Planar electrode processing device for silicon-based chip etching equipment

Abstract

The utility model discloses a planar electrode processing device for silicon-based chip etching equipment, and relates to the field of electrode processing, the planar electrode processing device comprises a box body, an air bellow is fixedly mounted on the rear side of the box body, a top plate is arranged at the top of the air bellow, an operation plate is fixedly mounted in the box body, and a dust cleaning mechanism is arranged in the air bellow; a movable clamping mechanism is arranged in the box body, a punching mechanism is arranged at the bottom of the top plate, by starting an exhaust fan, external air is blown into the box body through an air bellow and then blown out through an air outlet groove, chippings generated during punching are removed, and the situation that the chippings are inhaled by a human body, and consequently lung tissue is damaged is avoided; according to the electrode plate punching device, chronic lung diseases may be caused by long-term exposure, the moving assembly is started for moving the drill bit and punching a plurality of electrode plates, and the clamping assembly is started for driving the clamping block to clamp the electrode plates, so that the electrode plates are prevented from moving during punching, and the accuracy is effectively improved.

Description

Technical Field

[0001] The present application relates to the field of motor processing technology, and specifically to a planar electrode processing device for silicon-based chip etching equipment. Background Art

[0002] The processing of electrode sheets is a multi-step process aimed at preparing electrode materials that meet specific requirements. Electrode processing includes cutting, assembly, punching, surface treatment and other processes. However, punching is used to facilitate installation or connection, and debris will be generated during the punching process. These debris are small and light. When punching is performed manually, the debris will be inhaled by the human body. Long-term inhalation of metal debris may cause the debris to penetrate deep into the lungs, causing lung tissue damage. Long-term exposure may cause chronic lung diseases such as pneumoconiosis. The debris generated may carry bacteria or viruses, which may increase the risk of infection after inhalation.

[0003] In the patent with patent number CN220882639U, through the cooperation of the battery electrode sheet limiting structure and the soft pad, the electric telescopic rod is started to drive the vertical plate to move downward, and the downward movement of the vertical plate drives the connecting rods on both sides to swing relative to each other, and at the same time drives the clamping plates on both sides to slide relative to each other on the slides processed on the first shell, and drives the limiting rods on both sides to slide relative to each other on the slides processed on the inner wall of the first shell. The battery electrode sheet will not produce position displacement and will not affect subsequent production and processing work.

[0004] In the above-mentioned prior art, although clamping can be performed, the debris generated during drilling cannot be cleaned. These debris are small and light. When drilling manually, the debris will be inhaled by the human body. Long-term inhalation of metal debris may cause the debris to penetrate into the lungs, causing lung tissue damage. Long-term exposure may cause chronic lung disease. Some people may have allergic reactions to specific metals. Inhalation of metal debris may cause allergic reactions, such as skin rashes, asthma, etc. Therefore, a planar electrode processing device for silicon-based chip etching equipment is needed. Utility Model Content

[0005] 1. Technical issues to be solved

[0006] In view of the deficiencies in the prior art, the present application provides a planar electrode processing device for silicon-based chip etching equipment, which solves the problems mentioned in the above background technology.

[0007] (II) Technical solution

[0008] To achieve the above objectives, the present application is implemented through the following technical solutions: a planar electrode processing device for silicon-based chip etching equipment, comprising a box body, a bellows is fixedly installed on the rear side of the box body, a top plate is arranged on the top of the bellows, an operating panel is fixedly installed inside the box body, a dust cleaning mechanism is arranged inside the bellows, a movable clamping mechanism is arranged inside the box body, and a punching mechanism is arranged at the bottom of the top plate.

[0009] By adopting the above technical solution, the exhaust fan is started to blow the external air into the interior of the box through the bellows and then blown out through the air outlet slot to clean the debris generated during drilling to prevent the debris from being inhaled by the human body and causing lung tissue damage. Long-term exposure may cause chronic lung disease. The moving component is started to move the drill bit to drill holes in multiple electrode sheets. The clamping component is started to drive the clamping block to clamp the electrode sheet to prevent the electrode sheet from being displaced during drilling, thereby effectively improving the accuracy.

[0010] Preferably, the dust cleaning mechanism includes an exhaust assembly and an air spray assembly, the exhaust assembly includes an exhaust fan for exhausting air, and the air spray assembly includes an air outlet slot for spraying air.

[0011] By adopting the above technical solution, the exhaust fan blows external air into the interior of the box through the bellows, and then blows it out through the air outlet slot to clean the debris generated during drilling.

[0012] Preferably, the movable clamping mechanism comprises a movable component and a clamping component, the movable component comprises a sliding block for sliding, and the clamping component comprises a clamping plate for telescoping.

[0013] By adopting the above technical solution, the clamping mechanism is started to drive the clamping plate to clamp, thereby avoiding displacement of the electrode sheet during drilling, thereby effectively improving the accuracy.

[0014] Preferably, the punching mechanism comprises a drill bit for punching holes, and the drill bit is detachable.

[0015] By adopting the above technical solution, since the drill bit is detachably connected, it can be used to replace drill bits of different models to meet different drilling requirements.

[0016] Preferably, the exhaust assembly includes an exhaust slot opened on the rear side of the bellows, a fan rack is fixedly mounted on the inner wall of the bellows, an exhaust fan is fixedly mounted on the fan rack, and a plurality of ventilation holes are opened on one side of the bellows.

[0017] By adopting the above technical solution, the exhaust fan blows external air into the interior of the box through the bellows, and then blows it out through the air outlet slot to clean the debris generated during drilling.

[0018] Preferably, the air spray assembly includes an air spray box fixedly mounted on the top of the operating panel, the air outlet slot is provided on one side of the air spray box, and the bellows is connected to the air spray box through a plurality of ventilation holes.

[0019] By adopting the above technical solution, the exhaust fan is started to blow external air into the interior of the box through the bellows, and then blown out through the air outlet slot, so as to clean the debris generated during punching, thereby preventing the debris from being inhaled by the human body and causing lung tissue damage. Long-term exposure may cause chronic lung disease.

[0020] Preferably, the moving component includes a motor slot opened on the top of the box body, a cover plate is hinged on the top of the box body, a pull-twist device is fixedly installed on the top of the cover plate, the cover plate corresponds to the motor slot, a motor is fixedly installed on the inner side wall of the motor slot, and a threaded groove is also opened on the top of the box body, the threaded groove is located on one side of the motor slot, threaded rods are rotatably connected on both sides of the inner wall of the threaded groove, the threaded rods are fixedly connected to the output end of the motor, and the sliding block is threadedly connected to the outer side wall of the threaded rod.

[0021] By adopting the above technical solution, the motor is started to drive the threaded rod to rotate, and the sliding block on the outside is linked to move, so that the punching position is changed, thereby punching holes in the electrode sheet, which effectively improves flexibility.

[0022] Preferably, the clamping assembly includes two electric telescopic rods fixedly mounted on the front side of the inner wall of the box body, the clamping plate fixedly mounted on the output ends of the two electric telescopic rods, a limit plate fixedly mounted on the top of the operating panel, the clamping plate is in contact with the limit plate, and electrode grooves are provided on the tops of the limit plate and the clamping plate.

[0023] By adopting the above technical solution, the electric telescopic rod 1 is started to drive the limit plate to move, so that the clamping plate contacts the limit plate, thereby clamping the electrode sheet.

[0024] Preferably, the punching mechanism includes a mounting plate fixedly mounted on the inner bottom wall of the top plate, an electric telescopic rod 2 is fixedly mounted on the bottom of the mounting plate, a mounting frame is fixedly mounted on the bottom of the electric telescopic rod 2, a motor is fixedly mounted on the mounting frame, and the drill bit is connected to the output end of the motor.

[0025] By adopting the above technical solution, the electric telescopic rod 2 is started to be extended and retracted, so that the drill bit is lowered, and then the motor is started to drive the drill bit to rotate, so as to drill holes in the electrode sheet.

[0026] (III) Beneficial effects

[0027] The present application provides a planar electrode processing device for silicon-based chip etching equipment. The specific beneficial effects are as follows:

[0028] 1. This planar electrode processing device for silicon-based chip etching equipment starts the exhaust fan to blow external air into the interior of the box through the bellows, and then blows it out through the air outlet slot. It is used to clean up the debris generated during drilling to prevent the debris from being inhaled by the human body, causing lung tissue damage. Long-term exposure may cause chronic lung disease.

[0029] 2. This planar electrode processing device for silicon-based chip etching equipment is used to move the drill bit by starting the moving component to drill multiple electrode sheets. By starting the clamping component, the clamping block is driven to clamp the electrode sheet to avoid displacement of the electrode sheet during drilling, thereby effectively improving accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the implementation scheme of the utility model or the technical scheme in the prior art, the drawings required for use in the implementation scheme or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some implementation schemes of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0031] Figure 1 A schematic diagram of the three-dimensional structure of this application;

[0032] Figure 2 This is a schematic diagram of the cross-sectional structure of the dust cleaning mechanism of this application;

[0033] Figure 3 This is a schematic diagram of the cross-sectional structure of the mobile clamping mechanism of the present application;

[0034] Figure 4 This is a schematic diagram of the cross-sectional structure of the punching mechanism of the present application.

[0035] In the figure: 1. box body; 10. bellows; 11. top plate; 12. operating panel; 2. dust cleaning mechanism; 20. exhaust assembly; 21. air spray assembly; 201. exhaust slot; 202. fan rack; 203. exhaust fan; 204. ventilation hole; 211. air spray box; 212. air outlet slot; 3. mobile clamping mechanism; 30. mobile assembly; 31. clamping assembly; 301. motor slot; 302. motor; 303. cover plate; 304. pulling and twisting; 305. threaded slot; 306. threaded rod; 307. sliding block; 311. electric telescopic rod one; 312. clamping plate; 313. limit plate; 314. electrode slot; 4. punching mechanism; 41. mounting plate; 42. electric telescopic rod two; 43. mounting frame; 44. motor; 45. drill bit. DETAILED DESCRIPTION

[0036] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0037] Example 1

[0038] Reference Figure 1 , 2 , 3 and 4 are the first embodiment of the utility model, which provides a planar electrode processing device for silicon-based chip etching equipment, including a box body 1, a bellows 10 is fixedly installed on the rear side of the box body 1, a top plate 11 is arranged on the top of the bellows 10, an operating panel 12 is fixedly installed inside the box body 1, a dust cleaning mechanism 2 is arranged inside the bellows 10, a movable clamping mechanism 3 is arranged inside the box body 1, and a punching mechanism 4 is arranged at the bottom of the top plate 11.

[0039] Specifically, the dust cleaning mechanism 2 includes an exhaust assembly 20 and an air spray assembly 21 . The exhaust assembly 20 includes an exhaust fan 203 for exhausting air, and the air spray assembly 21 includes an air outlet slot 212 for spraying air.

[0040] Specifically, the exhaust assembly 20 includes an exhaust slot 201 opened on the rear side of the bellows 10, a fan frame 202 is fixedly installed on the inner wall of the bellows 10, an exhaust fan 203 is fixedly installed on the fan frame 202, and a plurality of ventilation holes 204 are opened on one side of the bellows 10. By starting the exhaust fan 203, the external air is blown into the interior of the box body 1 through the bellows 10, and then blown out through the air outlet slot 212, so as to clean the debris generated during punching.

[0041] Specifically, the air spray assembly 21 includes an air spray box 211 fixedly mounted on the top of the operating panel 12, and an air outlet slot 212 is provided on one side of the air spray box 211. The bellows 10 is connected to the air spray box 211 through a plurality of ventilation holes 204. The ventilation holes 204 are used to spray out the drawn air to prevent debris generated during punching from being scattered on the surface of the operating table 12 and being inhaled by the human body to cause injury.

[0042] Furthermore, by starting the exhaust fan 203, the external air is blown into the interior of the box body 1 through the bellows 10, and then blown out through the air outlet slot 212, so as to clean the debris generated during the punching, so as to prevent the debris from being inhaled by the human body and causing damage to the lung tissue. Long-term exposure may cause chronic lung disease.

[0043] Example 2

[0044] Reference Figure 2 and 3, which is the second embodiment of the utility model, and this embodiment is based on the previous embodiment. The mobile clamping mechanism 3 includes a moving component 30 and a clamping component 31. The moving component 30 includes a sliding block 307 for sliding, and the clamping component 31 includes a clamping plate 312 for telescoping.

[0045] Specifically, the movable component 30 includes a motor slot 301 opened on the top of the box body 1, a cover plate 303 is hinged on the top of the box body 1, a pull-twist block 304 is fixedly installed on the top of the cover plate 303, the cover plate 303 corresponds to the motor slot 301, and the inner wall of the motor slot 301 is fixedly installed with a motor 302. A threaded groove 305 is also opened on the top of the box body 1, and the threaded groove 305 is located on one side of the motor slot 301. Threaded rods 306 are rotatably connected on both sides of the inner wall of the threaded groove 305, and the threaded rod 306 is fixedly connected to the output end of the motor 302. The sliding block 307 is threadedly connected to the outer wall of the threaded rod 306. By starting the motor 302, the threaded rod 306 is driven to rotate, and the sliding block 307 on the outside is linked to move, so that the punching position is changed, thereby punching holes in the electrode sheet, which effectively improves flexibility.

[0046] Specifically, the clamping assembly 31 includes two electric telescopic rods 311 fixedly installed on the front side of the inner wall of the box body 1, the clamping plate 312 fixedly installed on the output ends of the two electric telescopic rods 311, and the top of the operating panel 12 is fixedly installed with a limit plate 313, the clamping plate 312 is in contact with the limit plate 313, and the limit plate 313 and the top of the clamping plate 312 are provided with an electrode groove 314. By starting the electric telescopic rod 311, the limit plate 313 is driven to move, so that the clamping plate 312 is in contact with the limit plate 313, so that the electrode sheet is clamped.

[0047] Furthermore, by starting the motor 302, the threaded rod 306 is driven to rotate, and the outer sliding block 307 is linked to move, so that the punching position is changed, thereby punching the electrode sheet, which effectively improves the flexibility. By starting the electric telescopic rod 311, the limit plate 313 is driven to move, and the clamping plate 312 is brought into contact with the limit plate 313, so that the electrode sheet is clamped to avoid displacement of the electrode sheet during punching, which effectively improves the accuracy. The motor slot 314 is provided for placing the electrode plate.

[0048] Example 3

[0049] Reference Figure 2 and 4 , which is the second embodiment of the utility model, and this embodiment is based on the previous embodiment, and the punching mechanism 4 includes a drill bit 45 for punching holes, and the drill bit 45 is detachable.

[0050] Specifically, the punching mechanism 4 includes a mounting plate 41 fixedly mounted on the inner bottom wall of the top plate 11, an electric telescopic rod 42 is fixedly mounted on the bottom of the mounting plate 41, a mounting frame 43 is fixedly mounted on the bottom of the electric telescopic rod 42, a motor 44 is fixedly mounted on the mounting frame 43, a drill bit 45 is connected to the output end of the motor 44, and because the drill bit 45 is detachably connected, it is used to replace drill bits 45 of different models to meet different punching requirements.

[0051] Furthermore, the electric telescopic rod 42 is started to extend and retract, so that the drill bit 45 is lowered, and then the motor 44 is started to drive the drill bit 45 to rotate, thereby drilling holes in the electrode sheet.

[0052] All electrical equipment in this solution are powered by an external power supply.

[0053] Working principle: This is a planar electrode processing device for silicon-based chip etching equipment. By starting the exhaust fan 203, the external air is blown into the interior of the box body 1 through the bellows 10, and then blown out through the air outlet slot 212, which is used to clean up the debris generated during drilling to prevent the debris from being inhaled by the human body. By starting the motor 302, the threaded rod 306 is driven to rotate, and the sliding block 307 on the outside is linked to move to change the drilling position, thereby drilling holes in the electrode sheet, which effectively improves the flexibility. By starting the electric telescopic rod 1 311, the limit plate 313 is driven to move, so that the clamping plate 312 contacts the limit plate 313, so that the electrode sheet is clamped, and the displacement of the electrode sheet is avoided during drilling, which effectively improves the accuracy. The motor slot 314 is opened to place the electrode plate. By starting the electric telescopic rod 2 42, it is extended and retracted to make the drill bit 45 descend, and then the drill bit 45 is driven to rotate by starting the motor 44, thereby drilling holes in the electrode sheet.

[0054] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0055] Although the embodiments of the present application have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A planar electrode processing device for a silicon-based chip etching device, comprising a housing (1), characterized in that: A bellows (10) is fixedly mounted on the rear side of the box body (1), a top plate (11) is arranged on the top of the bellows (10), an operating panel (12) is fixedly mounted inside the box body (1), a dust cleaning mechanism (2) is arranged inside the bellows (10), a movable clamping mechanism (3) is arranged inside the box body (1), and a punching mechanism (4) is arranged at the bottom of the top plate (11); The dust cleaning mechanism (2) comprises an air exhaust component (20) and an air spray component (21), the air exhaust component (20) comprises an exhaust fan (203) for exhausting air, and the air spray component (21) comprises an air outlet slot (212) for spraying air; The movable clamping mechanism (3) comprises a movable component (30) and a clamping component (31), wherein the movable component (30) comprises a sliding block (307) for sliding, and the clamping component (31) comprises a clamping plate (312) for telescoping; The punching mechanism (4) comprises a drill bit (45) for punching holes, and the drill bit (45) is detachable.

2. The planar electrode processing device for silicon-based chip etching equipment according to claim 1, characterized in that: The exhaust assembly (20) comprises an exhaust slot (201) provided on the rear side of the bellows (10); a fan frame (202) is fixedly mounted on the inner wall of the bellows (10); an exhaust fan (203) is fixedly mounted on the fan frame (202); and a plurality of ventilation holes (204) are provided on one side of the bellows (10).

3. The planar electrode processing device for silicon-based chip etching equipment according to claim 2, characterized in that: The air spray assembly (21) comprises an air spray box (211) fixedly mounted on the top of the operating panel (12); the air outlet slot (212) is provided on one side of the air spray box (211); and the bellows (10) is connected to the air spray box (211) via a plurality of ventilation holes (204).

4. The planar electrode processing device for silicon-based chip etching equipment according to claim 1, characterized in that: The moving assembly (30) comprises a motor slot (301) provided at the top of the box body (1); a cover plate (303) is hingedly connected to the top of the box body (1); a pull-twist (304) is fixedly installed on the top of the cover plate (303); the cover plate (303) corresponds to the motor slot (301); a motor (302) is fixedly installed on the inner side wall of the motor slot (301); a threaded slot (305) is also provided at the top of the box body (1); the threaded slot (305) is located on one side of the motor slot (301); threaded rods (306) are rotatably connected on both sides of the inner wall of the threaded slot (305); the threaded rod (306) is fixedly connected to the output end of the motor (302); and the sliding block (307) is threadedly connected to the outer side wall of the threaded rod (306).

5. The planar electrode processing device for silicon-based chip etching equipment according to claim 1, characterized in that: The clamping assembly (31) comprises two electric telescopic rods (311) fixedly mounted on the front side of the inner wall of the box body (1); the clamping plate (312) fixedly mounted on the output ends of the two electric telescopic rods (311); a limit plate (313) fixedly mounted on the top of the operating panel (12); the clamping plate (312) and the limit plate (313) are in contact with each other; and electrode grooves (314) are provided on the tops of the limit plate (313) and the clamping plate (312).

6. The planar electrode processing device for silicon-based chip etching equipment according to claim 1, characterized in that: The punching mechanism (4) comprises a mounting plate (41) fixedly mounted on the inner bottom wall of the top plate (11); a second electric telescopic rod (42) is fixedly mounted on the bottom of the mounting plate (41); a mounting frame (43) is fixedly mounted on the bottom of the second electric telescopic rod (42); a motor (44) is fixedly mounted on the mounting frame (43); and the drill bit (45) is connected to an output end of the motor (44).

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