Coupling auxiliary device and coupling system
By introducing a fiber positioner into the coupling auxiliary device of the optical fiber and grating coupler, the problem of difficulty in alignment between the optical fiber and grating coupler in a high-integration chip is solved, and fast positioning and efficient testing are achieved.
Patent Information
- Application Number
- CN202421578330.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-04
- Publication Date
- 2025-05-13
- Estimated Expiration
- 2034-07-04
AI Technical Summary
As the integration of electronic chips increases, the size of the grating coupler decreases, making alignment between the optical fiber and the grating coupler more difficult, and takes more time.
A coupling auxiliary device is designed, including a cover plate, an optical fiber array and an optical fiber positioner. The fiber positioner helps the fiber and grating coupler to achieve rapid positioning by being arranged on the cover plate.
Through the use of fiber positioners, the alignment time between the fiber and the grating coupler is significantly reduced, and the testing efficiency is improved.
Smart Images

Figure CN222866908U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of optoelectronic integrated chip and wafer testing, and in particular to a coupling auxiliary device. Background Art
[0002] In the on-wafer testing of optoelectronic integrated chips and wafers, most of the testing is done through grating couplers coupled to external optical fibers. As the integration of chips increases, the number of coupling ports increases exponentially, and more highly integrated optical fiber probe arrays begin to replace single optical fiber probe testing.
[0003] Moreover, as the integration of electronic chips becomes higher and higher, the size of grating couplers becomes smaller and smaller. In the process of coupling optical fiber and grating coupler, it is more difficult to achieve the alignment of optical fiber and grating coupler, which takes more time. Summary of the invention
[0004] The present application provides a coupling auxiliary device and a coupling system, which can solve the technical problem in the related art that as the integration of electronic chips becomes higher and higher, the size of grating couplers becomes smaller and smaller, and in the process of coupling using optical fiber and grating coupler, it is more difficult to achieve the alignment of optical fiber and grating coupler, which takes a long time.
[0005] In a first aspect, an embodiment of the present application provides a coupling assist device, which includes: a cover plate; an optical fiber array, wherein the optical fiber array is fixed to the cover plate, and an optical fiber positioner is installed on the cover plate corresponding to each optical fiber in the optical fiber array.
[0006] In combination with the first aspect, in one implementation, a lens is disposed at one end of each of the optical fibers.
[0007] In combination with the first aspect, in one implementation, the lens is configured to be hemispherical, the hemispherical lens has a first plane, and the lens is connected to the optical fiber through the first plane.
[0008] In combination with the first aspect, in one implementation, the lens is formed on one end of the optical fiber by 3D printing.
[0009] In combination with the first aspect, in one implementation, the optical fiber includes a core and a cladding covering a circumference of the core; and the lens is detachably connected to the cladding.
[0010] In combination with the first aspect, in one embodiment, the optical fiber positioner has a second plane, and the second plane is perpendicular to the axis of the optical fiber.
[0011] In combination with the first aspect, in one implementation, the optical fiber positioner is configured as a semi-cylinder or a triangle.
[0012] In combination with the first aspect, in one implementation, a diameter of the optical fiber positioner is the same as a diameter of the optical fiber.
[0013] In combination with the first aspect, in one embodiment, the optical fiber is installed on the bottom surface of the cover plate, the optical fiber positioner is installed on the side surface of the cover plate, and the extension direction of the optical fiber positioner is perpendicular to the axis of the optical fiber.
[0014] In a second aspect, an embodiment of the present application provides a coupling system, which includes the coupling auxiliary device in any of the above-mentioned embodiments; a chip, wherein the chip is provided with a plurality of grating couplers, and each of the grating couplers is respectively arranged corresponding to one of the optical fibers.
[0015] The beneficial effects brought by the technical solution provided in the embodiments of the present application include:
[0016] By setting up a fiber optic positioner, the fiber optic positioner can be used to position the fiber optic and the grating coupler as quickly as possible when coupling the fiber optic and the grating coupler, thereby solving the problem in the related art that the alignment of the fiber optic and the grating coupler is more difficult and takes more time. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.
[0018] Figure 1 A schematic diagram of the three-dimensional structure of a coupling system provided in an embodiment of the present application;
[0019] Figure 2 A schematic diagram of the side structure of the coupling system provided in an embodiment of the present application;
[0020] Figure 3 A schematic diagram of a top view of the coupling system provided in an embodiment of the present application;
[0021] Figure 4 It is a structural schematic diagram of directly projecting a pattern spot with an optical fiber in the related art;
[0022] Figure 5 Schematic diagram of the structure of the optical fiber projecting the pattern spot through the lens in the embodiment of the present application.
[0023] In the figure:
[0024] 1. Cover plate;
[0025] 2. Fiber array; 21. Fiber; 211. Mode spot;
[0026] 3. Fiber locator; 31. Second plane;
[0027] 4. lens; 41. first plane;
[0028] 5. Chip;
[0029] 6. Grating coupler. DETAILED DESCRIPTION
[0030] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0031] The embodiment of the present application provides a coupling auxiliary device, which can solve the technical problem in the related art that as the integration of electronic chips becomes higher and higher, the size of grating couplers becomes smaller and smaller, and in the process of coupling using optical fiber and grating coupler, it is more difficult to achieve the alignment of optical fiber and grating coupler, which requires a lot of time.
[0032] See also Figure 1 As shown, a coupling auxiliary device provided in an embodiment of the present application may include: a cover plate 1; an optical fiber array 2, wherein the optical fiber array 2 is fixed to the cover plate 1, and the cover plate 1 is equipped with an optical fiber locator 3 corresponding to each optical fiber 21 in the optical fiber array 2, that is, the optical fiber array 2 may include a plurality of optical fibers 21, and each optical fiber 21 may be equipped with a corresponding optical fiber locator 3, so that each optical fiber 21 can be quickly positioned by the optical fiber locator 3 before being coupled with the grating coupler 6.
[0033] The embodiment of the present application sets the fiber positioner 3, so that when coupling the optical fiber 21 with the grating coupler 6, the optical fiber positioner 3 can be used to position the optical fiber 21 with the grating coupler 6 as quickly as possible. When it is necessary to couple the optical fiber 21 with the grating coupler 6, refer to Figure 3As shown, since the orthographic projection of the cover plate 1 may block the orthographic projection of the end of the optical fiber 21, it is difficult to determine the position of each optical fiber 21. By setting the optical fiber locator 3, the orthographic projection of the optical fiber locator 3 can be projected to a position outside the orthographic projection of the cover plate 1. At this time, the position of the optical fiber 21 in a direction can be determined by the orthographic projection of the optical fiber locator 3 to achieve rapid positioning, which solves the problem that in the process of coupling the optical fiber 21 with the grating coupler 6 in the related technology, it is more difficult to align the optical fiber 21 with the grating coupler 6, and it takes more time.
[0034] In some optional embodiments, see Figure 5 As shown, a lens 4 is disposed at one end of each optical fiber 21. In the related art, as the integration of optoelectronic chips 5 becomes higher and higher, the size of grating couplers 6 becomes smaller and smaller. Figure 4 As shown in FIG. 1 , it is a schematic diagram of the structure of the optical fiber directly projecting the mode spot in the related art. When the lens 4 is not installed at one end of the optical fiber 21, the size of its mode spot 211 is relatively large. In addition to being projected at the grating coupler 6, the mode spot 211 is also projected outside the grating coupler, causing the light signal to diffuse in the air. Therefore, in the embodiment of the present application, a lens 4 is set at one end of the optical fiber 21 to reduce the size of the mode spot 211, so that the size of the mode spot 211 of the optical fiber 21 corresponds to the size of the coupling of the grating coupler 6 as much as possible, thereby increasing the light coupling efficiency. That is, the lens 4 in the embodiment of the present application can reduce the mode field of the optical fiber 21.
[0035] Preferably, the lens 4 is configured to be hemispherical, and the hemispherical lens 4 has a first plane 41. The lens 4 is connected to the optical fiber 21 via the first plane 41. In order to enable the mode spot 211 of the optical fiber 21 to be focused into a smaller mode spot 211 by the lens 4, in the embodiment of the present application, the side of the lens 4 close to the optical fiber 21 is configured to be a plane so that the first plane 41 can be convenient for focusing of the microscope, and the hemispherical lens 4 can enable the mode spot 211 of the optical fiber 21 to be vertically emitted and coupled with the grating coupler 6 on the chip 5. In some other embodiments, the lens 4 can also be configured to other shapes that are convenient for focusing, such as a cone.
[0036] In some optional embodiments, the lens 4 is formed at one end of the optical fiber 21 by 3D printing, that is, the lens 4 can be generated by 3D printing technology. During the printing process, the core of the optical fiber 21 can be used as the printing basis, so that the lens 4 can be directly formed at the core of the optical fiber 21. When designing the printing, attention should be paid to the printing of the first plane 41, so that the pattern spot 211 emitted by the optical fiber 21 can be vertically emitted and coupled with the grating coupler 6 on the chip 5 after being focused by the lens 4. Using 3D printing technology to directly generate the lens 4 can make the lens 4 more accurate in molding and can generate the lens 4 faster.
[0037] In some optional embodiments, the optical fiber 21 includes a core and a cladding coated on the peripheral side of the core; the lens 4 is detachably connected to the cladding, that is, the lens 4 can be detachably connected to the optical fiber 21, or can be directly fixed on the optical fiber 21, and the fixing method can adopt the method of directly generating the lens 4 near the core of the optical fiber 21 by the 3D printing technology in the above embodiment; in this embodiment, the lens 4 is detachably connected to the cladding by snapping, and the peripheral side of the lens 4 can be provided with a coating snap-in layer, which is arranged on the periphery of the lens 4, and the coating snap-in layer is adjacent to the first plane. 41 together form a cylindrical snap-in groove, the optical fiber 21 extends into the snap-in groove, and the coating snap-in layer is sleeved on the periphery of the cladding. It should be understood that the coating snap-in layer on the periphery of the lens 4 will not affect the docking of the core of the optical fiber 21 with the first plane 41. In some other embodiments, the lens 4 and the optical fiber 21 can be detachably connected in a manner such as by setting a thread. Setting the lens 4 and the optical fiber 21 as a detachable connection can facilitate the optical fiber 21 to be sleeved with lenses 4 of different sizes and shapes as needed, so that the optical fiber 21 can form pattern spots 211 of different sizes, so as to couple with grating couplers 6 of different sizes as adaptably as possible.
[0038] In some optional embodiments, the fiber locator 3 has a second plane 31, and the second plane 31 is perpendicular to the axis of the optical fiber 21. It should be understood that the second plane 31 of the fiber locator 3 can facilitate focusing of the microscope, and the second plane 31 is arranged on a side of the fiber locator 3 away from the optical fiber 21, see Figure 1 As shown, in the embodiment of the present application, the fiber locator 3 can facilitate the positioning of the optical fiber 21 on the chip 5 and the grating coupler 6 in the Y direction. The positioning is away from the projection of the fiber locator 3 on the chip 5. Each fiber locator 3 is arranged one by one in the Y direction. Therefore, the position of the optical fiber 21 corresponding to the fiber locator 3 in the Y direction can be determined by the positive projection of each fiber locator 3 on the chip 5. When the optical fiber 21 needs to be matched with the grating coupler 6 position later, it is only necessary to match the position in the X direction.
[0039] In some optional embodiments, the fiber locator 3 is configured as a semi-cylinder or a triangle. In the embodiments of the present application, the optical fiber locator 3 is positioned in one direction by means of an orthographic projection of the optical fiber locator 3 on the chip 5. Therefore, the optical fiber locator 3 can be configured in a variety of shapes. Preferably, the optical fiber locators 3 fixed on a cover plate 1 are all of the same shape. Regardless of whether the optical fiber locator 3 is configured in a semi-cylinder, a triangle or other shapes, it should be ensured that the second plane 31 thereon can facilitate the focusing of the microscope.
[0040] In some optional embodiments, see Figure 2As shown, the diameter of the fiber locator 3 is the same as the diameter of the optical fiber 21, that is, the length of the fiber locator 3 along the Y direction is the same as the diameter of the optical fiber 21. Setting the length of the fiber locator 3 along the Y direction to be the same as the diameter of the optical fiber 21 can make the length of the orthographic projection of the fiber locator 3 along the Y direction the same as the diameter of the optical fiber 21, so that the position of the optical fiber 21 can be intuitively seen by using the orthographic projection of the fiber locator 3. In some other embodiments, the diameter of the fiber locator 3 can also be shorter than the diameter of the optical fiber 21, but it should be noted that the center line of the orthographic projection of the fiber locator 3 in the Y direction should correspond to the center line of the fiber locator 3 in the Y direction to ensure the accuracy of positioning as much as possible. In the embodiment of the present application, the fiber locator 3 can also be generated by 3D printing technology, and the lens 4 and the fiber locator 3 can be printed synchronously. When printing the lens 4 and the fiber locator 3, the position to be printed on the cover plate 1 can be aligned with the 3D printer, and the pre-designed modeling of the two can be input into the printer for slicing.
[0041] In some optional embodiments, the optical fiber 21 is installed on the bottom surface of the cover plate 1, the optical fiber positioner 3 is installed on the side of the cover plate 1, and the extension direction of the optical fiber positioner 3 is perpendicular to the axis of the optical fiber 21, that is, the optical fiber positioner 3 and the lens 4 are arranged on the adjacent two sides of the cover plate 1, and the optical fiber positioner 3 can be used to more intuitively realize the positioning of the optical fiber 21. It should be understood that since the positioning of the optical fiber 21 in the X direction by the optical fiber positioner 3 is realized by using the orthographic projection of the optical fiber positioner 3 on the chip 5, the height of the optical fiber positioner 3 in the Z direction can be different, but preferably, the optical fiber positioner 3 is arranged at the same height of the cover plate 1 in the Z direction.
[0042] The embodiment of the present application also provides a coupling system, which may include a coupling auxiliary device as in any of the above embodiments; a chip 5, wherein the chip 5 is provided with a plurality of grating couplers 6, each of which is respectively provided corresponding to one of the optical fibers 21. In the embodiment of the present application, the grating structure of the grating coupler 6 may be a Bragg grating, a focusing grating, a phase grating, a blazed grating, a sub-wavelength grating, a chirped grating, a photonic crystal grating, etc.; its material may be silicon, III-V group, silicon nitride, polycrystalline silicon, silicon dioxide, polymer, etc. In addition, the optical fiber 21 may be a single-mode optical fiber 21, a multi-mode optical fiber 21, a multi-core optical fiber 21, etc.; and the type of the optical fiber 21 may be a non-coated optical fiber 21 or a coated optical fiber 21.
[0043] In some optional embodiments, with the rapid development of high-speed VCSELs, the demand for their packaging and testing is increasing. In the embodiments of the present application, a coupling auxiliary device can be coupled with multiple high-speed VCSELs at the same time to increase the coupling efficiency.
[0044] In some optional embodiments, after the optical fiber 21 is fixed to the bottom surface of the cover plate 1, preferably, each optical fiber 21 is arranged perpendicular to the bottom surface of the cover plate 1. However, when some optical fibers 21 are just installed on the bottom surface of the cover plate 1, there may be an inclination angle with the bottom surface. In order to make each optical fiber 21 perpendicular to the bottom surface of the cover plate 1, the optical fiber 21 can be calibrated at this time. When the optical fiber array 2 is calibrated, since the projection of the cover plate 1 will block the projection of the tip of the optical fiber 21, it is difficult to determine whether each optical fiber 21 is offset. In the embodiment of the present application, a hexagonal prism is used to calibrate the optical fiber 21. Two hexagonal prisms are placed on adjacent sides of the cover plate 1, and the side surfaces of the cover plate 1 are spaced apart from the hexagonal prisms. The hexagonal prisms are used to adjust the offset of the optical fiber 21 in the X direction and the Y direction, respectively, so that each optical fiber 21 in the final optical fiber array 2 is perpendicular to the bottom surface of the cover plate 1.
[0045] In the description of the present application, it should be noted that the terms "upper", "lower", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.
[0046] It should be noted that, in this application, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.
[0047] The above description is only a specific implementation of the present application, so that those skilled in the art can understand or implement the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest range consistent with the principles and novel features applied for herein.
Claims
1. A coupling auxiliary device, characterized in that: It includes: Cover plate (1); An optical fiber array (2), the optical fiber array (2) being fixed to the cover plate (1), and the cover plate (1) being equipped with an optical fiber positioner (3) corresponding to each optical fiber (21) in the optical fiber array (2); The optical fiber (21) is installed on the bottom surface of the cover plate (1), the optical fiber positioner (3) is installed on the side surface of the cover plate (1), and the extension direction of the optical fiber positioner (3) is perpendicular to the axis of the optical fiber (21).
2. The coupling assisting device according to claim 1, characterized in that: A lens (4) is provided at one end of each optical fiber (21).
3. The coupling assisting device according to claim 2, characterized in that: The lens (4) is configured to be hemispherical, the hemispherical lens (4) having a first plane (41), and the lens (4) is connected to the optical fiber (21) via the first plane (41).
4. The coupling assisting device according to claim 2, characterized in that: The lens (4) is formed at one end of the optical fiber (21) by means of 3D printing.
5. The coupling assisting device according to claim 2, characterized in that: The optical fiber (21) comprises a core and a cladding covering the circumference of the core; The lens (4) is detachably connected to the cladding.
6. The coupling assisting device according to claim 1, characterized in that: The optical fiber positioner (3) has a second plane (31), and the second plane (31) is perpendicular to the axis of the optical fiber (21).
7. The coupling assisting device according to claim 1, characterized in that: The optical fiber positioner (3) is configured as a semi-cylinder or a triangle.
8. The coupling assisting device according to claim 1, characterized in that: The diameter of the optical fiber positioner (3) is the same as the diameter of the optical fiber (21).
9. A coupling system, characterized in that: It comprises a coupling auxiliary device as claimed in any one of claims 1 to 8; A chip (5), wherein the chip (5) is provided with a plurality of grating couplers (6), and each of the grating couplers (6) is respectively arranged corresponding to one of the optical fibers (21).