Relay ring coating crucible and equipment

Abstract

The utility model provides a relay ring coating crucible and equipment, and relates to the technical field of semiconductor equipment. The relay ring coating crucible comprises a crucible body and a crucible cover, the crucible body is covered with the crucible cover, a supporting step is arranged on the edge of the bottom in the crucible body and used for supporting a relay ring to be coated, and a cavity defined by the bottom in the crucible body and the supporting step is used for loading tantalum powder. The depth a in the crucible body is 1.2 to 2 times the height b of the relay ring. The relay ring coating crucible and equipment can improve the coating efficiency of the relay ring, and the formed tantalum carbide film is compact and uniform.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a relay ring coating crucible and equipment. Background Art

[0002] In the existing silicon carbide (SiC) seed crystal growth crucible, a tantalum carbide film is generally coated on the relay ring by spraying, but the spraying method has at least the following defects:

[0003] 1. The spraying method generally relies on the operator to hold a spray gun for coating. Moreover, the paint sprayed by the spray gun is usually more in the middle and less around the workpiece surface, presenting an uneven state. In this way, the manual operation error plus the tool error causes the tantalum carbide film formed on the relay ring to be very uneven;

[0004] 2. The relay ring is in the shape of a circular ring, and the inner surface of the relay ring is mainly sprayed and heated to form a tightly attached tantalum carbide film, which is difficult to operate. The heating process takes about 6 hours, resulting in low spraying efficiency. Utility Model Content

[0005] The utility model aims to provide a relay ring coating crucible and equipment, which can improve the coating efficiency of the relay ring and form a dense and uniform tantalum carbide film.

[0006] The embodiment of the utility model is achieved as follows:

[0007] In the first aspect, the utility model provides a relay ring coating crucible, which comprises a crucible body and a crucible cover, wherein the crucible cover is covered on the crucible body, and a supporting step is provided at the bottom edge of the crucible body, and the supporting step is used to support the relay ring to be coated, and the cavity surrounded by the bottom of the crucible body and the supporting step is used to load tantalum powder, and the depth a in the crucible body is 1.2 to 2 times the height b of the relay ring.

[0008] In an optional embodiment, a height c of the supporting step relative to the bottom of the crucible body is 0.6 mm to 1.5 mm.

[0009] In an optional embodiment, the supporting step is in a circular ring shape, the bottom surface of the supporting step is connected to the inner bottom surface of the crucible body, and the outer side surface of the supporting step is connected to the inner side surface of the crucible body.

[0010] In an optional embodiment, the inner diameter d of the supporting step is larger than the inner diameter e of the relay ring and smaller than the outer diameter f of the relay ring.

[0011] In an optional embodiment, the relay ring coating crucible further includes an end cover, which is disposed in the crucible body and covers the top of the relay ring.

[0012] In an optional embodiment, the diameter g of the end cap is larger than the inner diameter e of the relay ring and smaller than the outer diameter f of the relay ring.

[0013] In an optional embodiment, the bottom surface of the crucible body and the top surface of the crucible cover are both flat.

[0014] In a second aspect, the utility model provides a relay ring coating device, which includes a heater and the relay ring coating crucible of the aforementioned embodiment, wherein the relay ring coating crucible is arranged inside the heater.

[0015] In an optional embodiment, a plurality of relay ring coating crucibles are stacked in a vertical direction and are all disposed inside the heater.

[0016] In an optional embodiment, the relay ring coating device further includes a vacuum chamber and a vacuum pumping device, the heater and the relay ring coating crucible are both arranged in the vacuum chamber, and the vacuum pumping device is connected to the vacuum chamber.

[0017] The beneficial effects of the relay ring coating crucible and the device provided by the embodiment of the utility model include:

[0018] 1. Tantalum powder is evaporated into gas by evaporation, and reacts with carbon on the relay ring to form a tantalum carbide film. It is not only simple to operate and has high coating efficiency, but also the formed tantalum carbide film is dense and uniform;

[0019] 2. The depth a inside the crucible body is 1.2 to 2 times the height b of the relay ring, and the relay ring is placed on the supporting step at the bottom edge of the crucible body. The distance between the tantalum powder in the crucible body and the relay ring is small, which can ensure that the tantalum powder evaporates into gas and reaches the inner surface of the relay ring, thereby improving the success rate and efficiency of coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 A schematic diagram of the appearance structure of a relay ring coating crucible provided in an embodiment of the utility model;

[0022] Figure 2 A schematic diagram of the full cross-section structure of a relay ring coating crucible provided in an embodiment of the utility model;

[0023] Figure 3A schematic structural diagram of a relay ring coating device provided in an embodiment of the utility model.

[0024] Icons: 1-crucible body; 2-support step; 3-crucible cover; 4-end cover; 5-heater; 6-vacuum chamber; 7-vacuum extraction equipment; 100-relay ring coating crucible; 200-relay ring coating equipment; 300-relay ring. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0028] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0029] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0030] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] First embodiment

[0032] Please refer to Figure 1 and Figure 2 This embodiment provides a relay ring coating crucible 100 , which includes a crucible body 1 , a crucible cover 3 and an end cover 4 .

[0033] The crucible cover 3 is covered on the crucible body 1, and the bottom surface of the crucible body 1 and the top surface of the crucible cover 3 are both flat, which is convenient for stacking and storing the relay ring coated crucibles 100. More importantly, it is convenient for multiple relay ring coated crucibles 100 to be stacked in the vertical direction and the relay rings 300 are coated at the same time, thereby improving the coating efficiency.

[0034] The bottom edge of the crucible body 1 is provided with a support step 2, which is used to support the relay ring 300 to be coated, and the cavity formed by the bottom of the crucible body 1 and the support step 2 is used to load tantalum powder. In this way, by heating the relay ring coating crucible 100, the tantalum powder can be evaporated into gas by evaporation, and react with the carbon on the relay ring 300 to form a tantalum carbide film, which is not only simple to operate and has high coating efficiency, but also the formed tantalum carbide film is dense and uniform.

[0035] The depth a inside the crucible body 1 is 1.2 to 2 times the height b of the relay ring 300, and the relay ring 300 is placed on the supporting step 2 at the bottom edge of the crucible body 1. The distance between the tantalum powder in the crucible body 1 and the relay ring 300 is small, which can ensure that the tantalum powder evaporates into gas and reaches the inner surface of the relay ring 300, thereby improving the success rate and efficiency of coating.

[0036] To further ensure that the tantalum powder can reach the inner surface of the relay ring 300 after evaporating into gas, the height c of the support step 2 relative to the bottom of the crucible body 1 is 0.6 mm to 1.5 mm.

[0037] In order to improve the stability of the support step 2 supporting the relay ring 300 and ensure that the gas evaporated from the tantalum powder participates in the coating on the inner surface of the relay ring 300 as much as possible, the support step 2 is designed to be in a circular ring shape, the bottom surface of the support step 2 is connected to the inner bottom surface of the crucible body 1, and the outer side surface of the support step 2 is connected to the inner side surface of the crucible body 1. In order to avoid the support step 2 being too wide and hindering the uniform contact between the gas and the inner surface of the relay ring 300, the inner diameter d of the support step 2 is designed to be larger than the inner diameter e of the relay ring 300 and smaller than the outer diameter f of the relay ring 300.

[0038] Moreover, the end cap 4 is arranged in the crucible body 1 and covers the top of the relay ring 300, so as to prevent a large amount of gas from entering the area between the relay ring 300 and the crucible cover 3, and to increase the gas concentration inside the relay ring 300. The diameter g of the end cap 4 is larger than the inner diameter e of the relay ring 300 and smaller than the outer diameter f of the relay ring 300, so as to ensure that the end cap 4 can be stably placed on the top surface of the relay ring 300 and play the role of reducing the gas overflow inside the relay ring 300.

[0039] Second embodiment

[0040] Please refer to Figure 3 This embodiment provides a relay ring coating device 200, which includes a heater 5, a vacuum chamber 6, a vacuum pumping device 7 and the relay ring coating crucible 100 of the aforementioned embodiment, and the relay ring coating crucible 100 is arranged inside the heater 5.

[0041] The vacuum pumping device 7 is connected to the vacuum chamber 6. The heater 5 is disposed inside the vacuum chamber 6. The relay ring coating crucible 100 is disposed inside the heater 5. In this embodiment, a plurality of relay ring coating crucibles 100 are stacked in a vertical direction and are all disposed inside the heater 5. In this way, the relay ring coating device 200 can coat a plurality of relay rings 300 at one time, thereby improving the coating efficiency.

[0042] The working process of the relay ring coating equipment 200 is as follows: first, the vacuum equipment 7 evacuates the vacuum chamber 6, and then the heater 5 heats the multiple relay ring coating crucibles 100 simultaneously, especially the tantalum powder in the relay ring coating crucible 100, so that the tantalum powder evaporates into gas and adheres to the surface of the relay ring 300, and reacts with the carbon on the relay ring 300 to form a tantalum carbide film.

[0043] The beneficial effects of the relay ring coating crucible 100 and the device provided by the embodiment of the utility model include:

[0044] 1. Tantalum powder is evaporated into gas by evaporation, and reacts with carbon on the relay ring 300 to form a tantalum carbide film. This method is simple to operate and has high coating efficiency. The formed tantalum carbide film is dense and uniform.

[0045] 2. The depth a in the crucible body 1 is 1.2 to 2 times the height b of the relay ring 300, and the relay ring 300 is placed on the support step 2 at the bottom edge of the crucible body 1. The distance between the tantalum powder in the crucible body 1 and the relay ring 300 is small, which can ensure that the tantalum powder evaporates into gas and reaches the inner surface of the relay ring 300, thereby improving the success rate and efficiency of coating;

[0046] 3. A plurality of relay ring coating crucibles 100 can be stacked in a vertical direction, and a relay ring 300 is placed in each relay ring coating crucible 100, so that a plurality of relay rings 300 can be coated at one time, thereby improving coating efficiency.

[0047] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may be subject to various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A relay ring coating crucible, characterized in that: The relay ring coating crucible comprises a crucible body (1) and a crucible cover (3), wherein the crucible cover (3) is covered on the crucible body (1), and a supporting step (2) is provided at the bottom edge of the crucible body (1), and the supporting step (2) is used to support the relay ring (300) to be coated, and a cavity enclosed by the bottom of the crucible body (1) and the supporting step (2) is used to load tantalum powder, and the depth a in the crucible body (1) is 1.2 to 2 times the height b of the relay ring (300).

2. The relay ring coating crucible according to claim 1, characterized in that: The height c of the supporting step (2) relative to the bottom of the crucible body (1) is 0.6 mm to 1.5 mm.

3. The relay ring coating crucible according to claim 1, characterized in that: The supporting step (2) is in the shape of a circular ring, the bottom surface of the supporting step (2) is connected to the inner bottom surface of the crucible body (1), and the outer side surface of the supporting step (2) is connected to the inner side surface of the crucible body (1).

4. The relay ring coating crucible according to claim 3, characterized in that: The inner diameter d of the support step (2) is larger than the inner diameter e of the relay ring (300) and smaller than the outer diameter f of the relay ring (300).

5. The relay ring coating crucible according to claim 1, characterized in that: The relay ring coating crucible further comprises an end cover (4), wherein the end cover (4) is arranged in the crucible body (1) and covers the top of the relay ring (300).

6. The relay ring coating crucible according to claim 5, characterized in that: The diameter g of the end cover (4) is larger than the inner diameter e of the relay ring (300) and smaller than the outer diameter f of the relay ring (300).

7. The relay ring coating crucible according to claim 1, characterized in that: The bottom surface of the crucible body (1) and the top surface of the crucible cover (3) are both flat surfaces.

8. A relay ring coating device, characterized in that: The relay ring coating device comprises a heater (5) and the relay ring coating crucible according to claim 1, and the relay ring coating crucible is arranged inside the heater (5).

9. The relay ring coating device according to claim 8, characterized in that: A plurality of the relay ring coating crucibles are stacked in a vertical direction and are all arranged inside the heater (5).

10. The relay ring coating device according to claim 8, characterized in that: The relay ring coating device further comprises a vacuum chamber (6) and a vacuum pumping device (7), the heater (5) and the relay ring coating crucible are both arranged in the vacuum chamber (6), and the vacuum pumping device (7) is connected to the vacuum chamber (6).

Images