Cathode assembly cooling system for vacuum magnetron sputtering device

Abstract

The utility model discloses a cathode assembly cooling system for a vacuum magnetron sputtering device. The cathode assembly cooling system comprises a plurality of rotating cathode units which are circumferentially and uniformly distributed by taking a sputtering roller as a center, the cathode rotating unit comprises a cylindrical target barrel, a water inlet pipeline and a water outlet pipe are assembled at the two ends of the target barrel respectively, the ends of the water inlet pipeline and the water outlet pipe extend out of the side plates on the corresponding sides, and the water inlet pipeline and the water outlet pipe are communicated through a magnetic bar pipe in the target barrel; an arc-shaped water inlet guide pipe and an arc-shaped water outlet guide pipe are respectively mounted on a side plate on the corresponding side of the water inlet pipeline and a side plate on the corresponding side of the water outlet pipe, and the arc-shaped water inlet guide pipe and the arc-shaped water outlet guide pipe are arc-shaped pipes with one ends closed and the other ends provided with water passing joints; a plurality of water inlet pipe communicating assemblies communicating with the water inlet ends of the water inlet pipeline in a one-to-one correspondence mode are arranged on the side, close to the water inlet pipeline, of the arc-shaped water inlet guide pipe, and a plurality of water outlet pipe communicating assemblies communicating with the water outlet ends of the water outlet pipe in a one-to-one correspondence mode are arranged on the side, close to the water outlet pipe, of the arc-shaped water outlet guide pipe.

Description

Technical Field

[0001] The utility model relates to the field of sputtering coating devices, in particular to a cathode assembly cooling system for a vacuum magnetron sputtering device. Background Art

[0002] The cathode used in the magnetron sputtering coating process is divided into a planar cathode and a rotating cathode according to the structure. Among them, the rotating cathode has the advantages of high target material utilization and large loadable electric power, and is used more and more widely. Specifically, each rotating cathode unit is evenly distributed on the outside of the sputtering roller in the circumferential direction. Each rotating cathode unit mainly includes a cylindrical target barrel and a magnetic rod tube installed in the target barrel. A cooling water channel for cooling water to pass through is installed in the magnetic rod tube. A driving mechanism for driving the target barrel to rotate is installed at one end of the target barrel. The cooling water enters through one end of the cooling water channel and flows out at the other end to achieve cooling of the magnetic rod tube. The cooling water input and output of each rotating cathode unit are transported through an input pipe and an output pipe. The number of input pipes and output pipes arranged is equal to that of the rotating cathode units, which occupies a large space and has many pipelines. It is not easy to distinguish from the vacuum pipe network and the anode cooling system, and it is inconvenient to install and maintain. Summary of the invention

[0003] In view of the above-mentioned deficiencies in the prior art, the purpose of the utility model is to provide a cathode assembly cooling system for a vacuum magnetron sputtering device, so as to solve the problems in the existing cathode assembly cooling system that there are many coolant input pipelines and output pipelines, the pipeline network is complex, the space is large, and it is inconvenient to maintain and install.

[0004] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0005] A cathode assembly cooling system for a vacuum magnetron sputtering device comprises a plurality of rotating cathode units uniformly distributed circumferentially with a sputtering roller as the center, each rotating cathode unit is horizontally arranged, and both ends are respectively mounted on two oppositely arranged side plates of a vacuum chamber; the cathode rotating unit comprises a cylindrical target barrel, and a water inlet pipe and a water outlet pipe with ends extending out of the corresponding side plates are respectively mounted at both ends of the target barrel, and the water inlet pipe and the water outlet pipe are connected through a magnetic rod pipe in the target barrel; An arc-shaped water inlet duct and an arc-shaped water outlet duct are respectively installed on the side panels, and the arc-shaped water inlet duct and the arc-shaped water outlet duct are both located on the inner side of the circle surrounded by the corresponding ends of the rotating cathode unit, and the arc-shaped water inlet duct and the arc-shaped water outlet duct are arc-shaped tubes with one end closed and the other end provided with a water connection joint; a plurality of water inlet pipe connecting components that are connected to the water inlet end of the water inlet pipe in a one-to-one correspondence are provided on the side of the arc-shaped water inlet duct close to the water inlet pipe, and a plurality of water outlet pipe connecting components that are connected to the water outlet end of the water outlet pipe in a one-to-one correspondence are provided on the side of the arc-shaped water outlet duct close to the water outlet pipe. In this way, an arc-shaped water inlet conduit and an arc-shaped water outlet conduit are respectively arranged on the corresponding sides of the water inlet pipe and the water outlet pipe of each rotating cathode unit, and are connected to the arc-shaped water inlet conduit through the water inlet pipe connecting component, and the water outlet pipe connecting component is connected to the arc-shaped water outlet conduit, so that when the cooling water is introduced, the cooling water is introduced into the arc-shaped water inlet conduit through the pipeline, and then flows into the water inlet pipe of each rotating cathode unit, and finally exported to the arc-shaped water outlet conduit through the water outlet pipe and the water outlet pipe connecting component of each rotating emergency unit, so that the cooling water is finally sent to the water joint of the arc-shaped water outlet conduit and exported to the outside. The introduction and export of cooling water in the above cooling system are respectively separated by the arc-shaped water inlet conduit and the arc-shaped water outlet conduit, the overall pipeline setting is small in number, the pipeline layout space is compact, the pipeline layout structure is simple, and the installation and maintenance are also relatively convenient.

[0006] Furthermore, a plurality of first pipe brackets for fixing the arc-shaped water inlet conduit can be detachably mounted on the outer side of the side plate at one end of the water inlet pipeline, and a plurality of second pipe brackets for supporting the arc-shaped water outlet conduit can be detachably mounted on the outer side of the side plate at one end of the water outlet pipe. In this way, the first pipe bracket and the second pipe bracket can support the arc-shaped water inlet conduit and the arc-shaped water outlet conduit respectively, and their installation heights correspond to the water inlet end of the water inlet pipeline and the water outlet end of the water outlet pipe, and are suspended outside the side plate of the vacuum chamber.

[0007] Furthermore, the first pipe bracket and the second pipe bracket have the same structure, both are L-shaped or U-shaped, and include a fixed bottom plate with a positioning hole and a bracket whose lower end is integrally formed with the fixed bottom plate and whose upper end is fixedly connected to the arc-shaped water inlet conduit or the arc-shaped water outlet conduit. In this way, the pipe bracket has a simple structure and is easy to fix, and can realize the suspension support of the arc-shaped water inlet conduit and the arc-shaped water outlet conduit.

[0008] Furthermore, a plurality of extended water-dividing parts corresponding to the water inlet pipe connecting components are provided on the arc-shaped water inlet conduit, and a plurality of extended water outlet parts corresponding to the water outlet pipe connecting components are provided on the arc-shaped water outlet conduit; the two ends of the water inlet pipe connecting component are respectively sleeved in the extended water-dividing part and the water inlet end of the water inlet pipeline, and the two ends of the water outlet pipe connecting component are respectively sleeved in the extended water outlet part and the water outlet end of the water outlet pipe. In this way, the extended water-dividing part is integrally formed with the arc-shaped water inlet conduit, and the extended water outlet part is integrally formed with the arc-shaped water outlet conduit, providing sufficient assembly space for the water outlet pipe connecting component and the water inlet pipe connecting component, and effectively ensuring the sealing performance of the joint.

[0009] Furthermore, the water inlet pipe connecting assembly includes a water inlet bellows and pipe end joints connected to both ends of the water receiving bellows. The pipe end joints of each water inlet pipe connecting assembly close to one end of the water inlet pipeline are sealed and sleeved in the water inlet end of the water inlet pipeline, and the other end is sealed and sleeved in the corresponding extended water diversion part; the water outlet pipe connecting assembly includes a water outlet bellows and a second pipe joint connected to both ends of the water outlet bellows and a connecting elbow. The end of the second pipe joint is sealed and sleeved in the extended water outlet part, and the end of the connecting elbow is sealed and sleeved in the pipe joint of the water outlet pipe. In this way, the middle of the water inlet pipe connecting assembly and the water outlet pipe connecting assembly are both provided with bellows. During installation, they can be flexibly stretched and bent according to the installation needs, and the precision requirements for the connecting assembly are lower, and installation and disassembly are also more convenient.

[0010] Furthermore, a first connecting sleeve is sleeved at the joint between each water inlet bellows and the end joint of the pipe fitting, and a second connecting sleeve is sleeved at the joint between each second pipe fitting joint and the water outlet bellows, and at the joint between each connecting elbow and the water outlet bellows. In this way, the first connecting sleeve and the second connecting sleeve can further improve the pipe fitting at the pipe connection, and can effectively ensure the sealing performance of the pipe connection.

[0011] Furthermore, the water inlet pipeline includes a water inlet pipe, a middle connecting tube and a connecting sleeve. One end of the connecting sleeve is sleeved in the target tube, and the end face of the other end is tightly attached to the end of the middle connecting tube and connected by a fastener. The water inlet pipe is sleeved in the middle connecting tube and is sealed with the middle connecting tube by at least one circle of the second pipeline sealing ring. An adapter is sealed and fixed at the water inlet end of each water inlet pipe. An L-shaped water guide channel connected to the water inlet pipe is provided in the adapter. The pipe end joint on the corresponding side of the water inlet pipe connecting component and the L-shaped water guide channel of the corresponding adapter are sealed and connected. In this way, the water inlet pipeline adopts a multi-section setting, which can effectively reduce the manufacturing process, and the pipeline sealing ring can effectively ensure the water sealing effect of the water inlet pipeline. The adapter set at the water inlet end of the water inlet pipeline can be easily connected to the water inlet pipe connecting component to reverse the cooling water.

[0012] Furthermore, a third pipeline sealing ring is provided between the connecting sleeve and the target barrel, and a step is provided in the middle of the connecting sleeve to fit closely with the end face of the target barrel, and after the ends of the connecting sleeve and the target barrel fit closely, a plurality of annular grooves are formed on the outer end face; the connecting sleeve and the target barrel are locked and fixed by a first clamp whose inner side matches with the annular groove. In this way, in addition to the sleeve connection between the water inlet pipeline and the target barrel, the first clamp is also locked and fixed after matching with the joint between the water inlet pipeline and the target barrel. This double connection and fixing method can effectively ensure the sealing effect between the water inlet pipeline and the target barrel. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 Schematic diagram of the three-dimensional structure of the cathode assembly cooling system in the embodiment;

[0014] Figure 2 It is a structural schematic diagram of the cathode assembly cooling system installed on the vacuum chamber in the embodiment;

[0015] Figure 3 This is a schematic diagram of the installation structure of the water inlet pipeline and the vacuum chamber side plate in the embodiment;

[0016] Figure 4 for Figure 3 Schematic diagram of the cross-sectional structure of AA;

[0017] Figure 5 for Figure 3 Schematic diagram of the partially enlarged cross-section structure of AA. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. The components of the embodiment of the utility model generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model claimed for protection, but merely represents the selected embodiment of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0019] It should be noted that similar numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. In the description of the utility model, it should be noted that the orientation or position relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. is based on the orientation or position relationship shown in the drawings, or the orientation or position relationship in which the invention product is usually placed when used, which is only for the convenience of describing the utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In addition, the terms "horizontal", "vertical", etc. do not mean that the components are absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted. In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0020] like Figure 1-Figure 3As shown, the cathode assembly cooling system for the vacuum magnetron sputtering device disclosed in this embodiment includes a plurality of rotating cathode units 2 uniformly distributed circumferentially with the sputtering roller as the center, each rotating cathode unit 2 is horizontally arranged, and both ends are respectively mounted on two oppositely arranged side plates 1 of a vacuum chamber; the cathode rotating unit includes a cylindrical target barrel 21, and a water inlet pipe 3 and a water outlet pipe 7 are respectively mounted at both ends of the target barrel 21, and the ends of the water inlet pipe 3 and the water outlet pipe 7 extend out of the corresponding side plate 1, and the water inlet pipe 3 and the water outlet pipe 7 are connected through the magnetic rod pipe in the target barrel 21; the side plate 1 and the water outlet pipe 7 on the corresponding side of the water inlet pipe 3 An arc-shaped water inlet duct 5 and an arc-shaped water outlet duct 9 are respectively installed on the side plates 1 on the corresponding sides, and the arc-shaped water inlet duct 5 and the arc-shaped water outlet duct 9 are both located on the inner side of the circle surrounded by the corresponding ends of the rotating cathode unit 2, and the arc-shaped water inlet duct 5 and the arc-shaped water outlet duct 9 are arc-shaped tubes with one end closed and the other end provided with a water connection joint; on the side of the arc-shaped water inlet duct 5 close to the water inlet pipeline 3, a plurality of water inlet pipe 32 connecting components 4 are provided, which are connected one-to-one with the water inlet end of the water inlet pipeline 3; on the side of the arc-shaped water outlet duct 9 close to the water outlet pipe 7, a plurality of water outlet pipe connecting components 8 are provided, which are connected one-to-one with the water outlet end of the water outlet pipe 7. In this way, an arc-shaped water inlet conduit 5 and an arc-shaped water outlet conduit 7 are respectively arranged on the corresponding sides of the water inlet pipeline 3 and the water outlet pipe 7 of each rotating cathode unit 2, and the water inlet pipe 32 connecting component 4 is connected to the arc-shaped water inlet conduit 5, and the water outlet pipe connecting component 8 is connected to the arc-shaped water outlet conduit 9, so that when the cooling water is introduced, the cooling water is introduced into the arc-shaped water inlet conduit 5 through the pipeline, and then flows into the water inlet pipeline 3 of each rotating cathode unit 2, and finally exported to the arc-shaped water outlet conduit 9 through the water outlet pipe 7 and the water outlet pipe connecting component 8 of each rotating emergency unit, so that the cooling water is finally sent to the water connection joint of the arc-shaped water outlet conduit 9 and exported to the outside. The introduction and export of cooling water in the above cooling system are respectively separated through the arc-shaped water inlet conduit 5 and the arc-shaped water outlet conduit 9, the overall pipeline setting number is small, the pipeline layout space is compact, the pipeline layout structure is simple, and the installation and maintenance are also relatively convenient. The arc-shaped water inlet conduit 5 and the arc-shaped water outlet conduit 9 are both hard metal water pipes with high pressure resistance. A side plate connecting plate for fixedly connecting with the corresponding side plate 1 is sleeved on the water inlet pipe 3, and a flange plate for fixedly connecting with the corresponding side plate is provided at the protruding end of the water outlet pipe 7. The side plate connecting plate and the flange plate are both multi-sealedly connected with the corresponding side plates, and the side plate connecting plate and the water inlet pipe, as well as the flange plate and the water outlet pipe are sealed by sealing rings to prevent external space from entering the vacuum chamber from the connection.

[0021] Furthermore, a plurality of first pipe brackets 6 for fixing the arc-shaped water inlet conduit 5 are detachably mounted on the outer side of the side plate 1 at one end of the water inlet pipeline 3, and a plurality of second pipe brackets for supporting the arc-shaped water outlet conduit 9 are detachably mounted on the outer side of the side plate 1 at one end of the water outlet pipe 7. In this way, the first pipe bracket 6 and the second pipe bracket can support the arc-shaped water inlet conduit 5 and the arc-shaped water outlet conduit 9 respectively, and their installation heights correspond to the water inlet end of the water inlet pipeline 3 and the water outlet end of the water outlet pipe 7, and are suspended outside the side plate 1 of the vacuum chamber.

[0022] Furthermore, the first pipe bracket 6 and the second pipe bracket have the same structure, both of which are L-shaped or U-shaped, and include a fixed bottom plate with a positioning hole and a bracket whose lower end is integrally formed with the fixed bottom plate and whose upper end is fixedly connected to the arc-shaped water inlet conduit 5 or the arc-shaped water outlet conduit 9. In this embodiment, the bracket and the arc-shaped water inlet conduit are fixed by welding, and a pipe clamp can be used in specific implementation. In this way, the pipe bracket has a simple structure and is easy to fix, and can realize the suspension support of the arc-shaped water inlet conduit 5 and the arc-shaped water outlet conduit 9.

[0023] Furthermore, a plurality of extended water-dividing parts 51 corresponding to the water inlet pipe 32 connecting component 4 are provided on the arc-shaped water inlet conduit 5, and a plurality of extended water outlet parts 91 corresponding to the water outlet pipe connecting component 8 are provided on the arc-shaped water outlet conduit 9; the two ends of the water inlet pipe 32 connecting component 4 are respectively sleeved in the extended water-dividing part 51 and the water inlet end of the water inlet pipeline 3, and the two ends of the water outlet pipe connecting component 8 are respectively sleeved in the extended water outlet part 91 and the water outlet end of the water outlet pipe 7. In this way, the extended water-dividing part 51 is integrally formed with the arc-shaped water inlet conduit 5, and the extended water outlet part 91 is integrally formed with the arc-shaped water outlet conduit 9, providing sufficient assembly space for the water outlet pipe connecting component 8 and the water inlet pipe 32 connecting component 4, and effectively ensuring the sealing performance of the joint.

[0024] Furthermore, the water inlet pipe 32 connecting component 4 includes a water inlet corrugated pipe 41 and a pipe end joint 42 connected to both ends of the water connecting corrugated pipe. The pipe end joint 42 of each water inlet pipe 32 connecting component 4 close to one end of the water inlet pipeline 3 is sealed and sleeved in the water inlet end of the water inlet pipeline 3, and the other end is sealed and sleeved in the corresponding extended water diversion part 51; the water outlet pipe connecting component 8 includes a water outlet corrugated pipe 81 and a second pipe joint 83 connected to both ends of the water outlet corrugated pipe 81 and a connecting elbow 82. The end of the second pipe joint 83 is sealed and sleeved in the extended water outlet part 91, and the end of the connecting elbow 82 is sealed and sleeved in the pipe joint of the water outlet pipe 7. In this way, the middle parts of the water inlet pipe 32 connecting component 4 and the water outlet pipe connecting component 8 are both provided with corrugated pipes, which can be flexibly extended and bent according to the installation requirements during installation, and the precision requirements for the connecting components are lower, and the installation and disassembly are also more convenient.

[0025] Furthermore, a first connecting sleeve (not shown in the figure) is sleeved at the joint of each water inlet bellows 41 and the pipe end joint 42, and a second connecting sleeve is sleeved at the joint of each second pipe joint 83 and the water outlet bellows 81, and at the joint of each connecting elbow 82 and the water outlet bellows 81. In this way, the first connecting sleeve and the second connecting sleeve can further improve the pipe fitting at the pipe connection, and can effectively ensure the sealing performance of the pipe connection.

[0026] like Figure 4 , Figure 5 As shown, the water inlet pipeline 3 includes a water inlet pipe 32, a middle connecting tube 33 and a connecting sleeve 34. One end of the connecting sleeve 34 is sleeved in the target tube 21, and the end face of the other end is tightly attached to the end of the middle connecting tube 33 and connected by a fastener. The water inlet pipe 32 is sleeved in the middle connecting tube 33 and is sealed with the middle connecting tube 33 by at least one circle of the second pipeline sealing ring. A conversion joint 31 is sealed and fixed at the water inlet end of each water inlet pipe 32 (the water inlet pipe can rotate in the conversion joint and is rotatably and sealedly connected with the conversion joint). An L-shaped water guide channel connected to the water inlet pipe 32 is provided in the conversion joint 31. The pipe end joint 42 on the corresponding side of the water inlet pipe 32 connecting component 4 is sealed and connected to the L-shaped water guide channel of the corresponding conversion joint 31. In this way, the water inlet pipeline 3 adopts a multi-section setting, which can effectively reduce the manufacturing process, and the set pipeline sealing ring can effectively ensure the water sealing effect of the water inlet pipeline 3. The adapter 31 provided at the water inlet end of the water inlet pipeline 3 can be conveniently connected to the water inlet pipe 32 communicating assembly 4 to reverse the cooling water.

[0027] Furthermore, a third pipeline sealing ring is provided between the connecting sleeve 34 and the target barrel 21, and a step is provided in the middle of the connecting sleeve 34 to be in close contact with the end face of the target barrel 21, and after the end of the connecting sleeve 34 and the target barrel 21 are in close contact, a plurality of annular grooves are formed on the outer end face; the connecting sleeve 34 and the target barrel 21 are locked and fixed by a first clamp whose inner side surface cooperates with the annular groove. In this way, in addition to the sleeve connection between the water inlet pipeline 3 and the target barrel 21, the first clamp cooperates with the joint of the water inlet pipeline 3 and the target barrel 21 and is locked and fixed. This double connection and fixing method can effectively ensure the sealing effect between the water inlet pipeline 3 and the target barrel 21.

[0028] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model rather than to limit the technical solution. Ordinary technicians in this field should understand that those modifications or equivalent replacements of the technical solution of the utility model without departing from the purpose and scope of the technical solution of the utility model should be included in the scope of the claims of the utility model.

Claims

1. A cathode assembly cooling system for a vacuum magnetron sputtering device, comprising a plurality of rotating cathode units uniformly distributed circumferentially with a sputtering roller as the center, each rotating cathode unit is horizontally arranged, and the two ends are respectively mounted on two oppositely arranged side plates of a vacuum chamber; the cathode rotating unit comprises a cylindrical target barrel, and a water inlet pipe and a water outlet pipe with an end extending out of the corresponding side plate are respectively mounted at the two ends of the target barrel, and the water inlet pipe and the water outlet pipe are connected through a magnetic rod pipe in the target barrel; it is characterized in that An arc-shaped water inlet duct and an arc-shaped water outlet duct are respectively installed on the side plate on the corresponding side of the water inlet pipeline and the side plate on the corresponding side of the water outlet pipe. The arc-shaped water inlet duct and the arc-shaped water outlet duct are both located on the inner side of the circle surrounded by the corresponding ends of the rotating cathode unit, and the arc-shaped water inlet duct and the arc-shaped water outlet duct are arc-shaped tubes with one end closed and the other end provided with a water connection joint; a plurality of water inlet pipe connecting components that are connected to the water inlet end of the water inlet pipeline in a one-to-one manner are provided on the side of the arc-shaped water inlet duct close to the water inlet pipeline, and a plurality of water outlet pipe connecting components that are connected to the water outlet end of the water outlet pipe in a one-to-one manner are provided on the side of the arc-shaped water outlet duct close to the water outlet pipe.

2. The cathode assembly cooling system for a vacuum magnetron sputtering device according to claim 1, characterized in that: A plurality of first pipe brackets for fixing the arc-shaped water inlet conduit are detachably mounted on the outer side of the side plate at one end of the water inlet pipeline, and a plurality of second pipe brackets for supporting the arc-shaped water outlet conduit are detachably mounted on the outer side of the side plate at one end of the water outlet pipe.

3. The cathode assembly cooling system for a vacuum magnetron sputtering device according to claim 2, characterized in that: The first pipe bracket and the second pipe bracket have the same structure, both are L-shaped or U-shaped, and include a fixed base plate with a positioning hole and a support whose lower end is integrally formed with the fixed base plate and whose upper end is fixedly connected to the arc-shaped water inlet conduit or the arc-shaped water outlet conduit.

4. The cathode assembly cooling system for a vacuum magnetron sputtering device according to claim 1, 2 or 3, characterized in that: A plurality of extended water distribution parts corresponding one-to-one to the water inlet pipe connecting components are arranged on the arc-shaped water inlet conduit, and a plurality of extended water outlet parts corresponding one-to-one to the water outlet pipe connecting components are arranged on the arc-shaped water outlet conduit; the two ends of the water inlet pipe connecting component are respectively sleeved in the extended water distribution part and the water inlet end of the water inlet pipeline, and the two ends of the water outlet pipe connecting component are respectively sleeved in the extended water outlet part and the water outlet end of the water outlet pipe.

5. The cathode assembly cooling system for a vacuum magnetron sputtering device according to claim 4, characterized in that: The water inlet pipe connecting component includes a water inlet bellows and pipe end joints connected to the two ends of the water connecting bellows. The pipe end joints of each water inlet pipe connecting component close to one end of the water inlet pipeline are sealed and sleeved on the water inlet end of the water inlet pipeline, and the other end is sealed and sleeved in the corresponding extended water diversion part; the water outlet pipe connecting component includes a water outlet bellows and a second pipe joint connected to the two ends of the water outlet bellows and a connecting elbow. The end of the second pipe joint is sealed and sleeved in the extended water outlet part, and the end of the connecting elbow is sealed and sleeved in the pipe joint of the water outlet pipe.

6. The cathode assembly cooling system for a vacuum magnetron sputtering device according to claim 5, characterized in that: A first connecting pipe sleeve which is sealed and connected to each water inlet bellows is sleeved at the joint between each water inlet bellows and the pipe end joint; a second connecting pipe sleeve which is sealed and connected to each water outlet bellows is sleeved at the joint between each second pipe joint and the water outlet bellows and at the joint between each connecting elbow and the water outlet bellows.

7. The cathode assembly cooling system for a vacuum magnetron sputtering device according to claim 5 or 6, characterized in that: The water inlet pipeline includes a water inlet pipe, a middle connecting tube and a connecting sleeve. One end of the connecting sleeve is sleeved in the target tube, and the end face of the other end is tightly attached to the end of the middle connecting tube and connected by a fastener. The water inlet pipe is sleeved in the middle connecting tube and is sealed with the middle connecting tube by at least one circle of second pipeline sealing ring; an adapter is sealed and fixed to the water inlet end of each water inlet pipe, and an L-shaped water guide channel connected to the water inlet pipe is provided in the adapter, and the pipe end joint on the corresponding side of the water inlet pipe connecting component is sealed and connected to the L-shaped water guide channel of the corresponding adapter.

8. The cathode assembly cooling system for a vacuum magnetron sputtering device according to claim 7, characterized in that: A third pipeline sealing ring is provided between the connecting sleeve and the target barrel, and a step is provided in the middle of the connecting sleeve which is in close contact with the end face of the target barrel. After the ends of the connecting sleeve and the target barrel are in close contact, multiple circles of annular grooves are formed on the outer end face; the connecting sleeve and the target barrel are locked and fixed by a first clamp whose inner side surface cooperates with the annular groove.

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