Silicon carbide coating graphite disc performance testing device
By designing a silicon carbide-coated graphite disk performance testing device including electric push rods, push plates, cushions and baffles, the problem of easy bumps in the graphite disk is solved, and the smooth placement and removal of the graphite disk is achieved, and the measurement accuracy and operation convenience are improved.
Patent Information
- Application Number
- CN202421919081.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-09
- Publication Date
- 2025-05-13
- Estimated Expiration
- 2034-08-09
AI Technical Summary
The existing graphite disk accuracy testing device has a simple structure, which makes the graphite disk easily bumped with the bottom table surface when placed, affecting the measurement accuracy.
A silicon carbide-coated graphite disk performance testing device is designed, including base, round groove, electric push rod, push plate, cushion, baffle, groove, slide groove and collection box. Through the combination of electric push rods and push plates, the graphite disk can be placed and removed smoothly from the base. The design of the cushion and baffle avoids direct contact between the graphite disk and the base and debris scattering.
The device achieves smooth placement and removal of graphite disks through the combination of electric push rods and push plates, avoiding bumps and debris, and improving measurement accuracy and operational convenience.
Smart Images
Figure CN222865835U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of graphite disc detection, in particular to a performance testing device for a silicon carbide coated graphite disc. Background Art
[0002] Graphite disk is a graphite carrier disk used for LED epitaxial wafers, including several wafer grooves arranged above the carrier disk for placing epitaxial wafer substrates. A baffle structure is arranged on the inner edge of the wafer groove, and the baffle structure is complementary to the wafer substrate and has the characteristics of high temperature resistance, high strength, and thermal shock resistance. The silicon carbide coating can prevent the graphite disk from oxidation at a high temperature of 1600°C, thereby further improving its service life. There are usually a series of performance tests for graphite disks, and the graphite disk surface accuracy test is one of them. The graphite disk is usually placed on a support plate and then measured with a micrometer.
[0003] The existing graphite disk precision testing device has a simple structure. When in use, the graphite disk can be placed on the top of the base for measurement. However, the top surface of the base is flat. When placing the graphite disk, its bottom surface needs to fit with the top surface of the base. It is difficult to clamp the graphite disk with fingers, so the graphite disk is easy to bump against the surface of the base. Utility Model Content
[0004] The purpose of the present invention is to solve at least one of the above technical deficiencies.
[0005] The purpose of the utility model is to overcome the shortcomings of the prior art, solve the problems mentioned in the background technology, and provide a performance testing device for a silicon carbide coated graphite disk.
[0006] The purpose of the utility model is achieved through the following technical solutions: A silicon carbide coated graphite disk performance testing device, comprising a base, a circular groove is opened on the top of the base, a first electric push rod is fixedly connected to the inside of the circular groove, a push plate is fixedly connected to the output end of the first electric push rod, and a cushion layer is fixedly connected to the top of the push plate;
[0007] A baffle is fixedly connected to the edge of the top of the base, grooves are provided on the front and rear sides of the top of the base, a slide groove is provided on one side of the base close to the bottom of the groove, a collection box is slidably connected inside the slide groove, an inclined surface is provided at the edge of the top of the collection box, and a handle is fixedly connected to one side of the collection box.
[0008] Preferably, the left and right sides of the base are fixedly connected with a first linear module, the output end of the first linear module is fixedly connected with a vertical rod, the top of the vertical rod is fixedly connected with a second linear module, the output end of the second linear module is fixedly connected with a second electric push rod, and the output end of the second electric push rod is fixedly connected with a micrometer.
[0009] By adopting the above technical solution, the two first linear modules can adjust the front and rear positions of the dial indicator, the second linear module can adjust the left and right positions of the dial indicator, and the second electric push rod can adjust the upper and lower positions of the dial indicator. The above structure can facilitate the adjustment of the position of the dial indicator on the top of the base, and facilitate the detection of the graphite disk on the top of the base.
[0010] Preferably, the number of the circular grooves is three, and the three circular grooves in the circular array are opened at the center position of the top of the base. The material of the cushion layer is rubber, and the cushion layer is a circular plate. The cushion layer is bonded to the top of the push plate, and the size of the cushion layer is compatible with the size of the circular grooves.
[0011] By adopting the above technical solution, the rubber cushion layer can prevent the metal push plate from directly contacting the graphite disk, thereby achieving the purpose of protecting the graphite disk.
[0012] Preferably, the height of the baffle is five millimeters, the baffle is a square frame, and the height of the top surface of the baffle is greater than the height of the top surface of the base.
[0013] By adopting the above technical solution, the baffle plate can prevent the debris on the top surface of the base from scattering in all directions, making it convenient for the staff to clean the debris into the inside of the groove.
[0014] Preferably, the groove is a rectangular groove, the groove is connected to the slide slot, and the size of the collection box is matched with the size of the slide slot.
[0015] By adopting the above technical solution, the collection box can collect the graphite debris swept off the top of the base.
[0016] Preferably, three top edges of the collection box located in the groove are all provided with inclined surfaces, and handles are welded on the left and right sides of one side of the collection box.
[0017] By adopting the above technical solution, the collection box can be pulled out from the slide groove by holding the handle, so that the graphite debris inside the collection box can be easily cleaned.
[0018] Compared with the prior art, the utility model has the following advantages:
[0019] 1. The performance testing device for silicon carbide coated graphite disk is provided with a first electric push rod, the inside of the circular groove is fixedly connected with the first electric push rod, the output end of the first electric push rod is fixedly connected with a push plate, and the top of the push plate is fixedly connected with a cushion layer. When in use, the first electric push rod is started in a positive direction, and the first electric push rod pushes the push plate at the output end out of the circular groove, and then the staff can place the graphite disk on the top of the cushion layer to complete the initial placement of the graphite disk, and then the first electric push rod is started in a reverse direction until the push plate and the cushion layer completely enter the inside of the circular groove. When the cushion layer is completely separated from the graphite disk, the graphite disk can be stably placed on the top surface of the base. After the test is completed, the first electric push rod can be started in a positive direction to push the graphite disk away from the surface of the base through the push plate, so that the staff can take the graphite disk by hand, thereby achieving the purpose of facilitating the storage and retrieval of the graphite disk;
[0020] 2. The silicon carbide coated graphite disk performance testing device is provided with a baffle, and the baffle is fixedly connected to the edge of the top of the base. Grooves are provided on the front and rear sides of the top of the base, and a slide groove is provided on the side of the base close to the bottom of the groove. A collection box is slidably connected inside the slide groove. After the graphite disk is tested, graphite debris sometimes remains on the top surface of the base, and the graphite debris will affect the accuracy of the next graphite disk test. The staff can clean the graphite debris on the top surface of the base with a brush, and the graphite debris on the top surface of the base can be swept into the inside of the groove, and the graphite debris falls into the inside of the collection box. The collection box can be pulled out of the slide groove by holding the handle, so that the graphite debris inside is easy to clean. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 It is a schematic diagram of the structure of the utility model;
[0022] Figure 2 This is a schematic diagram of the internal structure of the base of the utility model;
[0023] Figure 3 This is a schematic diagram of the structure of the push plate of the utility model;
[0024] Figure 4 It is a structural schematic diagram of the collection box of the utility model.
[0025] In the figure: 1-base, 2-circular groove, 3-first electric push rod, 4-push plate, 5-pad, 6-baffle, 7-groove, 8-slide, 9-collection box, 10-inclined surface, 11-handle, 12-first linear module, 13-vertical rod, 14-second linear module, 15-second electric push rod, 16-micrometer. DETAILED DESCRIPTION
[0026] Additional aspects and advantages of the present invention will be further described below in conjunction with the accompanying drawings, and some will become apparent from the following description or be learned through practice of the present invention.
[0027] like Figure 1-3 As shown, a silicon carbide coated graphite disk performance testing device includes a base 1, a circular groove 2 is opened on the top of the base 1, a first electric push rod 3 is fixedly connected inside the circular groove 2, a push plate 4 is welded to the output end of the first electric push rod 3, and a cushion layer 5 is bonded to the top of the push plate 4.
[0028] Through the above arrangement, when in use, the first electric push rod 3 is started in the forward direction, and the first electric push rod 3 pushes the push plate 4 at the output end out of the circular groove 2, and then the staff can place the graphite disk on the top of the cushion layer 5 to complete the initial placement of the graphite disk, and then the first electric push rod 3 is started in the reverse direction until the push plate 4 and the cushion layer 5 completely enter the interior of the circular groove 2. When the cushion layer 5 is completely separated from the graphite disk, the graphite disk can be stably placed on the top surface of the base 1. After the inspection is completed, the first electric push rod 3 can be started in the forward direction to push the graphite disk away from the surface of the base 1 through the push plate 4, so that the staff can take the graphite disk by hand, thereby achieving the purpose of facilitating the storage and retrieval of the graphite disk;
[0029] like Figure 1 and Figure 4 As shown, baffles 6 are welded at the edges of the top of the base 1, grooves 7 are provided on both the front and rear sides of the top of the base 1, a slide groove 8 is provided on one side of the base 1 close to the bottom of the groove 7, a collection box 9 is slidably installed inside the slide groove 8, an inclined surface 10 is provided at the edge of the top of the collection box 9, and a handle 11 is welded on one side of the collection box 9;
[0030] Through the above arrangement, after the graphite disc is inspected, graphite debris may sometimes remain on the top surface of the base 1, which may affect the accuracy inspection of the next graphite disc. The staff can use a brush to clean the graphite debris on the top surface of the base 1, and the graphite debris on the top surface of the base 1 can be swept into the inside of the groove 7, and the graphite debris falls into the inside of the collection box 9. The collection box 9 can be pulled out of the chute 8 by holding the handle 11, so as to facilitate the cleaning of the graphite debris inside.
[0031] As a preferred technical solution of the utility model, the left and right sides of the base 1 are fixedly connected with a first linear module 12, the output end of the first linear module 12 is fixedly connected with a vertical rod 13, the top of the vertical rod 13 is fixedly connected with a second linear module 14, the output end of the second linear module 14 is fixedly connected with a second electric push rod 15, and the output end of the second electric push rod 15 is fixedly connected with a micrometer 16.
[0032] As a preferred technical solution of the utility model, the number of circular grooves 2 is three, and the three circular grooves 2 are opened in a circular array at the center position of the top of the base 1. The cushion layer 5 is made of rubber, and the cushion layer 5 is a circular plate. The cushion layer 5 is bonded to the top of the push plate 4, and the size of the cushion layer 5 is adapted to the size of the circular groove 2.
[0033] As a preferred technical solution of the utility model, the height of the baffle 6 is five millimeters, the baffle 6 is a square frame, and the height of the top surface of the baffle 6 is greater than the height of the top surface of the base 1.
[0034] As a preferred technical solution of the utility model, the groove 7 is a rectangular groove, the groove 7 is connected with the slide groove 8, and the size of the collection box 9 is adapted to the size of the slide groove 8.
[0035] As a preferred technical solution of the utility model, three top edges of the collection box 9 located in the groove 7 are provided with inclined surfaces 10, and handles 11 are welded on the left and right sides of one side of the collection box 9.
[0036] The working process of the utility model is as follows:
[0037] S1, start the first electric push rod 3 in the forward direction, the first electric push rod 3 pushes the push plate 4 at the output end out of the circular groove 2, and then the staff can place the graphite disk on the top of the cushion layer 5, completing the preliminary placement of the graphite disk;
[0038] S2, reversely start the first electric push rod 3 until the push plate 4 and the cushion layer 5 completely enter the interior of the circular groove 2, and when the cushion layer 5 is completely separated from the graphite disk, the graphite disk can be stably placed on the top surface of the base 1;
[0039] S3. After the detection is completed, the first electric push rod 3 can be started forward to push the graphite disk away from the surface of the base 1 through the push plate 4, so that the staff can take the graphite disk by hand;
[0040] S4. Sweep the graphite debris on the top surface of the base 1 into the groove 7. The graphite debris falls into the collecting box 9. The collecting box 9 can be pulled out of the chute 8 by holding the handle 11, so as to clean the graphite debris inside.
[0041] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A performance testing device for silicon carbide coated graphite disks, characterized in that: The invention comprises a base (1), a circular groove (2) is provided on the top of the base (1), a first electric push rod (3) is fixedly connected inside the circular groove (2), a push plate (4) is fixedly connected to the output end of the first electric push rod (3), and a cushion layer (5) is fixedly connected to the top of the push plate (4); The top edge of the base (1) is fixedly connected with a baffle (6), the front and rear sides of the top of the base (1) are provided with grooves (7), the side of the base (1) close to the bottom of the groove (7) is provided with a slide groove (8), the interior of the slide groove (8) is slidably connected with a collection box (9), the top edge of the collection box (9) is provided with an inclined surface (10), and one side of the collection box (9) is fixedly connected with a handle (11).
2. The silicon carbide coated graphite disk performance testing device according to claim 1, characterized in that: The left and right sides of the base (1) are both fixedly connected to a first linear module (12); the output end of the first linear module (12) is fixedly connected to a vertical rod (13); the top of the vertical rod (13) is fixedly connected to a second linear module (14); the output end of the second linear module (14) is fixedly connected to a second electric push rod (15); and the output end of the second electric push rod (15) is fixedly connected to a micrometer (16).
3. The silicon carbide coated graphite disk performance testing device according to claim 1, characterized in that: The number of the circular grooves (2) is three, and the three circular grooves (2) are arranged in a circular array at the center of the top of the base (1). The cushion layer (5) is made of rubber and is a circular plate. The cushion layer (5) is bonded to the top of the push plate (4), and the size of the cushion layer (5) is compatible with the size of the circular grooves (2).
4. The silicon carbide coated graphite disk performance testing device according to claim 1, characterized in that: The height of the baffle (6) is five millimeters. The baffle (6) is a square frame. The height of the top surface of the baffle (6) is greater than the height of the top surface of the base (1).
5. The silicon carbide coated graphite disk performance testing device according to claim 1, characterized in that: The groove (7) is a rectangular groove, the groove (7) is connected to the slide groove (8), and the size of the collection box (9) is compatible with the size of the slide groove (8).
6. The silicon carbide coated graphite disk performance testing device according to claim 1, characterized in that: The three top edges of the collection box (9) located in the groove (7) are all provided with inclined surfaces (10), and handles (11) are welded on the left and right sides of one side of the collection box (9).