Combined quartz boat assembly
By designing a combined quartz boat assembly and assembling it with quartz rods of different grooves, the problem that existing quartz boats are difficult to fix sample blocks of different sizes is solved, and the production efficiency and stability are improved.
Patent Information
- Application Number
- CN202421554598.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-03
- Publication Date
- 2025-05-13
- Estimated Expiration
- 2034-07-03
AI Technical Summary
Existing quartz boats are difficult to fix sample blocks of different sizes, resulting in waste of resources and low production efficiency.
A combined quartz boat assembly is designed, and the assembly is carried out by two quartz rod carriers and a combination mechanism, and the quartz rods of different grooves can be assembled, so that sample blocks of different sizes can be fixed.
This combined quartz boat assembly can easily fix sample blocks of different sizes, improve production efficiency, reduce resource waste, and maintain stability after assembly.
Smart Images
Figure CN222861719U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of quartz boat components, in particular to a combined quartz boat component. Background Art
[0002] During the production process of single crystal silicon, it is necessary to test the parameters such as oxygen, carbon, and resistivity of the crystal rod. The presence of oxygen donors in single crystal silicon will cause distortion of the measurement data. Therefore, after the single crystal rod is pulled, several samples of 1~5mm are cut from specific positions of the single crystal rod. Before the sample is tested, it is necessary to anneal the sample to eliminate oxygen donors and ensure the accuracy of the test data. When performing some special processes, annealing of the test sample is also indispensable. Annealing is to place the single crystal silicon sample in a quartz boat, keep it at a constant temperature in an annealing furnace at 720℃ for 20 minutes, then take the single crystal silicon sample out of the annealing furnace and quickly cool it to room temperature. The quartz boat is an indispensable carrier in the annealing process. It can withstand high temperatures and ensure the cleanliness of the single crystal silicon sample. It is a very critical auxiliary device in the annealing process.
[0003] Ordinary quartz boats are divided into different specifications according to the diameters of the samples. For example, the diameters of the samples are divided into 4 inches, 5 inches and 6 inches, so there will be three specifications of quartz boats of 4 inches, 5 inches and 6 inches. Before annealing, the samples are placed in quartz boats of different specifications according to their diameters. This may cause the entire quartz boat to fix only a single sample, and multiple quartz boats are needed to anneal a batch of samples, resulting in a waste of resources. In addition, such an annealing method results in low efficiency, which is not conducive to large-scale production. The annealing times are large, which wastes resources and causes frequent operations, increasing the workload of employees. In view of this, a combined quartz boat assembly is proposed. Utility Model Content
[0004] In view of the deficiencies of the prior art, the utility model provides a combined quartz boat assembly, which solves the problem that the quartz boat is difficult to fix different sample blocks.
[0005] In order to achieve the above-mentioned purpose of returning different samples with different combinations of quartz rods, the utility model provides the following technical solutions: a combined quartz boat assembly, including two quartz rod carriers, the opposite surfaces of the two quartz rod carriers are each provided with six first slots arranged horizontally, and the opposite surfaces of the two quartz rod carriers are each provided with six second slots arranged obliquely;
[0006] Among them, a combination mechanism is arranged on the quartz rod carrier, which includes twelve limit rings, twelve first clamping holes, twelve quartz rods, multiple grooves, limit rods, a first limit plate, twelve sliding holes, twelve second clamping holes, twelve second limit plates, twelve fixed columns and twelve third clamping holes.
[0007] Preferably, the twelve limiting rings are respectively fixedly mounted on opposite surfaces of the two quartz rod carriers, and the twelve limiting rings are respectively mounted corresponding to the six first slots and the six second slots;
[0008] The twelve first clamping holes are respectively arranged on the outer surfaces of the twelve limiting rings.
[0009] Preferably, the twelve quartz rods are respectively arranged in the six first slots and the six second slots;
[0010] Wherein, a plurality of grooves are respectively opened on the outer surfaces of the twelve quartz rods.
[0011] Preferably, the twelve limiting rods are respectively inserted into the twelve first clamping holes.
[0012] Preferably, the twelve first limiting plates are fixedly mounted on the left ends of the twelve quartz rods respectively;
[0013] The twelve sliding holes are respectively opened at the right ends of the twelve quartz rods, and the twelve second clamping holes are respectively opened at the outer surfaces of the twelve quartz rods.
[0014] Preferably, the twelve second limit plates are respectively arranged at the right ends of the twelve quartz rods, and the twelve fixing columns are respectively fixedly installed on the left surfaces of the twelve second limit plates;
[0015] Among them, the twelve third clamping holes are respectively opened on the outer surfaces of the ten fixing columns.
[0016] Compared with the prior art, the utility model provides a combined quartz boat assembly, which has the following beneficial effects:
[0017] 1. The combined quartz boat assembly can fix different samples by assembling quartz rods with different grooves. Compared with the traditional quartz boat that can only carry samples of the same size, the combined quartz boat assembly can fix different samples by quartz rods with different grooves, which is more convenient.
[0018] 2. The combined quartz boat assembly, the first limit plate, the second limit plate and the eight limit rings can prevent the quartz rod from moving left and right, that is, maintain the stability after assembly, and can stably carry different sample blocks. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 This is a schematic diagram of the structure of a combined quartz boat assembly of the utility model;
[0020] Figure 2 This is a schematic diagram of the structure of the quartz rod carrier of the utility model;
[0021] Figure 3 This is a schematic diagram of the structure of the quartz rod carrier of the utility model;
[0022] Figure 4 For this utility model Figure 1 A magnified view of the structure at center;
[0023] Figure 5 This is a schematic diagram of the structure of the quartz rod of the utility model;
[0024] Figure 6 For this utility model Figure 5 Enlarged view of the structure at point B in the middle.
[0025] In the figure: 1. quartz rod carrier; 2. first slot; 3. second slot; 4. limit ring; 5. first clamping hole; 6. quartz rod; 7. groove; 8. limit rod; 9. first limit plate; 10. sliding hole; 11. second clamping hole; 12. second limit plate; 13. fixing column; 14. third clamping hole. DETAILED DESCRIPTION
[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0027] See also Figure 1-6 The utility model provides a new technical solution: a combined quartz boat assembly, comprising two quartz rod carriers 1, the opposite surfaces of the two quartz rod carriers 1 are each provided with six first slots 2 arranged horizontally, and the opposite surfaces of the two quartz rod carriers 1 are each provided with six second slots 3 arranged obliquely;
[0028] Among them, a combination mechanism is arranged on the quartz rod carrier 1, and the combination mechanism includes twelve limit rings 4, twelve first clamping holes 5, twelve quartz rods 6, multiple grooves 7, a limit rod 8, a first limit plate 9, twelve sliding holes 10, twelve second clamping holes 11, twelve second limit plates 12, twelve fixing columns 13 and twelve third clamping holes 14.
[0029] Furthermore, twelve limiting rings 4 are respectively fixedly mounted on opposite surfaces of the two quartz rod carriers 1, and the twelve limiting rings 4 are respectively mounted corresponding to the six first slots 2 and the six second slots 3;
[0030] The twelve first clamping holes 5 are respectively provided on the outer surfaces of the twelve limiting rings 4 .
[0031] Further, twelve quartz rods 6 are respectively arranged in the six first slots 2 and the six second slots 3;
[0032] A plurality of grooves 7 are respectively formed on the outer surfaces of the twelve quartz rods 6 .
[0033] Furthermore, the twelve limiting rods 8 are respectively inserted into the twelve first clamping holes 5 .
[0034] Furthermore, twelve first limit plates 9 are fixedly mounted on the left ends of the twelve quartz rods 6 respectively;
[0035] The twelve sliding holes 10 are respectively opened at the right ends of the twelve quartz rods 6 , and the twelve second clamping holes 11 are respectively opened at the outer surfaces of the twelve quartz rods 6 .
[0036] Furthermore, twelve second limiting plates 12 are respectively arranged at the right ends of the twelve quartz rods 6, and twelve fixing columns 13 are respectively fixedly installed on the left surfaces of the twelve second limiting plates 12;
[0037] The twelve third clamping holes 14 are respectively provided on the outer surfaces of the ten fixing columns 13;
[0038] When the combined quartz boat assembly is used, when fixing the 4-inch sample, the quartz rod 6 is inserted into the two closest first slots 2, and the two quartz rods 6 are inserted into the two second slots 3 at the bottom for assembly. At this time, the four quartz rods 6 are provided with grooves 7 for fixing the 4-inch sample, and the width of the grooves 7 opened on each quartz rod 6 is different. The 4-inch sample is prevented from being fixed behind the four quartz rods 6. The quartz rods 6 are fixed by successively passing eight limiting rods 8 through the first clamping holes 5 opened on the outer surface of the limiting ring 4, the second clamping holes 11 opened on the outer surface of the quartz rod 6, and the third clamping holes 14 opened on the outer surface of the fixing column 13. At this time, the installation is completed, and the first limiting plate 9, the second limiting plate 12 and the eight limiting rings 4 can prevent the quartz rod 6 from moving left and right. When fixing the sample block, the quartz rod 6 is inserted into the two first slots 2 located in the middle, and the two quartz rods 6 are inserted into the two second slots 3 located in the middle for assembly. At this time, the four quartz rods 6 are provided with grooves 7 for fixing the 5-inch sample block. The 5-inch sample block is prevented from being placed behind the four quartz rods 6. The operation of fixing the quartz rods 6 is repeated to fix the 5-inch sample block. When fixing the 6-inch sample block, the quartz rod 6 is inserted into the two first slots 2 located at the outermost sides, and the two quartz rods 6 are inserted into the two second slots 3 located at the uppermost sides for assembly. At this time, the four quartz rods 6 are provided with grooves 7 for fixing the 6-inch sample block. The 6-inch sample block is prevented from being placed behind the four quartz rods 6. The operation of fixing the quartz rods 6 is repeated to fix the 5-inch sample block.
[0039] The combined quartz boat assembly can fix different sample blocks by assembling quartz rods with different grooves. Compared with the traditional quartz boat that can only carry sample blocks of the same size, the combined quartz boat assembly can fix different sample blocks by quartz rods with different grooves, which is more convenient. In addition, the first limit plate, the second limit plate and the eight limit rings of the combined quartz boat assembly can prevent the quartz rods from moving left and right, that is, maintain the stability after assembly, and can stably carry different sample blocks.
[0040] Working principle: When the combined quartz boat assembly is used, when fixing the 4-inch sample, the quartz rod 6 is inserted into the two closest first slots 2, and the two quartz rods 6 are inserted into the two second slots 3 at the bottom for assembly. At this time, the four quartz rods 6 are provided with grooves 7 for fixing the 4-inch sample. The 4-inch sample is prevented from being placed behind the four quartz rods 6. The quartz rods 6 are fixed by successively passing eight limiting rods 8 through the first clamping holes 5 opened on the outer surface of the limiting ring 4, the second clamping holes 11 opened on the outer surface of the quartz rod 6, and the third clamping holes 14 opened on the outer surface of the fixing column 13. At this time, the installation is completed, and the first limiting plate 9, the second limiting plate 12 and the eight limiting rings 4 can prevent the quartz rod 6 from moving left and right. When fixing the 5-inch sample, , by inserting the quartz rod 6 into the two first slots 2 located in the middle, and inserting the two quartz rods 6 into the two second slots 3 located in the middle section for assembly, at this time, the four quartz rods 6 are provided with grooves 7 for fixing the 5-inch sample block, and the 5-inch sample block is prevented behind the four quartz rods 6, and the operation of fixing the quartz rods 6 is repeated to fix the 5-inch sample block. When fixing the 6-inch sample block, by inserting the quartz rod 6 into the two first slots 2 located at the outermost sides, and inserting the two quartz rods 6 into the two second slots 3 located at the uppermost ends for assembly, at this time, the four quartz rods 6 are provided with grooves 7 for fixing the 6-inch sample block, and the 6-inch sample block is prevented behind the four quartz rods 6, and the operation of fixing the quartz rods 6 is repeated to fix the 5-inch sample block.
[0041] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A combined quartz boat assembly, comprising two quartz rod carriers (1), the opposite surfaces of the two quartz rod carriers (1) are each provided with six first slots (2) arranged horizontally, characterized in that: The opposing surfaces of the two quartz rod carriers (1) are each provided with six second slots (3) arranged in an inclined manner; A combined mechanism is provided on the quartz rod carrier (1), the combined mechanism comprising twelve limiting rings (4), twelve first clamping holes (5), twelve quartz rods (6), a plurality of grooves (7), a limiting rod (8), a first limiting plate (9), twelve sliding holes (10), twelve second clamping holes (11), twelve second limiting plates (12), twelve fixing columns (13) and twelve third clamping holes (14).
2. The combined quartz boat assembly according to claim 1, characterized in that: The twelve limiting rings (4) are respectively fixedly mounted on opposite surfaces of the two quartz rod carriers (1), and the twelve limiting rings (4) are respectively mounted corresponding to the six first slots (2) and the six second slots (3); The twelve first clamping holes (5) are respectively formed on the outer surfaces of the twelve limiting rings (4).
3. The combined quartz boat assembly according to claim 1, characterized in that: The twelve quartz rods (6) are respectively arranged in the six first slots (2) and the six second slots (3); Wherein, a plurality of grooves (7) are respectively formed on the outer surfaces of the twelve quartz rods (6).
4. The combined quartz boat assembly according to claim 1, characterized in that: The twelve limiting rods (8) are respectively inserted into the twelve first clamping holes (5).
5. The combined quartz boat assembly according to claim 1, characterized in that: The twelve first limit plates (9) are respectively fixedly mounted on the left ends of the twelve quartz rods (6); The twelve sliding holes (10) are respectively formed at the right ends of the twelve quartz rods (6), and the twelve second clamping holes (11) are respectively formed at the outer surfaces of the twelve quartz rods (6).
6. The combined quartz boat assembly according to claim 1, characterized in that: Twelve second limit plates (12) are respectively arranged at the right ends of the twelve quartz rods (6), and twelve fixing columns (13) are respectively fixedly mounted on the left surfaces of the twelve second limit plates (12); The twelve third clamping holes (14) are respectively formed on the outer surfaces of the ten fixing columns (13).