Automatic bad crystal grain selector

Abstract

The utility model relates to an automatic bad crystal grain selector which comprises a conveying belt which conveys along the front-back direction, a motor is arranged above one side of the conveying belt, an output shaft of the motor faces the direction of the conveying belt and is fixedly connected with a rotating shaft, the tail end of the rotating shaft is detachably connected with a material box, and the bottom of the material box is open and abuts against a blocking plate. A first electric push rod is horizontally arranged on the rear side of the material box in the front-back direction, the telescopic end of the first electric push rod faces the rear side and is fixedly connected with an L-shaped supporting plate, the horizontal part of the supporting plate faces forwards and is fixedly connected with the rear end of the plugging plate, inverted-L-shaped supports are arranged on the left side and the right side of the material box, and connecting rods are fixedly connected to the inner sides of the vertical parts of the two supports. An electromagnet is fixedly connected between the two connecting rods, second electric push rods are arranged at the bottom ends of the vertical parts of the two supports, the telescopic ends of the two second electric push rods are opposite and fixedly connected with transverse plates, and brushes and scrapers are arranged at the tops of the transverse plates. According to the utility model, the sucked bad crystal grains can be automatically removed and collected, the electromagnet can be conveniently disassembled, assembled and replaced, and the device is more practical.

Description

Technical Field

[0001] The utility model belongs to the technical field of crystal grain processing, and in particular relates to an automatic selector for defective crystal grains. Background Art

[0002] The crystal grain is the basic form of transistors, made of semiconductor materials such as silicon. It is the earliest component used in semiconductor technology and the raw material of wafers. In the production process of crystal grains, it is necessary to select the poorly processed crystal grains. The existing selection method is mainly to first use an automatic dotting device to mark the poor crystal grains, so that the poor crystal grains are attached with magnetic magnetic powder ink dots, and then the entire wafer passes through the magnet area. Under the magnetic attraction of the magnet to the magnetic powder ink dots, the poor crystal grains in the corresponding wafer can be attracted to the magnet, and the automatic selection of the poor crystal grains can be realized. However, in actual applications, the magnet is usually a fixed structure, which is not convenient for convenient disassembly and replacement when its coverage range is smaller than the wafer, and it is not convenient to automatically, promptly and effectively remove and collect the poor crystal grains attracted by the magnet. It often requires manual removal, which is inconvenient, time-consuming and labor-intensive, and is not conducive to the selection operation, and needs to be improved. Utility Model Content

[0003] In view of this, the purpose of the utility model is to provide an automatic picker for defective grains, which can realize automatic removal and collection of sucked defective grains and convenient disassembly, assembly and replacement of electromagnets to solve the above problems.

[0004] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: an automatic selector for defective grains, comprising a conveyor belt for conveying in a front-to-rear direction, a motor is fixedly mounted on one side of the conveyor belt, the output shaft of the motor faces the direction of the conveyor belt and is coaxially fixedly connected with a rotating shaft, the tail end of the rotating shaft is fixedly connected with a support box, a hydraulic cylinder is fixedly mounted on the outer top of the support box, the piston rod of the hydraulic cylinder faces downward and is fixedly connected with a limiting plate, a plurality of limiting rods evenly distributed in a rectangular array are fixedly mounted on the bottom of the limiting plate, a through hole is opened on the top of the support box corresponding to the limiting rod, the support box is open on one side away from the rotating shaft, a material box is arranged above the conveyor belt, an inverted L-shaped pillar is fixedly arranged on the outer top of the material box, the tail end of the horizontal part of the pillar is fixedly connected with a mounting block, the mounting block is inserted in the support box and blind holes are opened at the positions of its top corresponding to the through holes The lifting plate has the advantages that: first, second, and third electric push rods are provided on the left and right sides of the lifting plate, and the extension end of the first electric push rod faces the rear side and is fixedly connected with an L-shaped support plate, and the horizontal part of the support plate faces forward and is fixedly connected with the rear end of the blocking plate. An inverted L-shaped support is fixed on the left and right sides of the lifting plate, and a connecting rod is fixedly connected horizontally on the inner sides of the vertical parts of the two supports, and an electromagnet is fixedly connected between the two connecting rods, and a second electric push rod is fixedly provided on the bottom ends of the vertical parts of the two supports, and the telescopic ends of the two second electric push rods are relatively arranged and fixedly connected with a cross plate, and a brush and a scraper are fixedly provided on the top of the cross plate in sequence from one side close to the corresponding second electric push rod to the other side, and the brush and the scraper can both contact the bottom of the electromagnet.

[0005] Preferably, the mounting block is compatible with the support box.

[0006] Preferably, the limiting rod is adapted to the corresponding through hole and blind hole.

[0007] Preferably, the cross-sectional area of ​​the inner side of the material box is larger than the cross-sectional area of ​​the electromagnet.

[0008] Preferably, the length of the brush and the scraper in the front-to-back direction is greater than the length of the electromagnet in the front-to-back direction.

[0009] The beneficial effect of the utility model is that during the selection operation, the conveyor belt can drive the marked wafers to pass under the electromagnet. At this time, the electromagnet is energized to have magnetic attraction, so that the marked bad magnetic grains in the passing wafers can be sucked to the bottom of the electromagnet, realizing the automatic suction and selection of bad grains. After a period of time, the conveying of the conveyor belt can be suspended, and the electromagnet can be automatically cleaned, specifically: the motor is running, driving the rotating shaft and the support box to rotate 180 degrees as a whole, so that the electromagnet can be turned upward, and the material box is located below the electromagnet. Then, the electromagnet is powered off, the first electric push rod is operated, and its telescopic end is extended, driving the blocking plate away from the material box, so that the top of the material box is open at this time. Next, the telescopic ends of the two second electric push rods are alternately extended and retracted, which can drive the two sets of horizontal plates and the brushes and scrapers on the horizontal plates to alternately scrape and clean the top of the electromagnet multiple times. Not only can the bad grains that have lost magnetic attraction be automatically scraped into the material box, but other contaminants on the top of the electromagnet can also be automatically swept away, which is more conducive to ensuring the cleanliness of the magnetic attraction surface of the electromagnet, and thus more conducive to subsequent suction and selection operations. After that, the horizontal plate and the blocking plate are reset, and the motor is activated again, driving the rotating shaft and the support box to reverse 180 degrees, so that the electromagnet can be turned down again, and then the electromagnet is energized to continue the selection operation;

[0010] When the material box is fully loaded or the size of the electromagnet is not appropriate, the hydraulic cylinder can be operated when the machine is stopped and the electromagnet is clean, so that its piston rod contracts and drives the limit plate to move up until the limit rod is pulled out of the corresponding through hole, and then the mounting block is pulled out, and the original material box can be disassembled as a whole. Then, take another empty material box or a material box with an electromagnet of an appropriate size, first plug the mounting block on it into the support box, and then operate the hydraulic cylinder to extend its piston rod, drive the limit plate down until it presses against the top of the support box, so that the limit rod can pass through the corresponding through hole and plug into the corresponding blind hole, plug and fix the mounting block, and complete the installation and fixation of the new material box, and the installation is stable and does not affect subsequent use. In summary, the automatic removal and collection of the absorbed bad grains and the convenient disassembly and replacement of the electromagnet can be realized, which is simple to operate, saves time and effort, and is more conducive to the selection operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a main structural schematic diagram of the utility model;

[0012] Figure 2 This is a schematic diagram of the main structure of the electromagnet of the utility model after flipping;

[0013] Figure 3 This is a schematic diagram of the main structure of the support box of the utility model;

[0014] Figure 4 This is a schematic diagram of the main structure of the material box of the utility model;

[0015] Figure 5 It is a right side structural schematic diagram of the material box of the utility model;

[0016] Figure 6 It is a schematic diagram of the main structure when the material box and the support box of the utility model are connected.

[0017] Numbers in the figure: 1 is a conveyor belt, 2 is a motor, 3 is a rotating shaft, 4 is a support box, 5 is a hydraulic cylinder, 6 is a limit plate, 7 is a limit rod, 8 is a through hole, 9 is a material box, 10 is a support, 11 is a mounting block, 12 is a blind hole, 13 is a blocking plate, 14 is a first electric push rod, 15 is a support plate, 16 is a support, 17 is a connecting rod, 18 is an electromagnet, 19 is a second electric push rod, 20 is a cross plate, 21 is a brush, and 22 is a scraper. DETAILED DESCRIPTION

[0018] The utility model is further described in detail below in conjunction with the accompanying drawings and specific implementation methods:

[0019] like Figures 1 to 6 As shown, an automatic picker for defective crystal grains includes a conveyor belt 1 conveying in the front-back direction, a motor 2 is fixedly mounted on one side of the conveyor belt 1, the output shaft of the motor 2 faces the direction of the conveyor belt 1 and is coaxially fixedly connected to a rotating shaft 3, and a support box 4 is fixedly connected to the tail end of the rotating shaft 3. A hydraulic cylinder 5 is fixedly mounted on the outer top of the support box 4, the piston rod of the hydraulic cylinder 5 faces downward and is fixedly connected to a limit plate 6, a plurality of limit rods 7 uniformly distributed in a rectangular array are fixedly mounted on the bottom of the limit plate 6, a through hole 8 is opened on the top of the support box 4 corresponding to the limit rod 7, and the side of the support box 4 away from the rotating shaft 3 is open. A material box 9 is provided above the conveyor belt 1. An inverted L-shaped support 10 is fixed on the outer top of the material box 9. A mounting block 11 is fixedly connected to the tail end of the horizontal part of the support 10. The mounting block 11 is inserted into the support box 4 and a blind hole 12 is opened at the position corresponding to the through hole 8 on the top of the support box 4. The limit plate 6 abuts on the top of the support box 4. The limit rod 7 passes through the corresponding through hole 8 and is inserted in the corresponding blind hole 12. The bottom of the material box 9 is open and abuts against a blocking plate 13. A first electric push rod 14 is fixed horizontally along the front-to-back direction on the rear side of the material box 9. The telescopic end of the first electric push rod 14 faces the rear side and is fixedly connected to an L-shaped support plate 15. The horizontal part of the support plate 15 faces forward and is fixedly connected to the rear end of the blocking plate 13. Inverted L-shaped supports 16 are fixed on the left and right sides of the material box 9. Connecting rods 17 are fixedly connected horizontally to the inner sides of the vertical parts of the two supports 16. An electromagnet 18 is fixedly connected between the two connecting rods 17. A second electric push rod 19 is horizontally fixed on the bottom end of the vertical part of the two supports 16. The telescopic ends of the two second electric push rods 19 are arranged opposite to each other and fixedly connected with a horizontal plate 20. A brush 21 and a scraper 22 are fixed on the top of the horizontal plate 20 in sequence from one side close to the corresponding second electric push rod 19 to the other side. The brush 21 and the scraper 22 can both contact the bottom of the electromagnet 18.

[0020] During the selection operation, the conveyor belt 1 can drive the marked wafers to pass under the electromagnet 18. At this time, the electromagnet 18 is energized and has magnetic attraction, so that the marked magnetic defective grains in the passing wafers can be sucked to the bottom of the electromagnet 18, and the defective grains can be automatically sucked and selected. After a period of time, the conveying of the conveyor belt 1 can be suspended, and the electromagnet 18 can be automatically cleaned. Specifically, the motor 2 runs, driving the rotating shaft 3 and the support box 4 to rotate 180 degrees as a whole, so that the electromagnet 18 can be turned up, and the material box 9 is located below the electromagnet 18. Then, the electromagnet 18 is powered off, and the first electric push rod 14 runs, and its telescopic end extends, driving the blocking plate 13 away from the material box 9, so that the top of the material box 9 is now open. Next, the telescopic ends of the two second electric push rods 19 are alternately extended and retracted, which can drive the two sets of horizontal plates 20 and the brushes 21 and scrapers 22 on the horizontal plates 20 to alternately scrape and clean the top of the electromagnet 18 multiple times. Not only can the bad grains that have lost magnetic attraction be automatically scraped into the material box 9, but other contaminants on the top of the electromagnet 18 can also be automatically swept away, which is more conducive to ensuring the cleanliness of the magnetic attraction surface of the electromagnet 18, and thus more conducive to the subsequent suction and selection operations. After that, the horizontal plate 20 and the blocking plate 13 are reset, and the motor 2 is activated again, driving the rotating shaft 3 and the support box 4 to reverse 180 degrees, so that the electromagnet 18 can be turned down again, and then the electromagnet 18 is energized to continue the selection operation;

[0021] When the material box 9 is fully loaded or the size of the electromagnet 18 is not appropriate, the hydraulic cylinder 5 can be operated under the state of stopping and the electromagnet 18 is clean, so that its piston rod is contracted, and the limit plate 6 is driven to move up, until the limit rod 7 is pulled out from the corresponding through hole 8, and then the mounting block 11 is pulled out, and the original material box 9 can be disassembled as a whole. Then, another empty material box 9 or a material box 9 with an electromagnet 18 of an appropriate size is taken, and the mounting block 11 on it is first inserted into the support box 4, and then the hydraulic cylinder 5 is operated to extend its piston rod, and the limit plate 6 is driven to move down until it presses against the top of the support box 4, so that the limit rod 7 can pass through the corresponding through hole 8 and be inserted into the corresponding blind hole 12, and the mounting block 11 is inserted and fixed, that is, the installation and fixation of the new material box 9 is completed, and the installation is stable and does not affect the subsequent use. In summary, the automatic removal and collection of the sucked defective grains and the convenient disassembly and replacement of the electromagnet 18 can be realized, which is easy to operate, saves time and effort, and is more conducive to the selection operation. The conveyor belt 1, the motor 2, the hydraulic cylinder 5, the first electric push rod 14, the electromagnet 18, and the second electric push rod 19 can all adopt the existing technology. The motor 2 can specifically adopt the existing stepping motor with a brake function to cooperate with the corresponding angle of rotation and position locking after rotation.

[0022] In this embodiment, the mounting block 11 is matched with the supporting box 4 to ensure that the mounting block 11 is smoothly plugged and installed in place.

[0023] In this embodiment, the limiting rod 7 is matched with the corresponding through hole 8 and blind hole 12 to ensure that the limiting rod 7 is smoothly inserted and installed in place.

[0024] In this embodiment, the cross-sectional area of ​​the inner side of the material box 9 is larger than the cross-sectional area of ​​the electromagnet 18 to ensure that the material box 9 has enough space to receive the defective grains sucked by the electromagnet 18 and prevent the defective grains from falling to the outside of the material box 9 .

[0025] In this embodiment, the length of the brush 21 and the scraper 22 in the front-to-back direction is greater than the length of the electromagnet 18 in the front-to-back direction, so that the brush 21 and the scraper 22 have sufficient length to scrape and clean the electromagnet to ensure the treatment effect.

[0026] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An automatic picker for defective crystals, comprising a conveyor belt for conveying in a front-to-rear direction, characterized in that: A motor is fixedly mounted above one side of the conveyor belt, and an output shaft of the motor faces the direction of the conveyor belt and is coaxially fixedly connected to a rotating shaft. The tail end of the rotating shaft is fixedly connected to a support box, and a hydraulic cylinder is fixedly mounted on the outer top of the support box, and the piston rod of the hydraulic cylinder faces downward and is fixedly connected to a limit plate, and a plurality of limit rods are fixedly mounted on the bottom of the limit plate and are evenly distributed in a rectangular array, and a through hole is opened on the top of the support box corresponding to the limit rod, and the support box is open on one side away from the rotating shaft. A material box is provided above the conveyor belt, and an inverted L-shaped support is fixedly mounted on the outer top of the material box, and a mounting block is fixedly connected to the tail end of the horizontal part of the support block, and the mounting block is inserted in the support box and has blind holes at the positions of the top corresponding to the through holes, and the limit plate abuts against the top of the support box, and the limit rod passes through the The lifting plate is an L-shaped support plate, and the lifting plate is an L-shaped support plate that is fixed to the lifting plate.

2. The automatic defective die picker according to claim 1, characterized in that: The mounting block is matched with the supporting box.

3. The automatic defective die picker according to claim 1, characterized in that: The limiting rod is matched with the corresponding through hole and blind hole.

4. The automatic defective die picker according to claim 1, characterized in that: The cross-sectional area of ​​the inner side of the material box is larger than the cross-sectional area of ​​the electromagnet.

5. The automatic defective die picker according to claim 1, characterized in that: The length of the brush and the scraper in the front-to-back direction is greater than the length of the electromagnet in the front-to-back direction.

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