CVD (Chemical Vapor Deposition) reactor capable of realizing compact spatial layout and high-efficiency reaction

Abstract

The utility model discloses a CVD (chemical vapor deposition) reactor capable of realizing compact space layout and high-effect reaction, which belongs to the technical field of CVD reactors and comprises a shell, the top of the shell is provided with an opening, four symmetrically arranged positioning seats are fixedly mounted on the outer side of the shell, a cover plate is arranged above the shell, and the top of the cover plate is provided with an opening. Four symmetrically-arranged fixing columns are fixedly installed on the outer side of the cover plate, lifting mechanisms are arranged on the fixing columns, the same conversion box is fixedly installed among the four fixing columns, and an air guide mechanism is arranged in the conversion box. Through the arrangement of a first eccentric shaft and a second eccentric shaft, an output shaft of a second motor drives a rotating plate to rotate, the rotating plate drives a rotating disc to eccentrically rotate around the output axis of the second motor through the first eccentric shaft, and meanwhile the eccentrically-rotating rotating disc drives a plurality of air guide boxes to rotate through the second eccentric shaft; the exhaust pipe is further driven to rotate around the silicon core for air injection.

Description

Technical Field

[0001] The utility model belongs to the technical field of CVD reactors, and in particular relates to a CVD reactor that realizes compact space layout and high-efficiency reaction. Background Art

[0002] At present, polysilicon is mainly produced by chemical vapor deposition principle. The raw gas enters the internal space of CVD reactor and is decomposed by heat to produce elemental silicon. The elemental silicon is deposited on the silicon core (the substrate to which the elemental silicon is attached, which is made of polycrystalline silicon to guide the elemental silicon to attach and grow into polycrystalline silicon) to grow into polycrystalline silicon rods. CVD reactor is a device container for gas reaction. In general, 12, 18, 24 or 36 pairs of silicon cores can be installed in the internal space of CVD reactor. The more silicon cores are installed, the larger the volume and diameter of CVD reactor, and the more gas needs to be introduced per unit time. In the prior art, there are two ways for raw gas to enter the internal space of CVD reactor. One is to set multiple air inlets on the base of CVD reactor, and raw gas is ejected upward from multiple air inlets to enter the internal space. The other way is to set multiple air guide pipes on the base, and raw gas enters the air guide pipe from the base. Multiple air outlets in different directions are set at a certain height of the air guide pipe, and raw gas is ejected from the air outlet to enter the internal space. However, in the actual production process, after the raw gas is introduced into the internal space of the CVD reactor, during the growth of polycrystalline silicon on the silicon core, due to the influence of factors such as the position where the raw gas enters the internal space and the uneven diffusion of the raw gas in the larger internal space, the distribution of the elemental silicon generated by the reaction on the silicon core is also uneven, which in turn makes the grown polycrystalline silicon rods uneven in diameter and inconsistent in appearance, resulting in relatively low single furnace output.

[0003] When the existing silicon core reacts with the raw gas, it is generally operated through a single reaction vessel, the reaction efficiency is low, and the distribution of the elemental silicon generated by the reaction on the silicon core is uneven;

[0004] To solve the above problems, the present application proposes a CVD reactor that achieves compact spatial layout and high-efficiency reaction. Utility Model Content

[0005] In view of the problems in the related art, the utility model proposes a CVD reactor that realizes compact space layout and high-efficiency reaction, so as to overcome the above-mentioned technical problems existing in the existing related art.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A CVD reactor that achieves compact space layout and high-efficiency reaction, comprises a shell, the top of the shell is open, four symmetrically arranged positioning seats are fixedly installed on the outer side of the shell, a cover plate is provided above the shell, four symmetrically arranged fixing columns are fixedly installed on the outer side of the cover plate, a lifting mechanism is provided on the fixing columns, a same conversion box is fixedly installed between the four fixing columns, an air guide mechanism is provided in the conversion box, a plurality of placement tubes are fixedly installed on the bottom inner wall of the shell, a silicon core is installed on the bottom inner wall of the placement tube, and the air guide mechanism cooperates with the silicon core.

[0008] Preferably, the lifting mechanism includes a lifting screw, which is rotatably mounted on the bottom end of a fixed column, a first motor is fixedly mounted on the top end of one of the four fixed columns, the output shaft of the first motor is fixedly connected to the corresponding lifting screw, and the lifting screw is threadedly connected to the corresponding positioning seat.

[0009] The output shaft of the first motor drives the lifting screw to rotate, and the lifting screw is connected to the positioning seat through a thread, thereby driving the cover plate to move up and down.

[0010] Preferably, the tops of the four positioning seats are threadedly connected to the same internal gear ring, the tops of the positioning seats are rotatably connected to a transmission gear, the transmission gear and the internal gear ring are meshed with each other, and the transmission gear is slidably connected to the corresponding lifting screw.

[0011] The rotating lifting screw rod is connected to the transmission gear through sliding, thereby driving the transmission gear to rotate. The four transmission gears are meshed with the inner gear ring, thereby driving the four lifting screw rods to rotate simultaneously.

[0012] Preferably, the cross section of the lifting screw is a fan-shaped structure, a fan-shaped hole is opened on the transmission gear, and the lifting screw is slidably connected to the fan-shaped hole.

[0013] The lifting screw is slidably connected with the fan-shaped hole, so that a limit is formed between the lifting screw and the transmission gear, and the lifting screw can be lifted and lowered on the transmission gear.

[0014] Preferably, the air guide mechanism includes multiple air guide boxes, which are rotatably mounted on the conversion box and have multiple through holes, which are interconnected with the conversion box. An exhaust pipe is fixedly mounted on the bottom of the air guide box, which has multiple exhaust holes, and the exhaust pipe cooperates with the corresponding silicon core.

[0015] The gas in the conversion box enters the gas guide box through the through hole and acts on the silicon core through the exhaust pipe and the exhaust hole.

[0016] Preferably, a second motor is fixedly mounted on the top of the cover plate, a rotating plate is fixedly mounted on the output shaft of the second motor, a first eccentric shaft is rotatably connected to the bottom of the rotating plate, a rotating disk is fixedly mounted on the bottom end of the first eccentric shaft, a plurality of second eccentric shafts are rotatably connected to the bottom of the rotating disk, and the second eccentric shafts are fixedly connected to the corresponding air guide boxes.

[0017] The output shaft of the second motor drives the rotating plate to rotate, and the rotating plate drives the rotating disk to rotate eccentrically around the output axis of the second motor through the first eccentric shaft. At the same time, the eccentrically rotating rotating disk drives multiple air guide boxes to rotate through the second eccentric shaft, thereby driving the exhaust pipe to rotate around the silicon core to eject air.

[0018] Preferably, an air collecting box is fixedly mounted on the top of the cover plate, a conduit is mounted on one side of the air collecting box, and one end of the conduit is interconnected with the conversion box.

[0019] The provision of the air collecting box and the duct can facilitate air conduction to the conversion box.

[0020] In summary, the technical effects and advantages of the utility model are as follows:

[0021] Through the arrangement of the first eccentric shaft and the second eccentric shaft, the output shaft of the second motor drives the rotating plate to rotate, and the rotating plate drives the turntable to rotate eccentrically around the output axis of the second motor through the first eccentric shaft. At the same time, the eccentrically rotating turntable drives multiple air guide boxes to rotate through the second eccentric shaft, thereby driving the exhaust pipe to rotate around the silicon core to eject jets.

[0022] Through the mutual meshing of the four transmission gears and the inner gear ring, the sliding connection between the lifting screw and the transmission gear, and the threaded connection between the lifting screw and the positioning seat, the output shaft of the first motor can drive the four lifting screws to rotate simultaneously, thereby driving the cover plate to rise and fall. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0024] Figure 2 This is a schematic diagram of the explosion structure of the cover plate, air guide box and conversion box of the utility model;

[0025] Figure 3 It is a schematic diagram of the top view of the housing and the placement tube of the utility model;

[0026] Figure 4 This is a schematic diagram of the structure of the air guide box, silicon core and exhaust pipe of the utility model.

[0027] In the figure:

[0028] 1. Shell; 2. Positioning seat; 3. Lifting screw; 4. Fixing column; 5. Cover plate; 6. Conversion box; 7. Air collecting box; 8. Conduit; 9. First motor; 10. Transmission gear; 11. Internal gear ring; 12. Exhaust hole; 13. Placement tube; 14. Silicon core; 15. Air guide box; 16. Through hole; 17. Exhaust pipe; 18. Second motor; 19. Turntable; 20. Turntable; 21. First eccentric shaft; 22. Second eccentric shaft. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0030] Reference Figure 1-4 A CVD reactor for realizing compact space layout and high-efficiency reaction comprises a shell 1, the top of the shell 1 is open, four symmetrically arranged positioning seats 2 are fixedly installed on the outer side of the shell 1, a cover plate 5 is arranged above the shell 1, four symmetrically arranged fixing columns 4 are fixedly installed on the outer side of the cover plate 5, a lifting mechanism is arranged on the fixing columns 4, a same conversion box 6 is fixedly installed between the four fixing columns 4, a gas guide mechanism is arranged in the conversion box 6, a plurality of placement tubes 13 are fixedly installed on the bottom inner wall of the shell 1, a silicon core 14 is installed on the bottom inner wall of the placement tube 13, and the gas guide mechanism cooperates with the silicon core 14.

[0031] Reference Figure 1 The lifting mechanism includes a lifting screw 3, which is rotatably mounted on the bottom end of a fixed column 4. A first motor 9 is fixedly mounted on the top end of one of the four fixed columns 4. The output shaft of the first motor 9 is fixedly connected to the corresponding lifting screw 3. The lifting screw 3 is threadedly connected to the corresponding positioning seat 2. The output shaft of the first motor 9 drives the lifting screw 3 to rotate. The lifting screw 3 is threadedly connected to the positioning seat 2, thereby driving the cover plate 5 to rise and fall.

[0032] Reference Figure 1 The tops of the four positioning seats 2 are threadedly connected to the same internal gear ring 11, and the top of the positioning seat 2 is rotatably connected to a transmission gear 10, which is meshed with the internal gear ring 11, and the transmission gear 10 is slidably connected to the corresponding lifting screw 3. The rotating lifting screw 3 is slidably connected to the transmission gear 10, thereby driving the transmission gear 10 to rotate. The four transmission gears 10 are meshed with the internal gear ring 11, thereby driving the four lifting screws 3 to rotate simultaneously.

[0033] Reference Figure 1The cross-section of the lifting screw 3 is a fan-shaped structure, and a fan-shaped hole is opened on the transmission gear 10. The lifting screw 3 is slidingly connected with the fan-shaped hole. The lifting screw 3 is slidably connected with the fan-shaped hole, so that a limit is formed between the lifting screw 3 and the transmission gear 10, and the lifting screw 3 can be lifted and lowered on the transmission gear 10.

[0034] Reference Figure 2 , Figure 3 and Figure 4 The air guide mechanism includes a plurality of air guide boxes 15, which are rotatably mounted on the conversion box 6, and a plurality of through holes 16 are provided on the air guide box 15, which are communicated with the conversion box 6, and an exhaust pipe 17 is fixedly mounted on the bottom of the air guide box 15, and a plurality of exhaust holes 12 are provided on the exhaust pipe 17, which cooperates with the corresponding silicon cores 14, and the gas in the conversion box 6 enters the air guide box 15 through the through holes 16, and acts on the silicon core 14 through the exhaust pipe 17 and the exhaust holes 12.

[0035] Reference Figure 2 A second motor 18 is fixedly installed on the top of the cover plate 5, and a rotating plate 19 is fixedly installed on the output shaft of the second motor 18. The bottom of the rotating plate 19 is rotatably connected to a first eccentric shaft 21, and a rotating disk 20 is fixedly installed on the bottom end of the first eccentric shaft 21. A plurality of second eccentric shafts 22 are rotatably connected to the bottom of the rotating disk 20. The second eccentric shafts 22 are fixedly connected to the corresponding air guide boxes 15. The output shaft of the second motor 18 drives the rotating plate 19 to rotate, and the rotating plate 19 drives the rotating disk 20 to eccentrically rotate around the output axis of the second motor 18 through the first eccentric shaft 21. At the same time, the eccentrically rotating rotating disk 20 drives the plurality of air guide boxes 15 to rotate through the second eccentric shaft 22, thereby driving the exhaust pipe 17 to rotate around the silicon core 14 to eject air.

[0036] Reference Figure 1 An air collecting box 7 is fixedly installed on the top of the cover plate 5, and a conduit 8 is installed on one side of the air collecting box 7. One end of the conduit 8 is interconnected with the conversion box 6. The arrangement of the air collecting box 7 and the conduit 8 can facilitate the air conduction to the conversion box 6.

[0037] Working principle: When working, start the switch of the first motor 9, and the output shaft of the first motor 9 can drive the four transmission gears 10 to rotate simultaneously through the mutual engagement of the four transmission gears 10 and the inner gear ring 11, thereby driving the four lifting screws 3 to rotate simultaneously, and the lifting screws 3 are connected with the positioning seat 2 through threads, so as to drive the cover plate 5 and the conversion box 6 to rise and fall, and when the conversion box 6 moves downward, it can drive the air guide box 15 to cover and seal the placement tube 13, and at the same time, the setting of the air collecting box 7 and the conduit 8 can facilitate the air conduction to the conversion box 6, and introduce it into the air guide box through the through hole 16 15, and finally acts on the silicon core 14 through the exhaust pipe 17 and the exhaust hole 12, and at the same time, the switch of the second motor 18 is started again, and the output shaft of the second motor 18 drives the rotating plate 19 to rotate, and the rotating plate 19 drives the turntable 20 to rotate eccentrically around the output axis of the second motor 18 through the first eccentric shaft 21, and at the same time, the eccentrically rotating turntable 20 drives multiple air guide boxes 15 to rotate through the second eccentric shaft 22, thereby driving the exhaust pipe 17 to rotate around the silicon core 14 to spray air, so that the spraying is uniform, and then the coating operation is more uniform, and at the same time, the setting of multiple placement cylinders 13 makes the coating spraying more efficient.

[0038] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A CVD reactor that realizes compact spatial layout and high-efficiency reaction, comprising a housing (1), characterized in that: The top of the shell (1) is open, and four symmetrically arranged positioning seats (2) are fixedly installed on the outer side of the shell (1). A cover plate (5) is provided above the shell (1), and four symmetrically arranged fixing columns (4) are fixedly installed on the outer side of the cover plate (5). A lifting mechanism is provided on the fixing columns (4). The same conversion box (6) is fixedly installed between the four fixing columns (4), and an air guide mechanism is provided inside the conversion box (6). A plurality of placement tubes (13) are fixedly installed on the inner wall of the bottom of the shell (1), and a silicon core (14) is installed on the inner wall of the bottom of the placement tube (13), and the air guide mechanism and the silicon core (14) cooperate with each other.

2. A CVD reactor for realizing compact space layout and high-efficiency reaction according to claim 1, characterized in that: The lifting mechanism comprises a lifting screw (3), the lifting screw (3) is rotatably mounted on the bottom end of a fixed column (4), a first motor (9) is fixedly mounted on the top end of one of the four fixed columns (4), an output shaft of the first motor (9) is fixedly connected to the corresponding lifting screw (3), and the lifting screw (3) is threadedly connected to the corresponding positioning seat (2).

3. A CVD reactor for realizing compact space layout and high-efficiency reaction according to claim 2, characterized in that: The tops of the four positioning seats (2) are threadedly connected to the same internal gear ring (11), and the tops of the positioning seats (2) are rotatably connected to a transmission gear (10), the transmission gear (10) and the internal gear ring (11) are meshed with each other, and the transmission gear (10) is slidably connected to the corresponding lifting screw (3).

4. A CVD reactor for realizing compact space layout and high-efficiency reaction according to claim 3, characterized in that: The cross section of the lifting screw rod (3) is a fan-shaped structure, and a fan-shaped hole is provided on the transmission gear (10), and the lifting screw rod (3) is slidably connected to the fan-shaped hole.

5. The CVD reactor for realizing compact space layout and high-efficiency reaction according to claim 1, characterized in that: The air guide mechanism comprises a plurality of air guide boxes (15), the air guide boxes (15) are rotatably mounted on the conversion box (6), a plurality of through holes (16) are provided on the air guide box (15), the through holes (16) and the conversion box (6) are mutually communicated, an exhaust pipe (17) is fixedly mounted on the bottom of the air guide box (15), a plurality of exhaust holes (12) are provided on the exhaust pipe (17), and the exhaust pipe (17) cooperates with the corresponding silicon core (14).

6. A CVD reactor for realizing compact space layout and high-efficiency reaction according to claim 5, characterized in that: A second motor (18) is fixedly mounted on the top of the cover plate (5); a rotating plate (19) is fixedly mounted on the output shaft of the second motor (18); a first eccentric shaft (21) is rotatably connected to the bottom of the rotating plate (19); a rotating disk (20) is fixedly mounted on the bottom end of the first eccentric shaft (21); a plurality of second eccentric shafts (22) are rotatably connected to the bottom of the rotating disk (20); and the second eccentric shafts (22) are fixedly connected to corresponding air guide boxes (15).

7. The CVD reactor for realizing compact space layout and high-efficiency reaction according to claim 1, characterized in that: An air collecting box (7) is fixedly mounted on the top of the cover plate (5), a conduit (8) is mounted on one side of the air collecting box (7), and one end of the conduit (8) is in communication with the conversion box (6).

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