Carbon-carbon bolt, heating assembly and single crystal furnace

Abstract

The utility model particularly relates to a carbon-carbon bolt, a heating assembly and a single crystal furnace, and belongs to the technical field of single crystal furnaces. The carbon-carbon bolt is used for connecting a heating ring and an electrode leg of the single crystal furnace, and comprises a screw part and two threaded parts, threads are arranged on the peripheral walls of the two ends of the screw part in the axial direction of the screw part, a driving section is arranged in the middle of the screw part, and the cross section of the driving section is in a regular polygon shape. The threaded parts are arranged on the screw rod part in a sleeving mode, the threaded parts are in threaded connection with the screw rod part, and the two threaded parts are arranged at the two ends of the screw rod part respectively. The carbon-carbon bolt has good high-temperature resistance, corrosion resistance and friction resistance, can meet the high-temperature working environment requirement of the heating ring, and improves the connection reliability of the heating ring and the electrode legs. The structure that the two ends of the screw rod part are in threaded connection with the threaded parts has good anti-loosening performance, and the connection reliability of the heating ring and the electrode legs is further improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of single crystal furnaces, and in particular relates to a carbon-carbon bolt, a heating component and a single crystal furnace. Background Art

[0002] A single crystal furnace is a device that uses a heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows single crystals without dislocation using the Czochralski method. Usually, the heater of a single crystal furnace includes a heating coil and electrode legs. The heating coil is arranged around the circumference of the crucible, and the electrode legs are used to connect to the electrodes arranged on the furnace body. In some existing heaters, the heating coil needs to be connected to the electrode legs by bolts. However, the operating temperature of the heater is relatively high, and common bolts cannot meet the operating temperature requirements of the heater, which reduces the connection reliability of the heating coil and the electrode legs. Utility Model Content

[0003] The utility model aims to provide a carbon-carbon bolt, a heating component and a single crystal furnace. The carbon-carbon bolt has the advantage of high temperature resistance and can increase the connection reliability between the heating ring and the electrode leg.

[0004] In order to achieve the above-mentioned purpose of the utility model, the technical solution adopted by the utility model is: on the one hand, the embodiment of the present application provides a carbon-carbon bolt for connecting the heating ring and the electrode leg of the single crystal furnace, including a screw part and two threaded parts. Along the axial direction of the screw part, the circumferential walls at both ends of the screw part are provided with threads, and the middle part of the screw part is provided with a driving section, and the cross section of the driving section is a regular polygon. The threaded part is sleeved on the screw part, and the threaded part is threadedly connected to the screw part, and the two threaded parts are respectively provided at both ends of the screw part.

[0005] In some embodiments, the cross-section of the threaded portion is a regular quadrilateral.

[0006] In some embodiments, arc chamfers are provided at corners of the threaded portion.

[0007] In some embodiments, the distances from the drive section to the two ends of the screw portion are different.

[0008] On the other hand, an embodiment of the present application provides a heating assembly for a single crystal furnace, comprising a heating ring and an electrode leg, and also comprising the carbon-carbon bolt in the above embodiment, the electrode leg comprising a first wall and a second wall spaced apart, the first wall abutting against the outer peripheral wall of the heating ring, the heating ring, the first wall and the second wall are respectively coaxially provided with a first through hole, the screw portion is passed through the first through hole, the driving section is arranged between the first wall and the second wall, the inner peripheral wall of the heating ring and the side of the second wall away from the first wall are respectively provided with countersunk holes, the countersunk holes are used to accommodate the threaded portion, the electrode leg is provided with a protrusion, and the protrusion is provided with a second through hole.

[0009] In some embodiments, the protrusion is disposed on a side of the electrode leg away from the heating coil.

[0010] On the other hand, an embodiment of the present application provides a single crystal furnace, including a bottom wall and a first electrode arranged on the bottom wall, and also the heating component in the above embodiment, wherein the protrusion is connected to the first electrode.

[0011] In some embodiments, a second electrode is further included, the first electrode is connected to the second electrode, a second bolt is passed through the second through hole of the protrusion, and the second bolt is threadedly connected to the second electrode.

[0012] In some embodiments, a protective cover is also included, wherein a first opening and a second opening are provided on adjacent sides of the protective cover, the protective cover is covered on the protrusion via the first opening, the second opening is used to avoid the electrode leg so that the electrode leg is connected to the protrusion, and the head of the second bolt is accommodated in the protective cover.

[0013] In some embodiments, the protective cover is provided with a receiving portion, and the head of the second bolt is inserted into the receiving portion.

[0014] The utility model has the following beneficial effects:

[0015] On the one hand, the carbon-carbon bolt has good high temperature resistance, corrosion resistance and friction resistance, which can meet the high temperature working environment requirements of the heating coil and increase the connection reliability between the heating coil and the electrode leg. On the other hand, the threaded connection structure at both ends of the screw has good anti-loosening performance, which further increases the connection reliability between the heating coil and the electrode leg. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the carbon-carbon bolt structure of the utility model;

[0017] Figure 2 This is a schematic structural diagram of a heating assembly (showing a first wall and a second wall) of the utility model;

[0018] Figure 3 This is a schematic diagram of the structure of the heating assembly of the utility model (showing the countersunk hole);

[0019] Figure 4 for Figure 3 A magnified image of point A;

[0020] Figure 5 It is a partial structural schematic diagram of the single crystal furnace of the utility model;

[0021] Figure 6 It is a schematic structural diagram of the protective cover of the utility model.

[0022] Figure numbers: 1-screw portion, 2-threaded portion, 3-driving section, 4-heating ring, 5-electrode leg, 6-second wall, 7-first wall, 8-carbon-carbon bolt, 9-protrusion, 10-second through hole, 11-bottom wall, 12-first electrode, 13-second electrode, 14-second bolt, 15-protective cover, 16-first opening, 17-second opening, 18-accommodating portion. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Unless otherwise specified, the technical means used in the embodiments are conventional means well known to those skilled in the art.

[0024] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0025] The technical solution adopted by the utility model is: on the one hand, the embodiment of the present application provides a carbon-carbon bolt 8 for connecting the heating ring 4 and the electrode leg 5 of the single crystal furnace, including a screw part 1 and two threaded parts 2. Along the axial direction of the screw part 1, the two end peripheral walls of the screw part 1 are provided with threads, and the middle part of the screw part 1 is provided with a driving section 3, and the cross section of the driving section 3 is a regular polygon. The threaded part 2 is sleeved on the screw part 1, and the threaded part 2 is threadedly connected to the screw part 1, and the two threaded parts 2 are respectively provided at the two ends of the screw part 1.

[0026] Since the threaded portion 2 is threadedly connected to the screw portion 1, when the threaded portion 2 is stationary, when the screw portion 1 rotates, the threaded portion 2 can move axially relative to the screw portion 1. In the embodiment of the present application, the threads at both ends of the threaded portion 2 are configured such that when the screw portion 1 rotates clockwise (or counterclockwise), the two threaded portions 2 are closed, and conversely, when the threaded portion 2 rotates counterclockwise (or clockwise), the two threaded portions 2 are separated.

[0027] When using the carbon-carbon bolt 8 of the embodiment of the present application to connect the heating coil 4 and the electrode leg 5, the heating coil 4 and the electrode leg 5 are arranged between the two threaded portions 2, and the screw portion 1 is rotated so that the two threaded portions 2 can clamp the heating coil 4 and the electrode leg 5 respectively, so that the two can be connected.

[0028] The specific material of the carbon-carbon bolt 8 is well known to those skilled in the art and will not be described in detail here.

[0029] The middle portion of the screw portion 1 refers to a point between both ends of the screw portion 1 .

[0030] The cross section of the driving section 3 is a regular polygon, so that the screw part 1 can be rotated by a tool like a wrench. For example, the cross section of the driving section 3 can be a regular hexagon.

[0031] The heating coil 4 and the electrode leg 5 are connected by the carbon-carbon bolt 8 of the embodiment of the present application. On the one hand, the carbon-carbon bolt 8 has good high temperature resistance, corrosion resistance and friction resistance, which can meet the high temperature working environment requirements of the heating coil 4 and increase the connection reliability between the heating coil 4 and the electrode leg 5. On the other hand, the structure of the threaded portion 2 is threadedly connected at both ends of the screw portion 1, which has good anti-loosening performance, further increasing the connection reliability between the heating coil 4 and the electrode leg 5.

[0032] In some embodiments, the cross section of the threaded portion 2 is a regular quadrilateral.

[0033] The heating coil 4 and the electrode leg 5 can be respectively provided with a countersunk hole for accommodating the threaded portion 2. The cross section of the threaded portion 2 is a regular quadrilateral, and the corresponding cross section of the countersunk hole can also be a regular quadrilateral, so that when the threaded portion 2 is accommodated in the countersunk hole, the screw portion 1 rotates, and the threaded portion 2 does not rotate together. In addition, the cross section of the countersunk hole is a regular quadrilateral, which reduces the difficulty of processing the countersunk hole compared to regular polygons with more than four sides such as regular pentagons and regular hexagons.

[0034] In some embodiments, the corners of the threaded portion 2 are provided with arc chamfers.

[0035] The arc chamfer can reduce the risk of stress concentration at the edge of the threaded portion 2 and improve the durability of the threaded portion 2.

[0036] In some embodiments, the distances from the driving section 3 to the two ends of the screw portion 1 are different.

[0037] The advantage of such a setting is that in some use cases, the distances from the drive section 3 to the two ends of the screw part 1 can be different. For example, in the heating assembly of the embodiment of the present application, the length required for the side of the drive section 3 close to the heating ring 4 is longer, and the length required for the side close to the second wall 6 is shorter. If the distances from the drive section 3 to the two ends of the screw part 1 are the same, the side of the screw part 1 close to the second wall 6 will protrude excessively from the second wall 6, which may cause the screw part 1 to interfere with other components in the single crystal furnace. Therefore, the different distances from the drive section 3 to the two ends of the screw part 1 can increase the installation adaptability of the carbon-carbon bolt 8.

[0038] On the other hand, an embodiment of the present application provides a heating assembly for a single crystal furnace, comprising a heating coil 4 and an electrode leg 5, and also comprising the carbon-carbon bolt 8 in the above embodiment, the electrode leg 5 comprises a first wall 7 and a second wall 6 arranged at intervals, the first wall 7 abuts against the outer peripheral wall of the heating coil 4, the heating coil 4, the first wall 7 and the second wall 6 are respectively coaxially provided with a first through hole, the screw portion 1 is passed through the first through hole, the driving section 3 is arranged between the first wall 7 and the second wall 6, the inner peripheral wall of the heating coil 4 and the side of the second wall 6 away from the first wall 7 are respectively provided with countersunk holes, the countersunk holes are used to accommodate the threaded portion 2, the electrode leg 5 is provided with a protrusion 9, and the protrusion 9 is provided with a second through hole 10.

[0039] The specific structure and working principle of the heating coil 4 are well known to those skilled in the art and will not be described in detail here.

[0040] The electrode leg 5 is used to connect the electrode and the heating ring 4 provided in the single crystal furnace so that the external current can be transmitted to the heating ring 4 . Meanwhile, the electrode leg 5 can also play the role of supporting the heating ring 4 .

[0041] The driving section 3 is arranged between the first wall 7 and the second wall 6 , so that the driving section 3 can be rotated by inserting a wrench between the first wall 7 and the second wall 6 .

[0042] The threaded portion 2 cooperates with the counterbore so that when the screw portion 1 rotates, the threaded portion 2 does not rotate together.

[0043] The screw part 1 is rotated so that the two threaded parts 2 can be closed and enter the countersunk hole, and the electrode leg 5 and the heating coil 4 are clamped by the threaded part 2 so that the two can be connected.

[0044] Since the screw part 1 rotates through the action of the driving section 3, on the one hand, the peripheral wall of the threaded part 2 can be as close to the inner wall of the countersunk hole as possible while meeting the requirements, and there is no need to set a large gap between the head and the countersunk hole in order to facilitate the twisting of the head like a traditional bolt, thereby making it difficult for the threaded part 2 to rotate relative to the countersunk hole, thereby increasing the anti-loosening effect. On the other hand, the end of the screw part 1 and the threaded part 2 can be accommodated in the countersunk hole, thereby reducing the inner wall of the heating coil 4 and the protruding part of the second wall 6 away from the side of the heating coil 4, reducing the risk of the screw part 1 and the threaded part 2 interfering with other components in the single crystal furnace. On the other hand, the first wall 7 and the second wall 6 can protect the driving section 3.

[0045] The protrusion 9 is used to connect the electrode leg 5 to an electrode disposed in the single crystal furnace, so that the electrode leg 5 can be electrically connected to the electrode.

[0046] The second through hole 10 can be used for a bolt to penetrate therethrough to connect the protrusion 9 and the electrode.

[0047] In some embodiments, the protrusion 9 is disposed on a side of the electrode leg 5 away from the heating coil 4 .

[0048] The protrusion 9 is arranged on the side of the electrode leg 5 away from the heating coil 4, which reduces the risk of components arranged inside the heating coil 4, such as a crucible, blocking the bolts passing through the second through hole 10, making the electrode leg 5 difficult to disassemble and assemble.

[0049] On the other hand, an embodiment of the present application provides a single crystal furnace, including a bottom wall 11 and a first electrode 12 arranged on the bottom wall 11 , and also the heating assembly in the above embodiment, wherein the protrusion 9 is connected to the first electrode 12 .

[0050] The specific structure and material of the first electrode 12 and the connection method between the first electrode 12 and the bottom wall 11 are well known to those skilled in the art and will not be described in detail here.

[0051] The protrusion 9 is connected to the first electrode 12 , so that the heating coil 4 can be electrically connected to the first electrode 12 .

[0052] In some embodiments, a second electrode 13 is further included, the first electrode 12 is connected to the second electrode 13 , a second bolt 14 is passed through the second through hole 10 of the protrusion 9 , and the second bolt 14 is threadedly connected to the second electrode 13 .

[0053] The second electrode 13 may be provided with a screw hole, and the shaft of the second bolt 14 is threadedly connected to the screw hole.

[0054] The connection method of the first electrode 12 and the second electrode 13 can be selected from existing suitable connection methods. For example, the first electrode 12 and the second electrode 13 can be threadedly connected.

[0055] The protruding portion 9 can be connected to the second electrode 13 by using the second bolt 14, which has the advantages of reliable, convenient and fast connection.

[0056] The protrusion 9 is connected to the first electrode 12 via the second electrode 13 , which facilitates the installation of the protrusion 9 on the one hand, and can adjust the position of the electrode leg 5 relative to the bottom wall 11 via the second electrode 13 on the other hand.

[0057] In some embodiments, a protective cover 15 is further included, and a first opening 16 and a second opening 17 are provided on adjacent two sides of the protective cover 15. The protective cover 15 is covered on the protrusion 9 via the first opening 16, and the second opening 17 is used to avoid the electrode leg 5 so that the electrode leg 5 is connected to the protrusion 9, and the head of the second bolt 14 is accommodated in the protective cover 15.

[0058] The first opening 16 may be disposed toward the bottom wall 11 .

[0059] The protective cover 15 can protect the second bolt 14 , so that the second bolt 14 can be isolated from the silicon liquid, thereby reducing the risk of adhesion between the second bolt 14 and the protrusion 9 .

[0060] When the protective cover 15 is covered on the protruding portion 9, the end of the second opening 17 can be against the electrode leg 5, so that the protective cover 15, the electrode leg 5 and the protruding portion 9 can form a nearly closed chamber structure.

[0061] In some embodiments, the protective cover 15 is provided with a receiving portion 18 , and the head of the second bolt 14 is inserted into the receiving portion 18 .

[0062] The head of the second bolt 14 is inserted into the accommodating portion 18 , so that the protective cover 15 can be connected to the protruding portion 9 . In addition, the accommodating portion 18 can increase the protective effect of the protective cover 15 on the second bolt 14 .

[0063] The above embodiments are only descriptions of the preferred methods of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various deformations, modifications, and substitutions made by ordinary technicians in this field to the technical solutions of the present invention should all fall within the protection scope determined by the claims of the present invention.

Claims

1. A carbon-carbon bolt for connecting a heating ring (4) and an electrode leg (5) of a single crystal furnace, characterized in that: include: A screw portion (1), wherein the circumferential walls at both ends of the screw portion (1) are provided with threads along the axial direction of the screw portion (1), and a driving section (3) is provided in the middle of the screw portion (1), and the cross section of the driving section (3) is a regular polygon; Two threaded parts (2), the threaded parts (2) are sleeved on the screw part (1), the threaded parts (2) are threadedly connected to the screw part (1), and the two threaded parts (2) are respectively arranged at two ends of the screw part (1).

2. The carbon-carbon bolt according to claim 1, characterized in that: The cross section of the threaded portion (2) is a regular quadrilateral.

3. The carbon-carbon bolt according to claim 2, characterized in that: The corners of the threaded portion (2) are provided with circular arc chamfers.

4. The carbon-carbon bolt according to claim 1, characterized in that: The distances between the driving section (3) and the two ends of the screw portion (1) are different.

5. A heating assembly for a single crystal furnace, comprising a heating ring (4) and an electrode leg (5), characterized in that: It also includes a carbon-carbon bolt (8) as described in any one of claims 1 to 4, the electrode leg (5) includes a first wall (7) and a second wall (6) arranged at intervals, the first wall (7) abuts against the outer peripheral wall of the heating coil (4), the heating coil (4), the first wall (7) and the second wall (6) are respectively coaxially provided with a first through hole, the screw portion (1) is passed through the first through hole, the driving section (3) is arranged between the first wall (7) and the second wall (6), the inner peripheral wall of the heating coil (4) and the side of the second wall (6) away from the first wall (7) are respectively provided with countersunk holes, the countersunk holes are used to accommodate the threaded portion (2), the electrode leg (5) is provided with a protrusion (9), and the protrusion (9) is provided with a second through hole (10).

6. The heating assembly according to claim 5, characterized in that The protruding portion (9) is arranged on a side of the electrode leg (5) away from the heating coil (4).

7. A single crystal furnace, comprising a bottom wall (11) and a first electrode (12) arranged on the bottom wall (11), characterized in that: It also comprises a heating assembly as claimed in any one of claims 5 to 6, wherein the protrusion (9) is connected to the first electrode (12).

8. The single crystal furnace according to claim 7, characterized in that: It also includes a second electrode (13), the first electrode (12) is connected to the second electrode (13), a second bolt (14) is passed through the second through hole (10) of the protruding portion (9), and the second bolt (14) is threadedly connected to the second electrode (13).

9. The single crystal furnace according to claim 8, characterized in that: The invention also comprises a protective cover (15), wherein adjacent two sides of the protective cover (15) are provided with a first opening (16) and a second opening (17), the protective cover (15) is provided on the protruding portion (9) via the first opening (16), the second opening (17) is used to avoid the electrode leg (5) so that the electrode leg (5) is connected to the protruding portion (9), and the head of the second bolt (14) is accommodated in the protective cover (15).

10. The single crystal furnace according to claim 9, characterized in that: The protective cover (15) is provided with a receiving portion (18), and the head of the second bolt (14) is inserted into the receiving portion (18).

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