Lead bonding vacuum suction mounting positioning clamp

Abstract

The utility model discloses a lead bonding vacuum suction mounting positioning clamp which comprises a base, a placing plate, a pressing plate, a pressing piece and a locking piece. The placing plate is fixed on the base, and a vacuum suction groove is formed in the placing plate; the pressing plate covers the placing plate to separate the vacuum suction grooves, and the pressing plate is fixed to the placing plate through a pressing piece and a locking piece, and the pressing position and the pressing force of the pressing piece can be adjusted. According to the utility model, a plurality of single-point pressing windows are formed through the improved pressing plate, so that when the pressing plate is pressed on the heating block and the lead frame, each pressing window is correspondingly pressed on the chip lead welding area around one chip, and the pin of each chip can be ensured to be fixed by the bottom pressing opening of the pressing window; the floating of the pins is avoided, enough bonding wire space is reserved for lead bonding, and the bonding quality and the product yield of the lead bonding process are effectively improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor packaging, in particular to a wire bonding vacuum suction positioning fixture. Background Art

[0002] Intelligent Power Module (IPM) is often used in integrated drive circuits, protection circuits and detection circuits. The lead frame is mainly designed with high density, including a lead frame and multiple columns of small chips arranged in a matrix.

[0003] The wire bonding process of the lead frame is mainly carried out through the pressing step of the tooling fixture. The tooling fixture includes a pressing plate. The pressing plate is set to cover the large-area window of multiple rows of chips. By placing the lead frame and chip clamps in the pressing plate and vacuum slots, multiple rows of semiconductor products can be pressed at one time to complete the lead bonding.

[0004] Wire bonding is one of the most important packaging processes used in power modules. Some existing workpiece fixtures clamp the module with a clamping claw or fix the module with a locking screw, and excessive clamping force or extrusion force on the module will damage the workpiece surface; the positioning of the wire bonding fixture will also be inaccurate, resulting in wire bonding errors, resulting in poor bonding quality and product yield of the wire bonding process; at the same time, this type of clamping method is relatively cumbersome, and it takes a long time to take and place the module, reducing processing efficiency. Utility Model Content

[0005] The utility model aims to provide a wire bonding vacuum suction positioning fixture which can improve the bonding quality and product yield of the wire bonding process.

[0006] The wire bonding vacuum suction positioning fixture provided by the utility model comprises a base, a placing plate, a pressing plate, a pressing piece and a locking piece; the placing plate is fixed on the base, and a vacuum suction groove is opened on the placing plate; the pressing plate covers the placing plate to separate the vacuum suction grooves, and the pressing plate is fixed to the placing plate by a pressing piece and a locking piece with adjustable pressing position and pressing force.

[0007] In one embodiment of the above-mentioned clamp, the upper surface of the base has five approximately rectangular and upwardly open built-in cavities equidistantly along the length direction, and a downward connecting duct is opened in the center of each built-in cavity. The connecting ducts are connected to each other and to an external vacuum generator.

[0008] In one embodiment of the above-mentioned clamp, the upper surface of the placement plate is provided with five vacuum suction grooves arranged equidistantly along the length direction; a circle of rubber is fixed to the port of the vacuum suction groove; opposite connecting holes are respectively provided on the inner wall of the vacuum suction groove along the length direction, and the connecting holes are in a horizontal J shape, and the ports of the two connecting holes are located in the middle of the inner side wall of the vacuum suction groove; both connecting holes are equipped with one-way valves, and the flow diversion directions of the two one-way valves are opposite.

[0009] In one embodiment of the above-mentioned clamp, a group of vertical air channels are opened below the vacuum suction groove, and the connecting holes are all connected to the air channels; each group of air channels is connected to the built-in cavity.

[0010] In one embodiment of the above-mentioned clamp, five pressing windows are equidistantly opened in the middle section of the pressing plate along the length direction, and the top opening area of ​​each pressing window is larger than the bottom opening area; the upper and lower ends of the pressing window in the pressing plate are operating platforms; the thickness of the pressing window in the pressing plate is smaller than the thickness of the operating platform, and the top surface of the pressing plate is a flat surface.

[0011] In one embodiment of the clamp, the clamp is a rectangular block with a head protruding upward and a tail having an oblong hole in the length direction; the bottom end of the clamp is close to the head and has a downward semicircular protrusion.

[0012] In one embodiment of the clamp, the clamping members are fixed to the four corners of the placement plate through fasteners passing through oblong holes, and a screw rod penetrating downward is fixed to the head of each clamping member, and the bottom end of the screw rod is polished and smooth.

[0013] In one embodiment of the above-mentioned clamp, the locking member is a rectangular block, and a downwardly inclined supporting foot is arranged on the right side of the block; a locking member is fixed to the left side of each pressing window of the pressing plate by a fastener, and the supporting foot of the locking member is supported on the placing plate.

[0014] The beneficial effects of the utility model are:

[0015] 1. The improved pressing plate forms multiple single-point pressing windows, so that when the pressing plate is pressed on the heating block and the lead frame, each pressing window is pressed on the chip lead welding area around a chip, and it can ensure that the pins of each chip are fixed by the bottom pressing mouth of the pressing window, avoiding pin floating and leaving enough wire bonding space for wire bonding, effectively improving the bonding quality and product yield of the wire bonding process;

[0016] 2. When bonding, the frame is prone to shaking. The frame is fixed with a clamp and the lead frame is adsorbed with a vacuum suction groove, which improves the bonding quality and product yield of the lead bonding process. At the same time, the material removal and placement operation is convenient and the processing efficiency is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1This is a schematic diagram of the axonometric structure of an embodiment of the utility model.

[0018] Figure 2 for Figure 1 Schematic diagram of the structure of the middle base from top and side views.

[0019] Figure 3 for Figure 1 Schematic diagram of the structure of the center placement board from top and side views.

[0020] Figure 4 for Figure 1 Schematic diagram of the top view of the medium pressure plate.

[0021] Figure 5 for Figure 1 Schematic diagram of the structure of the middle clamping piece from top and side.

[0022] Figure 6 for Figure 1 Schematic diagram of the top and side views of the locking member. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the relevant technical solutions. Obviously, the described embodiments are only part of the embodiments, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] like Figure 1 As shown, the wire bonding vacuum suction positioning fixture disclosed in this embodiment includes a base 1, a placement plate 2, a pressing plate 3, a pressing member 4 and a locking member 5.

[0025] like Figure 2 As shown, the upper surface of the base 1 is provided with five rectangular and upwardly open built-in cavities 11 equidistantly along the length direction, and a downward connecting conduit 12 is provided at the center of each built-in cavity. The connecting conduits are interconnected and connected to an external vacuum generator.

[0026] like Figure 3 As shown, the upper surface of the placement plate 2 is arranged with five vacuum suction grooves 21 equidistantly along the length direction, and a circle of rubber is fixed to the port of the vacuum suction groove. Relative connecting holes are respectively provided on the inner wall of the vacuum suction groove along the length direction, and the connecting holes are in a horizontal J shape, and the ports of the two connecting holes are located in the middle of the inner side wall of the vacuum suction groove. Both connecting holes are equipped with one-way valves, and the two one-way valves have opposite flow directions.

[0027] A group of vertical air channels 22 are opened below each vacuum suction groove 21, and the communication holes are all connected to the air channels. Each group of air channels is connected to each built-in cavity of the base 1, the connecting conduit and the vacuum generator. The vacuum generator generates a negative pressure vacuum effect in the vacuum suction groove.

[0028] The placement plate 2 is fixed to the upper end of the base 1 by fastening screws at its four top corners.

[0029] like Figure 4 As shown, the middle section of the pressing plate 3 is provided with five pressing windows equidistantly along the length direction, and the pressing windows shrink from the top surface to the bottom surface, and the top opening area of ​​each pressing window is larger than the bottom opening area. The upper and lower ends of the pressing windows in the pressing plate are operating platforms. The thickness of the pressing windows in the pressing plate is smaller than the thickness of the operating platform, and the top surface of the pressing plate is a flat surface.

[0030] like Figure 5 As shown, the pressing piece 4 is a rectangular block, the head of which protrudes upwards, and the tail is provided with an oblong hole in the length direction. The bottom end of the pressing piece is close to the head position and has a downward semicircular protrusion.

[0031] like Figure 6 As shown, the locking member 5 is a rectangular block, and a support foot inclined downward is provided on the right side thereof.

[0032] The pressing plate 3 is placed on the placing plate 2 when the clamp is used.

[0033] The four clamping members 4 are fixed to the four corners of the placement plate 2 by screws passing through the oblong holes. The head of each clamping member is fixed with a screw rod penetrating downwards. The bottom of the screw rod is polished smooth so as not to damage the surface of the placement plate. The clamping member can be adjusted so that the tail of the clamping member is adjusted on the pressure plate 3, and then the screw rod is screwed downward to push up the head of the clamping member, and the tail of the clamping member is pressed down, so that the pressure plate is pressed against the placement plate.

[0034] A locking member 5 is fixed to the left side of each pressing window of the pressing plate 3 by screws, and the supporting legs of the locking member are supported on the placing plate 2.

[0035] The advantages of using this positioning fixture are:

[0036] 1. The improved pressing plate forms multiple single-point pressing windows, so that when the pressing plate is pressed on the heating block and the lead frame, each pressing window is pressed on the chip lead welding area around a chip, and it can ensure that the pins of each chip are fixed by the bottom pressing mouth of the pressing window, avoiding pin floating and leaving enough wire space for wire bonding, effectively improving the bonding quality and product yield of the wire bonding process.

[0037] 2. When bonding, the frame is prone to shaking. The frame is fixed with a clamp and the lead frame is adsorbed with a vacuum suction groove, which improves the bonding quality and product yield of the lead bonding process. At the same time, the material removal and placement operation is convenient and the processing efficiency is high.

[0038] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although detailed descriptions are made with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A wire bonding vacuum suction positioning fixture, characterized in that: It includes a base, a placing plate, a pressing plate, a pressing piece and a locking piece; The placing plate is fixed on the base, and vacuum suction grooves are opened on the placing plate; the pressing plate covers the placing plate to separate the vacuum suction grooves, and the pressing plate is fixed on the placing plate by a pressing member and a locking member with adjustable pressing position and pressing force.

2. The wire bonding vacuum suction positioning fixture according to claim 1, characterized in that: The upper surface of the base is provided with five rectangular built-in cavities opening upward at equal intervals along the length direction, and a downward connecting conduit is provided at the center of each built-in cavity. The connecting conduits are connected to each other and to an external vacuum generator.

3. The wire bonding vacuum suction positioning fixture according to claim 2, characterized in that: The upper surface of the placement plate is provided with five vacuum suction grooves arranged equidistantly along the length direction; a circle of rubber is fixed to the port of the vacuum suction groove; opposite connecting holes are respectively provided on the inner wall of the vacuum suction groove along the length direction, the connecting holes are in a horizontal J shape, and the ports of the two connecting holes are located in the middle of the inner side wall of the vacuum suction groove; both connecting holes are equipped with one-way valves, and the diversion directions of the two one-way valves are opposite.

4. The wire bonding vacuum suction positioning fixture according to claim 3, characterized in that: A group of vertical air passages are opened below the vacuum suction grooves, and the connecting holes are connected to the air passages; each group of air passages is connected to the built-in cavity.

5. The wire bonding vacuum suction positioning fixture according to claim 4, characterized in that: The middle section of the pressing plate is provided with five pressing windows equidistantly opened along the length direction, and the top opening area of ​​each pressing window is larger than the bottom opening area; the upper and lower ends of the pressing windows in the pressing plate are operating platforms; the thickness of the pressing windows in the pressing plate is smaller than the thickness of the operating platform, and the top surface of the pressing plate is a flat surface.

6. The wire bonding vacuum suction positioning fixture according to claim 5, characterized in that: The pressing piece is a rectangular block with a head protruding upward. The tail is provided with an oblong hole in the length direction; the bottom end of the clamping piece, close to the head, is provided with a downward semicircular protrusion.

7. The wire bonding vacuum suction positioning fixture according to claim 6, characterized in that: The clamping members are fixed to the four corners of the placing plate through fasteners passing through oblong holes. The head of each clamping member is fixed with a screw rod penetrating downward, and the bottom end of the screw rod is polished and smooth.

8. The wire bonding vacuum suction positioning fixture according to claim 6, characterized in that: The locking piece is a rectangular block, and a downwardly inclined supporting foot is arranged on the right side of the locking piece; a locking piece is fixed to the left side of each pressing window of the pressing plate by a fastener, and the supporting foot of the locking piece is supported on the placing plate.

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