Supporting device and reaction furnace
By designing a support device to carry auxiliary heating sleeves and inner pair sleeves in the reactor chamber, the problems of complex maintenance and poor sealing of traditional flange components are solved, and the effect of simplifying the maintenance process and reducing the risk of gas leakage is achieved.
Patent Information
- Application Number
- CN202421884993.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-05
- Publication Date
- 2025-05-13
- Estimated Expiration
- 2034-08-05
AI Technical Summary
The maintenance process of flange components in traditional CVD equipment is complicated and the maintenance time is long. The repeated disassembly and assembly of auxiliary heating sleeves and inner couple sleeves leads to poor sealing, increasing the risk of gas leakage.
A support device is designed, including a support assembly, a first load-bearing plate and a second load-bearing plate, capable of carrying auxiliary heating sleeves and inner couple sleeves in the reactor chamber, so that the tail end connections of these sleeves are not required during disassembly and maintenance of the flange assembly.
The maintenance process of flange assembly is simplified, maintenance time is shortened, and poor sealing and gas leakage risks caused by repeated disassembly and assembly of auxiliary heating sleeves, inner couple sleeves and tail cover plates.
Smart Images
Figure CN222861626U_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the field of photovoltaic and semiconductor technology, and in particular to a supporting device and a reaction furnace. Background Art
[0002] In a conventional chemical vapor deposition (CVD) device, a flange assembly is provided at the furnace mouth of a reactor, an auxiliary heating sleeve and an inner coupling sleeve are arranged in the furnace tube of the reactor, and one end of the auxiliary heating sleeve and one end of the inner coupling sleeve are detachably connected to the flange assembly, and the other end of the auxiliary heating sleeve and the other end of the inner coupling sleeve extend into the furnace tube and are both connected to the tail cover plate of the reactor.
[0003] At present, when disassembling and maintaining the flange assembly, it is necessary to first remove the auxiliary heating sleeve and the inner coupling sleeve from the tail cover plate and the flange assembly, and then disassemble the flange assembly. When installing the flange assembly, it is necessary to reinstall both ends of the auxiliary heating sleeve and the inner coupling sleeve, which makes the maintenance process of the flange assembly complicated and the maintenance time long. Utility Model Content
[0004] In view of this, the embodiments of the present disclosure provide a supporting device and a reactor, which solve the problems of complex maintenance process and long maintenance time of the flange assembly in the related art.
[0005] In a first aspect, an embodiment of the present disclosure provides a supporting device, which is applied to a reaction furnace, wherein the reaction furnace comprises a furnace tube, at least one auxiliary heating sleeve, at least one inner pair sleeve and a flange assembly, wherein the reaction furnace has a chamber and a furnace mouth, the flange assembly is sleeved on one end of the furnace tube close to the furnace mouth, the auxiliary heating sleeve and the inner pair sleeve are arranged in the chamber, wherein the first end of the auxiliary heating sleeve and the first end of the inner pair sleeve are both detachably connected to the flange assembly, and the second end of the auxiliary heating sleeve and the second end of the inner pair sleeve both extend into the chamber; wherein the supporting device comprises: a supporting assembly, which can be placed in the chamber; at least one first bearing plate, which is connected to the supporting assembly and is configured to bear at least one of the auxiliary heating sleeves; and at least one second bearing plate, which is connected to the supporting assembly and is configured to bear at least one of the inner pair sleeves.
[0006] In some embodiments, the support assembly includes: a first support member capable of being placed in the chamber and close to the flange assembly, the first support member being respectively connected to at least one of the first supporting plates and at least one of the second supporting plates.
[0007] In some embodiments, the furnace tube and the first support member are both axisymmetric structures, in a direction perpendicular to the extension direction of the furnace tube, the shape of the cross section of the first support member is adapted to the shape of the cross section of the furnace tube, the size of the chamber is larger than the size of the first support member, and the difference between the size of the chamber and the first support member is less than 1 mm and greater than 0 mm, wherein the material of the first support member is a thermal insulation material.
[0008] In some embodiments, the first support member has a first avoidance groove and at least one second avoidance groove, wherein the first bearing plate is close to the first avoidance groove, the auxiliary heating sleeve passes through the first avoidance groove and overlaps with the first bearing plate, and the inner even sleeve passes through the second avoidance groove and overlaps with the second bearing plate.
[0009] In some embodiments, the supporting device further includes: at least one second supporting member, disposed on one side of the first supporting member and connected to the first supporting member, and at least one first supporting plate and at least one second supporting plate are both connected to the second supporting member.
[0010] In some embodiments, the support device also includes: at least two support bases, which are arranged opposite to each other and overlap with the bottom of the chamber respectively; a connecting member, which connects at least two of the support bases and is connected to at least one of the second support members; wherein the materials of the second support member and the connecting member are both metal materials, and the material of the support base is a non-metallic high-temperature resistant material.
[0011] In some embodiments, the support device further includes: at least one third support member, the third support member connecting the second support member and the second supporting plate, wherein the material of the second supporting plate is a non-metallic high temperature resistant material, and the material of the third support member is a metal material.
[0012] In some embodiments, the second support member has at least one long groove extending along the extension direction of the second support member, and the third support member has a first threaded portion; wherein the support device also includes: a locking member passing through the long groove and threadedly connected to the first threaded portion; or, the second support member has a plurality of bearing grooves arranged in sequence along the extension direction of the second support member, and an end of the third support member close to the second support member is inserted into the bearing groove.
[0013] In some embodiments, the second support member is connected to a side of the first support member close to the flange assembly.
[0014] In a second aspect, an embodiment of the present disclosure provides a reaction furnace, comprising: a furnace tube; at least one auxiliary heating sleeve, arranged in the furnace tube, configured to auxiliary heat the space in the furnace tube; at least one inner pair sleeve, arranged in the furnace tube, configured to monitor the temperature in the furnace tube; a flange assembly, sleeved on one end of the furnace tube close to the furnace mouth of the reaction furnace, and detachably connected to the first end of the auxiliary heating sleeve and the first end of the inner pair sleeve, respectively; the supporting device as described in the first aspect can be placed in the furnace tube and overlapped with the auxiliary heating sleeve and the inner pair sleeve.
[0015] The supporting device provided by the embodiment of the present disclosure can be placed in the chamber of the reaction furnace and carry the auxiliary heating sleeve and the inner pair sleeve, so that when the flange assembly is disassembled and maintained, it is not necessary to disassemble the auxiliary heating sleeve and the inner pair sleeve from the tail cover plate, and one end of the auxiliary heating sleeve and one end of the inner pair sleeve can be directly disassembled from the flange assembly, and the flange assembly can be disassembled from the furnace tube; in addition, after the maintenance of the flange assembly is completed, when installing the flange assembly, only one end of the auxiliary heating sleeve and one end of the inner pair sleeve need to be connected to the flange assembly. Therefore, the supporting device can support the auxiliary heating sleeve and the inner pair sleeve when disassembling and assembling the flange assembly, thereby simplifying the maintenance process of the flange assembly and shortening the maintenance time of the flange assembly. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 Shown is a schematic structural diagram of a reaction furnace provided in one embodiment of the present disclosure.
[0017] Figure 2 Shown is a schematic structural diagram of a support device provided in one embodiment of the present disclosure.
[0018] Figure 3 Shown is a schematic structural diagram of a reaction furnace provided in another embodiment of the present disclosure.
[0019] Figure 4 Shown is a schematic structural diagram of a support device provided in another embodiment of the present disclosure.
[0020] Reference numerals:
[0021] 1. Reactor; 101. Chamber; 102. Furnace mouth; 103. Tail cover; 10. Support device; 100. Support assembly; 110. First support member; 1101. First avoidance groove; 1102. Second avoidance groove; 1103. Second threaded portion; 120. Second support member; 1201. Long groove; 130. Support base; 140. Connector; 150. Mounting member; 1501. First threaded hole; 160. Third support member Support member; 1601, first threaded portion; 1602, third threaded portion; 170, locking member; 200, first bearing plate; 300, second bearing plate; 3001, through hole; 20, furnace tube; 30, auxiliary heating sleeve; 301, first end of the auxiliary heating sleeve; 302, second end of the auxiliary heating sleeve; 40, inner even sleeve; 401, first end of the inner even sleeve; 402, second end of the inner even sleeve; 50, flange assembly. DETAILED DESCRIPTION
[0022] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.
[0023] Semiconductor or photovoltaic materials are widely used in electronics, new energy and other industries. Semiconductor and photovoltaic materials usually need to undergo specific process treatment before they can be applied to products. Chemical vapor deposition (CVD) technology is one of the process treatment technologies used to coat the surface of semiconductor or photovoltaic materials. The chemical vapor deposition process needs to be carried out in a vacuum reactor, so the reactor needs to be in a sealed state during the process. At present, the flange assembly at the furnace mouth of the reactor is sealed with a fluororubber sealing ring. Since the temperature in the furnace is high during the process (usually 450℃-550℃), there will be frequent heating and cooling at the furnace mouth, which will cause carbonization problems in the sealing ring, and then cause the sealing ring to fail to meet the process sealing requirements. At this time, it is necessary to disassemble the flange assembly and replace the sealing ring, that is, disassemble and maintain the flange assembly.
[0024] In conventional CVD equipment and thermal process equipment, an auxiliary heating sleeve and an inner coupling sleeve are provided in the furnace tube of the reactor, and one end of the auxiliary heating sleeve and one end of the inner coupling sleeve are detachably connected to the flange assembly, and the other end of the auxiliary heating sleeve and the other end of the inner coupling sleeve extend into the furnace tube and are both connected to the tail cover plate of the reactor.
[0025] At present, when disassembling and maintaining the flange assembly, it is necessary to first remove the auxiliary heating sleeve and the inner coupling sleeve from the tail cover plate and the flange assembly, and then disassemble the flange assembly. Moreover, when installing the flange assembly after the maintenance of the flange assembly is completed, it is necessary to reinstall both ends of the auxiliary heating sleeve and the inner coupling sleeve, which makes the maintenance process of the flange assembly complicated and the maintenance time long.
[0026] In addition, the connections between the auxiliary heating sleeve, the inner coupling sleeve and the tail cover plate are sealed by sealing rings. Repeated disassembly and assembly of the auxiliary heating sleeve, the inner coupling sleeve and the tail cover plate will lead to poor sealing of the connections, thereby increasing the risk of gas leakage in the reactor.
[0027] In addition, when disassembling the flange assembly, it is necessary to wait until the reactor, the auxiliary heating sleeve and the inner sleeve are completely cooled before disassembling, which takes a long time and further increases the maintenance time of the flange assembly.
[0028] In view of the above problems, the embodiments of the present disclosure provide a supporting device and a reaction furnace. The specific structures of the supporting device and the reaction furnace are described below in conjunction with the embodiments.
[0029] Figure 1 Shown is a schematic structural diagram of a reaction furnace provided in one embodiment of the present disclosure. Figure 2 FIG. 1 is a schematic diagram of the structure of a support device provided by an embodiment of the present disclosure. Figure 1 and Figure 2 As shown, the support device 10 is applied to a reaction furnace 1, and the reaction furnace 1 includes a furnace tube 20, at least one auxiliary heating sleeve 30, at least one inner pair sleeve 40 and a flange assembly 50. The reaction furnace 1 has a chamber 101 and a furnace opening 102, the flange assembly 50 is sleeved on one end of the furnace tube 20 close to the furnace opening 102, the auxiliary heating sleeve 30 and the inner pair sleeve 40 are arranged in the chamber 101, the first end 301 of the auxiliary heating sleeve and the first end 401 of the inner pair sleeve are both detachably connected to the flange assembly 50, and the second end 302 of the auxiliary heating sleeve and the second end 402 of the inner pair sleeve both extend into the chamber 101.
[0030] Exemplarily, the extension direction of the auxiliary heating sleeve 30 and the inner even sleeve 40 is the same as the extension direction of the furnace tube 20 , and the second end 302 of the auxiliary heating sleeve and the second end 402 of the inner even sleeve are both connected to the tail cover plate 103 .
[0031] The support device 10 includes a support assembly 100, at least one first carrier plate 200 and at least one second carrier plate 300. The support assembly 100 can be placed in a chamber 101, the first carrier plate 200 is connected to the support assembly 100, and the first carrier plate 200 is configured to carry at least one auxiliary heating sleeve 30. The second carrier plate 300 is connected to the support assembly 100, and the second carrier plate 300 is configured to carry at least one inner pair sleeve 40.
[0032] Exemplarily, the support device 10 includes a first carrier plate 200 and two second carrier plates 300. A plurality of auxiliary heating sleeves 30 are arranged in the chamber 101 and located at the top of the chamber 101. The first carrier plate 200 is arranged above the support assembly 100 and can simultaneously carry a plurality of auxiliary heating sleeves 30. Two inner even sleeves 40 are relatively arranged at the sides of the chamber 101, and the two second carrier plates 300 are relatively arranged, and one second carrier plate 300 carries one inner even sleeve 40.
[0033] The supporting device 10 provided in the embodiment of the present disclosure can be placed in the chamber 101 of the reactor 1, and carries the auxiliary heating sleeve 30 and the inner even sleeve 40, so that when the flange assembly 50 is disassembled and maintained, it is not necessary to disassemble the auxiliary heating sleeve 30 and the inner even sleeve 40 from the tail cover plate 103, and the first end 301 of the auxiliary heating sleeve and the first end 401 of the inner even sleeve can be directly disassembled from the flange assembly 50, and the flange assembly 50 can be disassembled from the furnace tube 20; in addition, after the maintenance of the flange assembly 50 is completed, when installing the flange assembly 50, it is only necessary to connect the first end 301 of the auxiliary heating sleeve and the first end 401 of the inner even sleeve to the flange assembly 50. Therefore, the supporting device 10 can support the auxiliary heating sleeve 30 and the inner even sleeve 40 when disassembling and assembling the flange assembly 50, thereby simplifying the maintenance process of the flange assembly 50 and shortening the maintenance time of the flange assembly 50.
[0034] In addition, since the connection between the second end 302 of the auxiliary heating sleeve and the second end 402 of the inner pair sleeve and the tail cover plate 103 is sealed by a sealing ring, repeated disassembly and assembly will lead to poor sealing at this location, thereby increasing the risk of gas leakage. Since the support device 10 can support the auxiliary heating sleeve 30 and the inner pair sleeve 40 when disassembling and assembling the flange assembly 50, it is not necessary to repeatedly disassemble and assemble the second end 302 of the auxiliary heating sleeve and the second end 402 of the inner pair sleeve and the tail cover plate 103, thereby avoiding poor sealing at the connection between the second end 302 of the auxiliary heating sleeve and the second end 402 of the inner pair sleeve and the tail cover plate 103, resulting in gas leakage.
[0035] In addition, there is no need to wait for the reactor 1, the auxiliary heating sleeve 30 and the inner sleeve 40 to completely cool down before removing the flange assembly 50. Instead, the flange assembly 50 can be removed only when the temperature at the furnace mouth 102 of the reactor 1 drops to about 300°C, thereby further shortening the maintenance time of the flange assembly 50.
[0036] In some embodiments, Figure 2 and Figure 3As shown, the support assembly 100 includes a first support member 110 , which can be placed in the chamber 101 and close to the flange assembly 50 , and the first support member 110 is respectively connected to at least one first carrier plate 200 and at least one second carrier plate 300 .
[0037] When the first support member 110 is placed in the chamber 101 and close to the flange assembly 50 , the first support member 110 can also act as a heat insulator to block heat loss in the chamber 101 , thereby reducing energy consumption.
[0038] In some embodiments, the furnace tube 20 and the first support member 110 are both axially symmetrical structures. In the direction perpendicular to the extension direction of the furnace tube 20, the shape of the cross section of the first support member 110 is adapted to the shape of the cross section of the furnace tube 20. The size of the chamber 101 is larger than the size of the first support member 110, and the difference between the size of the chamber 101 and the first support member 110 is less than 1 mm and greater than 0 mm. By increasing the cross-sectional area of the first support member 110 as much as possible, while ensuring that the first support member 110 can be smoothly placed in the chamber 101, the first support member 110 can block the heat loss in the chamber 101 as much as possible. The material of the first support member 110 is a heat-insulating material, which has a better heat-insulating effect and can better prevent the heat loss in the chamber 101. Exemplarily, the heat-insulating material is an aluminum silicate fiber material.
[0039] In some embodiments, Figure 2 and Figure 3 As shown, the first support member 110 has a first avoidance groove 1101 and at least one second avoidance groove 1102, the first bearing plate 200 is close to the first avoidance groove 1101, the auxiliary heating sleeve 30 passes through the first avoidance groove 1101 and overlaps with the first bearing plate 200. The second bearing plate 300 is close to the second avoidance groove 1102, the inner even sleeve 40 passes through the second avoidance groove 1102 and overlaps with the second bearing plate 300.
[0040] Exemplarily, the first support member 110 has two second avoidance grooves 1102 , which are arranged opposite to each other, a second bearing plate 300 is close to a second avoidance groove 1102 , and an inner pair sleeve 40 passes through a second avoidance groove 1102 and overlaps with a second bearing plate 300 .
[0041] In some embodiments, Figure 2As shown, the support device 10 further includes at least one second support member 120, which is disposed on one side of the first support member 110 and connected to the first support member 110, and at least one first supporting plate 200 and at least one second supporting plate 300 are both connected to the second support member 120. The second support member 120 is used to support the first support member 110 to improve the mechanical strength and stability of the support device 10.
[0042] Exemplarily, when the material of the first support member 110 is aluminum silicate fiber material, the mechanical strength of the first support member 110 is relatively small, the first support member 110 is easily broken, and the first support member 110 is easily deformed when used for a long time. Using the second support member 120 to support the first support member 110 can increase the mechanical strength of the first support member 110, thereby avoiding the first support member 110 from being broken or deformed as much as possible.
[0043] In some embodiments, the support device 10 further includes at least two support bases 130 and a connector 140, and the at least two support bases 130 are arranged opposite to each other and overlap the bottom of the chamber 101 respectively. The connector 140 connects at least two support bases 130 and is connected to at least one second support member 120. Among them, the materials of the second support member 120 and the connector 140 are both metal materials to further enhance the mechanical strength and stability of the support device 10. The material of the support base 130 is a non-metallic high-temperature resistant material. The mechanical strength of the non-metallic material is relatively smaller than that of the metal material, which can avoid the support base 130 from scratching the bottom of the chamber 101 as much as possible. At the same time, the high-temperature resistant material can prevent the support base 130 from contacting the bottom of the high-temperature chamber 101 during the process, causing the support base 130 to deform.
[0044] For example, Figure 2 As shown, the support device 10 includes two second support members 120, which are arranged in parallel on the same side of the first support member 110 and are both connected to the first support member 110. Figure 2 and Figure 4 As shown, a mounting member 150 is provided on the first support member 110 away from the second support member 120, and two first threaded holes 1501 are provided on the mounting member 150. The second support member 120 has two second threaded portions 1103 on the side facing the first support member 110. A first screw (not shown in the figure) passes through the first threaded hole 1501 and is screwed to the second threaded portion 1103 to realize the connection between the first support member 110 and the second support member 120.
[0045] Exemplarily, the first supporting plate 200 is located above the two second supporting members 120 and is connected to the two second supporting members 120 respectively.
[0046] In some embodiments, Figure 2 As shown, the support device 10 further includes at least one third support member 160, which connects the second support member 120 and the second supporting plate 300. The second supporting plate 300 is made of non-metallic high temperature resistant material, and the third support member 160 is made of metal material.
[0047] The material of the second bearing plate 300 is a non-metallic high-temperature resistant material. The mechanical strength of the non-metallic material is relatively smaller than that of the metal material, and the second bearing plate 300 can be prevented from scratching the inner sleeve 40. At the same time, the high-temperature resistant material can prevent the second bearing plate 300 from deforming during the process. Since the second bearing plate 300 made of non-metallic material is directly connected to the second support member 120 made of metal material, it is necessary to drill threaded holes on the second bearing plate 300, which makes the second bearing plate 300 easily damaged under high temperature conditions. Therefore, the second support member 120 and the second bearing plate 300 are connected by the third support member 160, which can avoid drilling threaded holes on the second bearing plate 300. In addition, the third support member 160 made of metal material has high mechanical strength and can stably support the second bearing plate 300.
[0048] Exemplarily, one side of the second supporting plate 300 is located above the third supporting member 160, the second supporting plate 300 has a through hole 3001, the third supporting member 160 has a third threaded portion 1602, and a second screw (not shown in the figure) passes through the through hole 3001 and is screwed to the third threaded portion 1602 to realize the connection between the second supporting plate 300 and the third supporting member 160.
[0049] Exemplarily, the supporting device 10 has two third supporting members 160 , and one third supporting member 160 connects one second supporting member 120 and one second supporting plate 300 .
[0050] In some embodiments, the second support member 120 has at least one long slot 1201, and the long slot 1201 extends along the extension direction of the second support member 120, and the third support member 160 has a first threaded portion 1601. The support device 10 further includes a locking member 170, and the locking member 170 passes through the long slot 1201 and is screwed with the first threaded portion 1601. The long slot 1201 is used to achieve the position of the third support member 160 along the extension direction of the second support member 120 to be adjustable, so as to adjust the height of the third support member 160 according to the height of the inner even sleeve 40 from the bottom of the chamber 101, so that the second supporting plate 300 can carry the inner even sleeve 40.
[0051] Exemplarily, the locking member 170 may be a screw, a bolt or other structure with a thread, as long as it can lock the third support member 160 and the second support member 120 .
[0052] Exemplarily, the second support member 120 has two long grooves 1201 to further improve the locking stability between the third support member 160 and the second support member 120 .
[0053] In some embodiments, the second support member 120 has a plurality of bearing grooves sequentially arranged along the extension direction of the second support member 120, and one end of the third support member 160 close to the second support member 120 is inserted into the bearing groove to achieve the connection between the third support member 160 and the second support member 120. The third support member 160 is inserted into different bearing grooves to adjust the height of the third support member 160, so that the second bearing plate 300 can carry the inner pair sleeve 40 located at different height positions.
[0054] In some embodiments, the second support member 120 is connected to a side of the first support member 110 close to the flange assembly 50 , so that the second support member 120 faces the furnace opening 102 , thereby facilitating adjustment of the third support member 160 .
[0055] like Figure 1 and Figure 3 As shown, the reactor 1 provided by the embodiment of the present disclosure includes: the support device 10 mentioned in the above embodiment, the furnace tube 20, at least one auxiliary heating sleeve 30, at least one inner pair sleeve 40 and the flange assembly 50. The auxiliary heating sleeve 30 is arranged in the furnace tube 20, and the auxiliary heating sleeve 30 is configured to perform auxiliary heating on the space in the furnace tube 20. The inner pair sleeve 40 is arranged in the furnace tube 20, and the inner pair sleeve 40 is configured to monitor the temperature in the furnace tube 20. The flange assembly 50 is sleeved on one end of the furnace tube 20 close to the furnace port 102 of the reactor 1, and is detachably connected to the first end 301 of the auxiliary heating sleeve and the first end 401 of the inner pair sleeve respectively. The support device 10 can be placed in the furnace tube 20, and overlapped with the auxiliary heating sleeve 30 and the inner pair sleeve 40.
[0056] Since the reaction furnace 1 includes the supporting device 10 , all technical features and technical effects of the reaction furnace 1 including the supporting device 10 are not described in detail here.
[0057] In the embodiments of the present disclosure, if not clearly defined, the connection may be in the form of detachable connection by means of bolts and nuts, screws, buckles, magnets, etc. In some connections, if there is no special requirement for detachable matching, non-detachable connection may be achieved by means of welding, bonding, etc.
[0058] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.
[0059] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).
[0060] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.
[0061] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.
[0062] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure shall be included in the protection scope of the present disclosure.
Claims
1. A supporting device, characterized in that: Applied to a reaction furnace, the reaction furnace comprises a furnace tube, at least one auxiliary heating sleeve, at least one inner pair sleeve and a flange assembly, the reaction furnace has a chamber and a furnace opening, the flange assembly is sleeved on one end of the furnace tube close to the furnace opening, the auxiliary heating sleeve and the inner pair sleeve are arranged in the chamber, wherein the first end of the auxiliary heating sleeve and the first end of the inner pair sleeve are both detachably connected to the flange assembly, and the second end of the auxiliary heating sleeve and the second end of the inner pair sleeve both extend into the chamber; Wherein, the supporting device comprises: a support assembly capable of being placed in the chamber; at least one first bearing plate connected to the support assembly and configured to bear at least one of the auxiliary heating sleeves; At least one second bearing plate is connected to the supporting assembly and is configured to bear at least one inner pair sleeve.
2. The support device according to claim 1, characterized in that: The support assembly comprises: The first support member can be placed in the chamber and close to the flange assembly, and the first support member is respectively connected to at least one of the first supporting plates and at least one of the second supporting plates.
3. The supporting device according to claim 2, characterized in that: The furnace tube and the first support member are both axisymmetric structures. In the direction perpendicular to the extension direction of the furnace tube, the shape of the cross section of the first support member is adapted to the shape of the cross section of the furnace tube. The size of the chamber is larger than the size of the first support member, and the difference between the size of the chamber and the first support member is less than 1 mm and greater than 0 mm, wherein the material of the first support member is a heat-insulating material.
4. The supporting device according to claim 3, characterized in that: The first support member has a first avoidance groove and at least one second avoidance groove, wherein the first bearing plate is close to the first avoidance groove, the auxiliary heating sleeve passes through the first avoidance groove and overlaps with the first bearing plate, and the inner even sleeve passes through the second avoidance groove and overlaps with the second bearing plate.
5. The supporting device according to any one of claims 2 to 4, characterized in that: Also includes: At least one second support member is disposed on one side of the first support member and connected to the first support member, and at least one first supporting plate and at least one second supporting plate are both connected to the second support member.
6. The supporting device according to claim 5, characterized in that: Also includes: At least two supporting bases are arranged opposite to each other and overlap the bottom of the chamber respectively; A connecting member connects at least two of the support bases and is connected to at least one of the second support members; wherein the materials of the second support members and the connecting member are both metal materials, and the material of the support base is a non-metallic high-temperature resistant material.
7. The supporting device according to claim 6, characterized in that: Also includes: At least one third support member, the third support member connects the second support member and the second supporting plate, wherein the material of the second supporting plate is a non-metallic high temperature resistant material, and the material of the third support member is a metal material.
8. The supporting device according to claim 7, characterized in that: The second support member has at least one long groove, and the long groove extends along the extension direction of the second support member, and the third support member has a first threaded portion; Wherein, the supporting device further comprises: A locking member passing through the long slot and threadedly connected to the first threaded portion; or, The second support member has a plurality of bearing grooves arranged in sequence along an extension direction of the second support member, and one end of the third support member close to the second support member is inserted into the bearing groove.
9. The supporting device according to claim 8, characterized in that: The second support member is connected to a side of the first support member close to the flange assembly.
10. A reaction furnace, characterized in that: include: Furnace pipes; at least one auxiliary heating sleeve, disposed in the furnace tube and configured to perform auxiliary heating on the space in the furnace tube; at least one inner pair sleeve, disposed in the furnace tube and configured to monitor the temperature in the furnace tube; A flange assembly is sleeved on one end of the furnace tube close to the furnace port of the reaction furnace and is detachably connected to the first end of the auxiliary heating sleeve and the first end of the inner sleeve respectively; The supporting device according to any one of claims 1 to 9 can be placed in the furnace tube and overlapped with the auxiliary heating sleeve and the inner pair sleeve.