Tubular target material pressure slip casting resin mold

Abstract

The utility model relates to the technical field of pressure slip casting molds, in particular to a tubular target pressure slip casting resin mold which comprises an upper cover and a lower cover, a tubular outer frame mold and a cylindrical central column are arranged between the upper cover and the lower cover, and a layer of rubber mold is additionally arranged on the periphery of the central column. The upper cover, the lower cover and the outer frame mold are detachably fixed through four sets of C-shaped clamps respectively, positioning protrusions are arranged on the inner side of the upper cover and the inner side of the lower cover and used for being combined and positioned with grooves formed in the upper end face and the lower end face of the center column so as to prevent displacement, and pressure grouting holes are formed in the upper cover. And a gap for accommodating slurry is reserved between the inner wall of the outer frame mold and the central column peripheral rubber mold. The resin mold is simple and clear in structure and can be matched with an oil pressure demolding ring to facilitate demolding, the phenomena of cracking and mold sticking are avoided, a target biscuit body prepared by utilizing the mold is high in density, and the phenomenon of uniform cracks on the surface of a ceramic target biscuit can be eliminated.

Description

Technical Field

[0001] The utility model relates to the technical field of pressure grouting molding dies, in particular to a tubular target material pressure grouting molding resin die. Background Art

[0002] The coating target is a sputtering source that forms various functional thin films on the substrate under appropriate process conditions by magnetron sputtering, multi-arc ion plating or other types of coating systems. Simply put, the target material is the target material bombarded by high-speed energetic particles. Various types of sputtered thin film materials have been widely used in semiconductor integrated circuits, optical discs, flat panel displays, and surface coatings of workpieces, and the target material is the key to the preparation of sputtered thin film materials.

[0003] Generally, the utilization rate of planar target materials is only 30-40%, while that of tubular target materials can be more than 50%. When the target is precious metal material, it is undoubtedly of great significance to improve the utilization rate of target materials. However, the production process and technical equipment of tubular target materials are not yet mature and stable. The main preparation methods are room temperature sintering method and ceramic slurry casting method. Among them, room temperature sintering method is a target material preparation method that emerged in the early 1990s. It uses slurry casting to prepare high-density target blanks. The target blanks are sintered under a certain atmosphere and temperature. By controlling the sintering temperature and sintering atmosphere, the growth of the target blank grains is effectively controlled, achieving high densification of the target material and uniformity of grain distribution. In addition, the ceramic slurry casting method generally uses a gypsum mold, which is to inject the slurry into the gypsum mold under pressure, and use a water-absorbent multi-emulsion closed mold to absorb water from both sides or all surfaces of the model. However, when this method is used, defects such as uneven density and uneven composition are easily generated, and the bending strength and molding density of the molded body are low, and defects such as water marks and cracks are easily generated after sintering, and it is not possible to ensure that a high-density sintered body is obtained. In addition, since the gypsum used in the slurry casting molding is water-soluble, calcium may be mixed into the molded body. As a sputtering target, it is hoped that it has high purity. If calcium is mixed into it, it will have an adverse effect on the conductivity, transparency and erosion of the film. At the same time, the slurry casting method has strict requirements on the shape, particle size and particle size distribution of the powder. To obtain a dense sintered body, it is generally necessary to first ball mill the powder, air flow crushing and sedimentation classification. In addition, it is necessary to increase the sintering activity of the raw material powder and add sintering aids to meet the requirements. However, the activator and sintering aid are difficult to remove from the sintered body. Therefore, it is necessary to introduce a new tubular target pressure grouting molding process. Summary of the invention

[0004] The utility model aims to provide a pressure grouting molding resin mold for a tubular ceramic target material which has a simple and clear structure and is convenient for demoulding. The mold can adapt to the production process of preparing tubular ceramic targets in large quantities at low cost.

[0005] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is as follows.

[0006] A tubular target pressure grouting molding resin mold comprises an upper cover and a lower cover, between which a cylindrical or tubular porous resin filter outer frame mold and an aluminum alloy cylindrical solid center column are arranged, a layer of rubber mold is added on the outer wall of the center column to facilitate demoulding, and the upper cover and the lower cover are respectively fixed to the outer frame mold by four groups of C-shaped clamps, and the inner sides of the upper cover and the lower cover are provided with positioning protrusions for tightly combining with grooves arranged on the upper and lower end surfaces of the aluminum alloy cylindrical solid center column, a gap is left between the outer frame mold and the center column for accommodating slurry for pressure grouting, and a pressure grouting hole is opened on the upper cover.

[0007] Among them, the upper cover, the lower cover, the outer frame mold and the central column are all sealed and combined.

[0008] The resin mold is also provided with a hydraulic ejection ring made of rubber, which can be combined with a hydraulic press to eject the aluminum alloy center column. The inner diameter is 140 mm and the thickness is 50 mm.

[0009] Among them, the materials of the upper cover and the lower cover are both aluminum alloy, and the pressure grouting holes on the upper cover are circular through holes with a diameter of 15-25mm.

[0010] The compressive strength of the outer frame mold of the cylindrical porous resin filter material is greater than 20Mpa, the flexural strength is 7-10Mpa, the porosity is 40-50%, and the average pore size is less than 0.5μm.

[0011] Among them, the center column is made of aluminum alloy, the inner diameter of the groove on the upper end surface of the center column is 80mm, and the depth is 10mm. The inner diameter of the groove on the lower end surface of the center column is 80mm, and the depth is 3mm. They are used to seal with the upper cover and the lower cover respectively. The sizes of the positioning protrusions set on the inner sides of the upper cover and the lower cover match the sizes of the grooves set on the upper and lower end surfaces of the center column respectively.

[0012] The utility model provides a pressure grouting resin mold for tubular ceramic target materials. The mold is a pressure filtration molding mold with the advantages of simple mold structure and high density of the prepared ceramic target blank. It is easy to demould without sticking to the mold, especially it can eliminate the cracking phenomenon on the surface of the ceramic target blank. After the blank is sintered, there are no water marks and pores, and the relative density is greater than 99.5%. The mold solves the problems of poor water absorption, difficulty in molding and insufficient durability of the mold itself in the traditional gypsum dehydration process, and is suitable for low-cost and large-scale production of tubular ceramic targets. When the pressure grouting tubular ceramic target mold of the utility model is used to mold the ceramic target blank, there is no need to use expensive hot isostatic pressing equipment. A target with highly uniform density can be obtained directly through pressure grouting. After sintering, it fully meets the requirements of various factories for density, dimensional tolerance, coating effect and service life, and greatly improves the production yield of tubular ceramic targets. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the structure of a resin mold for pressure grouting molding of a tubular target material in an embodiment of the utility model.

[0014] In the figure: 1-upper cover, 2-lower cover, 3-outer frame mold, 4-center column, 5-rubber mold, 6-C-type clamp, 7-pressure grouting hole, 8-oil pressure demolding ring, 9-positioning convex. DETAILED DESCRIPTION

[0015] In order to more clearly understand the above-mentioned purpose, features and advantages of the utility model, the utility model is further described in detail below in conjunction with the accompanying drawings and specific embodiments. In the following description, many specific details are set forth to facilitate a full understanding of the utility model, but the utility model can also be implemented in other ways different from those described herein, and therefore, the utility model is not limited to the limitations of the specific embodiments disclosed below.

[0016] like Figure 1 A pressure injection molding resin mold for a tubular ceramic target material is shown, comprising an upper cover 1 and a lower cover 2 made of aluminum alloy, a tubular outer frame mold 3 made of porous resin filter material and an aluminum alloy cylindrical solid center column 4 are provided between the upper cover 1 and the lower cover 2, and a layer of rubber mold 5 (the material of the rubber film 5 is PET polyester plastic) is added on the periphery of the center column 4 to facilitate demoulding, and four groups of C-shaped clamps 6 are used to fix the upper cover 1, the lower cover 2 and the outer frame mold 3 respectively, and a pressure grouting hole 7 is opened on the aluminum alloy upper cover 1, and a gap is left between the inner wall of the outer frame mold 3 and the rubber mold 5 on the periphery of the aluminum alloy cylindrical solid center column 4 to accommodate the slurry, and the pressure grouting hole 7 can be connected to the gap.

[0017] Among them, the inner surfaces of the upper cover 1 and the lower cover 2 are both provided with positioning protrusions 9, which are cylindrical or truncated cone-shaped, and are used to combine with the matching grooves set on the upper and lower end surfaces of the solid cylindrical center column 4 of aluminum alloy to play a positioning and limiting role, so that the center column 4 can be located at the center position without displacement, and the close contact between the upper cover 1, the lower cover 2 and the center column 4 is maintained during the assembly of the mold, which is conducive to improving the fastening and sealing effects; the diameter of the center column 4 is 140mm, and the inner diameter of the groove on the upper end surface of the center column 4 is 80mm, and the depth is 10mm; the inner diameter of the groove on the lower end surface of the center column 4 is 80mm, and the depth is 3mm. Annular flanges are provided on the outer side walls of the upper and lower ends of the outer frame mold 3. The outer diameter of the annular flanges is equal to the diameters of the upper cover 1 and the lower cover 2. The cylindrical outer frame mold 3 is fastened by four sets of C-type clamps 6 and bolts ( Figure 1 The C-shaped clip 6 is fixedly sealed with the upper cover 1 and the lower cover 2 at the corresponding positions of the convex structure on the middle C-shaped clip 6, and the C-shaped clip 6 is arranged around the corresponding annular flange, the upper cover 1 and the lower cover 2. In addition, the upper cover 1 is provided with pressure grouting holes 7, and the positions of the pressure grouting holes 7 correspond to the positions of the gaps between the outer frame mold 3 and the rubber mold 5, for injecting ceramic slurry.

[0018] The upper cover 1 and the lower cover 2 are made of aluminum alloy, and the pressure injection hole 7 provided on the upper cover 1 is a circular through hole with a diameter of 15-25 mm. The material of the cylindrical outer frame mold 3 is a porous resin, which is a porous, insoluble exchange material with a compressive strength of >20Mpa and a flexural strength of 7-10Mpa; a porosity of 40-50% and an average pore size of <0.5μm.

[0019] In addition, a hydraulic ejector ring 8 is provided. The inner diameter of the hydraulic ejector ring 8 is 140 mm, the thickness is 50 mm, and the material is rubber. After grouting molding, the hydraulic ejector ring 8 can be combined with a hydraulic press to eject the aluminum alloy center column 4.

[0020] The resin mold for pressure grouting molding of tubular target materials provided by the utility model can effectively improve the density of the pressure grouting molding tubular target blanks, and will not stick to the mold during demolding. The grouting molding time can be completed within about 5 minutes depending on the size of the blank, and in particular, the problem of cracks on the surface of the blank is eliminated. Continuous grouting can be performed to improve the production efficiency of the product, and the uniformity and density of the ceramic blank are improved. The surface of the blank formed after grouting with the resin mold is flat, smooth and crack-free, and the sintered body is not prone to fragmentation and uneven density. It can be applied to ceramic tubular targets of different sizes. This mold is beneficial to improving the density of the blank, especially eliminating the cracks on the surface of the blank, and is suitable for making large-size target molds. This mold has a small investment in equipment and a simple process flow, and is suitable for high-efficiency, mechanized large-scale production.

[0021] The method of using the tubular target resin mold of the utility model is as follows:

[0022] During the pressure grouting process of the tubular target resin mold, the pressurized ceramic slurry enters from the pressure grouting hole 7, fills the gap between the inner wall of the outer frame mold 3 and the outer rubber mold 5 of the center column 4, passes through the outer frame mold 3 of the cylindrical porous resin filter material, and absorbs the excess liquid phase. After a short period of pressure holding, a ceramic blank with uniform density, smooth surface and no cracks is formed in the cavity of the mold, and then the C-type clamp 6 is removed, the upper cover 1 and the lower cover 2 are opened, and the aluminum alloy center column 4 is slowly ejected by the hydraulic press in conjunction with the hydraulic mold ejection ring 8 to complete the demolding of the ceramic blank. The entire pressure grouting molding process is completed by taking out the tubular ceramic blank. After pressure grouting, the water is absorbed by the resin outer frame mold 3, which accelerates the drainage. The blank will shrink due to the removal of water, so that the blank can be demolded smoothly after forming.

[0023] The tubular target resin mold of the utility model can be continuously grouted, has the characteristics of repeated use, and can improve the production efficiency of the product; it can also be prefabricated into components of different sizes according to demand, and the combination and assembly are simple, and can be applied to the production of tubular targets of different sizes; at the same time, the ceramic target prepared by using this mold is smoother and crack-free than other mold blanks, and the obtained blank products have greatly improved in quality, and are less likely to have color, uneven density, water marks and fragmentation after sintering; after relevant tests, no pores are generated after the blank is sintered. The tubular target resin mold of the utility model can be used for pressure grouting method, and can mass-produce rotating ceramic targets of various sizes. The mold has a long service life, which can improve production efficiency.

Claims

1. A pressure injection molding resin mold for a tubular ceramic target, characterized in that: The invention comprises an upper cover (1) and a lower cover (2), wherein a tubular outer frame mold (3) and a cylindrical center column (4) are provided between the upper cover (1) and the lower cover (2), a layer of rubber mold (5) is provided on the periphery of the center column (4), and four groups of C-shaped clamps (6) are used to detachably fix the upper cover (1), the lower cover (2) and the outer frame mold (3), respectively, and the inner sides of the upper cover (1) and the lower cover (2) are provided with positioning protrusions (9) for combining with grooves provided on the upper and lower end surfaces of the center column (4) for positioning to prevent displacement, and a pressure grouting hole (7) is opened on the upper cover (1), and a gap is left between the inner wall of the outer frame mold (3) and the rubber mold (5) on the periphery of the center column (4) for accommodating slurry.

2. A pressure injection molding resin mold for a tubular ceramic target according to claim 1, characterized in that: The upper cover (1) and the lower cover (2) are both made of aluminum alloy, and the outer frame mold (3) is made of porous resin filter material.

3. A pressure injection molding resin mold for a tubular ceramic target according to claim 1, characterized in that: Annular flanges are provided on the outer side walls of the upper and lower ends of the outer frame mold (3); the outer diameters of the annular flanges are equal to the diameters of the upper cover (1) and the lower cover (2); and four groups of C-shaped clamps (6) detachably fix the upper cover (1), the lower cover (2) and the outer frame mold (3) via the annular flanges.

4. A resin mold for pressure injection molding of a tubular ceramic target according to claim 1, characterized in that: The inner diameter of the groove on the upper end surface of the center column (4) is 80 mm and the depth is 10 mm; the inner diameter of the groove on the lower end surface of the center column (4) is 80 mm and the depth is 3 mm; the sizes of the positioning protrusions (9) arranged on the inner sides of the upper cover (1) and the lower cover (2) respectively match the sizes of the grooves arranged on the upper and lower end surfaces of the center column (4).

5. A resin mold for pressure injection molding of a tubular ceramic target according to claim 1, characterized in that: The outer frame mold (3), the central column (4), the upper cover (1) and the lower cover (2) are all sealed together.

6. A resin mold for pressure injection molding of a tubular ceramic target according to claim 1, characterized in that: The pressure grouting hole (7) is a circular through hole with a diameter of 15-25 mm.

7. A resin mold for pressure injection molding of a tubular ceramic target as claimed in claim 2, characterized in that: The outer frame mold (3) has a compressive strength of >20 MPa and a flexural strength of 7-10 MPa; a porosity of 40-50% and an average pore size of <0.5 μm.

8. A resin mold for pressure injection molding of a tubular ceramic target according to claim 4, characterized in that: The material of the central column (4) is aluminum alloy, and the central column (4) is a solid cylinder with a diameter of 140 mm.

9. A resin mold for pressure injection molding of a tubular ceramic target according to claim 8, characterized in that: The resin mold is also provided with a hydraulic ejection ring (8), which is made of rubber and is used to eject the center column (4) in combination with a hydraulic press after grouting molding. The inner diameter of the hydraulic ejection ring (8) is 140 mm and the thickness is 50 mm.

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