Detection module

Abstract

The utility model discloses a detection module. The detection module comprises a detector and a refrigerator, the refrigerator comprises a cold plate and at least one first thermocouple, and the cold end of the first thermocouple is connected with the cold plate; the detector is attached to the first side face of the cold plate, the detector is provided with a plurality of outgoing line electrodes, the first side face is provided with a plurality of internal connection electrodes and a plurality of external connection electrodes, at least part of the outgoing line electrodes correspond to at least part of the internal connection electrodes in position and are in electric contact connection, and a plurality of connection lines are arranged in the cold plate. Each connecting line is connected between at least one internal electrode and at least one external electrode. According to the detection assembly provided by the utility model, an adapter plate structure is canceled, and extra thermal resistance caused by introduction of the adapter plate is avoided, so that the temperature difference between the cold surface of the refrigerator and the detector is reduced, the temperature uniformity of the detector is improved, the detection precision of the detection module is ensured, the overall structure thickness of the detection module is reduced, and the cost is reduced. And miniaturization design is facilitated.

Description

Technical Field

[0001] The utility model relates to the field of detection, and in particular to a detection module. Background Art

[0002] Lowering the temperature is one of the important ways to reduce the dark current of the detector and improve the performance of the device. A thermoelectric cooler (TEC) is often introduced into the detector packaging structure. However, due to the difference between the size of the thermoelectric cooler and the size of the detector, the part of the cooler that exceeds the detector often causes the wire bonding distance between the detector's output electrode (pad) and the pin connected to the outside of the shell to be too far, resulting in wire bonding difficulties and other problems.

[0003] To solve this problem, an adapter board is needed to indirectly connect the output electrode of the detector to the pin. However, the adapter board often leads to new problems such as uneven temperature of the detector and low packaging reliability.

[0004] Therefore, how to provide a detection module structure with a simple structure and capable of ensuring detection accuracy and reliability has become a technical problem that needs to be urgently solved in this field. Utility Model Content

[0005] The utility model provides a detection module which has a simple structure and can ensure detection accuracy and reliability.

[0006] To achieve the above object, as one aspect of the utility model, a detection module is provided, the detection module comprising a detector and a refrigerator;

[0007] The refrigerator comprises a cold plate and at least one first thermocouple, wherein a cold end of the first thermocouple is connected to the cold plate;

[0008] The detector is attached to the first side of the cold plate, and has a plurality of outgoing electrodes. The first side has a plurality of internal electrodes and a plurality of external electrodes. At least some of the outgoing electrodes correspond to and are electrically connected to at least some of the internal electrodes. The cold plate has a plurality of connecting wires inside, and each of the connecting wires is connected between at least one of the internal electrodes and at least one of the external electrodes.

[0009] Optionally, the cold plate includes a plurality of stacked layers, the connecting wires are distributed between adjacent stacked layers, and ends of the connecting wires are connected to corresponding internal electrodes or external electrodes via through holes penetrating the stacks in a thickness direction.

[0010] Optionally, the material of the cold plate includes aluminum nitride, aluminum oxide, sulfur nitride or sulfur oxide.

[0011] Optionally, projections of at least two of the connection lines on the first side surface of the cold plate intersect, and at least one layer of the laminate is spaced between the connection lines where the projections intersect.

[0012] Optionally, the material of the internal electrode includes copper (Cu).

[0013] Optionally, the material of the external electrode includes copper.

[0014] Optionally, the first side surface of the cold plate further has a metal layer, and the detector is attached to the metal layer.

[0015] Optionally, the detector is connected to the metal layer by welding.

[0016] Optionally, the metal layer is formed on the cold plate by an electroplating process or a chemical plating process.

[0017] Optionally, the detector is adhesively connected to the cold plate.

[0018] Optionally, the first side surface of the cold plate further has a plurality of alignment marks, and the plurality of alignment marks surround the metal layer.

[0019] Optionally, the projection of the detector on the cold plate is in a rectangular shape, the shape of the metal layer corresponds to the shape of the detector, and the first side of the cold plate also has four alignment marks, and the positions of the four alignment marks correspond one-to-one to the four corners of the detector.

[0020] Optionally, the outgoing electrode is connected to the internal electrode by wire bonding.

[0021] Optionally, the detection module further comprises a housing and a plurality of pins, and the detector and the refrigerator are both fixedly disposed in the housing;

[0022] The first ends of the plurality of plug pins are located outside the shell, the second ends of the plurality of plug pins pass through the shell, and the second ends of at least some of the plug pins are electrically connected to at least some of the external electrodes in a one-to-one correspondence.

[0023] Optionally, the external electrode is connected to the pin by wire bonding.

[0024] Optionally, the refrigerator further comprises at least one substrate, the substrate is spaced apart and arranged on a side of the cold plate away from the detector, and thermocouples are arranged between the substrate and the cold plate and between adjacent substrates.

[0025] Optionally, the shape and size of the base plate correspond to the shape and size of the cold plate.

[0026] Optionally, a plurality of first connecting electrodes are provided on the second side of the cold plate, a plurality of second connecting electrodes are provided on the substrate, the first thermocouple comprises a first conductive component and a second conductive component, and the doping polarity of the first conductive component is opposite to the doping polarity of the second conductive component;

[0027] The refrigerator includes a plurality of first thermocouples, which are connected in series. The positions of the plurality of first thermocouples correspond one-to-one to the positions of the plurality of first connecting electrodes. The first conductive component and the second conductive component of each first thermocouple are electrically connected to the corresponding first connecting electrode. Adjacent first thermocouples are electrically connected through the second connecting electrode, and the polarities of the two conductive components electrically connected to the same second connecting electrode are opposite.

[0028] Optionally, the material of the substrate includes at least one of aluminum nitride and aluminum oxide.

[0029] Optionally, the refrigerator includes a plurality of the substrates, and also includes at least one group of second thermocouples, the plurality of the second thermocouples are connected in series with the plurality of the first thermocouples, and the at least one group of second thermocouples is arranged between each two adjacent substrates in a one-to-one correspondence; the second thermocouple includes a third conductive component and a fourth conductive component, and the doping polarity of the third conductive component is opposite to the doping polarity of the fourth conductive component;

[0030] The positions of the plurality of second thermocouples correspond one-to-one to the positions of the plurality of second connecting electrodes on the substrate on the side of the group of second thermocouples facing the cold plate, and the first conductive component and the second conductive component of each first thermocouple are electrically connected to the corresponding second connecting electrode, adjacent second thermocouples are electrically connected through the second connecting electrode on the substrate on the side of the group of second thermocouples away from the cold plate, and the polarities of the two conductive components electrically connected to the same second connecting electrode are opposite.

[0031] Optionally, the first conductive component and the second conductive component are both made of bismuth telluride.

[0032] Optionally, the third conductive component and the fourth conductive component are both made of bismuth telluride.

[0033] Optionally, the substrate between the cold plate and the outermost substrate has a connecting via hole, and the thermocouples on both sides of the substrate are connected in series through the connecting via hole.

[0034] Optionally, the detection module also includes a pair of refrigeration power leads, one end of the two refrigeration power leads is located outside the shell, and the other end of the two refrigeration power leads is electrically connected to both ends of the series circuit of multiple first thermocouples and multiple second thermocouples respectively.

[0035] Optionally, the plurality of pins are distributed on two opposite sides of the refrigerator along the first direction, the plurality of internal electrodes are distributed on two opposite sides of the detector along the first direction, the plurality of external electrodes are distributed between the plurality of internal electrodes on each side and the pins on the corresponding side, and the plurality of internal electrodes are electrically connected to the plurality of pins on the corresponding side through the plurality of external electrodes on the corresponding side.

[0036] Optionally, the shell includes a tube shell and a cover plate, the cover plate seals the opening of the tube shell and is arranged opposite to the detector, the cover plate has a light window, and the detector is used to detect the environment outside the shell through the light window.

[0037] Optionally, the detection module further includes a getter, and the getter is arranged inside the shell.

[0038] Optionally, the getter comprises a heating wire and a getter material coated on the outside of the heating wire, and the heating wire is used to heat the getter material when powered on, so that the getter material reacts with the gas inside the shell.

[0039] Optionally, the detection module further includes a pair of air intake power leads, one end of the two air intake power leads is located outside the shell, and the other end of the two refrigeration air intake leads is electrically connected to the two ends of the heating wire respectively.

[0040] Optionally, the tube shell has an insulating ridge, the shell has a main accommodating chamber and a secondary accommodating chamber respectively located on both sides of the insulating ridge, the detector and the refrigerator are both arranged in the main accommodating chamber, the getter is arranged in the secondary accommodating chamber, and the main accommodating chamber and the secondary accommodating chamber are connected through the gap between the insulating ridge and the cover plate.

[0041] Optionally, the detection module further includes an evacuation tube, which passes through a side wall of the tube shell and communicates with the main accommodating cavity.

[0042] Optionally, the insulation ridge extends along the first direction, the main accommodating cavity and the auxiliary accommodating cavity are distributed along the second direction, and the refrigeration power lead and the air intake power lead respectively pass through two sides of the shell along the second direction.

[0043] Optionally, the shell has a plurality of jacks, and the plurality of pins pass through the plurality of jacks in a one-to-one correspondence. A jack seal is filled between the inner wall of the jack and the pins, and the jack seal seals the jack.

[0044] Optionally, the material of the socket seal includes ceramic.

[0045] Optionally, the tube shell has a pair of first wire outlet holes, and the refrigeration power leads pass through the two first wire outlet holes one by one. A first sealant is filled between the inner wall of the first wire outlet hole and the refrigeration power leads, and the first sealant seals the first wire outlet hole.

[0046] Optionally, the tube shell has a pair of second wire outlet holes, the air intake power leads pass through the two second wire outlet holes one by one, a second seal is filled between the inner wall of the second wire outlet hole and the refrigeration power lead, and the second seal seals the second wire outlet hole.

[0047] Optionally, the shell further includes fixing parts arranged in pairs, each pair of the fixing parts is fixedly connected to two opposite sides of the tube shell, and at least one fixing hole penetrating the fixing part along the thickness direction of the fixing part is formed on the fixing part.

[0048] As a second aspect of the utility model, a detection device is provided, including a detection module and a control module, wherein the detection module is the detection module described above, and the control module is used to supply power to the detector and the refrigerator of the detection module, and to control the detector to detect the environment to be tested and obtain the detection signal generated by the detector.

[0049] In the detection module provided by the utility model, the cold surface of the cold plate of the refrigerator is provided with a plurality of internal electrodes and a plurality of external electrodes, and the internal electrodes and the external electrodes are connected by connecting wires inside the cold plate, so that the transfer function of the transfer plate is integrated on the cold plate, and the cold plate is used for contacting with the detector and absorbing the heat of the detector, and for electrically connecting the output electrode of the detector with the plug pin, so as to realize the communication connection between the detector and the outside of the shell. The detection assembly provided by the utility model eliminates the transfer plate structure, avoids the additional thermal resistance caused by the introduction of the transfer plate, thereby reducing the temperature difference between the cold surface of the refrigerator and the detector, improving the temperature uniformity of the detector, ensuring the detection accuracy of the detection module, and reducing the overall structural thickness of the detection module at the same time, which is conducive to miniaturization design.

[0050] Furthermore, the connecting wires between the internal electrode and the external electrode are arranged inside the cold plate, so that when multiple outgoing electrodes are connected to an external circuit through the same line, multiple internal electrodes corresponding to the multiple outgoing electrodes can be connected to the same external electrode through the connecting wires inside the cold plate. Similarly, when the signal of a certain outgoing electrode needs to be connected to an external circuit through multiple lines, the internal electrode corresponding to the outgoing electrode can be connected to multiple external electrodes through the connecting wires inside the cold plate. The utility model can realize complex routing through the connecting wires inside the cold plate, avoids the formation of complex wiring relationships with lead-out structures such as probes through wiring, wiring, etc. through electrodes exposed to the outside, reduces the difficulty of making external circuits of the cold plate, and improves the manufacturing efficiency of the detection module.

[0051] In addition, the detection module provided by the utility model eliminates the adapter plate structure, and only needs to fix the fitting surfaces between the refrigerator and the detector, thereby reducing the connection process between the laminated components, reducing the process complexity and production difficulty, ensuring the packaging reliability of the detection module, and simplifying the overall structure of the detection module, and reducing the fitting contact between adjacent laminated materials with different thermal expansion coefficients, thereby reducing the risk of stress concentration problems between different layers of materials when the temperature changes, and ensuring the reliability of the detection module.

[0052] These features and advantages of the utility model will be disclosed in detail in the following specific embodiments and drawings. The best implementation or means of the utility model will be fully presented in conjunction with the drawings, but it is not a limitation of the technical solution of the utility model. In addition, these features, elements and components appearing in each of the following texts and drawings are multiple, and are marked with different symbols or numbers for convenience, but all represent components with the same or similar structure or function. BRIEF DESCRIPTION OF THE DRAWINGS

[0053] The utility model is further described below in conjunction with the accompanying drawings:

[0054] Figure 1 It is a structural schematic diagram of a detection module provided by an embodiment of the utility model;

[0055] Figure 2 It is a structural schematic diagram of a refrigerator in a detection module provided by an embodiment of the utility model;

[0056] Figure 3 It is a side view of a cold plate of a refrigerator in a detection module provided by an embodiment of the utility model;

[0057] Figure 4 This is a schematic structural diagram of the first side of the cold plate in an embodiment of the utility model;

[0058] Figure 5It is a structural schematic diagram of the second side surface of the cold plate in an embodiment of the utility model;

[0059] Figure 6 It is a schematic diagram of the structure inside the cold plate in the embodiment of the utility model.

[0060] Description of reference numerals:

[0061] 100: detector 200: refrigerator

[0062] 210: Cold Plate 201: Lamination

[0063] 211: Internal electrode 212: External electrode

[0064] 213: Metal layer 214: Alignment mark

[0065] 215: first connection electrode 216: connection line

[0066] 220: first thermocouple 221: first conductive device

[0067] 222: second conductive device 230: substrate

[0068] 231: second connection electrode 240: second thermocouple

[0069] 241: third conductive device 242: fourth conductive device

[0070] 250: Connection via 300: Shell

[0071] 310: Tube shell 320: Fixed part

[0072] 321: Fixing hole 330: Insulation ridge

[0073] 400: Pin 410: Socket seal

[0074] 420: Refrigeration power lead 421: First seal

[0075] 430: air suction power lead 431: second sealing member

[0076] 500: Getter 510: Heating wire

[0077] 520: Getter material 600: Evacuation tube DETAILED DESCRIPTION

[0078] The following is a detailed description of embodiments of the present invention, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments in the implementation manner are intended to be used to explain the present invention and should not be construed as limiting the present invention.

[0079] In the related art, an adapter plate is provided between the detector and the refrigerator, and the external electrode of the detector is electrically connected to the pin through the adapter plate. However, although this solution can avoid the quality problem of long-span wiring, the adapter plate is located between the detector and the cold surface of the refrigerator, which introduces additional thermal resistance, causing the temperature of the detector to rise and the temperature uniformity of the detector to deteriorate, thereby affecting the detection accuracy. In addition, the adapter plate itself has a certain height, which will increase the overall height of the packaging structure, which is not conducive to the miniaturization design of the product, and the adapter plate needs to be fixedly connected to the detector and the refrigerator respectively, which increases the complexity of the process and the difficulty of processing and production, and the reliability of the packaging is difficult to guarantee. In addition, the adapter plate, the detector and the refrigerator are in contact with each other, and the thermal expansion coefficients of different materials are different. When the temperature changes, stress will be caused between the different layers of materials, which increases the difficulty of designing the detection component.

[0080] In order to solve the above technical problems, as one aspect of the present invention, a detection module is provided, such as Figure 1 As shown, the detection module includes a detector 100 and a refrigerator 200;

[0081] The refrigerator 200 includes a cold plate 210 and at least one first thermocouple 220, wherein the cold end of the first thermocouple 220 is connected to the cold plate 210 so as to absorb heat from the cold plate 210 when powered on;

[0082] The detector 100 is attached to the first side surface (i.e., the cold surface) of the cold plate 210. The detector 100 has multiple outgoing electrodes, and the first side surface has multiple internal electrodes 211 and multiple external electrodes 212. At least some of the outgoing electrodes correspond to at least some of the internal electrodes 211 in position and are electrically connected. The cold plate 210 has multiple connecting wires inside, and each connecting wire is connected between at least one internal electrode 211 and at least one external electrode 212.

[0083] In the detection module provided by the utility model, the cold surface of the cold plate 210 of the refrigerator 200 is provided with a plurality of internal electrodes 211 and a plurality of external electrodes 212, and the internal electrodes 211 and the external electrodes 212 are connected by connecting wires inside the cold plate 210, so that the transfer function of the transfer plate is integrated on the cold plate 210, and the cold plate 210 is used to contact with the detector 100 and absorb the heat of the detector 100, and to lead the output electrode of the detector 100 to the external electrode 212 through the internal electrode 211 and the connecting wire, and then electrically connected with the lead-out structure such as the pin 400, so as to realize the communication connection between the detector 100 and the external device of the detection module. The detection assembly provided by the utility model eliminates the transfer plate structure, avoids the additional thermal resistance caused by the introduction of the transfer plate, thereby reducing the temperature difference between the cold surface of the refrigerator 200 and the detector 100, improving the temperature uniformity of the detector 100, ensuring the detection accuracy of the detection module, and reducing the overall structural thickness of the detection module, which is conducive to miniaturization design.

[0084] In addition, the connecting wires between the internal electrode 211 and the external electrode 212 are arranged inside the cold plate 210, so that when multiple outgoing electrodes are connected to an external circuit through the same line, the multiple internal electrodes 211 corresponding to the multiple outgoing electrodes can be connected to the same external electrode 212 through the connecting wires inside the cold plate 210. Similarly, when the signal of a certain outgoing electrode needs to be connected to an external circuit through multiple lines, the internal electrode 211 corresponding to the outgoing electrode can be connected to multiple external electrodes 212 through the connecting wires inside the cold plate 210. The utility model can realize complex routing through the connecting wires inside the cold plate 210, avoid forming a complex wiring relationship with the lead-out structure such as the probe through the electrodes exposed to the outside through wire bonding, wiring, etc., reduce the difficulty of making the external circuit of the cold plate 210, and improve the manufacturing efficiency of the detection module.

[0085] In addition, the detection module provided by the present invention eliminates the adapter plate structure, and only needs to fix the fitting surfaces between the refrigerator 200 and the detector 100, thereby reducing the connection process between the laminated components, reducing the process complexity and production difficulty, ensuring the packaging reliability of the detection module, and simplifying the overall structure of the detection module, and reducing the matching contact between adjacent laminated materials with different thermal expansion coefficients, thereby reducing the risk of stress concentration problems between different layers of materials when the temperature changes, and ensuring the reliability of the detection module.

[0086] It is understandable that the number of outgoing electrodes on the detector 100 does not necessarily correspond to the number of internal electrodes 211 on the cold plate 210. For example, the number of internal electrodes 211 on the cold plate 210 can be greater than the number of outgoing electrodes of the currently installed detector 100, and the remaining internal electrodes 211 can be used to be compatible with detectors 100 with other numbers of outgoing electrodes, so as to improve the compatibility of the detection module with detectors of different models.

[0087] Similarly, the number of outgoing electrodes of the detector 100 may be greater than the number of internal electrodes 211 on the cold plate 210, that is, some functions of the detector 100 do not need to be enabled in the current detection module, and the outgoing electrodes corresponding to the functions do not need to be led out. Alternatively, the cold plate 210 may not have internal electrodes 211 at the outgoing electrodes corresponding to some functions of the current detector 100, and internal electrodes 211 for compatibility with other models of detectors may be reserved at positions other than all the outgoing electrodes of the detector 100.

[0088] As an optional implementation of the present invention, the detector 100 may be a terahertz detector or an infrared detector.

[0089] As an optional implementation of the present invention, the outgoing electrode is connected to the internal electrode 211 by bonding, that is, a metal wire is formed between the outgoing electrode and the internal electrode 211 by welding to electrically connect the two (the bonding structure between the two is not shown in the figure).

[0090] As a preferred embodiment of the present invention, Figure 1 As shown, the detection module also includes a housing 300 and a plurality of pins 400, and the detector 100 and the refrigerator 200 are both fixedly disposed in the housing 300. The first ends of the plurality of pins 400 are located outside the housing 300, the second ends of the plurality of pins 400 pass through the housing 300, and the second ends of at least some of the pins 400 are electrically connected to at least some of the external electrodes 212 in a one-to-one correspondence.

[0091] In an embodiment of the utility model, the detector 100 and the refrigerator 200 are both fixedly disposed in the shell 300, so that the shell 300 is used to protect the detector 100, the refrigerator 200 and other structures, prevent them from being corroded by external water vapor, and extend the service life of the detection module. The first end of the pin 400 is located outside the shell 300, and is used for plugging and connecting with an external socket and other structures, so that the external electrode 212 of the refrigerator 200 is connected to the external communication through the pin 400.

[0092] As an optional embodiment of the present invention, the external electrode 212 is wire-connected to the plug pin 400, that is, a metal wire is formed between the external electrode 212 and the plug pin 400 by welding to electrically connect the two (the wiring structure between the two is not shown in the figure).

[0093] As an optional implementation of the present utility model, Figure 2 As shown, the refrigerator 200 further includes at least one substrate 230 . The substrate 230 is disposed at intervals on a side of the cold plate 210 away from the detector 100 . Thermocouples are disposed between the substrate 230 and the cold plate 210 and between adjacent substrates 230 .

[0094] As a preferred embodiment of the present invention, Figure 2 As shown, the shape and size of the substrate 230 correspond to the shape and size of the cold plate 210 , that is, the projection shape and size of the substrate 230 along the stacking direction correspond to those of the cold plate 210 .

[0095] In the embodiment of the utility model, the pin 400 is arranged perpendicular to the cold plate 210 and the substrate, and the distance between the pin 400 and the external electrode 212 on the cold plate 210 is determined by the size of the cold plate 210 and the largest layer of each substrate. For example, when there is a substrate whose size is larger than the cold plate 210, the larger the area of ​​the substrate, the farther the distance between the pin 400 arranged on the side of the refrigerator 200 and the cold plate, and the longer the wire length of the wire connection between the external electrode 212 and the pin 400. Therefore, in this preferred embodiment, the shape and size of each substrate correspond to the shape and size of the cold plate 210, so that the structure of the refrigerator 200 is a "cube" structure with equal width and length at the upper and lower levels, which shortens the wire length between the second end of each pin 400 and the corresponding external electrode 212, and improves the reliability of the detection module.

[0096] As an optional implementation of the present utility model, Figure 2 As shown, a plurality of first connection electrodes 215 are provided on the second side of the cold plate 210, a plurality of second connection electrodes 231 are provided on the substrate 230, and the first thermocouple 220 includes a first conductive component 221 and a second conductive component 222, and the doping polarity of the first conductive component 221 is opposite to the doping polarity of the second conductive component 222;

[0097] The refrigerator 200 includes a plurality of first thermocouples 220, which are connected in series. The positions of the plurality of first thermocouples 220 correspond one-to-one to the positions of the plurality of first connecting electrodes 215, and the first conductive component 221 and the second conductive component 222 of each first thermocouple 220 are electrically connected to the corresponding first connecting electrode 215. Adjacent first thermocouples 220 are electrically connected through the second connecting electrode 231, and the polarities of the two conductive components electrically connected to the same second connecting electrode 231 are opposite.

[0098] As an optional embodiment of the present invention, the material of the substrate 230 includes aluminum nitride (e.g., aluminum nitride (AlN)), aluminum oxide (e.g., aluminum oxide (Al2O3)), sulfur nitride (e.g., sulfur nitride (S4N4)) or sulfur oxide (e.g., sulfur dioxide (SO2)).

[0099] As an optional embodiment of the present invention, the refrigerator 200 may be a multi-stage TEC refrigerator, specifically, Figure 2As shown, the refrigerator 200 includes a plurality of substrates 230, and also includes at least one group of second thermocouples 240, the plurality of second thermocouples 240 are connected in series with the plurality of first thermocouples 220, and the at least one group of second thermocouples 240 is arranged one by one between each two adjacent substrates 230; the second thermocouple 240 includes a third conductive component 241 and a fourth conductive component 242, and the doping polarity of the third conductive component 241 is opposite to the doping polarity of the fourth conductive component 242;

[0100] The positions of the multiple second thermocouples 240 correspond one-to-one to the positions of the multiple second connecting electrodes 231 on the substrate 230 on the side of the group of second thermocouples 240 facing the cold plate 210, and the first conductive component 221 and the second conductive component 222 of each first thermocouple 220 are electrically connected to the corresponding second connecting electrode 231, and adjacent second thermocouples 240 are electrically connected through the second connecting electrode 231 on the substrate 230 on the side of the group of second thermocouples 240 away from the cold plate 210, and the polarities of the two conductive components electrically connected to the same second connecting electrode 231 are opposite.

[0101] As an optional embodiment of the present invention, the detection module also includes a pair of refrigeration power leads 420, one end of the two refrigeration power leads 420 is located outside the shell 300, and the other end of the two refrigeration power leads 420 is electrically connected to the two ends of the series circuit of multiple first thermocouples 220 and multiple second thermocouples 240 respectively.

[0102] In other embodiments of the present invention, the structure of the refrigerator 200 may also be a traditional “pagoda-shaped” structure, that is, the sizes of the plurality of base plates 230 gradually increase along the side away from the cold plate 210 .

[0103] The embodiment of the utility model does not specifically limit the number of stages of the refrigerator 200. For example, as an optional implementation of the utility model, Figure 2 As shown, the cooler 200 may include three substrates 230 , that is, the cooler 200 is a three-stage TEC cooler including three sets of thermocouples.

[0104] In other embodiments of the present invention, the refrigerator 200 may also include more than three groups of thermocouples.

[0105] As an optional implementation of the present invention, the material of the first conductive component 221 and the second conductive component 222 both include bismuth telluride (Bi2Te3).

[0106] As an optional implementation of the present invention, the third conductive component 241 and the fourth conductive component 242 are both made of bismuth telluride.

[0107] As an optional implementation of the present utility model, Figure 2 As shown, a connecting via 250 is provided on the substrate 230 between the cold plate 210 and the outermost substrate 230 , and the thermocouples on both sides of the substrate 230 are connected in series through the connecting via 250 .

[0108] As an optional implementation of the present utility model, Figure 6 As shown, the cold plate 210 includes a plurality of stacked layers 201 , connecting wires 216 are distributed between adjacent stacked layers 201 , and ends of the connecting wires 216 are connected to corresponding internal electrodes 211 or external electrodes 212 via through holes penetrating the stacked layers 201 in the thickness direction.

[0109] In an embodiment of the utility model, the cold plate 210 includes a plurality of stacked layers 201, and the connecting wires 216 can be pre-buried in the gaps between the stacked layers 201 in the process of sequentially manufacturing the stacked layers 201, so that the stacked layers 201 can be used to fix the connecting wires 216 to prevent short circuits between the connecting wires 216, block the external water vapor environment, avoid corrosion of the connecting wires 216, and improve the stability of the internal circuits of the cold plate 210.

[0110] As an optional embodiment of the present invention, the material of the cold plate 210 includes aluminum nitride (e.g., aluminum nitride (AlN)), aluminum oxide (e.g., aluminum oxide (Al2O3)), sulfur nitride (e.g., sulfur nitride (S4N4)) or sulfur oxide (e.g., sulfur dioxide (SO2)).

[0111] As an optional embodiment of the present invention, the projections of at least two connecting lines 216 on the first side surface of the cold plate 210 intersect, and there is at least one layer of laminate 201 between the projected intersecting connecting lines 216, that is, when there are two connecting lines 216 that cannot be avoided from crossing by wiring due to reasons such as a large number of overlaps in the connected electrodes, the two connecting lines 216 can be arranged in different laminate gaps with at least one layer of laminate 201 between them, thereby avoiding short circuits caused by mutual contact between the connecting lines 216, and ensuring the stability of the connection between the electrodes through the internal wiring of the cold plate 210.

[0112] As an optional implementation of the present invention, the material of the internal electrode 211 includes copper (Cu).

[0113] As an optional implementation of the present invention, the material of the external electrode 212 includes copper.

[0114] In order to further ensure the detection accuracy of the detection module, as a preferred implementation of the utility model, Figure 3 , Figure 4As shown, the first side of the cold plate 210 also has a metal layer 213, and the detector 100 is bonded to the metal layer 213, so as to utilize the good thermal conductivity of the metal to ensure the thermal conductivity efficiency between the detector 100 and the cold plate 210, ensure the cooling efficiency of the cooler on the detector 100, and further improve the sensitivity of the electronic components on the detector 100, thereby ensuring the detection accuracy of the detection module.

[0115] To further ensure the detection accuracy of the detection module, as a preferred embodiment of the present invention, the detector 100 is welded to the metal layer 213, thereby further ensuring a firm fit between the detector 100 and the first side of the cold plate 210 and ensuring the thermal conductivity between the two.

[0116] As an optional implementation of the present invention, the metal layer 213 is formed on the cold plate 210 by an electroplating process or a chemical plating process.

[0117] In other embodiments of the present invention, the detector 100 may also be fixedly connected to the cold plate 210 in other ways. For example, the detector 100 may be adhesively connected to the cold plate 210 .

[0118] As a preferred embodiment of the present invention, Figure 4 As shown, the first side of the cold plate 210 is also provided with a plurality of alignment marks 214, and the plurality of alignment marks 214 surround the metal layer 213, so that when the detector 100 is fixed on the cold plate 210, the outgoing electrode of the detector 100 can be quickly aligned with the internal electrode 211 on the cold plate 210 through the alignment mark 214, thereby ensuring the alignment accuracy between the electrodes and the efficiency of manufacturing the detection module.

[0119] As an optional embodiment of the present invention, the shape of the projection of the detector 100 on the cold plate 210 is a rectangle, and the shape of the metal layer 213 corresponds to the shape of the detector 100, such as Figure 4 As shown, four alignment marks 214 are further provided on the first side surface of the cold plate 210 , and the positions of the four alignment marks 214 correspond one-to-one to the four corners of the detector 100 .

[0120] As an optional implementation of the present utility model, Figure 1 As shown, a plurality of pins 400 are distributed on two opposite sides of the refrigerator 200 along the first direction, a plurality of internal electrodes 211 are distributed on two opposite sides of the detector 100 along the first direction (i.e., two opposite sides of the metal layer 213 along the first direction), a plurality of external electrodes 212 are distributed between the plurality of internal electrodes 211 on each side and the pins 400 on the corresponding side, and the plurality of internal electrodes 211 are electrically connected to the plurality of pins 400 on the corresponding side through the plurality of external electrodes 212 on the corresponding side.

[0121] As an optional implementation of the present utility model, Figure 1 As shown, the housing 300 includes a tube shell 310 and a cover plate (not shown in the figure), the cover plate seals the opening of the tube shell 310 and is arranged opposite to the detector 100, and the cover plate has a light window, and the detector 100 is used to detect the environment outside the housing 300 through the light window.

[0122] In order to further ensure the detection accuracy of the detection module, as a preferred implementation of the utility model, Figure 1 As shown, the detection module also includes a getter 500, which is arranged inside the shell 300. The getter 500 can react with the gas inside the shell 300 to absorb the gas, thereby avoiding convection of the airflow in the shell 300 and affecting the temperature uniformity of the detector 100, thereby ensuring the detection accuracy of the detector 100.

[0123] As an optional implementation of the present utility model, Figure 1 As shown, the getter 500 includes a heating wire 510 and a getter material 520 coated on the outside of the heating wire 510 . The heating wire 510 is used to heat the getter material 520 when powered on, so that the getter material 520 reacts with the gas inside the housing 300 .

[0124] As an optional implementation of the present utility model, Figure 1 As shown, the detection module also includes a pair of air intake power leads 430 , one end of the two air intake power leads 430 is located outside the shell 300 , and the other end of the two cooling air intake leads are electrically connected to the two ends of the heating wire 510 respectively.

[0125] As a preferred embodiment of the present invention, Figure 1 As shown, the tube shell 310 has an insulating ridge 330, and the shell 300 has a main accommodating chamber and an auxiliary accommodating chamber located on both sides of the insulating ridge 330 respectively. The detector 100 and the refrigerator 200 are both arranged in the main accommodating chamber, and the getter 500 is arranged in the auxiliary accommodating chamber. The main accommodating chamber and the auxiliary accommodating chamber are connected through the gap between the insulating ridge 330 and the cover plate.

[0126] In the embodiment of the utility model, the thermal insulation ridge 330 divides the internal space of the shell 300 into a main accommodating chamber and a secondary accommodating chamber, so that the detector 100 and the refrigerator 200 accommodated in the main accommodating chamber and the getter 500 arranged in the secondary accommodating chamber are separated on both sides of the thermal insulation ridge 330, so that the thermal radiation generated by the getter 500 when working is blocked by the thermal insulation ridge 330, thereby further ensuring the uniformity of the temperature of the detector 100 and further ensuring the detection accuracy of the detector 100.

[0127] As a preferred embodiment of the present invention, Figure 1As shown, the detection module also includes an evacuation tube 600, which passes through the side wall of the tube shell 310 and is connected to the main accommodating cavity. Therefore, when the accuracy of the detector 100 decreases, the gas inside the shell 300 can be extracted through the evacuation tube 600 to eliminate gas convection and further ensure the temperature uniformity of the detector 100.

[0128] As an optional implementation of the present utility model, Figure 1 As shown, the insulation ridge 330 extends along the first direction, the main accommodating cavity and the auxiliary accommodating cavity are distributed along the second direction, and the refrigeration power lead 420 and the air intake power lead 430 respectively pass through the two sides of the shell 300 along the second direction.

[0129] As an optional implementation of the present utility model, Figure 1 As shown, the housing 300 has a plurality of plug holes, and a plurality of plug pins 400 pass through the plurality of plug holes in a one-to-one correspondence. A plug hole seal 410 is filled between the inner wall of the plug hole and the plug pin 400, and the plug hole seal 410 seals the plug hole.

[0130] As an optional implementation of the present invention, the material of the socket seal 410 includes ceramics, and the socket seal 410 is fixed in the socket by sintering.

[0131] As an optional implementation of the present utility model, Figure 1 As shown, the tube shell 310 has a pair of first outlet holes, and the cooling power lead wires 420 pass through the two first outlet holes one by one. A first seal 421 is filled between the inner wall of the first outlet hole and the cooling power lead wire 420, and the first seal 421 seals the first outlet hole.

[0132] As an optional implementation manner of the present invention, the material of the first sealing member 421 includes ceramics, and the first sealing member 421 is fixed in the first outlet hole by sintering.

[0133] As an optional implementation of the present utility model, Figure 1 As shown, the tube shell 310 has a pair of second outlet holes, and the air intake power lead 430 passes through the two second outlet holes one by one. A second seal 431 is filled between the inner wall of the second outlet hole and the refrigeration power lead 420, and the second seal 431 seals the second outlet hole.

[0134] As an optional implementation of the present invention, the material of the second sealing member 431 includes ceramics, and the second sealing member 431 is fixed in the second wire outlet hole by sintering.

[0135] As an optional implementation of the present utility model, Figure 1As shown, the shell 300 also includes a pair of fixing parts 320, each pair of fixing parts 320 is fixedly connected to the opposite sides of the tube shell 310, and at least one fixing hole 321 is formed on the fixing part 320 and penetrates the fixing part 320 along the thickness direction of the fixing part 320, so that the shell 300 can be fixedly connected with other structures such as a power supply module and a control module by fasteners (such as screws and bolts) passing through the fixing holes 321, thereby improving the convenience of equipping the detection module.

[0136] As a second aspect of the present invention, a detection device is provided, including a detection module and a control module. The detection module is the detection module provided in the embodiment of the present invention. The control module is used to supply power to the detector 100 and the refrigerator 200 of the detection module, and to control the detector 100 to detect the environment to be tested and obtain the detection signal generated by the detector 100.

[0137] In the detection device provided by the utility model, the cold surface of the cold plate 210 of the refrigerator 200 in the detection module is provided with a plurality of internal electrodes 211 and a plurality of external electrodes 212, and the internal electrodes 211 and the external electrodes 212 are connected through the connecting wires inside the cold plate 210, so that the transfer function of the transfer plate is integrated on the cold plate 210, and the cold plate 210 is used to contact with the detector 100 and absorb the heat of the detector 100, and to lead the output electrode of the detector 100 to the external electrode 212 through the internal electrode 211 and the connecting wire, and then electrically connected with the lead-out structure such as the pin 400, so as to realize the communication connection between the detector 100 and the external control module. The detection assembly provided by the utility model cancels the transfer plate structure, avoids the additional thermal resistance brought by the introduction of the transfer plate, thereby reducing the temperature difference between the cold surface of the refrigerator 200 and the detector 100, improving the detector 100, ensuring the detection accuracy of the detection module, and reducing the overall structural thickness of the detection module, which is conducive to miniaturization design.

[0138] In addition, the connecting wires between the internal electrode 211 and the external electrode 212 are arranged inside the cold plate 210, so that when multiple outgoing electrodes are connected to an external circuit through the same line, the multiple internal electrodes 211 corresponding to the multiple outgoing electrodes can be connected to the same external electrode 212 through the connecting wires inside the cold plate 210. Similarly, when the signal of a certain outgoing electrode needs to be connected to an external circuit through multiple lines, the internal electrode 211 corresponding to the outgoing electrode can be connected to multiple external electrodes 212 through the connecting wires inside the cold plate 210. The utility model can realize complex routing through the connecting wires inside the cold plate 210, avoid forming a complex wiring relationship with the lead-out structure such as the probe through the electrodes exposed to the outside through wire bonding, wiring, etc., reduce the difficulty of making the external circuit of the cold plate 210, and improve the manufacturing efficiency of the detection module.

[0139] In addition, the detection module provided by the present invention eliminates the adapter plate structure, and only needs to fix the fitting surfaces between the refrigerator 200 and the detector 100, thereby reducing the connection process between the laminated components, reducing the process complexity and production difficulty, ensuring the packaging reliability of the detection module, and simplifying the overall structure of the detection module, and reducing the matching contact between adjacent laminated materials with different thermal expansion coefficients, thereby reducing the risk of stress concentration problems between different layers of materials when the temperature changes, and ensuring the reliability of the detection module.

[0140] The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that the present invention includes but is not limited to the contents described in the drawings and the above specific embodiments. Any modification that does not deviate from the functional and structural principles of the present invention shall be included in the scope of the claims.

Claims

1. A detection module, characterized in that: The detection module includes a detector and a refrigerator; The refrigerator comprises a cold plate and at least one first thermocouple, wherein a cold end of the first thermocouple is connected to the cold plate; The detector is attached to the first side of the cold plate, and has a plurality of outgoing electrodes. The first side has a plurality of internal electrodes and a plurality of external electrodes. At least some of the outgoing electrodes correspond to and are electrically connected to at least some of the internal electrodes. The cold plate has a plurality of connecting wires inside, and each of the connecting wires is connected between at least one of the internal electrodes and at least one of the external electrodes.

2. The detection module according to claim 1, characterized in that: The cold plate includes a plurality of stacked layers, the connecting wires are distributed between adjacent stacked layers, and ends of the connecting wires are connected to corresponding internal electrodes or external electrodes through through holes penetrating the stacks in a thickness direction.

3. The detection module according to claim 2, characterized in that: Projections of at least two of the connection lines on the first side surface of the cold plate intersect, and at least one layer of the laminate is spaced between the connection lines where the projections intersect.

4. The detection module according to claim 1, characterized in that: The first side surface of the cold plate also has a metal layer, and the detector is attached to the metal layer.

5. The detection module according to claim 4, characterized in that: The detector is connected to the metal layer by welding.

6. The detection module according to any one of claims 1 to 5, characterized in that: The outgoing electrode is connected to the internal electrode by wire bonding.

7. The detection module according to any one of claims 1 to 5, characterized in that: The detection module also includes a housing and a plurality of pins, and the detector and the refrigerator are both fixedly arranged in the housing; The first ends of the plurality of plug pins are located outside the shell, the second ends of the plurality of plug pins pass through the shell, and the second ends of at least some of the plug pins are electrically connected to at least some of the external electrodes in a one-to-one correspondence.

8. The detection module according to claim 7, characterized in that: The external electrode is connected to the pin by wire bonding.

9. The detection module according to claim 8, characterized in that: The refrigerator further comprises at least one substrate, which is spaced apart on a side of the cold plate away from the detector, and thermocouples are arranged between the substrate and the cold plate and between adjacent substrates; the shape and size of the substrate correspond to those of the cold plate.

10. The detection module according to claim 7, characterized in that: The plurality of pins are distributed on two opposite sides of the refrigerator along the first direction, the plurality of internal electrodes are distributed on two opposite sides of the detector along the first direction, and the plurality of external electrodes are distributed between the plurality of internal electrodes on each side and the pins on the corresponding side, and the plurality of internal electrodes are electrically connected to the plurality of pins on the corresponding side through the plurality of external electrodes on the corresponding side.

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