Refrigerating system of automatic regenerating device of low-temperature pump

Abstract

According to the refrigerating system of the automatic regenerating device of the low-temperature pump, the motor drives the transmission device to do linear reciprocating motion, so that the first-stage condenser and the second-stage condenser are driven to do synchronous motion in the first-stage refrigerating unit and the second-stage refrigerating unit, and compressed air is rapidly compressed for refrigeration; the radiated temperature is reflected by the second adsorption assembly to prevent the temperature from rising, and the first adsorption assembly extracts water vapor and impurities in the gas; the temperature sensor is arranged to monitor the temperature of the adsorption assembly in real time, and when the low-temperature pump is not used, gas in the vacuum cavity is diluted through the nitrogen introduction seat to recover normal atmospheric pressure, so that regeneration of the low-temperature pump is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of cryogenic pumps, and more specifically to a refrigeration system of an automatic regeneration device for a cryogenic pump. Background Art

[0002] Cryopumps are vacuum pumps that exhaust gas by capturing gas molecules in a cryogenic plate cooled to ultra-low temperatures through condensation or adsorption. They are often used to achieve clean vacuum environments required by semiconductor circuit manufacturing processes. Cryopumps can obtain clean vacuums with the highest pumping rate and the lowest ultimate pressure. They are widely used in the research and production of semiconductors and integrated circuits, as well as molecular beam research, vacuum coating equipment, vacuum surface analysis instruments, ion implanters, and space simulation devices.

[0003] The prior art closest to the present application, the invention patent with the announcement number CN 118407897 A, discloses a composite cryopump with a high ultimate vacuum degree, including: a refrigerator, a cryopump shell, a refrigeration unit, a first adsorption unit and a second adsorption unit, the cryopump shell is provided with an inner cavity, the cryopump shell is connected to the refrigerator, the refrigerator is provided with a refrigeration unit extending into the inner cavity, the first adsorption unit is connected to the refrigeration unit, the first adsorption unit can adsorb the gas condensed by the refrigeration unit, and the second adsorption unit is connected to the cryopump shell and can adsorb the active gas in the inner cavity. When the present invention is in use, the inner cavity is connected to the external container, the refrigerator is started, the refrigerator quickly cools and evacuates the air in the inner cavity and the container through the refrigeration unit, the first adsorption unit adsorbs, condenses and captures the gas, the second adsorption unit is started, and the second adsorption unit gradually adsorbs the residual non-condensable gas in the vacuum cavity after being started, so that the cryopump can continue to improve the vacuum degree in the inner cavity and the container.

[0004] The current cryopump needs to be regenerated after it has been saturated with a large amount of water molecules and other gases. During the regeneration process, the amount of water molecules condensed and captured is too large to be completely removed by conventional regeneration methods, which affects the regeneration time and reduces production efficiency. In addition, the one-stage cold head has low air extraction efficiency and poor thermal insulation effect, which affects the overall performance. In addition, there is no temperature monitoring setting, and the refrigeration temperature cannot be accurately obtained in real time. Utility Model Content

[0005] In view of this, in order to solve the above problems, the utility model proposes a refrigeration system of a cryogenic pump automatic regeneration device, wherein the motor 103 drives the transmission device 10 to perform linear reciprocating motion, thereby driving the first-stage condenser 111 and the second-stage condenser 121 to move synchronously inside the first-stage refrigeration unit 11 and the second-stage refrigeration unit 12, so as to quickly compress the air for refrigeration; the radiated temperature is reflected by the second adsorption component 25 to prevent the temperature from rising, and the first adsorption component 24 removes water vapor and impurities in the gas; the temperature of the adsorption component is monitored in real time by setting a temperature sensor 3, and the gas in the vacuum chamber is diluted through the nitrogen inlet seat 4 when not in use to restore it to normal atmospheric pressure, thereby realizing the regeneration of the cryogenic pump 2.

[0006] A refrigeration system of a cryopump automatic regeneration device, comprising a refrigerator 1 and a cryopump 2, wherein one side of the cryopump 2 is connected to the refrigerator 1, and is characterized in that a transmission device 10 is provided at one end of the refrigerator 1, and a refrigeration unit is provided at the other end, wherein the refrigeration unit comprises a primary refrigeration unit 11 and a secondary refrigeration unit 12, wherein the primary refrigeration unit 11 and the secondary refrigeration unit 12 are internally connected to each other by being snap-fitted; the cryopump 2 comprises an outer shell 21, an inner cover 22, and an inner cavity 23, wherein an interlayer is left between the outer shell 21 and the inner cover 22, and the inner cavity 23 is surrounded by the inner cover 22, wherein the inner cover 22 opens upward, and the upper part of the inner cover 22 is connected to a cavity to be evacuated, and the interior of the cryopump 2 A first adsorption component 24 and a second adsorption component 25 are provided; the first-level refrigeration unit 11 is connected to one end of the outer shell 21, and the second-level refrigeration unit 12 is arranged in the inner cavity 23, one end of the second-level refrigeration unit 12 is connected to the first-level refrigeration unit 11, and the other end is connected to the first adsorption component 24, the second adsorption component 25 is detachably connected to the inner circle of the top of the inner cover 22, and the second adsorption component 25 is not in contact with the first adsorption component 24, and a temperature sensor 3 is provided outside the refrigerator 1, and the sensing ends of the temperature sensor 3 are respectively connected to the first adsorption component 24 and the second adsorption component 25, for respectively sensing whether the set temperature is reached on the first adsorption component 24 and the second adsorption component 25.

[0007] In some embodiments, a first-stage condenser 111 is provided inside the first-stage refrigeration unit 11, and the first-stage condenser 111 is tightly fitted with the inner wall of the first-stage refrigeration unit 11; a second-stage condenser 121 is provided inside the second-stage refrigeration unit 12, and the second-stage condenser 121 is tightly fitted with the inner wall of the second-stage refrigeration unit 12; the gas is condensed by the first-stage condenser 111 and the second-stage condenser 121; a first flange seat 112 is sleeved on the outer side of the connection between the first-stage condenser 111 and the second-stage condenser 121; a second flange seat 122 is sleeved on the outer side of the connection between the second-stage condenser 121 and the first adsorption component 24; an adapter plate 26 is provided on one side of the first adsorption component 24, and is connected to one end of the second flange seat 122 through one side of the adapter plate 26, so as to transfer the temperature to the first adsorption component 24 and the second adsorption component 25 in sequence.

[0008] Furthermore, the primary refrigeration unit 11 and the secondary refrigeration unit 12 are designed as a two-stage type, which is conducive to controlling the temperature gradient, thereby effectively condensing and adsorbing the gas and improving the extraction efficiency; during refrigeration, cold shielding is provided layer by layer from the outside to the inside, that is, from the primary refrigeration unit 11 to the secondary refrigeration unit 12, which is conducive to achieving thermal insulation effect, reducing heat transfer, and ensuring cooling effect.

[0009] Furthermore, the inner wall of the first flange seat 112 is tightly fitted to the primary condenser 111 , and the inner wall of the second flange seat 122 is tightly fitted to the secondary condenser 121 .

[0010] Furthermore, the first flange seat 112 and the second flange seat 122 are made of copper, which is convenient for quickly transferring the temperature to the adsorption component in the cryopump 2 .

[0011] In some embodiments, the transmission device 10 includes a piston assembly 101, a bearing assembly 102, and a motor 103. One end of the motor 103 is connected to the bearing assembly 102. A piston assembly 101 is provided above the bearing assembly 102. One end of the piston assembly 101 is provided at the tail of the refrigerator 1, and the other end is clamped inside the first-stage condenser 111. The bearing assembly 102 is driven to rotate by the motor 103, thereby driving the piston assembly 101 to perform linear reciprocating motion, thereby driving the first-stage condenser 111 and the second-stage condenser 121 to move synchronously inside the first-stage refrigeration unit 11 and the second-stage refrigeration unit 12, so as to quickly compress the air for refrigeration.

[0012] In some embodiments, the first adsorption assembly 24 includes a plurality of condensation plates 241 evenly spaced apart vertically, the upper edge of the condensation plate 241 is provided with a circle of annular folded edges 242 inwardly, and a first connecting plate 243 is provided between adjacent condensation plates 241. The annular folded edges 242 are connected to the connecting plate so that the upper and lower adjacent condensation plates 241 are connected, and the lower side of one of the annular folded edges 242 is connected to one side of the adapter plate 26, and the other side of the adapter plate 26 is connected to the second flange seat 122.

[0013] Furthermore, an activated carbon adsorption layer is provided on the inner wall of the condensation plate 241 to adsorb impurities, dust and moisture in the air, so as to achieve a cooling effect quickly.

[0014] In some embodiments, the second adsorption assembly 25 includes a plurality of baffles 251 evenly spaced laterally, the plurality of baffles 251 are arranged in concentric circles, the baffles 251 are snap-fitted with a plurality of second connecting plates 252, the plurality of second connecting plates 252 are symmetrically arranged with the center of the baffle 251 as the center, one end of the second connecting plate 252 close to the inner wall of the inner cover 22 is connected to the inner wall of the inner cover 22, and each of the second connecting plates 252 is snap-fitted with all the baffles 251 for secondary airflow guidance.

[0015] In some embodiments, a nitrogen inlet seat 4 is further provided outside the refrigerator 1 , and external nitrogen is connected through the nitrogen inlet seat 4 to fill into the cryopump 2 to restore the cryopump 2 to normal atmospheric pressure.

[0016] Furthermore, the inner wall of the inner cover 22 is coated with a layer of heat-insulating material to prevent heat from being dissipated after refrigeration.

[0017] The working principle of the utility model is as follows: the compressor is connected to the outside of the refrigerator, and the gaseous helium is compressed by the compressor. After entering the refrigerator, the gaseous helium expands when passing through the primary refrigeration unit and the secondary refrigeration unit, so that it can absorb external heat, cool down the low-temperature pump cavity for the first time and evacuate, which is mainly used to condense water vapor, and reflect the radiated temperature through the second adsorption component to prevent the temperature from rising. The first adsorption component removes water vapor and impurities in the gas, so that after the pressure reaches 40Pa, the pressure-maintaining state is maintained for 5 minutes and the inner cavity pressure is always maintained below 65Pa. This is normal, indicating that the low-temperature pump does not leak. If it is above 65Pa, it leaks and needs to be evacuated again for inspection; after the pressure is maintained, the secondary refrigeration unit is used to cool down and evacuate for the second time, which is mainly used to condense the gas with high vapor pressure of the saturated vapor body. The second adsorption component and the first adsorption component are condensed and adsorbed again, so that the pressure reaches below 10Pa and the temperature is below 20K, and the vacuuming time is 1.5-2h.

[0018] Beneficial effects of the utility model: the utility model proposes a refrigeration system of a low-temperature pump automatic regeneration device, which drives the transmission device 10 to make linear reciprocating motion through the motor 103, thereby driving the first-stage condenser 111 and the second-stage condenser 121 to move synchronously inside the first-stage refrigeration unit 11 and the second-stage refrigeration unit 12, so that the compressed air is quickly refrigerated, and the use of two-stage refrigeration units improves the air extraction efficiency, enhances thermal insulation, and optimizes the overall performance; the radiated temperature is reflected by the second adsorption component 25 to prevent the temperature from rising, and the first adsorption component 24 removes water vapor and impurities in the gas; the temperature of the adsorption component is monitored in real time by setting a temperature sensor 3, and the gas in the vacuum chamber is diluted through the nitrogen inlet seat 4 when not in use to restore it to normal atmospheric pressure. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The utility model is an overall structural diagram of the refrigeration system of the cryopump automatic regeneration device.

[0020] Figure 2 It is a cross-sectional view of the refrigeration system of the low-temperature pump automatic regeneration device of the utility model.

[0021] Figure 3 It is a cross-sectional view of the refrigeration system of the low-temperature pump automatic regeneration device of the utility model.

[0022] Main component symbols

[0023] Refrigerator 1, transmission device 10, piston assembly 101, bearing assembly 102, motor 103, primary refrigeration unit 11, primary condenser 111, first flange seat 112, secondary refrigeration unit 12, secondary condenser 121, second flange seat 122, cryopump 2, outer shell 21, inner cover 22, inner cavity 23, first adsorption assembly 24, condensation plate 241, annular folding edge 242, first connecting plate 243, second adsorption assembly 25, baffle 251, second connecting plate 252, adapter plate 26, temperature sensor 3, nitrogen inlet seat 4.

[0024] The following specific implementation manner will further illustrate the present utility model in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0025] like Figure 1 As shown, it is the overall structure diagram of the refrigeration system of the low temperature pump automatic regeneration device of the utility model; Figure 2 As shown, it is a cross-sectional view of the refrigeration system of the cryopump automatic regeneration device of the utility model; Figure 3 The figure shows a cross-sectional view of the refrigeration system of the cryopump automatic regeneration device of the present invention.

[0026] Embodiment 1:

[0027] A refrigeration system of a cryopump automatic regeneration device, comprising a refrigerator 1 and a cryopump 2, wherein one side of the cryopump 2 is connected to the refrigerator 1, one end of the refrigerator 1 is provided with a transmission device 10, and the other end is provided with a refrigeration unit, wherein the refrigeration unit comprises a primary refrigeration unit 11 and a secondary refrigeration unit 12, wherein the primary refrigeration unit 11 and the secondary refrigeration unit 12 are internally connected to each other by snapping; the cryopump 2 comprises an outer shell 21, an inner cover 22, and an inner cavity 23, wherein an interlayer is left between the outer shell 21 and the inner cover 22, and the inner cavity 23 is surrounded by the inner cover 22, wherein the inner cover 22 opens upward, and the upper part of the inner cover 22 is connected to the cavity to be evacuated, and the cryopump 2 is internally provided with a first An adsorption component 24 and a second adsorption component 25; the primary refrigeration unit 11 is connected to one end of the outer shell 21, the secondary refrigeration unit 12 is arranged in the inner cavity 23, one end of the secondary refrigeration unit 12 is connected to the primary refrigeration unit 11, and the other end is connected to the first adsorption component 24, the second adsorption component 25 is detachably connected to the inner circle of the top of the inner cover 22, and the second adsorption component 25 is not in contact with the first adsorption component 24, and a temperature sensor 3 is provided on the outside of the refrigerator 1, and the sensing ends of the temperature sensor 3 are respectively connected to the first adsorption component 24 and the second adsorption component 25, for respectively sensing whether the set temperature is reached on the first adsorption component 24 and the second adsorption component 25.

[0028] A first-stage condenser 111 is provided inside the first-stage refrigeration unit 11, and the first-stage condenser 111 is tightly fitted with the inner wall of the first-stage refrigeration unit 11; a second-stage condenser 121 is provided inside the second-stage refrigeration unit 12, and the second-stage condenser 121 is tightly fitted with the inner wall of the second-stage refrigeration unit 12; the gas is condensed by the first-stage condenser 111 and the second-stage condenser 121; a first flange seat 112 is sleeved on the outer side of the connection between the first-stage condenser 111 and the second-stage condenser 121; a second flange seat 122 is sleeved on the outer side of the connection between the second-stage condenser 121 and the first adsorption component 24; an adapter plate 26 is provided on one side of the first adsorption component 24, and is connected to one end of the second flange seat 122 through one side of the adapter plate 26, so as to transfer the temperature to the first adsorption component 24 and the second adsorption component 25 in sequence.

[0029] The primary refrigeration unit 11 and the secondary refrigeration unit 12 are designed as a two-stage type, which is conducive to controlling the temperature gradient, thereby effectively condensing and adsorbing the gas and improving the extraction efficiency; during refrigeration, cold shielding is provided layer by layer from the outside to the inside, that is, from the primary refrigeration unit 11 to the secondary refrigeration unit 12, which is conducive to achieving thermal insulation effect, reducing heat transfer, and ensuring cooling effect.

[0030] The inner wall of the first flange seat 112 is tightly fitted to the primary condenser 111 , and the inner wall of the second flange seat 122 is tightly fitted to the secondary condenser 121 .

[0031] The first flange seat 112 and the second flange seat 122 are made of copper, which is convenient for quickly transferring the temperature to the adsorption component in the cryopump 2 .

[0032] The transmission device 10 includes a piston assembly 101, a bearing assembly 102, and a motor 103. One end of the motor 103 is connected to the bearing assembly 102. A piston assembly 101 is provided above the bearing assembly 102. One end of the piston assembly 101 is provided at the rear of the refrigerator 1, and the other end is clamped inside the primary condenser 111. The motor 103 drives the bearing assembly 102 to rotate, thereby driving the piston assembly 101 to perform linear reciprocating motion, thereby driving the primary condenser 111 and the secondary condenser 121 to move synchronously inside the primary refrigeration unit 11 and the secondary refrigeration unit 12, so as to quickly compress the air for refrigeration.

[0033] The first adsorption assembly 24 includes a plurality of condensation plates 241 evenly spaced apart from top to bottom, the upper edge of the condensation plate 241 is provided with a circle of annular folded edges 242 inwardly, and a first connecting plate 243 is provided between adjacent condensation plates 241. The annular folded edges 242 are connected to the connecting plate so that the upper and lower adjacent condensation plates 241 are connected, and the lower side of one of the annular folded edges 242 is connected to one side of the adapter plate 26, and the other side of the adapter plate 26 is connected to the second flange seat 122.

[0034] An activated carbon adsorption layer is arranged on the inner wall of the condensation plate 241 to absorb impurities, dust and moisture in the air, so as to achieve a cooling effect quickly.

[0035] The second adsorption assembly 25 includes a plurality of baffles 251 that are evenly spaced laterally, and the plurality of baffles 251 are arranged in concentric circles. The baffles 251 are clamped with a plurality of second connecting plates 252, and the plurality of second connecting plates 252 are symmetrically arranged with the center of the baffle 251 as the center. One end of the second connecting plate 252 close to the inner wall of the inner cover 22 is connected to the inner wall of the inner cover 22, and each of the second connecting plates 252 is clamped with all the baffles 251 for secondary airflow guidance.

[0036] A nitrogen inlet seat 4 is also provided outside the refrigerator 1 , and external nitrogen is connected through the nitrogen inlet seat 4 to fill the cryopump 2 to restore the cryopump 2 to normal atmospheric pressure.

[0037] The inner wall of the inner cover 22 is coated with a layer of heat-insulating material to prevent heat from being easily dissipated after refrigeration.

[0038] Beneficial effects of the utility model: the utility model proposes a refrigeration system of a low-temperature pump automatic regeneration device, which drives the transmission device 10 to make linear reciprocating motion through the motor 103, thereby driving the first-stage condenser 111 and the second-stage condenser 121 to move synchronously inside the first-stage refrigeration unit 11 and the second-stage refrigeration unit 12, so that the compressed air is quickly refrigerated, and the use of two-stage refrigeration units improves the air extraction efficiency, enhances thermal insulation, and optimizes the overall performance; the radiated temperature is reflected by the second adsorption component 25 to prevent the temperature from rising, and the first adsorption component 24 removes water vapor and impurities in the gas; the temperature of the adsorption component is monitored in real time by setting a temperature sensor 3, and the gas in the vacuum chamber is diluted through the nitrogen inlet seat 4 when not in use to restore it to normal atmospheric pressure.

[0039] The above-mentioned embodiments only express several implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A refrigeration system of a cryopump automatic regeneration device, comprising a refrigerator (1) and a cryopump (2), wherein the cryopump (2) One side is connected to the refrigerator (1), characterized in that: A transmission device (10) is provided at one end of the refrigerator (1), and a refrigeration unit is provided at the other end, wherein the refrigeration unit comprises a primary refrigeration unit (11) and a secondary refrigeration unit (12), wherein the primary refrigeration unit (11) and the secondary refrigeration unit (12) are internally connected to each other by snap-fitting; the cryopump (2) comprises an outer shell (21), an inner cover (22), and an inner cavity (23), wherein an interlayer is provided between the outer shell (21) and the inner cover (22), wherein the inner cavity (23) is surrounded by the inner cover (22), wherein the inner cover (22) opens upward, and the upper part of the inner cover (22) is connected to a cavity to be evacuated, wherein a first adsorption assembly (24) and a second adsorption assembly (25) are provided inside the cryopump (2); The cold unit (11) is connected to one end of the outer shell (21), the secondary refrigeration unit (12) is arranged in the inner cavity (23), one end of the secondary refrigeration unit (12) is connected to the primary refrigeration unit (11), and the other end is connected to the first adsorption component (24), the second adsorption component (25) is detachably connected to the inner circle of the top of the inner cover (22), and the second adsorption component (25) is not in contact with the first adsorption component (24), and a temperature sensor (3) is arranged outside the refrigerator (1), and the sensing ends of the temperature sensor (3) are respectively connected to the first adsorption component (24) and the second adsorption component (25), and are used to respectively sense whether the first adsorption component (24) and the second adsorption component (25) have reached a set temperature.

2. The refrigeration system of the cryopump automatic regeneration device according to claim 1, characterized in that: The first-stage refrigeration unit (11) is provided with a first-stage condenser (111) inside, and the first-stage condenser (111) is tightly fitted with the inner wall of the first-stage refrigeration unit (11); the second-stage condenser (121) is provided with a second-stage condenser (121) inside, and the second-stage condenser (121) is tightly fitted with the inner wall of the second-stage refrigeration unit (12); the gas is condensed by the first-stage condenser (111) and the second-stage condenser (121); the outer side of the connection between the first-stage condenser (111) and the second-stage condenser (121) is sleeved with a first flange seat (112); the outer side of the connection between the second-stage condenser (121) and the first adsorption component (24) is sleeved with a second flange seat (122); a transfer plate (26) is provided on one side of the first adsorption component (24), and is connected to one end of the second flange seat (122) through one side of the transfer plate (26), so as to transfer the temperature to the first adsorption component (24) and the second adsorption component (25) in sequence.

3. The refrigeration system of the cryopump automatic regeneration device according to claim 1, characterized in that: The primary refrigeration unit (11) and the secondary refrigeration unit (12) are designed as two-stage types.

4. The refrigeration system of the cryopump automatic regeneration device according to claim 2, characterized in that: The inner wall of the first flange seat (112) is tightly fitted to the primary condenser (111), and the inner wall of the second flange seat (122) is tightly fitted to the secondary condenser (121).

5. The refrigeration system of the cryopump automatic regeneration device according to claim 1, characterized in that: The transmission device (10) comprises a piston assembly (101), a bearing assembly (102), and a motor (103); one end of the motor (103) is connected to the bearing assembly (102); a piston assembly (101) is arranged above the bearing assembly (102); one end of the piston assembly (101) is arranged at the rear of the refrigerator (1), and the other end is clamped inside the primary condenser (111); the motor (103) drives the bearing assembly (102) to rotate, thereby driving the piston assembly (101) to perform linear reciprocating motion, thereby driving the primary condenser (111) and the secondary condenser (121) to move synchronously inside the primary refrigeration unit (11) and the secondary refrigeration unit (12).

6. The refrigeration system of the cryopump automatic regeneration device according to claim 1, characterized in that: The first adsorption component (24) includes a plurality of condensation plates (241) evenly spaced apart from each other, the upper edge of each condensation plate (241) being provided with a circle of annular folded edges (242) inwardly, and a first connecting plate (243) being provided between adjacent condensation plates (241), and the annular folded edges (242) being connected to the connecting plate so that the upper and lower adjacent condensation plates (241) are connected, wherein the lower side of one of the annular folded edges (242) is connected to one side of the adapter plate (26), and the other side of the adapter plate (26) is connected to the second flange seat (122).

7. The refrigeration system of the cryopump automatic regeneration device according to claim 6, characterized in that: An activated carbon adsorption layer is arranged on the inner wall of the condensation plate (241) for adsorbing impurities, dust and moisture in the air.

8. The refrigeration system of the cryopump automatic regeneration device according to claim 1, characterized in that: The second adsorption assembly (25) comprises a plurality of baffles (251) arranged at uniform intervals in the transverse direction, the plurality of baffles (251) being arranged in a concentric circle, the baffles (251) being clamped with a plurality of second connecting plates (252), the plurality of second connecting plates (252) being symmetrically arranged with the center of the baffle (251) as the center, one end of the second connecting plate (252) close to the inner wall of the inner cover (22) being connected to the inner wall of the inner cover (22), and each of the second connecting plates (252) being clamped with all the baffles (251).

9. The refrigeration system of the cryopump automatic regeneration device according to claim 1, characterized in that: A nitrogen inlet seat (4) is also provided outside the refrigerator (1).

10. The refrigeration system of the cryopump automatic regeneration device according to claim 1, characterized in that: The inner wall of the inner cover (22) is coated with a layer of heat-insulating material.

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