Chip workshop laminar flow clean room

Abstract

The utility model discloses a chip workshop laminar flow clean room, and relates to the technical field of clean rooms. The clean room mainly comprises a clean room body, two static pressure difference balance mechanisms and a turbulent flow mechanism, an air inlet, an air outlet and an air return opening are formed in the clean room body, draft fans are arranged in the air inlet and the air return opening, and the two static pressure difference balance mechanisms are arranged in the air inlet and the air return opening respectively. The turbulent flow mechanism is arranged in the clean room body, and a plurality of air pressure sensors are arranged in the clean room body. Through the arrangement of the static pressure difference balance mechanism, the static pressure difference between the air inlet and the air return port of the clean room is accurately adjusted, the stability and the reliability of the environment in the clean room are ensured, the quality and the efficiency of chip production are improved, the airflow mode in the clean room is improved through the addition of the turbulent flow mechanism, and the production efficiency is improved. Local vortexes and dead zones are reduced, so that air flow is more uniform.

Description

Technical Field

[0001] The utility model relates to the technical field of clean rooms, in particular to a laminar flow clean room in a chip workshop. Background Art

[0002] Laminar cleanrooms, also known as unidirectional cleanrooms, use high-efficiency filters and specific air supply methods to allow air to flow in a single direction, thereby effectively removing and filtering particles in the air. In the field of semiconductor manufacturing, laminar cleanrooms in chip workshops are key facilities to ensure the quality and reliability of integrated circuit (IC) production. With the increasing miniaturization and integration of electronic devices, the cleanliness requirements in the chip manufacturing process are also getting higher and higher.

[0003] Static pressure difference refers to the pressure difference between the clean room and the external environment or different clean areas. Maintaining an appropriate static pressure difference can prevent the penetration of pollutants and ensure that the environment of the clean room is not polluted by the outside world. In addition, the static pressure difference also helps to control air flow and avoid cross contamination between different areas. This application document provides a chip workshop laminar flow clean room that can accurately control the static pressure difference. Summary of the invention

[0004] The purpose of the utility model is to solve the problems raised in the above background technology, and the utility model provides a laminar flow clean room for a chip workshop.

[0005] In order to achieve the above-mentioned purpose, the utility model specifically adopts the following technical solutions:

[0006] A laminar flow clean room in a chip workshop comprises a clean room body, a static pressure difference balancing mechanism and a spoiler mechanism, wherein the clean room body is provided with an air inlet, an air outlet and a return air outlet, the air inlet, the air outlet and the return air outlet are all provided with filter screens, exhaust fans are arranged inside the air inlet and the return air outlet, the static pressure difference balancing mechanism is two in number and is respectively arranged inside the air inlet and the return air outlet, the spoiler mechanism is arranged inside the clean room body, and a plurality of air pressure sensors are arranged inside the clean room body, and the heights of the plurality of air pressure sensors are different.

[0007] Preferably, ventilation ducts are installed on the air inlet and the return air outlet, the exhaust fan and the static pressure difference balancing mechanism are arranged inside the ventilation duct, the static pressure difference balancing mechanism includes a ventilation plate, an adjustment plate and an adjustment member, the ventilation plate is fixed inside the ventilation duct, a plurality of ventilation holes distributed in an array are opened through the ventilation plate, the adjustment plate is movably arranged inside the ventilation duct and fits with the ventilation plate, a plurality of connecting ports are opened through the adjustment plate, a plurality of the connecting ports correspond one-to-one to a plurality of the ventilation holes, and the adjustment member is used to control the adjustment plate to slide along one side of the ventilation plate.

[0008] Preferably, the adjusting member comprises a motor 1 mounted on the ventilation duct, a threaded rod is fixed to the output end of the motor 1, and a control plate threadedly sleeved on the threaded rod is fixed to the adjusting plate.

[0009] Preferably, the spoiler mechanism includes a mounting frame fixed on the inner wall of the clean room body, a rotating rod is rotatably mounted on the mounting frame, a plurality of spoiler blades distributed in an array are fixed on the rotating rod, and a motor 2 is mounted on the mounting frame, the output end of which is fixedly connected to one end of the rotating rod.

[0010] Preferably, a solar panel is arranged on the top of the clean room body, a rechargeable battery is arranged inside the clean room body, and the solar panel is electrically connected to the battery through an inverter.

[0011] Preferably, the filter is a HEPA filter. Beneficial Effects

[0012] The utility model realizes the precise adjustment of the static pressure difference between the air inlet and the air return outlet of the clean room by setting a static pressure difference balancing mechanism, thereby ensuring the stability and reliability of the environment inside the clean room, thereby improving the quality and efficiency of chip production. The addition of the spoiler mechanism improves the airflow pattern in the clean room, reduces local eddies and dead zones, makes the air flow more uniform, and further improves the air purification effect and the overall performance of the clean room. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0014] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0015] Figure 2 For this utility model Figure 1 A three-dimensional cross-sectional view of

[0016] Figure 3 For this utility model Figure 2 A magnified view of the structure in center A;

[0017] Figure 4 It is a three-dimensional structural schematic diagram of the static pressure difference balancing mechanism in the utility model;

[0018] Figure 5 It is a three-dimensional structural schematic diagram of the spoiler mechanism in the utility model.

[0019] Figure 1-Figure 5 middle:

[0020] 1. Clean room body; 2. Static pressure difference balancing mechanism; 3. Turbine mechanism; 11. Air inlet; 12. Air outlet; 13. Return air outlet; 14. Filter; 15. Exhaust fan; 16. Air pressure sensor; 17. Ventilation duct; 18. Solar panel; 19. Battery; 21. Ventilation plate; 22. Adjustment plate; 23. Adjustment member; 24. Ventilation port; 25. Connecting port; 31. Mounting frame; 32. Rotating rod; 33. Turbine blade; 34. Motor 2; 221. Control panel; 231. Motor 1; 232. Threaded rod. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solution and advantages of the embodiments of the present utility model clearer, the technical solution in the embodiments of the present utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the present utility model.

[0022] The present application provides a laminar flow clean room for a chip workshop, which is mainly used to solve the problem that the static pressure difference control of the current laminar flow clean room is not accurate enough, and provides the following technical solutions. Figure 1-Figure 5 Make a detailed description:

[0023] A chip workshop laminar flow clean room mainly includes a clean room body 1, a static pressure difference balance mechanism 2 and a spoiler mechanism 3. The clean room body 1 is constructed with an air inlet 11, an air outlet 12 and a return air outlet 13. The air inlet 11, the air outlet 12 and the return air outlet 13 are all equipped with a filter 14. The filter 14 is a HEPA filter. The HEPA filter is used to ensure the air purification effect and reduce the risk of pollution in the chip production process. The air inlet 11 and the return air outlet 13 are both provided with an exhaust fan 15. The use of the exhaust fan 15 ensures the stability of air flow, which is conducive to maintaining a clean environment in the clean room. The number of the static pressure difference balance mechanism 2 is two and they are respectively arranged at the inlet and outlet. The interior of the air inlet 11 and the return air inlet 13 can quickly adjust the static pressure difference according to the actual needs in the clean room body 1, thereby improving the response speed and adaptability of the system. The spoiler mechanism 3 is arranged inside the clean room body 1. Several air pressure sensors 16 are arranged inside the clean room body 1. The air pressure sensor 16 provides real-time data and provides accurate feedback for the adjustment of the static pressure difference balance mechanism 2. The heights of the several air pressure sensors 16 are different. By monitoring the air pressure at different heights, the airflow conditions in the clean room can be more comprehensively understood, which is helpful to optimize the air flow design. The setting of the spoiler mechanism 3 helps to eliminate the airflow dead zone in the clean room body 1 and ensure the uniformity of the air flow.

[0024] For details, please refer to Figure 2 , Figure 3 and Figure 4 , ventilation ducts 17 are installed on the air inlet 11 and the return air outlet 13, the exhaust fan 15 and the static pressure difference balancing mechanism 2 are both arranged inside the ventilation duct 17, and the static pressure difference balancing mechanism 2 includes a ventilation plate 21, an adjustment plate 22 and an adjustment member 23, the ventilation plate 21 is fixed inside the ventilation duct 17, and a plurality of ventilation holes 24 distributed in an array are opened on the ventilation plate 21, the adjustment plate 22 is movably arranged inside the ventilation duct 17 and fits with the ventilation plate 21, and a plurality of connecting ports 25 are opened on the adjustment plate 22, and the plurality of connecting ports 25 correspond to the plurality of ventilation holes 24 one by one, and the adjustment member 23 is used to control the adjustment plate 22 to slide along one side of the ventilation plate 21, and the adjustment plate 22 is controlled to move by the adjustment member 23, so as to change the area of ​​the connection port 25 overlapping with the corresponding ventilation hole 24, so as to change the wind speed of the air inlet 11 and the return air outlet 13, so as to realize the precise adjustment of the static pressure difference, and reduce the manual intervention through the automatic adjustment mechanism, and improve the convenience and accuracy of the operation;

[0025] For further information, see Figure 4The adjusting member 23 includes a motor 231 installed on the ventilation duct 17, a threaded rod 232 is fixed on the output end of the motor 231, and a control plate 221 threadedly sleeved on the threaded rod 232 is fixed on the adjusting plate 22. The motor 231 drives the threaded rod 232 to rotate, so that the control plate 221 can move along the threaded rod 232, thereby realizing the movement of the adjusting plate 22.

[0026] In this example, see Figure 2 and Figure 5 The spoiler mechanism 3 includes a mounting frame 31 fixed on the inner wall of the clean room body 1, a rotating rod 32 is rotatably mounted on the mounting frame 31, a plurality of spoiler blades 33 distributed in an array are fixed on the rotating rod 32, and a second motor 34 whose output end is fixedly connected to one end of the rotating rod 32 is mounted on the mounting frame 31. The second motor 34 drives the rotating rod 32 to rotate, thereby rotating the spoiler blades 33, disturbing the air inside the clean room body 1, reducing the generation of local eddy currents, and further improving the cleaning efficiency and air quality.

[0027] For further information, see Figure 1 and Figure 2 A solar panel 18 is arranged on the top of the clean room body 1, and a rechargeable battery 19 is arranged inside the clean room body 1. The solar panel 18 is electrically connected to the battery 19 through an inverter. The use of solar energy as a renewable energy source reduces the dependence on traditional energy and reduces energy costs. The use of the battery 19 ensures that the clean room body 1 can still maintain normal operation when the external power supply is unstable or interrupted. By using solar energy as a clean energy source, the impact of the clean room on the environment is reduced, and the sustainability and environmental protection of the system are improved.

[0028] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A laminar clean room for a chip workshop, characterized in that: The invention comprises a clean room body (1), a static pressure difference balancing mechanism (2) and a spoiler mechanism (3); the clean room body (1) is provided with an air inlet (11), an air outlet (12) and a return air outlet (13); the air inlet (11), the air outlet (12) and the return air outlet (13) are all provided with filter screens (14); exhaust fans (15) are provided inside the air inlet (11) and the return air outlet (13); the static pressure difference balancing mechanism (2) is two in number and is respectively provided inside the air inlet (11) and the return air outlet (13); the spoiler mechanism (3) is provided inside the clean room body (1); a plurality of air pressure sensors (16) are provided inside the clean room body (1); and the heights of the plurality of air pressure sensors (16) are different.

2. A chip workshop laminar flow clean room according to claim 1, characterized in that: The air inlet (11) and the air return outlet (13) are both provided with a ventilation duct (17); the exhaust fan (15) and the static pressure difference balancing mechanism (2) are both arranged inside the ventilation duct (17); the static pressure difference balancing mechanism (2) comprises a ventilation plate (21), an adjustment plate (22) and an adjustment member (23); the ventilation plate (21) is fixed inside the ventilation duct (17); a plurality of ventilation openings (24) distributed in an array are formed through the ventilation plate (21); the adjustment plate (22) is movably arranged inside the ventilation duct (17) and is fitted with the ventilation plate (21); a plurality of connecting openings (25) are formed through the adjustment plate (22); the plurality of connecting openings (25) correspond to the plurality of ventilation openings (24) in a one-to-one manner; and the adjustment member (23) is used to control the adjustment plate (22) to slide along one side of the ventilation plate (21).

3. A chip workshop laminar flow clean room according to claim 2, characterized in that: The regulating member (23) comprises a motor 1 (231) mounted on the ventilation duct (17), a threaded rod (232) being fixed to the output end of the motor 1 (231), and a control plate (221) being threadedly sleeved on the threaded rod (232) being fixed to the regulating plate (22).

4. A chip workshop laminar flow clean room according to claim 1, characterized in that: The spoiler mechanism (3) comprises a mounting frame (31) fixed on the inner wall of the clean room body (1), a rotating rod (32) being rotatably mounted on the mounting frame (31), a plurality of spoiler blades (33) distributed in an array being fixed on the rotating rod (32), and a second motor (34) having an output end fixedly connected to one end of the rotating rod (32) being mounted on the mounting frame (31).

5. The laminar flow clean room for a chip workshop according to claim 1, characterized in that: A solar panel (18) is arranged on the top of the clean room body (1), a rechargeable and dischargeable storage battery (19) is arranged inside the clean room body (1), and the solar panel (18) is electrically connected to the storage battery (19) via an inverter.

6. A chip workshop laminar flow clean room according to claim 1, characterized in that: The filter (14) is a HEPA filter.

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