Improved wire feeding guide pipe, evaporation system and vacuum evaporation equipment

Abstract

The utility model discloses an improved wire feeding guide pipe, an evaporation system and vacuum evaporation equipment, which comprise a pipe body, a continuous channel is arranged in the pipe body and is used for a metal wire to pass through, and the metal wire extends to the upper part of an evaporation surface of an evaporation vessel through the channel; the main body of the pipe body is arranged in a non-evaporation area on the side face of the evaporation vessel, and the outlet end of the pipe body extends to the position above an evaporation area of the evaporation vessel. According to the improved wire feeding guide pipe, the arrangement of the wire feeding guide pipe is optimized, shielding of a metal steam evaporation path generated by an evaporation vessel is reduced, and wires are fed into a needed area.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to an improved wire feeding duct, a vapor deposition system and vacuum vapor deposition equipment. Background Art

[0002] For thin film products using vacuum evaporation, such as metal targets based on polymer films as carriers, the commonly used coating equipment is a vacuum coating machine. The vacuum coating machine is equipped with a wire feeding mechanism and an evaporation boat. The wire feeding mechanism transports the linear target material to the surface of the evaporation boat. Under the high temperature generated by the evaporation mechanism, the metal is evaporated into a gaseous state and coated on the plastic film.

[0003] At present, a double-row evaporation boat structure is generally adopted, and a wire feeding mechanism is set on one side of each evaporation boat, that is, a single-side wire feeding method is adopted, and the length of the evaporation boat is limited, so the evaporation amount of the metal wire is relatively small. In view of the above technical problems, the prior art, such as patent publication number CN219449843U, proposes to adopt a double-side, multi-wire feeding method to increase the wire feeding amount.

[0004] In the above technical solution, a structure with multiple groups of wire feed tubes is adopted on one side, and the multiple groups of improved wire feed tubes extend to different axial positions of the evaporation boat respectively. If too many improved wire feed tubes are set, the evaporation path of the metal vapor will be blocked, which will affect the evaporation amount to a certain extent.

[0005] Further improvement is needed. Utility Model Content

[0006] The utility model aims to solve one of the technical problems in the related art at least to a certain extent. To this end, one purpose of the utility model is to provide an improved wire feeding duct, optimize the arrangement of the wire feeding duct, reduce the obstruction of the evaporation path of the metal vapor generated by the evaporation vessel, and feed the wire to the required area.

[0007] Another object of the present application is to provide an evaporation system having the above-mentioned improved wire feed guide tube structure;

[0008] Another object of the present application is to provide a vacuum coating device having the above-mentioned evaporation system.

[0009] The technical solution of the utility model is as follows:

[0010] An improved wire feeding guide tube comprises a tube body, in which a continuous channel is arranged for the metal wire to pass through, and the metal wire extends through the channel to above the evaporation surface of the evaporator;

[0011] The main body of the tube is arranged in a non-evaporation area on the side of the evaporation vessel, and the outlet end of the tube extends to above the evaporation vessel.

[0012] Based on the above technical solution, the shielding of the evaporation path by the tube body can be reduced.

[0013] Furthermore, the tube body is arranged below the intersection area of ​​the evaporation paths of adjacent evaporating vessels.

[0014] Based on the above technical solution, the impact on the evaporation path can be further reduced.

[0015] Furthermore, the tube body comprises a first tube body, the first tube body is arranged between gaps between adjacent evaporating vessels, and the first tube body bends downward in an arc-shaped trajectory.

[0016] Based on the above technical solution, the first tube body has a similar structure to a conventional wire feeding tube, which is convenient for being led out from the pressure wheel mechanism of the wire feeding mechanism.

[0017] Furthermore, the projection of the first tube is parallel to the axis of the evaporation vessel boat.

[0018] Based on the above technical solution, it can be easier to arrange the tube body and related wire feeding mechanisms.

[0019] Furthermore, the tube body also includes a second tube body connected to the outlet end of the first tube body, the second tube body is a curved tube, and the center of the projection of the second tube body is arranged toward the corresponding side close to the wire feeding evaporator vessel.

[0020] Based on the above technical solution, the transmission track of the metal wire can be transmitted from the side of the evaporating vessel to the top of the boat body, which greatly reduces the interference and obstruction of the metal vapor.

[0021] Furthermore, the central angle α of the arc length corresponding to the second tube body is ≤90°.

[0022] Furthermore, the projected end of the second tube body extends to the middle area of ​​the evaporation boat.

[0023] Furthermore, the tube body further comprises a third tube body, which is connected to the outlet end of the second tube body, and the center of the projection of the third tube body is arranged away from the corresponding side of the evaporation boat.

[0024] Furthermore, the outlet end of the third tube body extends to be parallel to the axis of the evaporation boat.

[0025] Furthermore, the central angle β corresponding to the arc of the third tube body is ≤90°.

[0026] Based on the above technical solution, after the metal wire is led out of the third tube body, since the arc end of the third tube body is basically set horizontally, its downward component force is relatively small, thereby reducing the impact of the molten metal liquid on the evaporation boat; at the same time, the transported metal wire can basically be infiltrated and distributed in the horizontal direction of the evaporation boat.

[0027] A vapor deposition system is a single-side or double-side wire feeding system, comprising a wire feeding mechanism, wherein the wire feeding mechanism comprises the above-mentioned improved wire feeding duct.

[0028] Furthermore, the evaporation vessel is an extended evaporation boat, and its length is set to 20-35 cm.

[0029] A vacuum coating machine comprises the above-mentioned evaporation system. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0031] Figure 1 It is a schematic diagram of the top view of the structure of the tube body and the evaporation boat (the figure only shows the light situation of single-side wire feeding);

[0032] Figure 2 for Figure 1 A schematic diagram of the structure of the middle tube body and the evaporation boat;

[0033] Figure 3 for Figure 2 Schematic diagram of force analysis at the outlet of the middle metal wire;

[0034] Figure 4 It is a top view structural schematic diagram of the second embodiment of the cooperation between the tube body and the evaporation boat (the figure only shows the light situation of single-side wire feeding);

[0035] Figure 5 for Figure 4 A schematic diagram of the structure of the middle tube body and the evaporation boat;

[0036] Figure 6 It is a schematic diagram of the cooperation between the tube body and the evaporation boat in the prior art.

[0037] In the figure:

[0038] 1-tube body;

[0039] 11-the first tube body; 11'-the projection of the first tube body;

[0040] 12-The second tube body; 12'-The projection of the second tube body;

[0041] 13-Third tube body; 13'-Third tube body projection;

[0042] 2-wire; 2'-wire projection. DETAILED DESCRIPTION

[0043] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0044] Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0045] Reference Figure 1-2 , an improved wire feeding guide tube, comprising a tube body 2, in which a continuous channel is arranged for the metal wire to pass through, and the metal wire extends to the upper side of the evaporation surface of the evaporator through the guide path of the channel;

[0046] The main body of the tube body 2 is arranged in the gap on the side of the evaporation vessel, such as the gap between the evaporation boats, and can be further arranged below the intersection area of ​​the evaporation paths of adjacent evaporation boats; the outlet end of the tube body 2 (from the side) extends to the top of the evaporation vessel, thereby reducing the obstruction of the evaporation path by the tube body.

[0047] In this embodiment, the tube body 2 includes a first tube body 11, which is arranged in the gap of the evaporation boat, bends downward in an arc-shaped trajectory, and the first tube body projection 11' is basically parallel to the axis of the evaporation boat; the tube body 2 also includes a second tube body 12 connected to the outlet end of the first tube body 11, the second tube body 12 is a curved tube, and bends toward the evaporation boat. The center of the second tube body projection 12' is arranged on the corresponding side of the wire feeding evaporation boat, deviating from the first tube body projection 11', so that the transmission trajectory of the metal wire is transmitted from the side of the evaporation boat to the top of the boat body.

[0048] The central angle α of the arc length corresponding to the second tube 12 is preferably ≤90°, and more preferably ≤60°.

[0049] The end of the second tube projection 12' extends to the middle area of ​​the evaporation boat; at this time, Figure 3 As shown, the metal wire 2 is drawn out from the second tube body 12 under the traction of the catheter tube body, and its force has components in the horizontal, longitudinal and vertical directions; compared with conventional wire feeding ( Figure 6 As shown in the figure, its force components are mainly in the longitudinal and vertical directions; therefore, when the wire feeding and unwinding tension is the same, Figure 3 The vertical force component is smaller than the conventional wire feeding force in the prior art, so the vertical impact of the metal wire on the evaporation boat is relatively smaller, and the corrosion acceleration caused by the impact of the metal wire can be reduced to a certain extent.

[0050] Further references Figure 4-5 , in this implementation, the pipe body 2 includes:

[0051] A first tube body 11, which is disposed in the gap of the evaporation boat and is bent downward in an arc-shaped trajectory, and a projection 11' of the first tube body is substantially parallel to the axis of the evaporation boat;

[0052] The second tube body 12 is connected to the outlet end of the first tube body 11, and the second tube body 12 is a curved tube, and the center of the second tube body projection 12' is set on one side of the corresponding wire feeding evaporation boat, deviating from the first tube body projection 11';

[0053] And the third tube body 13 is connected to the outlet end of the second tube body 12, and the third tube body 13 is a curved tube with a bending direction opposite to that of the second tube body 12, that is, the center of the third tube body projection 13' is set on the other side opposite to the center of the second tube body projection 12' (the side away from the evaporation boat), so that its outlet (extension line) end extends to be substantially parallel to the axis of the evaporation boat, and the metal wire derived is substantially centered. Of course, the center angle β corresponding to the arc of the third tube body 13 is preferably ≤90°, and more preferably ≤60°.

[0054] At this time, after the metal wire 2 is led out of the third tube body 13, since the arc end of the third tube body 13 is basically set horizontally, its downward component force is relatively small, thereby reducing the impact of the molten metal liquid on the evaporation boat; at the same time, the transported metal wire can basically be infiltrated and distributed in the horizontal direction of the evaporation boat.

[0055] The above-mentioned tube bodies can be integrated and continuous, such as formed by bending the tube body; or they can be independently separated and connected by connecting parts, such as elbow joints.

[0056] In addition, the wire feeding duct structure in the present application is applicable to both conventional single-sided wire feeding evaporation boats and evaporation systems of double-sided wire feeding evaporation boats; of course, it is also applicable to evaporation systems with multiple wire feeding points on one side in the prior art.

[0057] The present application also discloses a vapor deposition system, including a wire feeding mechanism, wherein the wire feeding mechanism includes the above-mentioned improved wire feeding duct.

[0058] The evaporating vessel is an extended evaporating boat, which only needs to be set on one side, and its length can be set to 20-35cm.

[0059] A vacuum coating machine comprises the above-mentioned evaporation system.

[0060] In this application, structures and connection relationships that are not described in detail are all prior arts, and their structures and principles are well-known technologies and will not be described in detail here.

[0061] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0062] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. An improved wire feeding guide tube, comprising a tube body, in which a continuous channel is arranged for the metal wire to pass through, and the metal wire extends through the channel to above the evaporation surface of the evaporator; It is characterized in that The main body of the tube is arranged in the non-evaporation area on the side of the evaporation vessel, and the outlet end of the tube extends above the evaporation area of ​​the evaporation vessel.

2. The improved wire feed guide tube according to claim 1, characterized in that: The tube body comprises a first tube body, which is arranged between gaps between adjacent evaporating vessels and bends downward in an arc-shaped trajectory.

3. The improved wire feed guide tube according to claim 2, characterized in that: The projection of the first tube is parallel to the axis of the evaporation vessel boat.

4. The improved wire feeding guide tube according to claim 3, characterized in that: The tube body also includes a second tube body connected to the outlet end of the first tube body. The second tube body is a curved tube, and the center of the projection of the second tube body is arranged toward the corresponding side close to the wire feeding evaporator.

5. The improved wire feeding guide tube according to claim 4, characterized in that: The projected end of the second tube body extends to the middle area of ​​the evaporation boat.

6. The improved wire feeding guide tube according to claim 4, characterized in that: The tube body also includes a third tube body, which is connected to the outlet end of the second tube body, and the center of the projection of the third tube body is arranged away from the corresponding side of the evaporation boat.

7. The improved wire feed guide tube according to claim 6, characterized in that: The outlet end of the third tube body extends to be parallel to the axis of the evaporation boat.

8. The improved wire feeding guide tube according to any one of claims 4 to 7, characterized in that: The central angle α of the arc length corresponding to the second tube is ≤90°; And / or, the central angle β corresponding to the arc of the third tube body is ≤90°.

9. A vapor deposition system, characterized in that: A single-sided or double-sided wire feeding system comprises a wire feeding mechanism, wherein the wire feeding mechanism comprises the improved wire feeding duct according to any one of claims 1 to 7.

10. A vacuum evaporation device, characterized in that: Comprising the evaporation system as claimed in claim 9.

Images