Magnetron sputtering coating device

Abstract

The utility model relates to the technical field of magnetron sputtering coating, in particular to a magnetron sputtering coating device which comprises a fixing frame, a fixing device and a centralizing assembly, the fixing device is installed above the fixing frame, the centralizing assembly comprises a fixing plate, a hydraulic rod, a connecting component, an installation plate, an elastic component and an abutting plate, the fixing plate is fixedly connected with the fixing frame, and the hydraulic rod is fixedly connected with the fixing frame. The hydraulic rod is fixedly connected with the fixing plate and located on the side, away from the fixing device, of the fixing plate, the mounting plate is connected with the hydraulic rod through a connecting component, the connecting component supports the mounting plate, the abutting plate is connected with the mounting plate through an elastic component, and the elastic component drives the abutting plate to move. And a safer and more labor-saving fixed part is obtained, so that the safety of equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetron sputtering coating, in particular to a magnetron sputtering coating device. Background Art

[0002] When magnetron sputtering is used to coat a plate-like workpiece, in many cases, both sides of the plate-like workpiece need to be coated in a vacuum chamber. The existing method is to release the vacuum state of the vacuum chamber after coating one side, open the vacuum chamber, take out the plate-like workpiece, reverse and clamp it, put it back into the vacuum chamber, and then evacuate the vacuum chamber and coat the second side. However, this method requires an additional vacuuming step, which greatly increases the production cost. The vacuuming takes time, which reduces the production efficiency of the product and is less practical.

[0003] In the existing patent technology CN116288210A, a magnetron sputtering coating device is recorded, which includes a bottom, a disc-shaped support base with a plurality of fixed grooves in an annular array at the top, and a flip transmission assembly is fixedly installed in each of the plurality of fixed grooves, a servo motor is fixedly installed at the center of the top of the disc-shaped support base, and the motor shaft of the servo motor passes through one end of the disc-shaped support base and is fixedly connected to an X-shaped bracket, a driving gear ring is constructed on the X-shaped bracket, and the driving gear ring is meshed and connected to a plurality of flip transmission assemblies, the flip transmission assembly includes a fixed seat, a transmission shaft is rotatably installed in the fixed seat, and a support assembly is fixedly installed at the top of the transmission shaft, and a transmission gear meshed with the driving gear ring is fixedly installed at the bottom of the transmission shaft, and the support assembly includes a mounting seat. The magnetron sputtering coating device simplifies the processing steps, does not need to repeatedly evacuate, greatly reduces the production cost, and improves the production efficiency of the product, and can also be applied to workpieces of different sizes, with a wide range of applications and strong practicality.

[0004] When using this device to fix parts, it is necessary to hold the parts with hands and wait for the upper clamping plate to abut against the parts to fix the parts. Since the upper clamping plate is driven by a hydraulic rod and the space for operation is limited, it is easy to cause injuries to workers during the fixing process, increasing the danger of the equipment. Utility Model Content

[0005] The purpose of the utility model is to provide a magnetron sputtering coating device, which solves the problem that when using the device to fix parts, it is necessary to hold the parts with hands and wait for the upper clamping plate to abut against the parts to fix the parts. Since the upper clamping plate is driven by a hydraulic rod and the space for operation is limited, it is easy to cause injuries to workers during the fixing process, increasing the danger of the equipment.

[0006] To achieve the above-mentioned purpose, the utility model provides a magnetron sputtering coating device, including a fixed frame, a fixing device and a straightening assembly, wherein the fixing device is installed above the fixed frame, and the straightening assembly includes a fixing plate, a hydraulic rod, a connecting member, a mounting plate, an elastic member and an abutment plate, the fixing plate is fixedly connected to the fixing frame and is located on a side of the fixing frame away from the fixing device, the hydraulic rod is fixedly connected to the fixing plate and is located on a side of the fixing plate away from the fixing frame, the mounting plate is connected to the hydraulic rod through the connecting member, the connecting member supports the mounting plate, the abutment plate is connected to the mounting plate through the elastic member, and the elastic member drives the abutment plate to move.

[0007] Wherein, the connecting component includes a connecting block, a connecting frame and a connecting base, the connecting block is fixedly connected to the hydraulic rod and is located at one end of the hydraulic rod away from the fixing plate; the connecting frame is fixedly connected to the connecting block and is located on a side of the connecting block away from the hydraulic rod; the connecting base is fixedly connected to the connecting frame and is located on a side of the connecting frame away from the connecting block, and is connected to the mounting plate.

[0008] Wherein, the elastic component includes a mounting seat, a guide rod and an elastic element, the mounting seat is fixedly connected to the mounting plate and is located on a side of the mounting plate away from the connecting base; the guide rod is fixedly connected to the mounting seat and is located on a side of the mounting seat away from the mounting plate and is connected to the abutment plate; the elastic element is installed on the abutment plate, and the elastic element supports the movement of the abutment plate.

[0009] Wherein, the elastic element includes an abutment block and a spring, the abutment block is fixedly connected to the abutment plate and is located on the side of the low-level plate close to the guide rod; the spring is sleeved on the outside of the guide rod, and the two ends of the spring respectively abut the mounting seat and the abutment block.

[0010] Wherein, the straightening assembly also includes a support frame and a support block, the support frame is fixedly connected to the fixed frame and is located on a side of the fixed frame away from the fixed plate; the support block is fixedly connected to the support frame and is located on a side of the support frame away from the fixed frame and abuts against the connecting frame.

[0011] The utility model discloses a magnetron sputtering coating device, wherein the fixing plate is mounted on a side of the fixing frame away from the fixing device by bolts, the hydraulic rod is mounted on the fixing plate by bolts, the fixing plate enables the hydraulic rod to be more stably mounted on the fixing frame, the mounting plate is mounted on the output end of the hydraulic rod by the connecting member, so that the hydraulic rod can drive the mounting plate to move by the connecting member, an inclined block is provided above the abutment plate, thereby facilitating the movement of the part, the abutment plate is mounted on the mounting plate by the elastic member, the elastic member supports the abutment plate and can also drive the abutment plate to move, the number of the abutment plates is two, the two abutment plates abut against the part, thereby fixing the part on the fixing frame, facilitating the fixing device to fix the part, the mounting plate is driven to move by the hydraulic rod, and then the abutment plate leaves the surface of the part to complete the coating, thereby achieving a safer and more labor-saving fixing of the part, thereby improving the safety of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art are briefly introduced below.

[0013] Figure 1 It is a schematic diagram of the overall structure of a magnetron sputtering coating device according to the first embodiment of the utility model.

[0014] Figure 2 It is a schematic diagram of the installation of the mounting plate and the abutment plate of the first embodiment of the utility model.

[0015] Figure 3 It is a schematic diagram of the installation of the support frame and the support block of the second embodiment of the utility model.

[0016] In the figure: 100-fixed frame, 101-fixed device, 102-fixed plate, 103-hydraulic rod, 104-mounting plate, 105-abutment plate, 106-connecting block, 107-connecting frame, 108-connecting base, 109-mounting seat, 110-guide rod, 111-abutment block, 112-spring, 213-support frame, 214-support block. DETAILED DESCRIPTION

[0017] Embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, but should not be understood as limiting the present invention.

[0018] The first embodiment of the present application is:

[0019] See also Figure 1 and Figure 2 ,in, Figure 1 This is a schematic diagram of the overall structure of a magnetron sputtering coating device according to the first embodiment of the utility model. Figure 2 It is a schematic diagram of the installation of the mounting plate and the abutment plate of the first embodiment of the utility model.

[0020] The utility model provides a magnetron sputtering coating device: including a fixing frame 100, a fixing device 101 and a straightening assembly, the straightening assembly includes a fixing plate 102, a hydraulic rod 103, a connecting member, a mounting plate 104, an elastic member and an abutment plate 105, the connecting member includes a connecting block 106, a connecting frame 107 and a connecting base 108, the elastic member includes a mounting seat 109, a guide rod 110 and an elastic element, the elastic element includes an abutment block 111 and a spring 112, the above-mentioned scheme solves the problem that when using the device to fix parts, it is necessary to hold the parts by hand and wait for the upper clamping plate to abut against the parts, so as to fix the parts, because the upper clamping plate is driven by the hydraulic rod 103, and the space for operation is limited, which can easily cause injuries to workers during the fixing process, increasing the danger of the equipment. It can be understood that the above-mentioned scheme can be used in the scene of assisting the fixing of parts when fixing parts, and can also be used to solve the problem of how to make the equipment move more smoothly.

[0021] According to this specific embodiment, the fixing device 101 is installed above the fixing frame 100. The fixing frame 100 and the fixing device 101 are both the supporting assembly and the fixing device 101 recorded in the existing patent technology CN116288210A, a magnetron sputtering coating device. The fixing device 101 is installed above the fixing frame 100, and the fixing device 101 abuts against the parts to fix the parts in the fixing frame 100. This solution achieves a safer and more labor-saving fixing of the parts, thereby improving the safety of the equipment.

[0022] The fixing plate 102 is fixedly connected to the fixing frame 100 and is located on a side of the fixing frame 100 away from the fixing device 101. The hydraulic rod 103 is fixedly connected to the fixing plate 102 and is located on a side of the fixing plate 102 away from the fixing frame 100. The mounting plate 104 is connected to the hydraulic rod 103 via the connecting member, and the connecting member supports the mounting plate 104. The abutment plate 105 is connected to the mounting plate 104 via the elastic member, and the elastic member drives the abutment plate 105 to move. The fixing plate 102 is installed on a side of the fixing frame 100 away from the fixing device 101 via bolts. The hydraulic rod 103 is installed on the fixing plate 102 via bolts. The fixing plate 102 allows the hydraulic rod 103 to be more stably installed on the fixing frame 100. The plate 104 is installed on the output end of the hydraulic rod 103 through the connecting member, so that the hydraulic rod 103 can drive the mounting plate 104 to move through the connecting member. The abutment plate 105 has an inclined block on top, which is convenient for the movement of parts. The abutment plate 105 is installed on the mounting plate 104 through the elastic member. The elastic member supports the abutment plate 105 and can also drive the abutment plate 105 to move. There are two abutment plates 105, and the two abutment plates 105 abut against the parts, so that the parts are fixed on the fixing frame 100, which is convenient for the fixing device 101 to fix the parts. The mounting plate 104 is driven to move by the hydraulic rod 103, so that the abutment plate 105 leaves the surface of the part, so that the coating is completed, thereby achieving safer and more labor-saving fixing of the parts, thereby improving the safety of the equipment.

[0023] Secondly, the connecting block 106 is fixedly connected to the hydraulic rod 103 and is located at one end of the hydraulic rod 103 away from the fixing plate 102; the connecting frame 107 is fixedly connected to the connecting block 106 and is located at a side of the connecting block 106 away from the hydraulic rod 103; the connecting base 108 is fixedly connected to the connecting frame 107 and is located at a side of the connecting frame 107 away from the connecting block 106, and is connected to the mounting plate 104, the connecting block 106 is installed at the output end of the hydraulic rod 103 by bolts, the connecting frame 107 is installed at a side of the connecting block 106 away from the hydraulic rod 103 by bolts, the connecting base 108 is installed at a side of the connecting frame 107 away from the connecting block 106 by bolts, and the mounting plate 104 is installed at a side of the connecting base 108 away from the mounting frame by bolts, thereby installing the mounting plate 104 on the hydraulic rod 103, so that the hydraulic rod 103 can drive the mounting plate 104 to move.

[0024] At the same time, the mounting seat 109 is fixedly connected to the mounting plate 104 and is located on a side of the mounting plate 104 away from the connecting base 108; the guide rod 110 is fixedly connected to the mounting seat 109 and is located on a side of the mounting seat 109 away from the mounting plate 104, and is connected to the abutment plate 105; the elastic element is installed on the abutment plate 105, and the elastic element supports the abutment plate 105 to move. The mounting seat 109 is installed on a side of the mounting plate 104 away from the connecting base 108 by bolts. One end of the guide rod 110 is mounted on the mounting seat 109 by a bolt and is connected to the abutment plate 105 by a threaded structure. The guide rod 110 is a retractable short rod, so that the abutment plate 105 can move forward and backward. The elastic member is installed on the abutment plate 105, and the abutment plate 105 is driven by the elastic member to move to the side away from the mounting plate 104, so that the abutment plate 105 can fix the parts and hold the parts to facilitate the fixing device 101 to fix the parts on the fixing frame 100.

[0025] In addition, the abutment block 111 is fixedly connected to the abutment plate 105 and is located on the side of the low-level plate close to the guide rod 110; the spring 112 is sleeved on the outer side of the guide rod 110, and the two ends of the spring 112 respectively abut the mounting seat 109 and the abutment block 111, and the abutment block 111 is installed on the side of the abutment plate 105 close to the guide rod 110 by bolts, and the spring 112 is sleeved on the outer side of the guide rod 110, and the two ends of the spring 112 respectively abut the abutment block 111 and the mounting seat 109, and the abutment block 111 is driven to move by the elastic force of the spring 112, thereby causing the abutment plate 105 to move to the side away from the mounting plate 104.

[0026] When placing a part using a magnetron sputtering coating device according to the present embodiment, the part is inserted into the gap between the two abutment plates 105, and the two abutment plates 105 are used to abut the part through the spring 112. At this time, the fixing device 101 is started, and the part is fixed on the fixing frame 100 through the fixing device 101. Then, the hydraulic rod 103 is started, and the hydraulic rod 103 drives the mounting plate 104 to drive the abutment plate 105 away from the surface of the part through the connecting frame 107, so that the part is coated, thereby achieving safer and more labor-saving fixing of the parts, thereby improving the safety of the equipment.

[0027] The second embodiment of the present application is:

[0028] Based on the first embodiment, please refer to Figure 3 ,in, Figure 3It is a schematic diagram of the installation of the support frame and the support block of the second embodiment of the utility model.

[0029] The straightening assembly of this embodiment further includes a support frame 213 and a support block 214 .

[0030] Among them, the support frame 213 is fixedly connected to the fixed frame 100 and is located on a side of the fixed frame 100 away from the fixed plate 102; the support block 214 is fixedly connected to the support frame 213 and is located on a side of the support frame 213 away from the fixed frame 100, and abuts against the connecting frame 107. The support frame 213 is installed on the side of the fixed frame 100 away from the fixed plate 102 by bolts. The support frame 213 is a triangular structure, so that the support frame 213 is more stably installed on the fixed frame 100. The support block 214 is installed on the support frame 213 by bolts, and the connecting frame 107 is abutted against the support block 214, so that the connecting frame 107 can slide on the support block 214. The stability of the connecting frame 107 is improved by the support frame 213 and the support block 214, thereby ensuring that the hydraulic rod 103 can normally drive the mounting plate 104 to move.

[0031] A magnetron sputtering coating device according to the present embodiment is used, wherein the connecting frame 107 abuts against the support block 214, so that the support frame 213 shares part of the pressure on the connecting frame 107, thereby ensuring that the connecting frame 107 will not bend, and enabling the hydraulic rod 103 to normally drive the mounting plate 104 to move.

[0032] What is disclosed above is only one of the multiple preferred embodiments of the present application, and cannot be used to limit the scope of rights of the present application. Ordinary technicians in this field can understand that all or part of the processes of implementing the above embodiments and equivalent changes made according to the claims of the present application are still within the scope covered by the present application.

Claims

1. A magnetron sputtering coating device, comprising a fixing frame and a fixing device, wherein the fixing device is installed above the fixing frame, characterized in that: Also included is a righting assembly; The straightening assembly includes a fixed plate, a hydraulic rod, a connecting member, a mounting plate, an elastic member and an abutment plate. The fixed plate is fixedly connected to the fixing frame and is located on a side of the fixing frame away from the fixing device. The hydraulic rod is fixedly connected to the fixed plate and is located on a side of the fixing plate away from the fixing frame. The mounting plate is connected to the hydraulic rod through the connecting member, and the connecting member supports the mounting plate. The abutment plate is connected to the mounting plate through the elastic member, and the elastic member drives the abutment plate to move.

2. The magnetron sputtering coating device according to claim 1, characterized in that: The connecting member includes a connecting block, a connecting frame and a connecting base. The connecting block is fixedly connected to the hydraulic rod and is located at an end of the hydraulic rod away from the fixing plate; the connecting frame is fixedly connected to the connecting block and is located on a side of the connecting block away from the hydraulic rod; the connecting base is fixedly connected to the connecting frame and is located on a side of the connecting frame away from the connecting block and is connected to the mounting plate.

3. The magnetron sputtering coating device according to claim 2, characterized in that: The elastic component includes a mounting seat, a guide rod and an elastic element. The mounting seat is fixedly connected to the mounting plate and is located on a side of the mounting plate away from the connecting base; the guide rod is fixedly connected to the mounting seat and is located on a side of the mounting seat away from the mounting plate and is connected to the abutment plate; the elastic element is installed on the abutment plate, and the elastic element supports the movement of the abutment plate.

4. The magnetron sputtering coating device according to claim 3, characterized in that: The elastic element includes an abutment block and a spring. The abutment block is fixedly connected to the abutment plate and is located on a side of the abutment plate close to the guide rod. The spring is sleeved on the outer side of the guide rod, and the two ends of the spring respectively abut the mounting seat and the abutment block.

5. The magnetron sputtering coating device according to claim 2, characterized in that: The straightening assembly also includes a support frame and a support block. The support frame is fixedly connected to the fixed frame and is located on a side of the fixed frame away from the fixed plate; the support block is fixedly connected to the support frame and is located on a side of the support frame away from the fixed frame and abuts against the connecting frame.

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