Detection gas circuit, gas supply system and reaction furnace system

Abstract

The utility model discloses a detection gas circuit, a gas supply system and a reaction furnace system. The detection gas circuit comprises at least one first detection pipe and at least one second detection pipe, the first detection pipe is provided with a first pipe orifice, and the second detection pipe is provided with a second pipe orifice; the first end of the first detection tube and the first end of the second detection tube are oppositely arranged, the first tube opening and the second tube opening are located at different positions in the reaction cavity, and the second end of the first detection tube and the second end of the second detection tube are connected with a gas analyzer respectively, so that the gas content in the reaction cavity is reflected more accurately. The gas supply system comprises a gas supply pipeline and the detection gas circuit; the gas supply pipeline and the detection gas circuit are connected with the reaction furnace; the reaction furnace system comprises the reaction furnace and the gas supply system, the gas supply system is connected with the reaction furnace, the content of gas in the reaction furnace can be accurately reflected through the detection gas path of the gas supply system, and the content of the gas supplied to the reaction furnace can be accurately regulated and controlled through the gas supply pipeline of the gas supply system.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a detection gas circuit, a gas supply system and a reaction furnace system. Background Art

[0002] In the field of semiconductor processing, reactors are often used to perform processes such as coating, sintering, and oxidation on semiconductors. During the reaction, the gas that needs to react needs to pass into the reactor. The gas content in the reactor will affect the progress and results of the coating, sintering, oxidation, and other processes.

[0003] In the prior art, the gas content entering the reactor is usually detected at the inlet of the reactor, but the above-mentioned detection gas path cannot relatively accurately reflect the gas content in the reactor, resulting in poor detection effect, thereby affecting the regulation of the gas content and further affecting the quality of the reaction. Utility Model Content

[0004] One of the purposes of the utility model is to provide a detection gas path, which can more accurately reflect the gas content in the reaction furnace.

[0005] To achieve this purpose, the utility model discloses a detection gas circuit for connecting a reaction chamber of a reaction furnace and a gas analyzer, the detection gas circuit comprising at least one first detection tube and at least one second detection tube; the first detection tube has a first pipe opening, the second detection tube has a second pipe opening, the first end of the first detection tube and the first end of the second detection tube are arranged opposite to each other, so that the first end of the first detection tube and the first end of the second detection tube can be respectively inserted into the reaction chamber from two opposite ends of the reaction chamber, the first pipe opening and the second pipe opening can be located at different positions in the reaction chamber; the second end of the first detection tube and the second end of the second detection tube are respectively connected to the gas analyzer.

[0006] The beneficial effect of the detection gas circuit of the utility model is that the first detection tube and the second detection tube are respectively inserted from the opposite ends of the reaction chamber, so that the first tube opening and the second tube opening are respectively placed at different positions in the reaction chamber, and the gas content at different positions in the reaction chamber can be detected, which more accurately reflects the gas content in the reaction chamber and makes the detection result more accurate.

[0007] In some embodiments, at least two first detection tubes are provided;

[0008] The lengths of any two first detection tubes inserted into the reaction chamber are not equal; the first tube opening is located at the first end of the first detection tube; or, the lengths of the first detection tubes inserted into the reaction chamber are equal, the first tube opening is located between the first end of the first detection tube and the cavity wall of the reaction chamber through which the first detection tube passes, and the positions of any two first tube openings are different.

[0009] In some embodiments, at least two second detection tubes are provided;

[0010] The lengths of any two second detection tubes inserted into the reaction chamber are not equal; the second tube opening is located at the first end of the second detection tube; or, the lengths of the second detection tubes inserted into the reaction chamber are equal; the second tube opening is located between the first end of the second detection tube and the cavity wall of the reaction chamber through which the second tube opening is passed, and the positions of any two second tube openings are different.

[0011] In some embodiments, the position of the first tube opening in the reaction chamber and the position of the second tube opening in the reaction chamber divide the reaction chamber equally in the insertion direction of the first detection tube.

[0012] In some embodiments, each first detection tube and each second detection tube is provided with a switch valve.

[0013] In some embodiments, the detection gas circuit also includes a third detection tube, which is connected to the gas analyzer and an external gas source.

[0014] In some embodiments, the detection gas circuit also includes a fourth detection tube, which is connected to the gas analyzer and the cooling chamber of the reaction furnace.

[0015] The second purpose of the utility model is to provide a gas supply system that can more accurately control the gas content entering the reaction furnace.

[0016] In some embodiments, the gas supply pipeline further includes a gas mixing branch pipe, and the gas mixing branch pipe connects a spray pipe disposed in the reactor and the gas mixing tank.

[0017] In some embodiments, the first gas supply pipeline also includes a first main gas pipe and a first branch gas pipe, the first main gas pipe connects the first gas source and the gas mixing tank, the first end of the first branch gas pipe is connected to the first main gas pipe, and the second end of the first branch gas pipe is connected to the gas mixing branch pipe.

[0018] In some embodiments, the gas mixing branch pipe is provided with a first flow controller and a first pneumatic diaphragm valve along the ventilation direction thereof;

[0019] A second pneumatic diaphragm valve, a second flow controller and a third pneumatic diaphragm valve are arranged on the first main air pipe along its ventilation direction;

[0020] A fourth pneumatic diaphragm valve, a third flow controller and a fifth pneumatic diaphragm valve are arranged on the first gas distribution pipe along the ventilation direction;

[0021] The second air supply pipeline includes a second main air pipe, which connects the second air source and the air mixing tank. The second main air pipe is provided with a sixth pneumatic diaphragm valve, a fourth flow controller and a seventh pneumatic diaphragm valve along its ventilation direction.

[0022] To achieve this purpose, the utility model also discloses a gas supply system, including a gas supply pipeline and the above-mentioned detection gas circuit, the gas supply pipeline is connected to the reaction furnace to provide reaction gas to the reaction furnace, and the detection gas circuit is connected to the reaction furnace to detect the gas content in the reaction furnace.

[0023] The beneficial effect of the gas supply system of the present invention is that, due to the aforementioned detection gas circuit, the gas supply system can adjust the gas supply condition of the gas supply pipeline according to the detection result of the detection gas circuit, thereby accurately controlling the gas supply amount.

[0024] In some embodiments, the gas supply pipeline includes a first gas supply pipeline, a second gas supply pipeline and a gas mixing tank, the first gas supply pipeline connects the first gas source and the gas mixing tank, the second gas supply pipeline connects the second gas source and the gas mixing tank, and the gas mixing tank is connected to the reaction furnace.

[0025] The third purpose of the utility model is to provide a reactor system that can further improve product quality.

[0026] To achieve this purpose, the utility model also discloses a reactor system, including a reactor and the above-mentioned gas supply system, wherein the gas supply system is connected to the reactor to detect and regulate the content of gas in the reactor.

[0027] The beneficial effects of the reactor system of the embodiment of the utility model are: on the one hand, it can accurately reflect the gas content in the reactor through the detection gas circuit of the gas supply system; on the other hand, it can accurately control the content of gas supplied to the reactor through the gas supply pipeline of the gas supply system, thereby improving the reaction quality in the reactor and further improving product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of one of the viewing angles of the gas path detection in the utility model;

[0029] Figure 2 It is a schematic diagram of another perspective of the detection gas path in the utility model;

[0030] Figure 3 It is a schematic diagram of the utility model in which each first detection tube is inserted into the reaction chamber with equal length and each second detection tube is inserted into the reaction chamber with equal length;

[0031] Figure 4 It is a schematic diagram of the utility model in which each first detection tube is inserted into the reaction chamber at different lengths and each second detection tube is inserted into the reaction chamber at different lengths;

[0032] Figure 5 It is a schematic diagram showing the gas mixing branch pipe in the utility model;

[0033] Figure 6 It is a schematic diagram showing the first gas supply pipeline in the utility model;

[0034] Figure 7 It is a schematic diagram showing the second gas supply pipeline in the utility model;

[0035] Figure 8 It is a partial schematic diagram of the reaction furnace system in the utility model.

[0036] In the figure:

[0037] 1. First detection tube; 11. First pipe opening; 2. Second detection tube; 21. Second pipe opening; 3. Switch valve; 4. Main pipe; 5. Filter; 6. Third detection tube; 7. Fourth detection tube;

[0038] 8. First air supply pipeline; 81. First main air pipe; 82. Pressure regulating valve; 83. Pressure gauge; 84. First switch; 85. Second pneumatic diaphragm valve; 86. Second flow controller; 87. Third pneumatic diaphragm valve; 88. First air distribution pipe; 89. Fourth pneumatic diaphragm valve; 810. Third flow controller; 811. Fifth pneumatic diaphragm valve;

[0039] 9. Second air supply pipeline; 91. Second main air pipe; 92. Pressure reducing valve; 93. Second switch; 94. Sixth pneumatic diaphragm valve; 95. Fourth flow controller; 96. Seventh pneumatic diaphragm valve; 97. Oil mist separator; 98. Second air distribution pipe; 99. Solenoid valve group; 910. Third air distribution pipe;

[0040] 10. gas mixing tank; 111. gas mixing branch pipe; 12. first flow controller; 13. first pneumatic diaphragm valve;

[0041] 100, reaction furnace; 101, reaction chamber; 102, cooling chamber;

[0042] 200. Gas analyzer; 300. Spray pipe. DETAILED DESCRIPTION

[0043] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0044] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0045] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0046] In the description of this embodiment, the terms "upper", "lower", "left", "right", etc., and the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of description and simplified operation, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0047] like Figures 1 to 7 As shown, the utility model provides a detection gas circuit, which includes at least one first detection tube 1 and at least one second detection tube 2; the first detection tube 1 has a first pipe opening 11, and the second detection tube 2 has a second pipe opening 21; the first end of the first detection tube 1 and the first end of the second detection tube 2 are arranged opposite to each other, so that the first end of the first detection tube 1 and the first end of the second detection tube 2 can be respectively inserted into the reaction chamber 101 from two opposite ends of the reaction chamber 101 of the reactor 100, and the first pipe opening 11 and the second pipe opening 21 are located at different positions in the reaction chamber 101; the second end of the first detection tube 1 and the second end of the second detection tube 2 are respectively connected to the gas analyzer 200.

[0048] Through the above-mentioned detection gas path, the first detection tube 1 and the second detection tube 2 are respectively inserted from the opposite ends of the reaction chamber 101, so that the tube openings of the first detection tube 1 and the second detection tube 2 are respectively placed at different positions in the reaction chamber 101, so that the gas content at different positions in the reaction chamber 101 can be detected, and the gas content in the reaction chamber 101 can be more accurately reflected, making the detection result more accurate.

[0049] It should be noted that the first tube opening 11 refers to the collection opening of the first detection tube 1 for collecting gas in the reaction chamber 101; the second tube opening 21 refers to the collection opening of the second detection tube 2 for collecting gas in the reaction chamber 101. It should also be noted that the first detection tube 1 and the second detection tube 2 are inserted from different directions respectively, which can also avoid the single direction of insertion causing the length of the single first detection tube 1 or the second detection tube 2 to be too long, which makes it convenient for maintenance on the one hand, and avoids the first detection tube 1 or the second detection tube 2 from being too long and causing damage on the other hand. Exemplarily, the first detection tube 1 and the second detection tube 2 can be, but are not limited to, quartz tubes to adapt to the high temperature environment in the reaction chamber 101.

[0050] like Figure 3 and Figure 4As shown, in some embodiments, at least two first detection tubes 1 are provided, the first tube opening 11 is located at the first end of the first detection tube 1, and the lengths of any two first detection tubes 1 inserted into the reaction chamber 101 are different, so that the positions of the first tube opening 11 in the reaction chamber 101 are different; while in other embodiments, the lengths of the first detection tubes 1 inserted into the reaction chamber 101 are equal, and the first tube opening 11 is located between the first end of the first detection tube 1 and the cavity wall of the reaction chamber 101 through which the first detection tube 1 is penetrated; the positions of any two first tube openings 11 are different, so that the positions of the first tube opening 11 in the reaction chamber 101 can also be different; and further, by virtue of the different positions of the first tube opening 11 in the reaction chamber 101, gases at multiple points of the reaction chamber 101 can be collected along one direction, so that the detection result is more accurate. Similarly, at least two second detection tubes 2 can also be provided. In some embodiments, the lengths of any two second detection tubes 2 inserted into the reaction chamber 101 are also different, and the second tube mouth 21 is located at the first end of the second detection tube 2; in other embodiments, the lengths of the second detection tube 2 inserted into the reaction chamber 101 are equal; the second tube mouth 21 is located between the first end of the second detection tube 2 and the cavity wall of the reaction chamber 101 through which the second tube mouth 21 is arranged, and the positions of any two second tube mouths 21 are different, so that gas from multiple points in another direction of the reaction chamber 101 can be collected. Further, in order to collect gas in the reaction chamber 101 more evenly, the position of the first tube mouth 11 in the reaction chamber 101 and the position of the second tube mouth 21 in the reaction chamber 101 divide the reaction chamber 101 equally in the insertion direction of the first detection tube 1, that is, divide the reaction chamber 101 equally in the length direction, thereby equidistantly segmenting the reaction chamber 101 and further refining the detection results. Further, both the first detection tube 1 and the second detection tube 2 can be fixed to the reaction chamber 101 by a fixing ring.

[0051] Since a spray pipe 300 is arranged in the reaction chamber 101, and the spray pipe 300 is connected to an external gas source, it can be understood that the external gas source can be a single gas source or a mixed gas source. A plurality of spray ports are arranged below the spray pipe 300. The spray pipe 300 is a prior art, and other details are not given here. It should be noted here that the nozzles of the first detection tube 1 and the second detection tube 2 located in the reaction chamber 101 can be staggered with the spray ports. Specifically, the first detection tube 1 and the second detection tube 2 can be located above or to the side of the spray pipe 300 to stay away from the spray ports arranged below the spray pipe 300, thereby avoiding affecting the detection accuracy.

[0052] like Figure 5As shown, in some embodiments, the first detection tube 1 and the second detection tube 2 transport the gas in the reaction chamber 101 to the gas analyzer 200 for analysis and processing. In order to avoid mutual influence of the gas between each first detection tube 1 or the second detection tube 2, a switch valve 3 is provided on each first detection tube 1 and the second detection tube 2. When the switch valve 3 on any first detection tube 1 or the second detection tube 2 is opened to collect gas, the switch valves 3 on the other first detection tubes 1 or the second detection tubes 2 can be closed to avoid mutual influence. Exemplarily, the switch valve 3 can be, but is not limited to, a solenoid valve.

[0053] like Figure 3 As shown, in some embodiments, both the first detection tube 1 and the second detection tube 2 need to be connected to the above-mentioned gas analyzer 200. For the convenience of connection, the detection gas circuit also includes a main tube 4, one end of which is connected to the above-mentioned gas analyzer 200. The main tube 4 is provided with multiple interfaces for connecting the above-mentioned first detection tube 1 and the second detection tube 2, so that the gas collected by the first detection tube 1 and the second detection tube 2 is transported to the gas analyzer 200 through the above-mentioned main tube 4. In addition, in order to prevent the impurities in the reaction chamber 101 from entering the gas analyzer 200 through the first detection tube 1 and the second detection tube 2, affecting the accuracy of the detection result, the detection gas circuit is also provided with a filter 5. In the current embodiment, the filter 5 is provided on the main tube 4, so that the gas from the first detection tube 1 or the second detection tube 2 to the main tube 4 needs to pass through the filter 5 before entering the gas analyzer 200; in other embodiments, each first detection tube 1 and each second detection tube 2 are equipped with the above-mentioned filter 5. The form of the filter 5 is not specifically limited. Exemplarily, the main pipe 4 is an EP pipe or a steel pipe.

[0054] like Figure 5 As shown, in some embodiments, the detection gas circuit also includes a third detection tube 6, and the third detection tube 6 connects the gas analyzer 200 with an external gas source. It can be understood that the external gas source can be a single gas source or a mixed gas source, so that the gas content can be detected before the gas is supplied to the reaction chamber 101 of the reactor 100, and the detection result can be further accurate. Specifically, one end of the third detection tube 6 is connected to the gas supply pipeline connected to the gas source, and the other end of the third detection tube 6 is connected to the main line pipe 4, and the filter 5 is arranged between the third detection tube 6 and the gas analyzer 200. Of course, it can be understood that the third detection tube 6 is also provided with the above-mentioned switch valve 3, and the third detection tube 6 can be provided with a filter 5 separately.

[0055] like Figure 5As shown, in some embodiments, the detection gas circuit also includes a fourth detection tube 7, which connects the gas analyzer 200 and the cooling chamber 102 of the reactor 100, so that the content of the cooling chamber 102 can be detected, providing a technical basis for adjusting the gas supply. Specifically, one end of the fourth detection tube 7 is connected to the gas supply pipeline, and the other end of the fourth detection tube 7 is connected to the main line pipe 4. A filter 5 can also be provided between the fourth detection tube 7 and the gas analyzer 200. In addition, the fourth detection tube 7 is also provided with the above-mentioned switch valve 3, and the fourth detection tube 7 can be provided with a filter 5 separately.

[0056] like Figures 5 to 7 As shown, the utility model also provides a gas supply system, which includes a gas supply pipeline and the above-mentioned detection gas circuit, the gas supply pipeline is connected to the reactor 100 to supply reaction gas into the reactor 100; the detection gas circuit is connected to the reactor 100 to detect the gas content in the reactor 100; so that the gas supply amount of the above-mentioned gas supply pipeline can be adjusted according to the detection result of the above-mentioned detection gas circuit.

[0057] like Figure 6 and Figure 7 As shown, in some embodiments, the gas supply pipeline includes a first gas supply pipeline 8, a second gas supply pipeline 9 and a gas mixing tank 10, the first gas supply pipeline 8 connects the first gas source and the gas mixing tank 10, and the second gas supply pipeline 9 connects the second gas source and the gas mixing tank 10, so that the gas of the first gas source and the gas of the second gas source are mixed into a reaction gas in the gas mixing tank 10, and the gas mixing tank 10 is also connected to the spray pipe 300 located in the reaction chamber 101 to supply the mixed reaction gas to the reactor 100. Exemplarily, the first gas source includes but is not limited to a nitrogen gas source, and the second gas source includes but is not limited to an oxygen gas source or an air gas source.

[0058] In some embodiments, the gas supply pipeline also includes a mixing branch pipe 111, and the mixing tank 10 is connected to the spray pipe 300 in the reactor 100 through the mixing branch pipe 111. The mixing branch pipe 111 is provided with a first flow controller 12 and a first pneumatic diaphragm valve 13. The first pneumatic diaphragm valve 13 is located downstream of the first flow controller 12 in the ventilation direction, that is, the mixed gas first passes through the first flow controller 12 and then enters the first pneumatic diaphragm valve 13. The first flow controller 12 is used to control the incoming flow rate of the mixed gas, and the first pneumatic diaphragm valve 13 is used to prevent the mixed gas from flowing back to the first flow controller 12, that is, the gas content value detected by the gas analyzer 200 can be changed by adjusting the flow rate of the mixed gas entering the furnace until the gas content reaches a preset value.

[0059] Based on the fact that the first gas source is a nitrogen gas source and the second gas source is an oxygen gas source or an air gas source, the first gas supply pipeline 8 includes a first main gas pipe 81, and the first main gas pipe 81 connects the first gas source and the gas mixing tank 10; the first gas supply pipeline 8 also includes a pressure regulating valve 82, a pressure gauge 83, a first switch 84, a second pneumatic diaphragm valve 85, a second flow controller 86 and a third pneumatic diaphragm valve 87. The pressure regulating valve 82, the first pressure gauge 83, the first switch 84, the second pneumatic diaphragm valve 85, the second flow controller 86 and the third pneumatic diaphragm valve 87 are distributed on the first main gas pipe 81 along the ventilation direction of the first main gas pipe 81. The specific ventilation process is to adjust the pressure after the gas passes through the pressure regulating valve 82, and the first pressure gauge 83 tests the pressure value of the gas after pressure adjustment. After reaching the preset value, the first switch 84 is opened, and the gas is connected to the second pneumatic diaphragm valve 85, the second flow controller 86 and the third pneumatic diaphragm valve 87 to enter the gas mixing tank 10. It should be noted here that the second flow controller 86 plays a dual role of detecting the gas flow and adjusting the gas flow, the second pneumatic diaphragm valve 85 located upstream of the second flow controller 86 can prevent the gas pressure from impacting the second flow controller 86, and the third pneumatic diaphragm valve 87 is to prevent the gas from flowing back to the second flow controller 86. Further, in the current embodiment, two first pressure gauges 83 are provided, and the two first pressure gauges 83 face opposite directions, so that when observing the pressure, there is no need to switch positions.

[0060] Furthermore, the first gas supply pipeline 8 also includes a first gas branch pipe 88, the first end of which is connected to the first main gas pipe 81, specifically connected between the first switch 84 and the second pneumatic diaphragm valve 85; the second end of the first gas branch pipe 88 is connected to the mixed gas branch pipe 111, so that the first gas branch pipe 88 serves as a supplementary branch. It can be understood that the fourth pneumatic diaphragm valve 89, the third flow controller 810 and the fifth pneumatic diaphragm valve 811 are arranged on the first gas branch pipe 88 along the ventilation direction, and their functions are not repeated here.

[0061] like Figure 7As shown, the second air supply pipeline 9 includes a second main air pipe 91, one end of which is connected to the second air source, and the other end is connected to the mixing tank 10; the second air supply pipeline 9 also includes a pressure reducing valve 92, a second switch 93, a sixth pneumatic diaphragm valve 94, a fourth flow controller 95 and a seventh pneumatic diaphragm valve 96; the pressure reducing valve 92, the second switch 93, the sixth pneumatic diaphragm valve 94, the fourth flow controller 95 and the seventh pneumatic diaphragm valve 96 are distributed on the second main air pipe 91 along the ventilation direction of the second main air pipe 91. Among them, the pressure reducing valve 92 is used for pressure regulation; the functions of the second switch 93, the sixth pneumatic diaphragm valve 94, the fourth flow controller 95 and the seventh pneumatic diaphragm valve 96 are not repeated, and they have the same functions as the first switch 84, the second pneumatic diaphragm valve 85, the second flow controller 86 and the third pneumatic diaphragm valve 87. When the second gas source is an air source, the second gas supply pipeline 9 also includes an oil mist separator 97, which can be arranged between the pressure reducing valve 92 and the second switch 93 to separate the oil and mist in the air transported in the second main gas pipe 91 to avoid pollution affecting the detection accuracy of the gas analyzer 200.

[0062] Furthermore, the second air supply pipeline 9 also includes a second air branch pipe 98, one end of which is connected to the second main air pipe 91, specifically connected between the second switch 93 and the pressure reducing valve 92; and the other end of the second air branch pipe 98 is connected to the solenoid valve group 99, the solenoid valve group 99 includes a number of solenoid valves, the first pneumatic diaphragm valve 13, the second pneumatic diaphragm valve 85, the third pneumatic diaphragm valve 87, the fourth pneumatic diaphragm valve 89, the fifth pneumatic diaphragm valve 811, the sixth pneumatic diaphragm valve 94, and the seventh pneumatic diaphragm valve 96 are all connected to the corresponding solenoid valves in the solenoid valve group 99 to supply air to them so that they can work normally.

[0063] Furthermore, when the driving member for opening the furnace door in the reaction furnace 100 is a cylinder, the second gas supply pipeline 9 further includes a third gas branch pipe 910, one end of the third gas branch pipe 910 is connected to the second main gas pipe 91, and the other end of the third gas branch pipe 910 is connected to the above-mentioned cylinder, thereby providing gas source power for the cylinder. In other embodiments, the first gas supply pipeline 8 further includes a fourth gas branch pipe, one end of the fourth gas branch pipe is connected to the first main gas pipe 81, and the other end of the fourth gas branch pipe is connected to the above-mentioned cylinder, thereby providing gas source power for the cylinder.

[0064] like Figure 8 As shown, the utility model also provides a reactor system, which includes a reactor 100 and the above-mentioned gas supply system. The gas supply system is connected to the above-mentioned reactor 100. On the one hand, it can accurately control the content of gas supplied to the reactor 100 through the gas supply pipeline of the gas supply system. On the other hand, it can accurately reflect the content of gas in the reactor 100 through the detection gas path of the gas supply system, thereby improving the reaction quality in the reactor 100 and further improving the product quality.

[0065] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. Detection gas path, characterized in that, include: At least one first detection tube (1) and at least one second detection tube (2); The first detection tube (1) has a first tube opening (11), and the second detection tube (2) has a second tube opening (21); the first end of the first detection tube (1) and the first end of the second detection tube (2) are arranged opposite to each other, so that the first end of the first detection tube (1) and the first end of the second detection tube (2) can be respectively inserted into the reaction chamber (101) of the reaction furnace (100) from two oppositely arranged ends thereof, and the first tube opening (11) and the second tube opening (21) can be located at different positions in the reaction chamber (101); the second end of the first detection tube (1) and the second end of the second detection tube (2) are respectively connected to a gas analyzer (200).

2. The detection gas circuit according to claim 1, characterized in that: At least two of the first detection tubes (1) are provided; The lengths of any two first detection tubes (1) inserted into the reaction chamber (101) are not equal, and the first tube opening (11) is located at the first end of the first detection tube (1); or, the lengths of the first detection tubes (1) inserted into the reaction chamber (101) are equal, and the first tube opening (11) is located between the first end of the first detection tube (1) and the cavity wall of the reaction chamber (101) through which the first detection tube (1) passes, and the positions of any two first tube openings (11) are different.

3. The detection gas circuit according to claim 2, characterized in that: At least two of the second detection tubes (2) are provided; The lengths of any two second detection tubes (2) inserted into the reaction chamber (101) are not equal, and the second tube opening (21) is located at the first end of the second detection tube (2); or, the lengths of the second detection tubes (2) inserted into the reaction chamber (101) are equal, and the second tube opening (21) is located between the first end of the second detection tube (2) and the cavity wall of the reaction chamber (101) through which the second tube opening (21) passes, and the positions of any two second tube openings (21) are different.

4. The detection gas circuit according to claim 3, characterized in that: The position of the first tube opening (11) in the reaction chamber (101) and the position of the second tube opening (21) in the reaction chamber (101) divide the reaction chamber (101) into equal parts in the insertion direction of the first detection tube (1).

5. The detection gas circuit according to claim 1, characterized in that Each of the first detection tubes (1) and each of the second detection tubes (2) is provided with a switch valve (3).

6. The detection gas circuit according to any one of claims 1 to 5, characterized in that: It also includes a third detection tube (6), wherein the third detection tube (6) is connected to the gas analyzer (200) and an external gas source.

7. The detection gas circuit according to any one of claims 1 to 5, characterized in that: It also includes a fourth detection tube (7), wherein the fourth detection tube (7) is connected to the gas analyzer (200) and the cooling chamber (102) of the reaction furnace (100).

8. A gas supply system, including a gas supply pipeline, characterized in that: It also includes a detection gas circuit as described in any one of claims 1 to 7, wherein the gas supply pipeline is connected to the reaction furnace (100) to provide reaction gas into the reaction furnace (100), and the detection gas circuit is connected to the reaction furnace (100) to detect the gas content in the reaction furnace (100).

9. The gas supply system according to claim 8, characterized in that: The gas supply pipeline comprises a first gas supply pipeline (8), a second gas supply pipeline (9) and a gas mixing tank (10), wherein the first gas supply pipeline (8) connects a first gas source and the gas mixing tank (10), the second gas supply pipeline (9) connects a second gas source and the gas mixing tank (10), and the gas mixing tank (10) is connected to the reaction furnace (100).

10. The gas supply system according to claim 9, characterized in that: The gas supply pipeline further comprises a gas mixing branch pipe (111), wherein the gas mixing branch pipe (111) connects a spray pipe (300) disposed in the reaction furnace (100) and the gas mixing tank (10).

11. The gas supply system according to claim 10, characterized in that: The first gas supply pipeline (8) further comprises a first main gas pipe (81) and a first gas branch pipe (88); the first main gas pipe (81) connects the first gas source and the gas mixing tank (10); a first end of the first gas branch pipe (88) is connected to the first main gas pipe (81); and a second end of the first gas branch pipe (88) is connected to the gas mixing branch pipe (111).

12. The gas supply system according to claim 11, characterized in that: A first flow controller (12) and a first pneumatic diaphragm valve (13) are provided on the gas mixing branch pipe (111) along its ventilation direction; A second pneumatic diaphragm valve (85), a second flow controller (86) and a third pneumatic diaphragm valve (87) are arranged on the first main air pipe (81) along its ventilation direction; A fourth pneumatic diaphragm valve (89), a third flow controller (810) and a fifth pneumatic diaphragm valve (811) are arranged on the first gas distribution pipe (88) along the ventilation direction; The second air supply pipeline (9) comprises a second main air pipe (91), the second main air pipe (91) connecting the second air source and the air mixing tank (10), and a sixth pneumatic diaphragm valve (14), a fourth flow controller (95) and a seventh pneumatic diaphragm valve (96) are arranged on the second main air pipe (91) along its ventilation direction.

13. A reactor system, comprising a reactor (100), characterized in that: It also comprises a gas supply system as claimed in any one of claims 8 to 12, wherein the gas supply system is connected to the reaction furnace (100) to detect and regulate the gas content in the reaction furnace (100).

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