Probe station for WAT test of WAT probe card

Abstract

The utility model relates to the technical field of WAT test, and discloses a probe station for WAT test of a WAT probe card, which comprises a processing table, a clamping and placing device arranged in the processing table, and a cleaning device arranged in the processing table. The clamping and placing device comprises a bearing disc, a magnet limiting frame, an arc frame, a first arc plate, a limiting internal thread base, a fixing screw rod, an internal magnetic attraction sliding block, a second arc plate and a connecting thin rod. According to the probe station for the WAT test of the WAT probe card, the clamping and placing device is arranged, the bottom end of an arc groove, used for penetrating through a positioning arc plate, in an arc frame is moved to be flush with the top of a wafer, the internal positioning arc plate is inserted for limiting and fixing, a fixing screw rod is held to be screwed leftwards till the left side of a pressing pad makes contact with the right side of the wafer, pressing and fixing are conducted, and the wafer is clamped and placed in the clamping and placing device. The wafer is well placed, and the two groups of limiting assemblies are not simply inserted and placed, so that the wafer does not swing inside under the influence of a multi-angle wind source, and the subsequent test by using a probe card is not influenced.

Description

Technical Field

[0001] The utility model relates to the technical field of WAT testing, in particular to a WAT ​​probe card and a probe station for WAT testing. Background Art

[0002] The mainstream solution for clean WAT test machines is to install two fresh air sources FFU on the WAT automatic parameter tester. The two fresh air sources FFU are located on the side of the test machine cabinet Stage and the top of the tester Loader respectively, so that the air flow inside the machine can circulate and carry away the pollution / impurity particles.

[0003] The prior art discloses a WAT ​​test machine with a publication number of CN111257605B, including a WAT ​​automatic parameter tester and an automatic probe station. The test head of the WAT automatic parameter tester is arranged on the top of the automatic probe station test machine cabinet. A carrier plate for carrying the wafer to be tested is arranged in the test machine cabinet, and the wafer loading cabinet is adjacent to the test machine cabinet; a first air source is formed on the top of the test head; a second air source is formed on the top; a third air source is formed on the left side wall of the test machine cabinet; a fourth air source is formed on the right side wall of the wafer loading cabinet; wherein a first air duct is arranged at the center of the test head, and the right side wall of the test machine cabinet and the left side wall of the probe card loading cabinet are closed and adjacent, and a second air duct is formed therebetween. The present application overcomes the drawbacks brought by the existing technical solutions of the WAT test machine and effectively improves the test cleanliness of the wafer.

[0004] The WAT probe card WAT test probe station mentioned above places the wafer by simply inserting the carrier plate, without setting a fixed component. Under the influence of wind sources at multiple angles, it will swing internally, affecting subsequent tests using the probe card. The effect during use is not good and needs to be improved. Utility Model Content

[0005] The utility model aims to provide a WAT ​​probe card and a WAT ​​test probe station to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above objectives, the utility model provides the following technical solutions: a WAT ​​probe card WAT test probe station, comprising a processing table, a clamping device is arranged inside the processing table, a cleaning device is arranged inside the processing table, and a wafer is arranged inside the clamping device.

[0007] The clamping device includes a carrying plate, a magnet limit frame, an arc frame, a first arc plate, a limiting internal threaded seat, a fixing screw, an inner magnetic slider, a second arc plate and a connecting thin rod. The carrying plate is fixedly connected to the inner bottom end of the processing table, the magnet limit frame is fixedly connected to the top of the carrying plate, the second arc plate is fixedly connected to the surface of the inner magnetic slider at the upper end, the second arc plate is slidably connected to the top of the surface of the magnet limit frame, the connecting thin rod is fixedly connected to the bottom of the second arc plate, and the first arc plate is fixedly connected to the bottom of the connecting thin rod.

[0008] Preferably, the cleaning device includes a hollow box, a connecting pipe, an air outlet pipe and a negative pressure fan component, the hollow box is fixedly connected to the inner back side of the processing table, the connecting pipe is fixedly connected to the inside of the hollow box, the negative pressure fan component is fixedly connected to the top of the hollow box, and the air outlet pipe is fixedly connected to the bottom of the connecting pipe.

[0009] Preferably, a pressing pad is fixedly connected to the left side of the fixing screw, and the diameter of the pressing pad is smaller than the inner diameter of the limiting internal thread seat.

[0010] Preferably, the arc frame is fixedly connected to the right side of the second arc plate, and a positioning arc plate is slidably connected inside the arc frame, which can fit on the top of the wafer component after installation to perform position limiting and fixing.

[0011] Preferably, a slide groove is provided inside the magnet limit frame, and the width of the slide groove is adapted to the width of the inner magnetic slider. The setting of the slide groove inside the magnet limit frame allows the inner magnetic slider to be raised and lowered, with the purpose of moving the bottom end of the arc groove through the positioning arc plate to be flush with the top of the wafer, and inserting the internal positioning arc plate for limiting and fixing, thereby helping to limit and fix the wafer.

[0012] Preferably, the inner magnetic slider is slidably connected to the inside of the magnet limit frame, and the inner magnetic slider is magnetically connected to the magnet limit frame.

[0013] Preferably, the limiting internal thread seat is fixedly connected to the top of the first arc plate, and the fixing screw is threadedly connected to the inside of the limiting internal thread seat.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. The WAT probe card WAT test probe station is provided with a clamping device. The bottom end of the arc groove inside the arc frame for passing through the positioning arc plate is moved to be flush with the top of the wafer, and the internal positioning arc plate is inserted for limit fixation. The fixing screw is held and turned to the left until the left side of the pressing pad contacts the right side of the wafer for pressing and fixing. The wafer is placed well, and the two sets of limit assemblies are not simply plugged in and placed. They will not swing internally under the influence of wind sources at multiple angles, and will not affect subsequent tests using the probe card.

[0016] 2. The WAT probe card WAT test probe station is equipped with a cleaning device to start the negative pressure fan above to generate downward wind force, blow air to the wafer parts, and use the hollow box parts and the connecting pipe parts connected internally to carry out wind circulation, which helps to blow the dust on the surface and improve the test cleanliness of the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the overall side view structure of the utility model;

[0018] Figure 2 For this utility model Figure 1 The enlarged structural diagram at A in the middle;

[0019] Figure 3 This is a schematic diagram of the overall front view structure of the utility model;

[0020] Figure 4 This is a schematic diagram of the overall structure of the utility model when viewed from above;

[0021] Figure 5 For this utility model Figure 4 Enlarged structural diagram at B in the middle.

[0022] In the figure: 1. Processing table; 2. Clamping device; 201. Carrying plate; 202. Magnetic limit frame; 203. Arc frame; 204. First arc plate; 205. Limiting internal thread seat; 206. Fixed screw; 207. Internal magnetic slider; 208. Second arc plate; 209. Connecting thin rod; 3. Cleaning device; 301. Hollow box; 302. Connecting pipe; 303. Exhaust pipe; 304. Negative pressure fan; 4. Wafer parts. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] See also Figure 1-5 , the utility model provides the following technical solutions:

[0025] A probe station for WAT probe card WAT test comprises a processing table 1, a clamping device 2 is arranged inside the processing table 1, a cleaning device 3 is arranged inside the processing table 1, and a wafer 4 is arranged inside the clamping device 2.

[0026] The clamping device 2 includes a carrying plate 201, a magnet limiting frame 202, an arc frame 203, a first arc plate 204, a limiting internal thread seat 205, a fixing screw 206, an internal magnetic slider 207, a second arc plate 208 and a connecting thin rod 209. The carrying plate 201 is fixedly connected to the inner bottom end of the processing table 1, the magnet limiting frame 202 is fixedly connected to the top of the carrying plate 201, the second arc plate 208 is fixedly connected to the surface of the upper internal magnetic slider 207, the second arc plate 208 is slidably connected to the top of the surface of the magnet limiting frame 202, the connecting thin rod 209 is fixedly connected to the bottom of the second arc plate 208, the first arc plate 204 is fixedly connected to the bottom of the connecting thin rod 209, the limiting internal thread seat 205 is fixedly connected to the top of the first arc plate 204, and the fixing screw 206 is threadedly connected to the inside of the limiting internal thread seat 205. A pressing pad is fixedly connected to the left side of the fixing screw 206, and the diameter of the pressing pad is smaller than the inner diameter of the limiting internal threaded seat 205. The arc frame 203 is fixedly connected to the right side of the second arc plate 208. The interior of the arc frame 203 is slidably connected with a positioning arc plate, which can be fitted on the top of the wafer part 4 after installation for limiting and fixing. A slide groove is opened inside the magnet limiting frame 202, and the width of the slide groove is adapted to the width of the inner magnetic slider 207. The setting of the slide groove inside the magnet limiting frame 202 allows the inner magnetic slider 207 to be raised and lowered, so as to move the bottom end of the arc groove of the positioning arc plate to be flush with the top of the wafer part 4, and insert the internal positioning arc plate for limiting and fixing, which helps to limit and fix the wafer part 4. The inner magnetic slider 207 is slidably connected to the inside of the magnet limiting frame 202, and the inner magnetic slider 207 is magnetically connected to the magnet limiting frame 202.

[0027] The cleaning device 3 includes a hollow box 301, a connecting pipe 302, an air outlet pipe 303 and a negative pressure fan component 304. The hollow box 301 is fixedly connected to the inner back of the processing table 1, the connecting pipe 302 is fixedly connected to the inside of the hollow box 301, the negative pressure fan component 304 is fixedly connected to the top of the hollow box 301, and the air outlet pipe 303 is fixedly connected to the bottom of the connecting pipe 302.

[0028] When in use, the wafer 4 to be tested is placed inside the carrier plate 201, inserted and placed, and then fixed by the limiting fixing assembly on the top of the carrier plate 201. By holding the second arc plate 208 at the upper end and sliding it up and down, the bottom end of the arc groove inside the arc frame 203 for passing the positioning arc plate is moved to be flush with the top of the wafer 4, and then the internal positioning arc plate is inserted into the front and rear sets of arc frames 203, and just fits on the top of the wafer 4 for limiting and fixing. At this time, the first arc plate 204 at the bottom is moved to the right side of the wafer 4 near the middle, and then the fixing screw 206 can be held and turned to the left until it is The left side of the pressing pad contacts the right side of the wafer 4 for pressing and fixing, and the wafer 4 is placed well. The two sets of limit assemblies are not simply plugged in and placed. Under the influence of wind sources at multiple angles, the wafer 4 will not swing internally, and will not affect subsequent testing using the probe card. The effect is good when used, and multiple sets of wind source devices are arranged above the position of the wafer 4. When in use, the negative pressure fan 304 above can be started to generate downward wind force to blow air toward the wafer 4. The hollow box 301 and the connecting pipe 302 connected internally can be used to perform wind connection circulation, which helps to blow dust on the surface and improves the test cleanliness of the wafer.

[0029] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A WAT probe card WAT test probe station, comprising a processing station (1), characterized in that: A clamping device (2) is arranged inside the processing table (1), a cleaning device (3) is arranged inside the processing table (1), and a wafer (4) is arranged inside the clamping device (2); The clamping device (2) comprises a carrying plate (201), a magnet limiting frame (202), an arc frame (203), a first arc plate (204), a limiting internal thread seat (205), a fixing screw (206), an inner magnetic attraction slider (207), a second arc plate (208) and a connecting thin rod (209); the carrying plate (201) is fixedly connected to the inner bottom end of the processing table (1); the magnet limiting frame (202) is fixedly connected to the top of the carrying plate (201); the second arc plate (208) is fixedly connected to the surface of the inner magnetic attraction slider (207) at the upper end; the second arc plate (208) is slidably connected to the top of the surface of the magnet limiting frame (202); the connecting thin rod (209) is fixedly connected to the bottom of the second arc plate (208); and the first arc plate (204) is fixedly connected to the bottom of the connecting thin rod (209).

2. A WAT probe card WAT test probe station according to claim 1, characterized in that: The cleaning device (3) comprises a hollow box (301), a connecting pipe (302), an air outlet pipe (303) and a negative pressure fan (304); the hollow box (301) is fixedly connected to the inner back side of the processing table (1); the connecting pipe (302) is fixedly connected to the inside of the hollow box (301); the negative pressure fan (304) is fixedly connected to the top of the hollow box (301); and the air outlet pipe (303) is fixedly connected to the bottom of the connecting pipe (302).

3. A WAT probe card WAT test probe station according to claim 1, characterized in that: A pressing pad is fixedly connected to the left side of the fixing screw rod (206), and the diameter of the pressing pad is smaller than the inner diameter of the limiting internal thread seat (205).

4. A WAT probe card WAT test probe station according to claim 1, characterized in that: The arc frame (203) is fixedly connected to the right side of the second arc plate (208), and a positioning arc plate is slidably connected inside the arc frame (203).

5. A WAT probe card WAT test probe station according to claim 1, characterized in that: The magnet limiting frame (202) is provided with a slide groove inside, and the width of the slide groove is adapted to the width of the inner magnetic attraction sliding block (207).

6. A WAT probe card WAT test probe station according to claim 1, characterized in that: The inner magnetic attraction slider (207) is slidably connected to the inside of the magnet limiting frame (202), and the inner magnetic attraction slider (207) is magnetically connected to the magnet limiting frame (202).

7. A WAT probe card WAT test probe station according to claim 1, characterized in that: The position-limiting internal thread seat (205) is fixedly connected to the top of the first arc plate (204), and the fixing screw (206) is threadedly connected to the inside of the position-limiting internal thread seat (205).

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