Flexible clamping structure for material sheets
By designing a flexible clamping structure including horizontal substrate, cylinder, push block and telescopic slider, the problem of position offset and clamping inconvenient during transfer of the material sheet in semiconductor manufacturing is solved, and convenient pick-up and position calibration of the material sheet is achieved, avoiding damage to the material sheet.
Patent Information
- Application Number
- CN202420678892.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-03
- Publication Date
- 2025-05-13
- Estimated Expiration
- 2034-04-03
AI Technical Summary
In the semiconductor manufacturing process, the position shift is prone to occur when the sheet is transferred, which makes it difficult to clamp, and the manipulator's force is too large, which may damage the sides of the sheet.
A flexible clamping structure of the material sheet is designed, including a horizontal substrate, a cylinder, a push block and a telescopic slider. The movement of the push block and a telescopic slider is driven by the cylinder to realize the synchronous centering of the clamping strip to the material sheet, and has the elastic clamping function.
It realizes convenient pick-up and position calibration of the tape, avoids damage caused by excessive stress on one side of the tape, and improves the efficiency and safety of the tape transfer process.
Smart Images

Figure CN222867657U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a flexible clamping structure of a material sheet. Background Art
[0002] When semiconductors are manufactured, multiple sheets need to be transferred to a laminator, connected using resin, and cured before being electroplated with tin.
[0003] In the prior art, when transferring sheets, a robot is usually used to directly clamp the sheets. However, the position of the sheets is easily offset after the robot clamps the sheets, and it needs to be calibrated for subsequent processing. It is not convenient to clamp multiple sheets, and the side of the sheet may be damaged if the robot uses too much force. Utility Model Content
[0004] The utility model aims to provide a flexible clamping structure for a sheet material to overcome the deficiencies in the prior art.
[0005] In order to solve the above technical problems, the technical solution of the utility model is: a flexible clamping structure of a sheet, comprising a horizontal base plate and a cylinder arranged above the horizontal base plate, the lower end of the piston rod of the cylinder passes through the horizontal base plate and is equipped with a push block, the push block can move in the vertical direction with the piston rod of the cylinder, a plurality of telescopic sliders corresponding to each other are installed on the lower surface of the horizontal base plate, a plurality of telescopic sliders arranged around the push block are evenly arranged along the circumferential direction, each of the telescopic sliders is movably connected to the horizontal base plate, and can reciprocate along the radial direction where they are located, and a clamping bar for clamping the sheet is provided at one end of each telescopic slider away from the push block;
[0006] The outer side of the lower end of the push block is provided with several main slope surfaces corresponding to the telescopic slider, and each of the telescopic sliders is provided with a secondary slope surface matching the corresponding main slope surface at one end close to the push block. A connecting pin is installed under each of the telescopic sliders, and the distance between each connecting pin and the push block is equal. An annular elastic belt in a tensioned state is wound around several of the connecting pins.
[0007] Furthermore, in the flexible clamping structure of the sheet mentioned above, four telescopic sliders are provided, which are a left telescopic slider, a right telescopic slider, a front telescopic slider and a rear telescopic slider which are respectively provided correspondingly.
[0008] Furthermore, in the above-mentioned flexible clamping structure of the material sheet, a slide seat is provided on the top of the left telescopic slider, the right telescopic slider, the front telescopic slider, and the rear telescopic slider, each of the slide seats is provided with a roller on the top, and a slide groove matching each roller is provided on the horizontal base plate.
[0009] Furthermore, in the above-mentioned flexible clamping structure of the material sheet, the front telescopic slider and the rear telescopic slider are arranged along the length direction of the material sheet, and mounting parts extending along the length direction of the material sheet are provided on both sides of the slide seat located at the top of the front telescopic slider and the rear telescopic slider, and at least one clamping strip is provided under each of the mounting parts.
[0010] Furthermore, in the above-mentioned flexible clamping structure of the sheet, the horizontal portion of the clamping strip is mounted on the telescopic slider, and the lower end of the vertical portion has a bending portion extending in the direction of the push block.
[0011] Furthermore, in the flexible clamping structure of the sheet, the piston rod of the cylinder and the push block are connected via a connecting rod, the upper end of the connecting rod is connected to the piston rod of the cylinder, and the lower end passes through the horizontal base plate and is connected to the push block.
[0012] Furthermore, in the above-mentioned flexible clamping structure of the sheet, the outer side surface of the lower end of the push block is a conical surface.
[0013] Compared with the prior art, the beneficial effect of the utility model is that the up and down movement of the push block and the tensioning and contraction of the elastic belt are synchronously driven to drive the telescopic sliders opposite to each other to move closer or farther away from each other, thereby realizing the synchronous centering, clamping and loosening of the material by the clamping strips installed on the telescopic sliders, which is convenient for taking and placing the material, and can calibrate the position of the material in at least one direction while clamping it, and can also realize elastic clamping of the material to avoid damage caused by excessive force on one side of the material. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0015] Figure 1 It is a structural schematic diagram of the flexible clamping structure of the material sheet of the utility model;
[0016] Figure 2 It is a partial structural schematic diagram of the flexible clamping structure of the sheet of the utility model;
[0017] Figure 3 for Figure 2 A schematic cross-sectional view of AA;
[0018] In the figure: 1, horizontal base plate; 2, cylinder; 3, push block; 31, main slope surface; 4, telescopic slider; 41, left telescopic slider; 42, right telescopic slider; 43, front telescopic slider; 44, rear telescopic slider; 45, secondary slope surface; 5, clamping strip; 51, horizontal part; 52, vertical part; 53, bending part; 6, connecting pin; 7, elastic belt; 8, connecting rod; 9, slide seat; 10, roller; 11, mounting part;
[0019] 100. Sheet metal. DETAILED DESCRIPTION
[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0021] Example 1
[0022] like Figure 1-3 As shown, a flexible clamping structure for a sheet comprises a horizontal base plate 1 and a cylinder 2 arranged above the horizontal base plate 1, the lower end of the piston rod of the cylinder 2 passes through the horizontal base plate 1 and is equipped with a push block 3, the piston rod of the cylinder 2 is connected to the push block 3 via a connecting rod 8, the upper end of the connecting rod 8 is connected to the piston rod of the cylinder 2, and the lower end passes through the horizontal base plate 1 and is connected to the push block 3; the push block 3 can move in the vertical direction with the piston rod of the cylinder 2, a plurality of telescopic sliders 4 corresponding to each other are installed on the lower surface of the horizontal base plate 1, a plurality of telescopic sliders 4 arranged around the push block 3 are evenly arranged in the circumferential direction, each of the telescopic sliders 4 is movably connected to the horizontal base plate 1, and can reciprocate along the radial direction where they are located, and a clamping bar 5 for clamping the sheet 100 is provided at the end of each telescopic slider 4 away from the push block 3;
[0023] The outer side of the lower end of the push block 3 is provided with a plurality of main slope surfaces 31 corresponding to the telescopic slider 4, and each of the telescopic sliders 4 is provided with a secondary slope surface 45 matched with the corresponding main slope surface 31 at one end close to the push block 3, and a connecting pin 6 is installed under each of the telescopic sliders 4, and the distance between each connecting pin 6 and the push block 3 is equal, and a ring-shaped elastic belt 7 in a tensioned state is wound around the plurality of connecting pins 6.
[0024] When in use, the cylinder 2 drives the connecting rod 8 to drive the push block 3 to move downward, and the push block 3 synchronously drives the telescopic sliders 4 opposite to each other to move away from each other so that the distance between the clamping strips 5 opposite to each other is maximized and each clamping strip 5 moves to the outside of the material to be transported accordingly; the up and down movement of the push block 3 and the tensioning and contraction of the elastic belt 7 synchronously drive the telescopic sliders 4 opposite to each other to move closer to or relatively away from each other, thereby realizing the synchronous centering, clamping and loosening of the material by the clamping strips installed on the telescopic slider 4, which is convenient for taking and placing the material and can also calibrate the position of the material in at least one direction while clamping it.
[0025] In the above structure, if Figure 3 As shown, the horizontal portion 51 of the clamping bar 5 is installed on the telescopic slider 4 , and the lower end of the vertical portion 52 thereof has a bent portion 53 extending toward the push block 3 .
[0026] In the above structure, if Figure 3 As shown, the outer side surface of the lower end of the push block 3 is a conical surface. Specifically, the lower end of the slope surface 45 correspondingly fits the main slope surface 31 located above it and extends toward the direction close to the push block 3.
[0027] Example 2
[0028] Based on the structure of Example 1, Figure 1 , 2 As shown, there are four telescopic sliders 4, which are a left telescopic slider 41, a right telescopic slider 42, a front telescopic slider 43 and a rear telescopic slider 44 which are respectively arranged correspondingly.
[0029] In the above structure, if Figure 1-3 As shown, a slide seat 9 is provided on the top of the left telescopic slider 41, the right telescopic slider 42, the front telescopic slider 43, and the rear telescopic slider 44. A roller 10 is provided on the top of each slide seat 9. A slide groove matching each roller 10 is provided on the horizontal base plate 1. The radial reciprocating movement of the telescopic slide rail 4 is guided by this structure.
[0030] In addition, the front telescopic slider 43 and the rear telescopic slider 44 are arranged along the length direction of the material sheet 100, and the two sides of the slide seat 9 located at the top of the front telescopic slider 43 and the rear telescopic slider 44 are provided with mounting parts 11 extending along the length direction of the material sheet, and at least one clamping strip 5 is arranged below each mounting part 11, and the number of clamping strips 5 can be set according to the length of the material sheet, so that the clamping of the material sheet can be more stable. When the length of the material sheet is not long, a clamping strip 5 installed on the telescopic slider 4 is arranged in the front and rear directions. In this embodiment, two clamping strips 5 are arranged on each side in the length direction of the material sheet 100.
[0031] The working principle of the utility model is as follows:
[0032] When in use, the cylinder 2 drives the connecting rod 8 to drive the push block 3 to move downward, and the push block 3 synchronously drives the two opposite telescopic sliders 4 to move away from each other so that the distance between the two opposite clamping bars 5 is maximized and each clamping bar 5 moves to the outside of the sheet to be transported accordingly;
[0033] Then, the cylinder 2 drives the connecting rod 8 to drive the push block 3 to move upward until the main slope surface 31 is no longer in contact with the secondary slope surface 45 on the telescopic slider 4. During this process, each telescopic slider 4 moves synchronously toward the sheet 100 under the action of the elastic belt 7 until the clamping strips 5 facing each other clamp the sheet.
[0034] In the above process, the up and down movement of the push block 3 and the tensioning and contraction of the elastic belt 7 synchronously drive the telescopic sliders 4 opposite to each other to move closer or farther away from each other, thereby realizing the synchronous centering, clamping and loosening of the material by the clamping strips 5 installed on the telescopic sliders 4, which is convenient for taking and placing the material, and can calibrate the position of the material in at least one direction while clamping it, and can also realize elastic clamping of the material to avoid damage caused by excessive force on one side of the material.
[0035] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.
[0036] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.
Claims
1. A flexible clamping structure for a sheet, characterized in that: It comprises a horizontal base plate and a cylinder arranged above the horizontal base plate, a push block is installed at the lower end of the piston rod of the cylinder through the horizontal base plate, the push block can move in the vertical direction with the piston rod of the cylinder, a plurality of telescopic sliders corresponding to each other are installed on the lower surface of the horizontal base plate, a plurality of telescopic sliders arranged around the push block are evenly arranged along the circumferential direction, each of the telescopic sliders is movably connected to the horizontal base plate, and can reciprocate along the radial direction where it is located, and a clamping bar for clamping a sheet is provided at one end of each telescopic slider away from the push block; The outer side of the lower end of the push block is provided with several main slope surfaces corresponding to the telescopic slider, and each of the telescopic sliders is provided with a secondary slope surface matching the corresponding main slope surface at one end close to the push block. A connecting pin is installed under each of the telescopic sliders, and the distance between each connecting pin and the push block is equal. An annular elastic belt in a tensioned state is wound around several of the connecting pins.
2. The flexible clamping structure of the sheet according to claim 1, characterized in that: The telescopic sliders are provided with four, which are a left telescopic slider, a right telescopic slider, a front telescopic slider and a rear telescopic slider which are provided correspondingly.
3. The flexible clamping structure of the sheet according to claim 2, characterized in that: The tops of the left telescopic slider, the right telescopic slider, the front telescopic slider and the rear telescopic slider are all provided with a slide seat, the top of each slide seat is provided with a roller, and the horizontal base plate is provided with a slide groove matched with each roller.
4. The flexible clamping structure of the sheet according to claim 3, characterized in that: The front telescopic slider and the rear telescopic slider are arranged along the length direction of the material sheet. Both sides of the slide seat located at the top of the front telescopic slider and the rear telescopic slider are provided with mounting parts extending along the length direction of the material sheet, and at least one clamping strip is provided under each mounting part.
5. The flexible clamping structure of a sheet according to claim 1, characterized in that: The horizontal part of the clamping bar is installed on the telescopic sliding block, and the lower end of the vertical part of the clamping bar is provided with a bending part extending in the direction of the pushing block.
6. The flexible clamping structure of a sheet according to claim 1, characterized in that: The piston rod of the cylinder is connected to the push block via a connecting rod, the upper end of the connecting rod is connected to the piston rod of the cylinder, and the lower end of the connecting rod passes through a horizontal base plate and is connected to the push block.
7. The flexible clamping structure of a sheet according to claim 1, characterized in that: The outer side surface of the lower end of the push block is a tapered surface.