Hot wire tensioning assembly, hot wire fixing mechanism and machining equipment

Abstract

The utility model discloses a hot wire tensioning assembly, a hot wire fixing mechanism and processing equipment, the hot wire tensioning assembly comprises a fixed base, a hot wire clamping block and an elastic piece, the hot wire clamping block is arranged on the fixed base in a sliding mode in the first direction, and the hot wire clamping block is configured to clamp and fix a hot wire; and the elastic piece is connected between the hot wire clamping block and the fixed base, and the elastic piece is configured to counteract the deformation of the hot wire in the first direction. According to the hot wire tensioning assembly and the hot wire fixing mechanism and the processing equipment comprising the hot wire tensioning assembly, the hot wire is convenient to disassemble and assemble, and the production efficiency is high.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating processing, in particular to a hot wire tensioning component, a hot wire fixing mechanism and processing equipment. Background Art

[0002] The principle of hot wire chemical vapor deposition processing equipment is to use the high temperature and catalytic effect of the hot wire to crack the reaction gas on the surface of the hot wire, and the product is deposited on the surface of the substrate to obtain the desired solid film. In order to obtain a good quality solid film, a suitable and stable temperature field is required to crack the reaction gas. However, the hot wire is easy to soften and deform in a high temperature environment, which affects the distribution of the temperature field and thus affects the coating effect.

[0003] In order to solve the above problems, the processing equipment in the related technology uses a spring to offset the deformation of the hot wire. However, the connection method used in the prior art is to tie the hot wire directly to the spring. The above connection method makes it inconvenient to disassemble and assemble the hot wire, which in turn leads to a long time required to replace the hot wire, resulting in reduced production efficiency. Utility Model Content

[0004] One of the purposes of the utility model is to provide a hot wire tensioning assembly, which can solve the problem of long time required for replacing the hot wire due to the inconvenience of disassembling and assembling the hot wire and the spring.

[0005] To achieve this purpose, the utility model discloses a hot wire tensioning assembly for fixing the hot wire, the hot wire tensioning assembly comprising a fixed base, a hot wire clamp block and an elastic member, the hot wire clamp block is slidably arranged on the fixed base along a first direction, the hot wire clamp block is configured to clamp and fix the hot wire; the elastic member is connected between the hot wire clamp block and the fixed base, and the elastic member is configured to offset the deformation of the hot wire along the first direction.

[0006] The hot wire clamp comprises a clamp body and an adjusting member, the clamp body is provided with a clamping space with adjustable size, one end of the hot wire is arranged in the clamping space, and the adjusting member is configured to adjust the size of the clamping space.

[0007] In one embodiment, the clamping space includes a slit opened on the clamping block body, the clamping block body includes a first clamping portion and a second clamping portion arranged on both sides of the slit, the adjusting member includes an adjusting screw, the adjusting screw passes through the first clamping portion and the slit in sequence along a third direction and is connected to the second clamping portion, and the third direction is arranged at an angle to the first direction

[0008] In one embodiment, a plurality of clamping holes of different sizes are arranged at intervals along the second direction in the slit, the clamping holes are configured to clamp the hot wire, and the clamping holes are located on the side of the adjusting screw close to the slit closure; the second direction is arranged at an angle to the first direction and the third direction.

[0009] In one embodiment, the elastic member extends when the hot wire is heated, softened and deformed, and / or the elastic member contracts when the hot wire is cooled and tightened, wherein the extension and contraction of the elastic member are used to offset the deformation of the hot wire along the first direction; the hot wire tensioning assembly also includes a first guide structure and a second guide structure, the first guide structure is connected to the hot wire clamp block, and the second guide structure is arranged on the fixed base, and the first guide structure and the second guide structure cooperate with each other to make the hot wire clamp block slide relative to the fixed base along the first direction.

[0010] In one embodiment, the fixed base includes a first side plate, a second side plate and a bottom plate, the bottom plate is respectively connected to the first side plate and the second side plate to form a receiving cavity, and the hot wire clamp block and the elastic member are arranged in the receiving cavity;

[0011] The first side plate and the second side plate are provided with a first through hole and a second through hole along the second direction, the first through hole and the second through hole extend along the first direction to form a first slideway and a second slideway on the first side plate and the second side plate respectively, and the first slideway and the second slideway form the second guide structure;

[0012] The first guide structure comprises a sliding shaft fixedly connected to the hot wire clamp block, and two ends of the sliding shaft are slidably disposed on the first slideway and the second slideway respectively.

[0013] In one embodiment, the hot wire tensioning assembly further includes an insulating protective structure, wherein the insulating protective structure cover is disposed on the fixed base to form a protective space, and the elastic member and the hot wire clamp block are both placed in the protective space.

[0014] In one embodiment, the fixed base includes an insulating connection portion, the elastic member is connected to the fixed base via the insulating connection portion, and an annular short-circuit prevention groove is provided on the outer periphery of the insulating connection portion.

[0015] The second purpose of the utility model is to provide a hot wire fixing mechanism, which can solve the problem of long hot wire replacement time.

[0016] To achieve this purpose, the utility model also discloses a hot wire fixing mechanism, including two groups of hot wire fixing components, the two groups of hot wire fixing components are respectively used to fix the two ends of the hot wire, and at least one of the two groups of hot wire fixing components adopts the hot wire tensioning component in any of the above embodiments.

[0017] In one embodiment, two bases are further included, and any group of the hot wire fixing components includes a plurality of the hot wire fixing components spaced apart along a second direction on the base, and the spacing between adjacent hot wire fixing components on the base along the second direction is adjustable, and the second direction is perpendicular to the first direction.

[0018] In one embodiment, a plurality of mounting holes are equidistantly arranged on the base along the second direction, a connecting hole is opened on the hot wire fixing assembly, and the hot wire fixing assembly and the base are detachably connected by fasteners passing through the mounting holes and the connecting holes.

[0019] In one embodiment, the hot wire fixing mechanism also includes a support rod and a second locking member, the base is slidably connected to the support rod along a third direction, and the second locking member is configured to lock the base and the support rod, and the third direction is perpendicular to the first direction and the second direction.

[0020] The third purpose of the utility model is to provide a processing equipment that can solve the problem of low production efficiency caused by the inconvenience of disassembling and assembling the hot wire.

[0021] To achieve this purpose, the utility model also discloses a processing equipment, including a reaction chamber and a hot wire, the processing equipment also includes the hot wire fixing mechanism in any of the above embodiments, the hot wire fixing mechanism is located in the reaction chamber, and the two ends of multiple hot wires are respectively clamped on two groups of hot wire fixing components of the hot wire fixing mechanism.

[0022] The beneficial effects of the hot wire clamping assembly, hot wire fixing mechanism and processing equipment in the embodiments of the utility model are as follows: the hot wire can be kept in a tensioned state by the elastic member to provide a stable temperature field; and the hot wire and the elastic member can be quickly disassembled and assembled by the setting of the hot wire clamp block, thereby achieving high production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a schematic diagram of a hot wire tensioning assembly in an embodiment of the utility model;

[0024] Figure 2 It is a schematic diagram of the connection relationship between the hot wire clamp block and the fixed base in the embodiment of the utility model;

[0025] Figure 3 It is a schematic diagram of the structure of the hot wire clamp block, the fixed base and the conductive column in the embodiment of the utility model;

[0026] Figure 4 It is a schematic diagram of the structure of the hot wire clamp block in the embodiment of the utility model;

[0027] Figure 5 yes Figure 4 The enlarged schematic diagram of point A in the middle;

[0028] Figure 6 It is a cross-sectional view of the hot wire clamp block in the embodiment of the utility model;

[0029] Figure 7 It is a structural schematic diagram of a connecting piece in an embodiment of the utility model;

[0030] Figure 8 It is a schematic diagram of the hot wire fixing mechanism in the embodiment of the utility model;

[0031] Fig. 9 It is a structural schematic diagram of the base in the embodiment of the utility model;

[0032] Fig.10 It is a structural schematic diagram of the support rod in the embodiment of the utility model;

[0033] Fig.11 It is a structural schematic diagram of the processing equipment in the embodiment of the utility model.

[0034] In the figure:

[0035] 11. Fixed base; 111. Insulated connecting part; 1111. Anti-short circuit groove; 112. Avoidance hole; 113. Bottom plate; 114. First side plate; 115. Second side plate; 12. Hot wire clamp; 121. Clamp body; 1211. First clamping part; 1212. Second clamping part; 1213. Slit; 1214. Clamping hole; 1215. Through hole; 1216. Threaded hole; 122. Adjusting member; 13. Elastic member; 14. First guide structure; 141. Sliding shaft; 142. Rolling bearing; 15. Second guide structure; 151. First slideway; 152. Second slideway; 16. Protective plate; 17. Protective cover; 18. Conductive column;

[0036] 20. Hot wire fixing mechanism; 21. Hot wire fixing assembly; 22. Base; 221. Mounting hole; 23. Support rod; 231. Limiting groove;

[0037] 30. Reaction chamber;

[0038] 40. Electrode;

[0039] 50. Hot wire. DETAILED DESCRIPTION

[0040] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0041] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0042] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0043] In the description of this embodiment, the terms "upper", "lower", "left", "right", etc., and the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of description and simplified operation, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0044] like Figures 1 to 7 As shown, the utility model provides a hot wire tensioning assembly for fixing the hot wire, the hot wire tensioning assembly comprises a fixing base 11, a hot wire clamping block 12 and an elastic member 13, the hot wire clamping block 12 is arranged along a first direction ( Figure 1-Figure 4 The hot wire clamp 12 is configured to clamp and fix the hot wire. The elastic member 13 is connected between the hot wire clamp 12 and the fixed base 11 to offset the deformation of the hot wire along the first direction. The elastic member 13 includes but is not limited to a high temperature resistant tension spring.

[0045] The hot wire tensioning assembly uses the hot wire clamping block 12 connected to the elastic member 13 to clamp and fix the hot wire, which can realize the quick connection and separation of the hot wire and the elastic member 13, reduce the difficulty of hot wire replacement, help improve production capacity, and compared with the connection method tied to the elastic member, it is not easy to damage the hot wire, and can extend the service life of the hot wire to a certain extent. Among them, there are two situations of changes in the hot wire, the hot wire is heated and softened and deformed, or the hot wire is cooled and tightened. When the hot wire is heated and softened and deformed, the elastic member contracts, and when the hot wire is cooled and tightened, the elastic member stretches. The contraction and extension of the elastic member are to offset the deformation of the hot wire along the first direction; of course, the hot wire can exist in only one situation or the above two situations, for example, the hot wire can only be heated and softened and deformed, and will not be cooled and tightened, or the hot wire can only be cooled and tightened, and cannot be heated and softened and deformed, or the hot wire can be heated and softened and deformed, and can also be cooled and tightened. Furthermore, the softening and deformation of the hot wire upon heating includes the softening and deformation of the hot wire after reaching a certain temperature, or the softening and deformation of the hot wire after being continuously heated at a certain temperature or within a temperature range for a period of time; the tightening of the hot wire upon cooling includes the tightening of the hot wire after reaching a certain temperature, or the tightening of the hot wire after being continuously cooled at a certain temperature or within a temperature range for a period of time.

[0046] In one embodiment, the hot wire clamp 12 includes a clamp body 121 and an adjusting member 122. The clamp body 121 is provided with a clamping space of adjustable size, and one end of the hot wire can be placed in the clamping space. The adjusting member 122 is used to adjust the size of the clamping space to cooperate with the clamp body 121 to clamp the hot wire.

[0047] For example, Figure 4-Figure 6As shown, the clamping body is configured to be an integrally formed U-shape, including a first clamping portion 1211 and a second clamping portion 1212 connected to one side edge along the second direction, a one-side closed slit 1213 is formed between the first clamping portion 1211 and the second clamping portion 1212, and the slit 1213 passes through the opposite ends of the clamping body along the first direction to clamp the hot wire, and the adjusting member 122 includes an adjusting screw, which passes through the slit 1213 from one of the first clamping portion 1211 and the second clamping portion 1212 along the third direction and is threadedly connected to the first clamping portion 1211 and the other of the clamping portions, and correspondingly, the first clamping portion 1211 A through hole 1215 is formed through one of the first clamping part 1211 and the second clamping part 1212, a threaded hole 1216 is formed on the other of the first clamping part 1211 and the second clamping part 1212, or an adjusting screw passes through the first clamping part 1211 and the second clamping part 1212 and is sleeved with an adjusting nut, and the adjusting nut abuts against the second clamping part 1212. Correspondingly, a through hole 1215 is formed through both the first clamping part 1211 and the second clamping part 1212, and the width of the gap 1213, i.e., the size of the clamping space, can be adjusted by screwing the adjusting screw or the adjusting nut. The third direction is set at an angle to the first direction and the second direction. In one embodiment, the second direction is Figure 1-Figure 4 The middle Y direction and its opposite direction, the third direction is Figure 1-Figure 4 The Z direction and its opposite direction, that is, the first direction, the second direction and the third direction are perpendicular to each other.

[0048] Furthermore, the slit 1213 includes a plurality of clamping holes 1214 of different sizes arranged at intervals along the second direction. Different clamping holes 1214 can be adapted to hot wires of different sizes, which is more versatile. Moreover, the hot wire is clamped in the clamping hole 1214, which has higher clamping stability than clamping in other positions of the slit 1213. It should be emphasized here that the clamping holes 1214 are all located on the side of the adjusting screw close to the closure of the slit 1213.

[0049] For another example, a socket is extended along the first direction on the clamping body, and a threaded adjustment hole perpendicular to the socket and connected to the socket is also opened on the clamping body. The adjusting member 122 includes an adjusting screw, which can pass through the threaded adjustment hole and be inserted into the socket. The hot wire in the socket can be tightened or loosened by screwing the adjusting screw, thereby clamping and fixing the hot wire.

[0050] In other embodiments, the hot wire clamp block 12 may also directly adopt a spring clamp, which belongs to the prior art and will not be described in detail here.

[0051] In order to make the hot wire clamp 12 move stably relative to the fixed base 11, the hot wire tensioning assembly also includes a first guide structure 14 and a second guide structure 15. The first guide structure 14 is arranged on the hot wire clamp 12, and the second guide structure 15 is arranged on the fixed base 11. The first guide structure 14 and the second guide structure 15 cooperate with each other to make the hot wire clamp 12 slide along the first direction relative to the fixed base 11.

[0052] refer to Figure 2 and Figure 3 As shown, in one embodiment, the fixed base 11 is configured as a U-shaped groove structure with an open end facing upward, including a first side plate 114, a second side plate 115 and a bottom plate 113, the bottom plate 113 is respectively connected to the first side plate 114 and the second side plate 115 to form an accommodating cavity, the hot wire clamping block 12 and the elastic member 13 are arranged in the accommodating cavity, the first side plate 114 and the second side plate 115 are provided with a first through hole and a second through hole along the second direction, the first through hole and the second through hole extend along the first direction to form a first slide 151 and a second slide 152 in the first side plate 114 and the second side plate 115 respectively, the first slide 151 and the second slide 152 form a second guide structure 15; the first guide structure 14 includes a sliding shaft 141 fixedly connected to the hot wire clamping block 12, and the two ends of the sliding shaft 141 are respectively slidably arranged in the first slide 151 and the second slide 152.

[0053] Furthermore, in order to reduce the friction between the sliding shaft 141 and the fixed base 11 , the first guide structure 14 further includes a rolling bearing 142 . The two rolling bearings 142 are rotatably disposed at both ends of the sliding shaft 141 and rollingly cooperate with the first slideway 151 and the second slideway 152 .

[0054] Specifically, the fixed base 11 also includes an insulating connecting part 111. At least the insulating connecting part 111 in the fixed base 11 is made of an insulating material. The insulating material can be made of ceramic, cloud ink, glass, etc. In one embodiment, the insulating connecting part 111 is made of ceramic. The ceramic not only has insulating properties, but also is resistant to high temperatures and has a long service life. The elastic member 13 is connected to the fixed base 11 through the insulating connecting part 111. Taking the elastic member 13 including a tension spring as an example, a hook hole is provided on the insulating connecting part 111 for one end of the tension spring to pass through. In order to prevent short circuits caused by film deposition, the outer side surface of the insulating connecting part 111 is set to an uneven curved surface, and the relatively convex part thereon can play a certain protective role on the relatively concave part, effectively preventing the film from being uniformly deposited.

[0055] refer to Figure 2 and Figure 7As shown, in one embodiment, an annular anti-short-circuit groove 1111 is provided on the outer periphery of the insulating connection part 111 to form an uneven curved surface on the outer side surface of the insulating connection part 111. More specifically, a plurality of anti-short-circuit grooves 1111 are provided on the outer periphery of the insulating connection part 111 at intervals along the second direction. For example, the entire insulating connection part 111 can be set as a pagoda-shaped structure.

[0056] In one embodiment, the hot wire tensioning assembly also includes an insulating protective structure, and the insulating protective structure cover is arranged on the fixed base 11 to enclose a protective space. The elastic member 13 and the hot wire clamp block 12 are both placed in the protective space to further prevent the position where the fixed base 11 and the elastic member 13 are connected, that is, the insulating connection part 111, from causing a short circuit due to coating deposition.

[0057] Based on the setting of the first slideway and the second slideway, the insulating protection structure includes a protection plate 16 and a protection cover 17, wherein two protection plates 16 are provided, respectively fixed to the outer sides of the two side walls of the base 22 along the second direction, and the protection plates 16 can simultaneously block the first slideway and the second slideway to prevent the rolling bearing 142 from detaching from the first slideway and the second slideway. The protection cover 17 is set as a U-shaped groove structure with an open bottom, and its two side walls along the first direction are respectively fixedly connected to the two protection plates 16.

[0058] In other embodiments, the first guide structure 14 includes a sliding hole penetrating along the first direction on the hot wire clamp block 12, and the second guide structure 15 includes a sliding rod fixed on the base 22 along the first direction, and the sliding rod is penetrated in the sliding hole and slidably connected to the hot wire clamp block 12.

[0059] In one embodiment, in order to facilitate the connection of adjacent hot wires in series, the hot wire tensioning assembly further includes a conductive column 18, and the hot wires clamped on adjacent hot wire tensioning assemblies are connected in series via wires connected to the conductive column 18. Figure 3 As shown, the conductive column 18 is fixedly connected to the bottom of the hot wire clamp block 12 and extends along the third direction to the bottom of the fixed base 11. The fixed base 11 is provided with a strip-shaped avoidance hole 112 for avoiding the conductive column. It can be understood that in order to achieve electrical connection, the hot wire clamp block 12 is made of conductive materials, such as various high-temperature resistant metal materials such as molybdenum or various docks.

[0060] refer to Figure 8-Figure 10 As shown, in the embodiment of the utility model, a hot wire fixing mechanism 20 is also proposed, including two groups of hot wire fixing components 21, the two groups of hot wire fixing components 21 are respectively used to fix the two ends of the hot wire, and at least one of the two groups of hot wire fixing components 21 adopts the hot wire tensioning component of any of the above embodiments to keep the hot wire in a taut state.

[0061] In order to make the spacing between the hot wires adjustable so as to flexibly control the temperature field, thereby facilitating the verification of process parameters and further improving production efficiency and production quality, the hot wire fixing mechanism 20 also includes a base 22, and two bases 22 are also provided. Any group of hot wire fixing components 21 includes a plurality of hot wire fixing components 21 arranged on the base 22 at intervals along the second direction, and the spacing between adjacent hot wire fixing components 21 on the base 22 along the second direction is adjustable.

[0062] In one embodiment, a plurality of rows of mounting holes 221 are equidistantly arranged along the second direction on the base 22, and a connecting hole is provided on the hot wire fixing assembly 21. The hot wire fixing assembly 21 and the base 22 are detachably connected by fasteners penetrating the mounting holes 221 and the connecting holes. By selecting different mounting holes 221 to fix the hot wire fixing assembly 21, the spacing between the hot wires fixed on the hot wire fixing assembly 21 can be adjusted. Since the mounting holes 221 are equidistantly arranged, when adjusting the spacing of the hot wire fixing assembly 21, it is only necessary to ensure that the number of mounting holes 221 between adjacent hot wire fixing assemblies 21 is consistent, that is, the distance between any adjacent hot wires can be ensured to be the same, which reduces the difficulty of adjusting the hot wire equidistant.

[0063] In one embodiment, the base 22 is a plate-like structure, and the fasteners are bolts used in conjunction with nuts. The bolts pass through the connecting holes and the mounting holes 221 to achieve fixed connection between the base 22 and the hot wire fixing assembly 21 .

[0064] In other embodiments, the hot wire fixing assembly 21 is slidably disposed on the base 22 to adjust the spacing between the hot wire fixing assemblies 21. At this time, in order to fix the hot wire fixing assembly 21 relative to the base 22 after the spacing is adjusted, the hot wire fixing mechanism 20 also includes a first locking member, which can lock the hot wire fixing assembly 21 and the base 22 to limit the relative movement of the hot wire fixing assembly 21 and the base 22. For example, the first locking member is a locking screw, which can pass through the hot wire fixing assembly 21 and abut or plug with the base 22, thereby limiting the relative movement of the hot wire fixing assembly 21 and the base 22. When the hot wire fixing assembly 21 needs to be adjusted, the locking screw can be screwed to separate the locking screw from the base 22.

[0065] Similarly, the hot wire fixing mechanism 20 further includes a support rod 23 extending along a third direction, and the base 22 is arranged on the support rod 23 in an adjustable manner along the third direction. By adjusting the height of the base 22 on the support rod 23, the distance between the hot wire clamped and fixed on the hot wire fixing assembly 21 and the substrate can be adjusted.

[0066] Specifically, through holes for the support rods 23 to pass through are opened at both ends of the base 22 along the second direction, and the two support rods 23 are respectively inserted into the two through holes and slidably connected to the base 22. In order to fix the base 22 relative to the support rods 23 after the spacing is adjusted, the hot wire fixing mechanism 20 also includes a second locking member, which can lock the base 22 and the support rods 23 to limit the base 22 from sliding relative to the support rods 23.

[0067] More specifically, the support rod 23 is provided with a plurality of limit grooves 231 at intervals along the third direction, the base 22 is provided with a slot communicating with the through hole, and the base 22 and the support rod 23 are locked by a second locking member penetrating the limit groove 231 and the slot. More specifically, in order to reduce the difficulty of inserting the second locking member into the limit groove 231, the limit groove 231 is provided as an annular limit groove. At the same time, in order to more conveniently adjust the height of the base 22 relative to the support rod 23, a scale is provided on the upper surface of the support rod 23, which can accurately display the height of the base 22.

[0068] The hot wire fixing mechanism 20 adopts the hot wire tensioning assembly in any of the above embodiments, so it can keep the hot wire in a taut state and the hot wire can be easily assembled and disassembled.

[0069] refer to Fig.11 As shown, in an embodiment of the utility model, a processing device is also proposed, including a reaction chamber 30, a hot wire 50, an electrode 40 and a hot wire fixing mechanism 20 in any of the above embodiments, the hot wire fixing mechanism 20 is fixed in the reaction chamber 30, the two ends of the plurality of hot wires 50 are respectively clamped on two groups of hot wire fixing components 21 of the hot wire fixing mechanism 20, and adjacent hot wires 50 are connected in series to form a hot wire group, the electrode 40 includes a positive electrode and a negative electrode, and the positive electrode and the negative electrode are respectively connected to the two ends of the hot wire group through two wires to form a loop.

[0070] It can be understood that, since the processing equipment includes the hot wire fixing mechanism 20 in any of the above embodiments, it has all the beneficial effects of the hot wire fixing mechanism 20.

[0071] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A hot wire tensioning assembly, used to fix the hot wire, characterized in that: The hot wire tensioning assembly comprises: Fixed base; A hot wire clamp block, the hot wire clamp block is slidably disposed on the fixed base along a first direction, and the hot wire clamp block is configured to clamp and fix the hot wire; an elastic member connected between the hot wire clamping block and the fixed base, wherein the elastic member is configured to offset the deformation of the hot wire along the first direction; The hot wire clamp comprises a clamp body and an adjusting member, the clamp body is provided with a clamping space with adjustable size, one end of the hot wire is arranged in the clamping space, and the adjusting member is configured to adjust the size of the clamping space.

2. The hot wire tensioning assembly according to claim 1, characterized in that: The clamping space includes a slit opened on the clamping block body, the clamping block body includes a first clamping portion and a second clamping portion arranged on both sides of the slit, the adjusting member includes an adjusting screw, the adjusting screw passes through the first clamping portion and the slit in sequence along a third direction and is connected to the second clamping portion, and the third direction is arranged at an angle to the first direction.

3. The hot wire tensioning assembly according to claim 2, characterized in that: A plurality of clamping holes of different sizes are arranged in the slit along the second direction at intervals, the clamping holes are configured to clamp the hot wire, and the clamping holes are located on a side of the adjusting screw close to the slit; The second direction is arranged at an angle with the first direction and the third direction.

4. The hot wire tensioning assembly according to any one of claims 1 to 3, characterized in that: When the hot wire is heated and softened and deformed, the elastic member is extended, and / or when the hot wire is cooled and tightened, the elastic member is contracted, wherein the extension and contraction of the elastic member are used to offset the deformation of the hot wire along the first direction; The hot wire tensioning assembly also includes a first guide structure and a second guide structure, the first guide structure is connected to the hot wire clamp block, and the second guide structure is arranged on the fixed base, and the first guide structure and the second guide structure cooperate with each other to enable the hot wire clamp block to slide along the first direction relative to the fixed base.

5. The hot wire tensioning assembly according to claim 4, characterized in that: The fixed base comprises a first side plate, a second side plate and a bottom plate, the bottom plate is respectively connected with the first side plate and the second side plate to form a receiving cavity, the hot wire clamp block and the elastic member are arranged in the receiving cavity; The first side plate and the second side plate are provided with a first through hole and a second through hole along the second direction, the first through hole and the second through hole extend along the first direction to form a first slideway and a second slideway on the first side plate and the second side plate respectively, and the first slideway and the second slideway form the second guide structure; The first guide structure includes a sliding shaft fixedly connected to the hot wire clamp block, one end of the sliding shaft is slidably disposed on the first slideway, and the other end of the sliding shaft is slidably disposed on the second slideway, and the second direction is perpendicular to the first direction.

6. The hot wire tensioning assembly according to any one of claims 1 to 3, characterized in that: The hot wire tensioning assembly also includes an insulating protective structure, and the insulating protective structure cover is arranged on the fixed base to form a protective space, and the elastic member and the hot wire clamp block are both placed in the protective space.

7. The hot wire tensioning assembly according to any one of claims 1 to 3, characterized in that: The fixed base comprises an insulating connection portion, the elastic member is connected to the fixed base via the insulating connection portion, and an annular short-circuit prevention groove is arranged on the outer periphery of the insulating connection portion.

8. A hot wire fixing mechanism, comprising two sets of hot wire fixing components, the two sets of hot wire fixing components are used to fix the two ends of the hot wire respectively, characterized in that: At least one of the two groups of hot wire fixing components adopts the hot wire tensioning component as described in any one of claims 1-7.

9. The hot wire fixing mechanism according to claim 8, characterized in that: The hot wire fixing mechanism also includes two bases, and any group of the hot wire fixing components includes a plurality of the hot wire fixing components spaced apart on the base along a second direction, and the spacing between adjacent hot wire fixing components on the base along the second direction is adjustable, and the second direction is perpendicular to the first direction.

10. The hot wire fixing mechanism according to claim 9, characterized in that: The base is provided with a plurality of mounting holes equidistantly along the second direction, the hot wire fixing assembly is provided with a connecting hole, and the hot wire fixing assembly and the base are detachably connected by fasteners penetrating the mounting holes and the connecting holes.

11. The hot wire fixing mechanism according to claim 9 or 10, characterized in that: The hot wire fixing mechanism also includes a support rod and a second locking member. The base is slidably connected to the support rod along a third direction. The second locking member is configured to lock the base and the support rod. The third direction is perpendicular to the first direction and the second direction.

12. A processing device comprising a reaction chamber and a hot wire, characterized in that: The processing equipment also includes a hot wire fixing mechanism as described in any one of claims 8 to 11, wherein the hot wire fixing mechanism is located in the reaction chamber, and both ends of the plurality of hot wires are respectively clamped on two groups of the hot wire fixing components of the hot wire fixing mechanism.

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