Anti-cracking graphite main heater foot plate
By designing the anti-crack graphite main heater foot board, and using structures such as protective cover, isolation block and stopper groove, the problem of silicon liquid infiltration during single crystal silicon drawing is solved, which significantly improves the stability of the connection and the service life of the main heater.
Patent Information
- Application Number
- CN202421812934.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-29
- Publication Date
- 2025-05-13
- Estimated Expiration
- 2034-07-29
AI Technical Summary
During the single crystal silicon drawing process, the connection between the electrodes and electrode legs of the graphite main heater is easily penetrated by splashed silicon liquid, resulting in difficulty in releasing the connection and even damage to the components.
A crack-proof graphite main heater foot panel is designed, including pillars, mounting blocks, protective covers and isolation blocks. The protective cover is provided on the mounting block, and the protection tank and the liquid discharge channel can prevent the infiltration of silicon liquid, and the isolation block and the stopper groove further block and lead to the silicon liquid liquid.
It effectively avoids the penetration of silicon liquid into the electrode holes and electrode connections, reduces the difficulty of removing connections and the risk of component damage, and extends the service life of the main heater.
Smart Images
Figure CN222861708U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of single crystal silicon production, and particularly relates to an anti-cracking graphite main heater foot plate. Background Art
[0002] During the single crystal silicon pulling process, a main graphite heater mainly used for thermal field heating is installed in the single crystal furnace. The main graphite heater includes a cylindrical heating element and an electrode support for supporting the cylindrical heating element. One side of the electrode support is connected to the cylindrical heating element, and the other side is connected to the electrode. In the single crystal furnace, a crucible is arranged inside the heating element. When silicon leakage occurs in the crucible, the silicon liquid is likely to fall to the connection between the electrode and the electrode support, and solidify at the connection after cooling, making it difficult to disassemble and even causing damage during the disassembly process. Utility Model Content
[0003] The purpose of the utility model is to provide a crack-resistant graphite main heater foot plate in view of the above-mentioned technical problems, which can prevent the electrode holes and electrode connections on the mounting block from being directly infiltrated by splashed silicon liquid, causing difficulties in subsequent disconnection and even causing damage to components during disconnection.
[0004] In view of this, the utility model provides an anti-cracking graphite main heater foot plate, including a pillar, a mounting block perpendicular to the pillar is connected to the bottom of the pillar, the mounting block is provided with an electrode hole, and also includes a protective cover, the protective cover is provided on the mounting block, a protective groove is provided at the bottom of the protective cover, an opening is provided on one side of the protective cover, the opening is connected to the protective groove, and the mounting block can enter the protective groove through the opening.
[0005] In the present technical solution, during the pulling process of single crystal silicon, once the crucible leaks silicon and the silicon liquid splashes downward, a protective cover is provided on the mounting block to prevent the electrode holes and electrode connections on the mounting block from being directly penetrated by the splashed silicon liquid, causing difficulties in subsequent disconnection and even causing damage to components during disconnection.
[0006] In the above technical solution, further, a mounting groove is provided on the bottom wall of the protection groove corresponding to the electrode hole.
[0007] In this technical solution, a mounting groove is provided for the connector to connect the electrode hole and the electrode.
[0008] In the above technical solution, further, an isolation block is arranged on the upper part of the mounting block, the isolation block is arranged between the mounting groove and the support, the protective groove is provided with a stop groove for accommodating the isolation block, the protective cover is provided with drainage channels on both sides corresponding to the stop groove, and the drainage channels are arranged vertically on the inner wall of the protective groove.
[0009] In this technical solution, the splashed silicon liquid slides down from the support pillar and may penetrate into the protective cover from the side close to the support pillar. With the arrangement of the isolation block, the liquid stop groove, and the drainage channel, when the silicon liquid penetrates into the liquid stop groove, it is blocked by the isolation block, and the silicon liquid flows to both sides along the length direction of the liquid stop groove and leaves through the drainage channels arranged on both sides.
[0010] In the above technical solution, further, the bottom wall of the protective groove is provided with positioning holes between the liquid stop groove and the installation groove, and the installation block is provided with through connection holes corresponding to the positioning holes.
[0011] In this technical solution, fasteners such as bolts pass through the positioning holes and the connection holes for threaded connection, ensuring that the protective cover is firmly set on the installation block. At the same time, the positioning holes are arranged between the liquid stop groove and the installation groove to prevent the silicon liquid from penetrating.
[0012] In the above technical solution, further, a connecting plate is convexly arranged upward on the side of the support pillar away from the installation block, and fixing holes are arranged on the connecting plate, and the fixing holes are arranged in a "field" shape.
[0013] In this technical solution, a connecting plate is convexly arranged upward on the top of the support pillar. The connecting plate perpendicular to the top surface of the support pillar and the top surface of the support pillar form a support structure for supporting the heating coil body. At the same time, there are 4 fixing holes arranged in a "field" shape. When connecting the heating coil body, the thermal stress can be dispersed, avoiding material fatigue or damage caused by local heat concentration. Multiple connection points can distribute the force more evenly, thus significantly improving the rigidity and stability of the entire structure.
[0014] In the above technical solution, further, on the side of the support pillar away from the top, both sides are narrowed inward to connect the installation block.
[0015] In this technical solution, by narrowing the support pillar, the resistance is reduced, the heat generation on the side of the foot plate away from the crucible is reduced, thereby reducing and slowing down the reaction between the silicon liquid and the bottom of the crucible, reducing the generation of silicon oxides, and achieving the purpose of reducing impurities in the pulled single crystal silicon rod. When the support pillar is narrowed, the installation block is also reduced accordingly, which can effectively reduce the arcing phenomenon and extend the service life of the foot plate.
[0016] In the above technical solution, further, the electrode hole is processed into an oval hole.
[0017] In this technical solution, it can also be a waist-shaped hole. By changing the electrode hole, the stress generated at the electrode hole and the splicing part can be effectively released, reducing the probability of crack occurrence, extending the service life of the main heater, and reducing the use cost.
[0018] The beneficial effects of the present utility model are:
[0019] 1. During the pulling process of single crystal silicon, once the crucible leaks silicon, the silicon liquid splashes downwards. The protective cover is arranged on the mounting block to prevent the electrode holes and electrode connections on the mounting block from being directly infiltrated by the splashed silicon liquid, causing difficulties in subsequent disconnection, and even causing damage to the components during disconnection;
[0020] 2. The splashed silicone liquid slides down from the pillar and may penetrate into the protective cover from the side of the protective cover close to the pillar. Due to the setting of the isolation block, the stop groove and the drainage channel, the silicone liquid penetrates into the stop groove and is blocked by the isolation block. The silicone liquid flows to both sides along the length direction of the stop groove and leaves through the drainage channels set on both sides.
[0021] 3. By narrowing the pillars to reduce resistance, the heat generated by the side of the foot plate away from the crucible is reduced, thereby reducing and slowing down the reaction between the silicon liquid and the bottom of the crucible, reducing the generation of silicon oxides, and achieving the purpose of reducing impurities in the pulled single crystal silicon rods. The narrowing of the pillars and the reduction of the mounting blocks can effectively reduce the sparking phenomenon and extend the service life of the foot plate;
[0022] 4. The electrode hole is processed into an elliptical hole, which can be a waist hole. By changing the electrode hole, the stress generated at the electrode hole and the joint can be effectively released, the probability of cracks can be reduced, the service life of the main heater can be extended, and the cost of use can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Figure 1 It is a schematic diagram of the structure when the protective cover and the mounting block are separated;
[0024] Figure 2 It is a schematic diagram of the structure when the protective cover and the mounting block are combined;
[0025] Figure 3 It is a schematic diagram of the structure of the installation block;
[0026] Figure 4 This is a cross-sectional view of the protective cover and mounting block in the assembled state.
[0027] The symbols in the figure are:
[0028] 1. Pillar; 2. Mounting block; 3. Electrode hole; 4. Protective cover; 5. Protective groove; 6. Opening; 7. Mounting groove; 8. Isolation block; 9. Stop groove; 10. Drain channel; 11. Positioning hole; 12. Connecting hole; 13. Connecting plate; 14. Fixing hole. DETAILED DESCRIPTION
[0029] The following will be combined with the drawings in the embodiments of the present application to clearly describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments in the present application belong to the scope of protection of this application.
[0030] In the description of the present application, it should be noted that the terms used herein are only for describing specific embodiments, and are not intended to limit the exemplary embodiments according to the present application. For ease of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. The technology, methods and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be regarded as part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as merely exemplary, rather than as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.
[0031] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally of one type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.
[0032] It should be noted that, in the description of the present application, the orientation or positional relationship indicated by terms such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description. Unless otherwise stated, these orientation words do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present application; the orientation words "inside and outside" refer to the inside and outside relative to the contour of each component itself.
[0033] It should be noted that, in the present application, the terms "comprise", "include" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises one..." does not exclude the presence of other identical elements in the process, method, article or device including the element. In addition, it should be noted that the scope of the method and device in the embodiment of the present application is not limited to performing functions in the order shown or discussed, and may also include performing functions in a substantially simultaneous manner or in reverse order according to the functions involved, for example, the described method may be performed in an order different from that described, and various steps may also be added, omitted, or combined. In addition, the features described with reference to certain examples may be combined in other examples.
[0034] First embodiment:
[0035] like Figure 1-4 As shown, this embodiment provides a crack-proof graphite main heater foot plate, including a pillar 1, a mounting block 2 perpendicular to the pillar 1 is connected to the bottom of the pillar 1, an electrode hole 3 is provided on the mounting block 2, and a protective cover 4 is provided on the mounting block 2. A protective groove 5 is provided at the bottom of the protective cover 4, and an opening 6 is provided on one side of the protective cover 4. The opening 6 is connected to the protective groove 5, and the mounting block 2 can enter the protective groove 5 through the opening 6. In the process of pulling single crystal silicon, once the crucible leaks silicon, the silicon liquid splashes downward. The protective cover 4 is provided on the mounting block 2, which can prevent the electrode hole 3 and the electrode connection on the mounting block 2 from being directly infiltrated by the splashed silicon liquid, causing difficulties in subsequent disconnection, and even causing damage to the components during disconnection.
[0036] The bottom wall of the protection groove 5 is provided with a mounting groove 7 corresponding to the electrode hole 3. The mounting groove 7 is provided for the connecting member to connect the electrode hole 3 and the electrode.
[0037] like Figure 1 , Figure 3 and Figure 4 As shown, an isolation block 8 is provided on the upper part of the mounting block 2, and the isolation block 8 is provided between the mounting groove 7 and the pillar 1. The protection groove 5 is provided with a stop groove 9 for accommodating the isolation block 8. The protection cover 4 is provided with drainage channels 10 on both sides corresponding to the stop groove 9, and the drainage channels 10 are vertically provided on the inner wall of the protection groove 5. The splashed silicon liquid slides down from the pillar 1 and may penetrate into the protection cover 4 from the side of the protection cover 4 close to the pillar 1. With the provision of the isolation block 8, the stop groove 9 and the drainage channel 10, the silicon liquid penetrates into the stop groove 9 and is blocked by the isolation block 8. The silicon liquid flows to both sides along the length direction of the stop groove 9 and leaves through the drainage channels 10 provided on both sides.
[0038] As Figure 1 and Figure 3 shown, a positioning hole 11 is provided on the bottom wall of the protection groove 5 between the flow-stop groove 9 and the installation groove 7, and a connection hole 12 is provided on the installation block 2 corresponding to the positioning hole 11 in a penetrating manner. By passing fasteners such as bolts through the positioning hole 11 and the connection hole 12 for threaded connection, it is ensured that the protective cover 4 is firmly covered on the installation block 2. At the same time, the positioning hole 11 is arranged between the flow-stop groove 9 and the installation groove 7 to prevent silicon liquid from seeping in.
[0039] As Figure 2 shown, a connecting plate 13 is convexly provided upward on the side of the support column 1 away from the installation block 2, and fixing holes 14 are provided on the connecting plate 13, and the fixing holes 14 are arranged in a "field" shape. A connecting plate 13 is convexly provided upward on the top of the support column 1, and the connecting plate 13 perpendicular to the top surface of the support column 1 and the top surface of the support column 1 form a support structure for supporting the heating coil body. At the same time, there are 4 fixing holes 14 arranged in a "field" shape. When connecting the heating coil body, the thermal stress can be dispersed, avoiding material fatigue or damage caused by local heat concentration. Multiple connection points can distribute the force more evenly, thereby significantly improving the rigidity and stability of the entire structure.
[0040] On the side of the support column 1 away from the top, both sides are narrowed inward to connect the installation block 2. By narrowing the support column 1, the resistance is reduced, the heat generation on the side of the foot plate away from the crucible is reduced, thereby reducing and slowing down the reaction between the silicon liquid and the bottom of the crucible, reducing the generation of silicon oxides, and achieving the purpose of reducing impurities in the pulled single crystal silicon rod. When the support column 1 is narrowed, the associated installation block 2 is reduced, which can effectively reduce the arcing phenomenon and extend the service life of the foot plate.
[0041] The electrode hole 3 is processed into an oval hole. It can also be a waist-shaped hole. By changing the electrode hole 3, the stress generated at the electrode hole 3 and the splicing part can be effectively released, the probability of crack occurrence can be reduced, the service life of the main heater can be extended, and the use cost can be reduced.
[0042] The embodiments of the present application have been described above in conjunction with the accompanying drawings. Without conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application is not limited to the above specific embodiments. The above specific embodiments are merely illustrative and not restrictive. Under the inspiration of the present application, those of ordinary skill in the art can also make many forms without departing from the purpose of the present application and the scope protected by the claims, and all belong to the protection scope of the present application.
Claims
1. A crack-proof graphite main heater foot plate, comprising a support (1), a mounting block (2) perpendicular to the support (1) being connected to the bottom of the support (1), an electrode hole (3) being provided on the mounting block (2), characterized in that: It further includes a protective cover (4). The protective cover (4) is sleeved on the mounting block (2). A protective groove (5) is provided at the bottom of the protective cover (4). An opening (6) is provided on one side of the protective cover (4). The opening (6) communicates with the protective groove (5). The mounting block (2) can enter the protective groove (5) through the opening (6). An installation groove (7) is provided on the bottom wall of the protective groove (5) corresponding to the electrode hole (3). An isolation block (8) is provided on the upper part of the mounting block (2). The isolation block (8) is arranged between the installation groove (7) and the support column (1). A flow-stop groove (9) for accommodating the isolation block (8) is provided in the protective groove (5). Drainage channels (10) are provided on both sides of the protective cover (4) corresponding to the flow-stop groove (9). The drainage channels (10) are vertically arranged on the inner wall of the protective groove (5).
2. The anti-cracking graphite main heater foot plate according to claim 1, characterized in that: A positioning hole (11) is provided on the bottom wall of the protective groove (5) between the flow-stop groove (9) and the installation groove (7). A connection hole (12) is provided on the mounting block (2) corresponding to the positioning hole (11) and runs through it.
3. The anti-crack graphite main heater foot plate according to claim 1, characterized in that: A connecting plate (13) protrudes upward on the side of the support column (1) away from the mounting block (2). Fixing holes (14) are provided on the connecting plate (13), and the fixing holes (14) are arranged in a "field" shape.
4. The anti-cracking graphite main heater foot plate according to claim 1, characterized in that: On the side of the support column (1) away from the top, both sides narrow inward to connect the mounting block (2).
5. A crack-proof graphite main heater foot plate according to any one of claims 1-4, characterized in that: The electrode hole (3) is machined into an oval hole.