Graphite boat with large bearing capacity

Abstract

The utility model discloses a graphite boat with large bearing capacity, which relates to the technical field of graphite boats and comprises a graphite boat body, the graphite boat body comprises an inner boat piece and an outer boat piece, a plurality of groups of graphite boat pieces are arranged between the inner boat piece and the outer boat piece, a penetrating groove is formed in the outer boat piece in a penetrating mode, and a plurality of groups of moving seats are connected in the penetrating groove in a sliding mode. The inner sides of the moving seats are connected with the graphite boat pieces close to the outer boat pieces, the outer side of each moving seat is provided with a fixing cylinder, the outer end of each fixing cylinder is telescopically connected with a moving plate, an inner cavity of each fixing cylinder is provided with a telescopic assembly for adjusting the moving plate to stretch out and draw back, one face, close to the outer walls of the outer boat pieces, of each moving plate is provided with a magnet piece, and the outer side walls of the outer boat pieces are provided with iron pieces. The left-right position of the graphite boat piece can be adjusted, the size of the internal space of the graphite boat can be adjusted according to the length of a silicon wafer, the bearing capacity of the graphite boat is improved, the position of the movable seat can be fixed through attraction of the magnet piece and the iron piece, the graphite boat piece is prevented from sliding, and the stability of the large-bearing-capacity graphite boat in use is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of graphite boats, in particular to a graphite boat with a large load capacity. Background Art

[0002] Graphite boats, made of high-purity graphite, are widely used in electronics, energy, and environmental protection due to their high-temperature and corrosion-resistant properties. Resembling a small boat, they can be used for manufacturing, transporting, and processing materials. Their high efficiency and environmental friendliness have earned them a prominent position in modern industry.

[0003] Publication No. CN208923068U proposes a graphite boat. When coating silicon wafers, the graphite boat in the utility model does not need to be turned over, which can effectively reduce the scratches on the edges of the silicon wafers caused by multiple insertions of the silicon wafers.

[0004] The above patent uses a graphite boat to coat silicon wafers, but each set of graphite boat slices is fixedly installed on the inner wall of the graphite boat, which makes it inconvenient to adjust the left and right positions of the graphite boat slices. As a result, longer silicon wafers cannot be placed, and shorter silicon wafers are wasted when placed in a large space, which reduces the carrying capacity of the graphite boat and results in poor performance. Therefore, we propose a graphite boat with a large carrying capacity. Utility Model Content

[0005] The purpose of the present invention is to provide a graphite boat with a large load capacity, so as to solve the problem in the above-mentioned background technology that longer silicon wafers cannot be placed, and smaller silicon wafers are placed in a large space, which wastes storage space and causes the load capacity of the graphite boat to be reduced.

[0006] To achieve the above objectives, the present invention provides the following technical solutions:

[0007] A large-load graphite boat comprises a graphite boat body, the graphite boat body comprising an inner boat sheet and an outer boat sheet, a plurality of graphite boat sheets are arranged between the inner boat sheet and the outer boat sheet, each group of graphite boat sheets close to the inner boat sheet is slidably connected to the inner side surface of the inner boat sheet, a through groove is provided in the outer boat sheet, a plurality of groups of movable seats are slidably connected in the through groove, and the inner side of the movable seats is connected to the graphite boat sheet close to the outer boat sheet;

[0008] A fixed cylinder is installed on the outside of each group of movable seats, and the outer end of the fixed cylinder is telescopically connected to a movable plate. The inner cavity of the fixed cylinder is provided with a telescopic component for adjusting the telescopic movement of the movable plate. A magnet is provided on the side of the movable plate close to the outer wall of the outer boat piece, and an iron sheet that is compatible with the magnet is provided on the outer wall of the outer boat piece.

[0009] Furthermore, a T-shaped groove is provided on the inner side surface of the inner boat sheet, and a plurality of groups of T-shaped blocks are slidably connected in the T-shaped groove, and the outer wall of the T-shaped block is connected to the graphite boat sheet close to the inner boat sheet.

[0010] Further: the telescopic assembly includes a telescopic rod, the outer wall of the telescopic rod is covered with a reset spring, and the outer end of the telescopic rod is installed with a T-shaped piece, the T-shaped piece is slidably connected to the inner cavity of the fixed cylinder, and the other end of the T-shaped piece is connected to the movable plate.

[0011] Furthermore, each group of graphite boats has a silicon wafer limiting slot at the top and bottom of both side walls, and a soft pad is provided on the inner wall of each slot. Front and rear adjacent graphite boats are connected by conductive rods.

[0012] Furthermore: a handle is installed on the outer wall of the movable plate, and the handheld end of the handle is covered with an anti-slip rubber sleeve.

[0013] Compared with the prior art, the beneficial effects of the present invention are:

[0014] The utility model can make the magnetic part on the movable plate move away from the iron sheet through the action of the telescopic rod and the return spring on the telescopic assembly. At this time, the position of the fixed cylinder is no longer restricted, and the movable seat can slide in the through groove. Cooperating with the sliding connection of the T-block and the T-slot, the left and right position of the graphite boat sheet can be adjusted. The internal space size of the graphite boat can be adjusted according to the length of the silicon sheet, thereby improving the carrying capacity of the graphite boat. Moreover, the attraction between the magnetic part and the iron sheet can fix the position of the movable seat, thereby preventing the graphite boat sheet from sliding during use, thereby improving the stability of the graphite boat with a large carrying capacity when in use. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the top structure of the utility model;

[0016] Figure 2 For the utility model Figure 1 A in the middle is an enlarged structural diagram;

[0017] Figure 3 It is a schematic diagram of the connection structure between the fixing cylinder and the side of the outer boat sheet of the present invention.

[0018] In the figure: 1. Graphite boat body; 2. Inner boat piece; 3. Outer boat piece; 4. T-slot; 5. T-block; 6. Graphite boat piece; 7. Slot; 8. Through slot; 9. Moving seat; 10. Fixed cylinder; 11. Telescopic rod; 12. Return spring; 13. T-piece; 14. Moving plate; 15. Magnet; 16. Handle; 17. Iron sheet. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0020] Example 1:

[0021] See also Figure 1-3 The utility model provides a technical solution: a large-load graphite boat, including a graphite boat body 1, the graphite boat body 1 includes an inner boat sheet 2 and an outer boat sheet 3, a plurality of groups of graphite boat sheets 6 are arranged between the inner boat sheet 2 and the outer boat sheet 3, each group of graphite boat sheets 6 close to the inner boat sheet 2 is slidably connected to the inner side surface of the inner boat sheet 2, a through groove 8 is provided in the outer boat sheet 3, a plurality of groups of movable seats 9 are slidably connected in the through groove 8, and the inner side of the movable seat 9 is connected to the graphite boat sheet 6 close to the outer boat sheet 3; using the graphite boat body 1 to coat silicon wafers is an existing technology, and the specific structure and working principle are not elaborated here. The movable seat 9 is fixedly connected to each group of graphite boat sheets 6 close to the outer boat sheet 3;

[0022] Each group of movable seats 9 is provided with a fixed cylinder 10 on the outside, and the outer end of the fixed cylinder 10 is telescopically connected to the movable plate 14. The inner cavity of the fixed cylinder 10 is provided with a telescopic component for adjusting the telescopic movement of the movable plate 14. The movable plate 14 is provided with a magnet 15 on the side close to the outer wall of the outer boat piece 3, and the outer wall of the outer boat piece 3 is provided with an iron sheet 17 adapted to the magnet 15 (the length of the iron sheet 17 is consistent with the length of the outer boat piece 3); the movable seat 9 is fixedly connected to the fixed cylinder 10, and the magnetic member on the movable plate 14 can be adjusted by the action of the telescopic component. The stone piece 15 is away from the iron sheet 17. At this time, the position of the fixed cylinder 10 is no longer restricted, and the movable seat 9 can slide in the through groove 8. Cooperating with the sliding connection between the T-block 5 and the T-slot 4, the left and right position of the graphite boat sheet 6 can be adjusted. The graphite boat can adjust the size of the internal space according to the length of the silicon wafer, which increases the carrying capacity of the graphite boat. The attraction between the magnetic piece 15 and the iron sheet 17 can fix the position of the movable seat 9, preventing the graphite boat sheet 6 from sliding during use, thereby improving the stability of the large-load-carrying graphite boat during use.

[0023] Among them, preferably, a T-shaped groove 4 is opened on the inner side surface of the inner boat sheet 2, and multiple groups of T-shaped blocks 5 are slidably connected in the T-shaped groove 4, and the outer wall of the T-shaped block 5 is connected to the graphite boat sheet 6 close to the inner boat sheet 2; the T-shaped block 5 is fixedly connected to the graphite boat sheet 6 close to the inner boat sheet 2, and through the sliding connection between the two, the graphite boat sheet 6 is smoother when adjusting the left and right positions.

[0024] Preferably, the telescopic assembly includes a telescopic rod 11, the outer wall of the telescopic rod 11 is covered with a return spring 12, and the outer end of the telescopic rod 11 is installed with a T-shaped piece 13, the T-shaped piece 13 is slidably connected to the inner cavity of the fixed cylinder 10, and the other end of the T-shaped piece 13 is connected to the movable plate 14; when it is necessary to adjust the left and right position of the graphite boat 6, the movable plate 14 is pulled outward, and the T-shaped piece 13 is moved outward at this time, the telescopic rod 11 fixedly connected thereto is stretched, and the return spring 12 is also stretched (with a tendency to automatically return), and the outward movement of the movable plate 14 causes the magnet 15 to move away from the iron sheet 17, and the position of the fixed cylinder 10 is no longer restricted, so that the movable seat 9 can slide in the through groove 8. After determining the left and right position of the graphite boat 6, the movable plate 14 can be released. At this time, the stretched return spring 12 automatically returns, and the movable plate 14 moves toward one side of the outer wall of the outer boat sheet 3, and the magnet 15 and the iron sheet 17 are attracted together, that is, the position of the fixed cylinder 10 is fixed, preventing the graphite boat 6 from sliding.

[0025] Preferably, the top and bottom ends of both side walls of each group of graphite boats 6 are provided with slots 7 for limiting the silicon wafers, and the inner walls of each group of slots 7 are provided with soft pads, and the front and rear adjacent graphite boats 6 are connected by conductive rods; the slots 7 are used to limit the silicon wafers, and the soft pads play a protective role to avoid damage to the outer walls of the silicon wafers.

[0026] Example 2:

[0027] Reference Figure 2 This embodiment is different from the first embodiment in that a handle 16 is installed on the outer wall of the movable plate 14, and the hand-held end of the handle 16 is covered with an anti-slip rubber sleeve; the handle 16 facilitates the outward pulling of the movable plate 14, and the anti-slip rubber sleeve plays an anti-slip role, preventing the hand from slipping when holding the handle 16 to pull the movable plate 14.

[0028] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A large-load graphite boat, comprising a graphite boat body (1), wherein the graphite boat body (1) comprises an inner boat sheet (2) and an outer boat sheet (3), wherein a plurality of groups of graphite boat sheets (6) are arranged between the inner boat sheet (2) and the outer boat sheet (3), wherein: Each group of graphite boat sheets (6) close to one side of the inner boat sheet (2) is slidably connected to the inner side surface of the inner boat sheet (2); a through groove (8) is provided in the outer boat sheet (3); a plurality of groups of movable seats (9) are slidably connected in the through groove (8); the inner side of the movable seat (9) is connected to the graphite boat sheet (6) close to the outer boat sheet (3); A fixed cylinder (10) is installed on the outside of each group of movable seats (9), and the outer end of the fixed cylinder (10) is telescopically connected to a movable plate (14). The inner cavity of the fixed cylinder (10) is provided with a telescopic component for adjusting the telescopic movement of the movable plate (14). A magnet (15) is provided on a side of the movable plate (14) close to the outer wall of the outer boat sheet (3), and an iron sheet (17) adapted to the magnet (15) is provided on the outer wall of the outer boat sheet (3).

2. A large-load graphite boat according to claim 1, characterized in that: The inner side surface of the inner boat sheet (2) is provided with a T-shaped groove (4), and a plurality of groups of T-shaped blocks (5) are slidably connected in the T-shaped groove (4), and the outer wall of the T-shaped block (5) is connected to a graphite boat sheet (6) close to the inner boat sheet (2).

3. The large-load graphite boat according to claim 1, characterized in that: The telescopic assembly comprises a telescopic rod (11), the outer wall of the telescopic rod (11) is sleeved with a return spring (12), and the outer end of the telescopic rod (11) is installed with a T-shaped piece (13).

4. A large-load graphite boat according to claim 3, characterized in that: The T-shaped piece (13) is slidably connected to the inner cavity of the fixed cylinder (10), and the other end of the T-shaped piece (13) is connected to the movable plate (14).

5. The large-load graphite boat according to claim 1, characterized in that: The top and bottom ends of both side walls of each group of graphite boat sheets (6) are provided with clamping grooves (7) for limiting silicon sheets, and the inner walls of each group of clamping grooves (7) are provided with soft pads.

6. The large-load graphite boat according to claim 1, characterized in that: Front and rear adjacent graphite boat sheets (6) are connected via conductive rods.

7. The large-load graphite boat according to claim 1, characterized in that: A handle (16) is installed on the outer wall of the movable plate (14), and the hand-held end of the handle (16) is covered with an anti-slip rubber sleeve.

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