 is connected to the air inlet pipe 131 through the connecting tube 1321 , and the annular tube 1322 can be attached to the inner wall of the furnace door body 110 , thereby improving the purging effect on the sealing member 120 .

[0039] refer to Figure 5 As shown, the purge structure 13221 includes a plurality of purge holes, and the plurality of purge holes are arranged at intervals along the circumference of the annular tube 1322. It is understandable that the plurality of purge holes are arranged at intervals along the circumference of the annular tube 1322, which can further enhance the purge effect on the seal 120, thereby enhancing the cleaning effect on the seal 120. It should be supplemented that, in the embodiment of the utility model, the purge hole can be a circular hole, a square hole, or a hole of other shapes, and the cross-sectional shape, cross-sectional size and distribution of the purge hole can be adjusted according to actual needs. In an alternative embodiment of the utility model, the purge structure 13221 includes a purge groove extending along the circumference of the annular tube 1322. It is understandable that the use of an annular purge groove instead of a plurality of purge holes simplifies the structure of the purge structure 13221, facilitates the processing of the purge structure 13221, and is conducive to the manufacture of the purge tube 132.

[0040] refer to Figure 4-Figure 5 As shown, the furnace door device 100 also includes a pipe joint 140, one end of which is connected to the air inlet pipe 131, and the other end is connected to the connecting pipe 1321. It can be understood that the connection between the air inlet pipe 131 and the connecting pipe 1321 is achieved through the pipe joint 140. On the one hand, it can ensure the connection stability between the two and avoid air leakage during the purge process. On the other hand, it is convenient to connect the air inlet pipe 131 with the connecting pipe 1321, and different purge pipes 132 can be replaced according to actual purge requirements, thereby improving the purge effect. Of course, it needs to be additionally explained here that in other embodiments of the utility model, the air inlet pipe 131 can be directly welded to the connecting pipe 1321, and is not limited to the connection method of the pipe joint 140 of this embodiment as an adapter.

[0041] Further, refer to Figure 5 As shown, the connecting pipe 1321 includes a first pipe segment 13211, a second pipe segment 13212, a third pipe segment 13213 and a fourth pipe segment 13214 which are connected in sequence. The first pipe segment 13211 is connected to the pipe joint 140. The first pipe segment 13211 and the third pipe segment 13213 are arranged in parallel and extend along the axial direction of the furnace door body 110. The second pipe segment 13212 and the fourth pipe segment 13214 are arranged at intervals along the axial direction of the furnace door body 110, and the second pipe segment 13212 and the fourth pipe segment 13214 are both extended along the radial direction of the furnace door body 110. The fourth pipe segment 13214 is connected to the annular pipe 1322. It can be understood that since the air intake pipe 131 is passed through the furnace door body 110 and the first pipe section 13211 is connected to the pipe joint 140, the connection between the connecting pipe 1321 and the air intake pipe 131 can be facilitated. Since the annular pipe 1322 is attached to the furnace door body 110, the second pipe section 13212, the third pipe section 13213 and the fourth pipe section 13214 are provided as intermediate pipes. This can avoid that an inclined pipe is directly provided after the first pipe section 13211 to connect the connecting pipe 1321 to the annular pipe 1322. A "Z-shaped" pipeline is formed by the second pipe section 13212, the third pipe section 13213 and the fourth pipe section 13214. This can avoid the occurrence of sharp leakage caused by the inclined pipeline and can also play a role in buffering the airflow, ensuring that the airflow can stably flow to the annular pipe 1322, thereby achieving a comprehensive purge of the seal 120.

[0042] Of course, in other embodiments of the present invention, the shape of the connecting pipe 1321 can be selected according to actual needs.

[0043] refer to Figure 4-Figure 5 As shown, the furnace door device 100 further includes a blocking member 150, which is installed on the inner side of the furnace door body 110, and the blocking member 150 is extended along the circumferential direction of the sealing member 120, and is located radially outside the sealing member 120. It can be understood that the blocking member 150 can prevent the dust particles blown away by the purge airflow from flying around, and the blocking member 150 can limit the dust particles within a specified range, so that the dust particles can be sucked away when the exhaust hole 111 is sucked, thereby facilitating the cleaning effect.

[0044] Further, refer to Figure 5As shown, the blocking member 150 includes a first annular baffle 151 and a second annular baffle 152, the first annular baffle 151 is spaced apart from the inner side wall of the furnace door body 110, and the second annular baffle 152 is connected to the first annular baffle 151 and the inner side wall of the furnace door body 110 at both ends along the axial direction of the furnace door body 110. The first annular baffle 151, the second annular baffle 152 and the inner side wall of the furnace door body 110 define a collection space together. It can be understood that by providing the first annular baffle 151 and the second annular baffle 152, a U-shaped collection space is formed between the inner side wall of the furnace door body 110, so that dust particles are confined to the entire U-shaped collection space to the maximum extent, and it is further convenient for the exhaust hole 111 to exhaust dust particles when exhausting, thereby facilitating the improvement of the cleaning effect.

[0045] Optionally, the air extraction hole 111 is provided corresponding to the first annular baffle 151 and is located radially inward of the second annular baffle 152. Thus, it is further convenient for the air extraction hole 111 to extract dust particles when exhausting air, thereby facilitating the cleaning effect. It should be supplemented that, in the embodiment of the utility model, the number, shape, size, arrangement and other parameters of the air extraction hole 111 can be selected according to actual needs, and the above parameters are not limited here.

[0046] Optionally, the furnace door device 100 further includes a plurality of connecting members, which are arranged at intervals along the circumference of the blocking member 150 and are used to connect the blocking member 150 to the furnace door body 110. It is understandable that the connecting member can be a screw, a pin, or a rivet. Connecting the blocking member 150 to the furnace door body 110 through a plurality of connecting members can improve the connection stability between the blocking member 150 and the furnace door body 110, thereby ensuring the installation stability of the blocking member 150.

[0047] refer to Figure 6 The specific structure of the processing equipment according to the embodiment of the utility model is described.

[0048] The utility model discloses a processing equipment, including the furnace door device 100 and the furnace tube 200 mentioned above, and the furnace door device 100 is installed at the furnace mouth of the furnace tube 200. It can be understood that due to the furnace door device 100 mentioned above, in the actual process, before the furnace door device 100 is closed, a purging and gas process is added, specifically, the gas output by the external air pump is purged to the seal 120 through the purging pipe 132, and the dust particles attached to the seal 120 are blown away from the seal 120, and the external vacuum pump extracts the dust particles blown off by the purging gas from the vacuum hole 111. Thereby, the current action of manually cleaning dust is reduced, so as to achieve the effect of automatically cleaning dust particles of the processing equipment. After the cleaning is completed, the furnace door device 100 is closed, and the vacuuming process is performed on the inside of the furnace tube 200 through the vacuuming port 112 on the furnace door device 100. Since the seal 120 has been cleaned, the vacuum sealing performance of the processing equipment is guaranteed, which is conducive to improving the process yield.

[0049] In the description of this specification, the description with reference to the terms "some embodiments", "other embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0050] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A furnace door device, characterized in that: include: A furnace door body, wherein a sealing member is provided on the inner side of the furnace door body, and an exhaust hole is provided on the furnace door body; A purge pipeline, the purge pipeline comprising an air inlet pipe and a purge pipe, the air inlet pipe is passed through the furnace door body, and one end of the air inlet pipe extending into the inner side of the furnace door body is connected to the purge pipe, and the purge pipe is used to spray purge gas toward the sealing member; Wherein, one of the purge pipe and the air extraction hole is located on the radial inner side of the sealing component, and the other is located on the radial outer side of the sealing component.

2. The furnace door device according to claim 1, characterized in that: The purge pipe comprises: A connecting pipe, one end of which is connected to the air inlet pipe; An annular tube is arranged to extend along the circumference of the seal, and a purge structure (13221) is provided on the side of the annular tube facing the seal, and the purge structure (13221) is used to spray out purge gas.

3. The furnace door device according to claim 2, characterized in that: The purge structure (13221) comprises a plurality of purge holes, wherein the plurality of purge holes are arranged at intervals along the circumference of the annular tube; or: The purge structure (13221) includes a purge groove extending along the circumference of the annular tube.

4. The furnace door device according to claim 2, characterized in that: The furnace door device also includes a pipe joint, one end of which is connected to the air inlet pipe, and the other end of which is connected to the connecting pipe.

5. The furnace door device according to claim 4, characterized in that: The connecting pipe comprises a first pipe section, a second pipe section, a third pipe section and a fourth pipe section which are connected in sequence; wherein: The first pipe segment is connected to the pipe joint, the first pipe segment and the third pipe segment are arranged in parallel and extend along the axial direction of the furnace door body; the second pipe segment and the fourth pipe segment are arranged at intervals along the axial direction of the furnace door body, and the second pipe segment and the fourth pipe segment are both extended along the radial direction of the furnace door body, and the fourth pipe segment is connected to the annular pipe.

6. The furnace door device according to any one of claims 1 to 5, characterized in that: The furnace door device further comprises a blocking member, which is installed on the inner side of the furnace door body, and the blocking member is extended along the circumferential direction of the sealing member and is located radially outside the sealing member.

7. The furnace door device according to claim 6, characterized in that: The blocking member comprises: a first annular baffle plate, the first annular baffle plate being spaced apart from the inner side wall of the furnace door body; a second annular baffle, wherein two ends of the second annular baffle along the axial direction of the furnace door body are respectively connected to the first annular baffle and the inner side wall of the furnace door body; Wherein, the first annular baffle, the second annular baffle and the inner side wall of the furnace door body jointly define a collecting space.

8. The furnace door device according to claim 7, characterized in that: The air extraction hole is arranged corresponding to the first annular baffle plate and is located radially inward of the second annular baffle plate.

9. The furnace door device according to claim 6, characterized in that: The furnace door device further comprises a plurality of connecting members, which are arranged at intervals along the circumference of the blocking member and are used to connect the blocking member to the furnace door body.

10. A processing equipment, characterized in that: It comprises a furnace door device and a furnace tube as described in any one of claims 1 to 9, wherein the furnace door device is installed at a furnace opening of the furnace tube.

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