Arc chamber discharging device

Abstract

The utility model relates to an arc chamber discharging device, and belongs to the technical field of stable isotope electromagnetic separators. The discharge chamber comprises a discharge chamber body, a positive electrode assembly and a filament assembly, the discharge chamber body comprises a shell, a first end plate and a second end plate, the first end plate and the second end plate are arranged at the two opposite ends of the shell respectively, a cavity for containing material steam is formed among the shell, the first end plate and the second end plate, and the first end plate is provided with a window part; the anode assembly is arranged on the second end plate, is electrified to form an anode and is insulated from the discharge chamber body; the filament assembly comprises a filament body used for emitting electrons, the filament body is electrified to form a negative electrode, the filament body is arranged on the side, away from the second end plate, of the first end plate, the filament body and the window part are arranged in a spaced mode, the electrons penetrate through the window part to enter the cavity to ionize the material steam, and an acceleration area is formed between the filament body and the positive electrode assembly to accelerate the electrons. The arc chamber has the effect of solving the problem that the distance between the filament of the arc chamber and the positive electrode plate is too short during isotope separation.

Description

Technical Field

[0001] The present application relates to the technical field of stable isotope electromagnetic separators, and in particular to an arc chamber discharge device. Background Art

[0002] The electromagnetic method of separating isotopes utilizes the different rotation radii produced by charged ions of different masses when they move in a circular motion in a magnetic field, thereby achieving the separation of charged ions and collecting different isotopes at different locations.

[0003] At present, the device used to separate isotopes by electromagnetic method mainly includes a crucible and an arc chamber, both of which are in a magnetic field. Among them, the crucible is used to heat and evaporate the material to be separated. The crucible is connected to the arc chamber. The material vapor heated by the crucible flows into the arc chamber through structures such as a boat-shaped plate and a gas distribution plate. The arc chamber is used to ionize the material vapor. The first end plate of the arc chamber is provided with an electron window, and the first end plate is provided with a positive electrode plate. A filament is provided on the outer side of the arc chamber near one end of the electron window. The filament is used as a negative electrode to emit electrons. Through the action of the electric field between the positive electrode plate and the filament, the electrons are guided and accelerated, so that the electrons rotate through the electron window into the arc chamber under the action of the magnetic field and the electric field, and the material vapor is ionized to form plasma.

[0004] However, in the isotope separation device in the related art, the filament is arranged on the outer side of the arc chamber near the electron window, and the distance between the filament and the positive electrode plate is relatively close, which makes it easy for the filament to sink and contact the positive electrode and cause a short circuit; and the area between the electron window and the filament serves as the electron acceleration area of ​​the arc chamber. Since the distance between the filament and the positive electrode plate is relatively close, the electron acceleration distance is too short, and the electron downward movement speed is insufficient. When there is a lot of material vapor below the arc chamber, it is not easy for the electrons to contact the material vapor below, which will prolong the arc starting time.

[0005] In the above related technologies, there is a defect that the distance between the filament and the positive electrode plate is too short. Utility Model Content

[0006] In order to improve the problem of too short distance between the filament and the positive electrode plate of the arc chamber during isotope separation, the present application provides an arc chamber discharge device.

[0007] The arc chamber discharge device provided in this application adopts the following technical solution:

[0008] An arc chamber discharge device, wherein the arc chamber is connected to a crucible, and the crucible is used to transport material vapor to the arc chamber. The arc chamber discharge device comprises: a discharge chamber body, wherein the discharge chamber body comprises an outer shell, a first end plate and a second end plate, wherein the first end plate and the second end plate are respectively arranged at opposite ends of the outer shell along the length direction, wherein a cavity is formed between the outer shell, the first end plate and the second end plate, wherein the cavity contains material vapor, and a window portion is provided on the first end plate; a positive electrode assembly, wherein the positive electrode assembly is arranged on the second end plate, wherein the positive electrode assembly is used to form a positive electrode when energized, and the positive electrode assembly is relatively insulated from the discharge chamber body; and a filament assembly, wherein the filament body is used to form a negative electrode when energized, wherein the filament body is arranged on a side of the first end plate away from the second end plate, wherein the filament body is spaced apart from the window portion, wherein the filament body is used to emit electrons, wherein the electrons can pass through the window portion and enter the cavity of the discharge chamber body to ionize the material vapor, and wherein an acceleration region is formed between the filament body and the positive electrode assembly, wherein the electrons are accelerated in the acceleration region.

[0009] By adopting the above technical scheme, the material vapor in the crucible is transported to the arc chamber, and the material vapor is ionized by the arc chamber discharge; the outer shell of the discharge chamber body and the first end plate and the second end plate arranged in the outer shell are arranged to form a cavity, so that the material vapor can be contained in the cavity; the filament body as the negative electrode is arranged outside the outer shell, located on the side of the first end plate away from the second end plate and spaced from the window part on the first end plate, and the positive electrode assembly as the positive electrode is arranged in the second end plate, so that after power is turned on, an electric field can be formed between the filament body and the positive electrode assembly, thereby making the cavity have an electric field effect; because the filament body and the positive electrode assembly are arranged on both sides of the window part of the first end plate, the electrons emitted by the filament body can, under the action of the electric field, make it easier for the electrons to pass through the window part and enter the cavity, thereby increasing the probability of the electrons emitted by the filament body entering the cavity; and, compared with setting the positive electrode assembly in the second end plate, the positive electrode assembly is arranged in the second end plate. On one end plate, the positive electrode assembly is arranged on the second end plate far away from the filament body, which can improve the problem of too short distance between the filament body and the positive electrode assembly, expand the range of the acceleration area provided by the electric field for electrons, increase the acceleration distance of the electrons, so that the electrons can obtain a greater speed, and the electrons are accelerated by the electric field, which helps to make the electrons reach one end of the cavity close to the second end plate, thereby improving the ionization effect on the material vapor below the cavity and shortening the arc starting time; because the filament body as the negative electrode is located outside the discharge chamber body, and the positive electrode assembly as the positive electrode is insulated from the discharge chamber body, the discharge chamber body is not charged, even if the filament body is powered on for a long time and sinks, since the discharge chamber body is not charged at this time, the filament body as the negative electrode contacts the uncharged discharge chamber body, and no short circuit problem occurs, thereby improving the use safety and reliability.

[0010] Optionally, the positive electrode assembly includes a positive electrode plate and an insulating member, the insulating member is provided on the outer periphery of the positive electrode plate, an embedded groove is opened in the second end plate, and the positive electrode plate covered with the insulating member is arranged in the embedded groove.

[0011] By adopting the above technical solution, the insulating part is coated on the outer periphery of the positive electrode plate, and the embedded groove opened on the second end plate provides a bearing structure for the positive electrode assembly, so that after the positive electrode plate is installed in the embedded groove, the insulation between the positive electrode plate and the second end plate can be achieved through the insulating part, so that the positive electrode plate can be energized to form an electric field between the filament body as the positive electrode and the filament body as the negative electrode, thereby avoiding the problem of charging the discharge chamber body and easily causing a short circuit when the filament body comes into contact with it.

[0012] Optionally, the cross-sectional area of ​​the positive electrode plate is the same as the cross-sectional area of ​​the cavity.

[0013] By adopting the above technical solution, since the material vapor and the electrons generated by the filament body are distributed in the cavity, the cross-sectional areas of the positive electrode plate and the cavity are the same, which helps to form an electric field of sufficient range in the cavity, ensures that the electrons in the cavity can be affected by the electric field, and accelerate the filament body to pass through the window to the second end plate, thereby improving the utilization rate of the electrons.

[0014] Optionally, a power supply component is further included, which is independent of the discharge chamber body, and the positive electrode assembly also includes a positive wiring component, which is electrically connected to the positive electrode plate and the power supply component respectively.

[0015] By adopting the above technical solution, the positive electrode plate is electrically connected to the power supply unit through the positive wiring member, so that the positive electrode plate can be used as a positive electrode to form an electric field with the filament body as a negative electrode.

[0016] Optionally, the positive wiring member includes a conductive portion and an insulating portion, the conductive portion is electrically connected to the positive electrode plate and the power supply member, respectively, and the insulating portion is sleeved on the outer periphery of the conductive portion.

[0017] By adopting the above technical solution, the conductive part is used to realize the electrical connection between the positive electrode plate and the power supply component, so that the positive electrode plate is positively charged; since the positive electrode assembly is arranged in the embedded groove of the second end plate, and the positive electrode assembly needs to be relatively insulated from the second end plate, the conductive part led out from the positive electrode plate needs to be relatively insulated from the discharge chamber body, and the insulating part is sleeved on the outside of the conductive part, so that the conductive part and the discharge chamber body can be relatively insulated, avoiding the problem that the discharge chamber body is charged and easily contacts and short-circuits with the filament body.

[0018] Optionally, the positive electrode assembly further includes a clamping member and a conductive member, the clamping member is electrically connected to the positive terminal, and the clamping member clamps one end of the conductive member to achieve electrical connection, and the other end of the conductive member is electrically connected to the power supply member.

[0019] By adopting the above technical solution, the conductive part is used to realize the electrical connection between the clamping part and the power supply part. The clamping part realizes the positive terminal part and the conductive part by clamping, so that the circuit can be connected or disconnected conveniently through the clamping part, which is convenient for disassembly.

[0020] Optionally, the filament assembly further includes a connecting member, and the connecting member electrically connects the filament body and the power supply member respectively.

[0021] By adopting the above technical solution, the connector is used to realize the electrical connection between the filament body and the power supply, so that the filament body can be energized to act as a negative electrode and a positive electrode component, thereby forming an electric field in the cavity and accelerating the electrons.

[0022] Optionally, the insulating member is made of boron nitride.

[0023] By adopting the above technical solution, boron nitride has high electrical insulation and stable chemical properties, which helps to ensure the insulation reliability between the positive electrode plate and the discharge chamber body.

[0024] Optionally, the thickness of the first end plate and the second end plate are both greater than or equal to 4 mm.

[0025] By adopting the above technical solution, the thickness of the first end plate and the second end plate is not less than 4 mm, which can reduce the risk of the first end plate and the second end plate being broken down by the electric field formed in the cavity.

[0026] Optionally, the discharge chamber body is made of graphite.

[0027] In summary, the present application includes at least one of the following beneficial technical effects:

[0028] 1. The material vapor in the crucible is transported to the arc chamber, and the material vapor is ionized by arc chamber discharge; the outer shell of the discharge chamber body and the first end plate and the second end plate arranged in the outer shell are arranged to form a cavity, so that the material vapor can be contained in the cavity; the filament body as the negative electrode is arranged outside the outer shell, located on the side of the first end plate away from the second end plate and spaced from the window portion on the first end plate, and the positive electrode assembly as the positive electrode is arranged in the second end plate, so that after power is turned on, an electric field can be formed between the filament body and the positive electrode assembly, thereby making the cavity have an electric field effect; because the filament body and the positive electrode assembly are arranged on both sides of the window portion of the first end plate, the electrons emitted by the filament body can, under the action of the electric field, make it easier for the electrons to pass through the window portion into the cavity, thereby increasing the probability of the electrons emitted by the filament body entering the cavity; and, compared with arranging the positive electrode assembly on the first end plate, The positive electrode assembly is arranged on the second end plate away from the filament body, which can improve the problem of the short distance between the filament body and the positive electrode assembly, expand the range of the acceleration area provided by the electric field for the electrons, and increase the acceleration distance of the electrons, so that the electrons can obtain a greater speed. The electrons are accelerated by the electric field, which helps to make the electrons reach the end of the cavity close to the second end plate, thereby improving the ionization effect on the material vapor below the cavity and shortening the arc starting time; since the filament body as the negative electrode is located outside the discharge chamber body, and the positive electrode assembly as the positive electrode is insulated from the discharge chamber body, the discharge chamber body is not charged, even if the filament body sinks due to a long power-on time, since the discharge chamber body is not charged at this time, the filament body as the negative electrode contacts the discharge chamber body without charging, and no short circuit problem occurs, thereby improving the use safety and reliability;

[0029] 2. The insulating member is coated on the outer periphery of the positive electrode plate, and the embedded groove provided on the second end plate provides a bearing structure for the positive electrode assembly, so that after the positive electrode plate is installed in the embedded groove, the insulating member can achieve insulation between the positive electrode plate and the second end plate, so that the positive electrode plate can be energized to form an electric field between the filament body as the positive electrode and the filament body as the negative electrode, thereby avoiding the problem of charging the discharge chamber body and causing a short circuit when the filament body is in contact;

[0030] 3. The conductive part is used to realize the electrical connection between the clamping part and the power supply part. The clamping part realizes the positive connection part and the conductive part by clamping, so that the circuit can be connected or disconnected conveniently through the setting of the clamping part, which is convenient for disassembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic diagram of the assembly of the arc chamber discharge device of the embodiment of the present application.

[0032] Figure 2 It is an internal schematic diagram of the arc chamber discharge device of an embodiment of the present application.

[0033] Figure 3 It is a top view of the second end plate of the embodiment of the present application.

[0034] Figure 4 yes Figure 3 Cross-section view at AA in the middle.

[0035] Figure 5 Schematic diagram of a clamping member according to an embodiment of the present application.

[0036] Description of reference numerals:

[0037] 100, arc chamber; 200, crucible; 1, discharge chamber body; 11, outer shell; 12, first end plate; 121, window portion; 13, second end plate; 131, embedded groove; 2, positive electrode assembly; 21, positive electrode plate; 22, insulating member; 23, positive wiring member; 24, clamping member; 25, conductive member; 3, filament assembly; 31, filament body; 32, connecting member; 4, power supply member. DETAILED DESCRIPTION

[0038] The following is combined with Figure 1 -Attached Figure 5 The present application is further described in detail. In this embodiment, if not clearly specified, "connected", "connected" and "fixed" are understood in a broad sense, including fixed connection, detachable connection, connection to form an integral structure, mechanical connection, electrical connection, direct connection, indirect connection through an intermediary, internal connection and interaction between two elements, etc., which can be understood according to the specific circumstances.

[0039] In the present application, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or the first and second features being in contact not directly but through another feature between them. Moreover, in the description of the present embodiment, the terms "above", "below", "right", etc., the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. Unless otherwise specified, the orientation words used in the present application, such as "inside" and "outside", refer to the contours of the corresponding parts themselves.

[0040] like Figure 1 , Figure 2 and Figure 3 As shown, an embodiment of the present application discloses an arc chamber discharge device (hereinafter referred to as “device”).

[0041] like Figure 1 , Figure 2 and Figure 4As shown, the device includes a discharge chamber body 1, a positive electrode assembly 2 and a filament assembly 3. The arc chamber 100 is connected to a crucible 200, and the crucible 200 is used to transport material vapor to the arc chamber 100. The arc chamber 100 includes the device and also includes a cover shell, a heating assembly, etc. arranged outside the device. In view of the existing related technologies, the cover shell, the heating assembly, etc. of the arc chamber 100 will not be described in detail here.

[0042] The discharge chamber body 1 includes an outer shell 11, a first end plate 12 and a second end plate 13. The first end plate 12 and the second end plate 13 are respectively arranged at opposite ends of the outer shell 11 along the length direction. A cavity is formed between the outer shell 11, the first end plate 12 and the second end plate 13, and the cavity is used to contain material vapor. The outer shell 11 can be a cylindrical structure with two ends open and a rectangular cross section, so that it can be surrounded and formed into a cavity in cooperation with the first end plate 12 and the second end plate 13 arranged at both ends of the outer shell 11. The material vapor in the crucible 200 is transported to the arc chamber 100. Specifically, the material vapor can be transported to the cavity so that it can be discharged through the device and ionized in the cavity. The positive electrode assembly 2 is arranged in the second end plate 13. The positive electrode assembly 2 is used to be energized to form a positive electrode, and the positive electrode assembly 2 is relatively insulated from the discharge chamber body 1.

[0043] like Figure 1 , Figure 2 and Figure 4As shown, the filament assembly 3 includes a filament body 31, which is used to form a negative electrode when powered on, and the filament body 31 can emit electrons after power is turned on. The filament body 31 is arranged on the arc chamber 100, and the filament body 31 is arranged on the side of the first end plate 12 away from the second end plate 13, and the filament body 31 is spaced apart from the window portion 121. The filament body 31 as the negative electrode is arranged outside the housing 11, located on the side of the first end plate 12 away from the second end plate 13, and is spaced apart from the window portion 121 on the first end plate 12, and the positive electrode assembly 2 as the positive electrode is arranged in the second end plate 13, so that after power is turned on, an electric field can be formed between the filament body 31 and the positive electrode assembly 2, thereby causing an electric field effect in the cavity. The first end plate 12 is provided with a window portion 121, and the window portion 121 is used for electrons to pass through. The electrons can pass through the window portion 121 and enter the cavity of the discharge chamber body 1 to ionize the material vapor. Since the filament body 31 and the positive electrode assembly 2 are arranged on both sides of the window portion 121 of the first end plate 12, the electrons emitted by the filament body 31 can more easily pass through the window portion 121 into the cavity under the action of the electric field, thereby increasing the probability of the electrons emitted by the filament body 31 entering the cavity. In addition, the electrons can be accelerated by the action of the electric field, and an acceleration region is formed between the filament body 31 and the positive electrode assembly 2, which helps to accelerate the electrons in the acceleration region, improve the penetration ability of the electrons, and make the electrons reach the end of the cavity close to the second end plate 13, thereby improving the ionization effect of the material vapor at the bottom of the cavity close to the end of the second end plate 13, making it easier to start an arc, thereby shortening the arc starting time. The window portion 121 can be a through-hole structure opened on the first end plate 12, which is used to allow electrons to pass through and enter the cavity. It can be understood that in this embodiment, the bottom of the cavity refers to the space in the cavity close to the second end plate 13.

[0044] Since the filament body 31 as the negative electrode is located outside the discharge chamber body 1 and is not in direct contact with the discharge chamber body 1, and the positive electrode assembly 2 as the positive electrode is insulated from the discharge chamber body 1, the discharge chamber body 1 is not charged. Even if the filament body 31 is relatively soft and sinks when the power is on for a long time, since the discharge chamber body 1 is not charged at this time, the filament body 31 as the negative electrode contacts the discharge chamber body 1 without short circuit, thereby improving the safety and reliability of use. Optionally, the discharge chamber body 1 is made of graphite.

[0045] like Figure 1 , Figure 2 and Figure 4As shown, the positive electrode assembly 2 is arranged on the second end plate 13 far away from the filament body 31. Compared with the arrangement of the positive electrode assembly 2 on the first end plate 12, the problem of the short distance between the filament body 31 and the positive electrode assembly 2 can be improved, so that the range of the acceleration area provided by the electric field for the electrons is expanded, and the acceleration distance of the electrons is increased, so that the electrons can obtain a greater speed, and under the traction of the electric field, it is helpful to move the electrons to the lower part of the cavity near the second end plate 13. Since the material vapor in the cavity is unevenly distributed, that is, the material vapor is more at the lower part of the cavity near the second end plate 13, by increasing the speed of the electrons, the electrons can reach the second end plate 13 of the cavity faster, so that it is easier to interact with the material vapor in the cavity near the second end plate 13, and shorten the arc starting time.

[0046] like Figure 1 , Figure 2 and Figure 4 As shown, and because the distance between the filament body 31 as the negative electrode and the positive electrode assembly 2 as the positive electrode increases, according to E=U / D, where E is the electric field strength, U is the voltage, and D is the distance between the positive electrode and the negative electrode, in order to keep the electric field strength unchanged, the voltage needs to be increased on the basis of increasing the distance between the positive electrode and the negative electrode. The voltage can provide acceleration energy for the electrons, so that the device can make the electrons obtain more energy and more easily react with the material vapor to achieve arcing. In the way that the positive electrode assembly 2 is set on the first end plate 12, if the voltage is large and the distance between the first end plate 12 and the filament body 31 is too short, the electrons will bombard the first end plate 12 too much, causing the first end plate 12 to generate arc flow, which will cause the problem of difficult arcing, so it is impossible to increase the electron acceleration by increasing the voltage. The device can also reduce the situation where the electron speed is not enough and reacts with other particles above the first end plate 12 in the cavity, thereby affecting the electron utilization rate. Since the device can increase the probability of electrons entering the cavity through the action of the electric field, more electrons can enter the cavity under the action of the electric field, thereby increasing the utilization rate of primary electrons and helping to improve arc starting stability.

[0047] Optionally, the thickness of the first end plate 12 and the second end plate 13 are both greater than or equal to 4 mm, which can reduce the risk of the first end plate 12 and the second end plate 13 being broken down by the electric field formed in the cavity and improve reliability.

[0048] like Figure 1 , Figure 2 and Figure 4As shown, optionally, the positive electrode assembly 2 includes a positive electrode plate 21 and an insulating member 22, and the insulating member 22 is covered on the outer periphery of the positive electrode plate 21. An embedded groove 131 is provided in the second end plate 13 to provide a bearing structure for the positive electrode assembly 2, and the positive electrode plate 21 covered with the insulating member 22 is embedded in the embedded groove 131. The insulating member 22 completely covers the outer periphery of the positive electrode plate 21, so that after the positive electrode plate 21 is installed in the embedded groove 131, the insulation between the positive electrode plate 21 and the second end plate 13 can be achieved through the insulating member 22, so that the positive electrode plate 21 can be energized to form an electric field between the filament body 31 as the positive electrode and the negative electrode, thereby avoiding the problem of charging the discharge chamber body 1 and easily contacting and short-circuiting with the filament body 31. The embedded groove 131 can be a cavity provided inside the second end plate 13.

[0049] Optionally, the insulating member 22 is made of boron nitride. Boron nitride has high electrical insulation and stable chemical properties, and can withstand high temperature and high pressure, which helps to ensure the reliability of insulation between the positive electrode plate 21 and the discharge chamber body 1. The insulating member 22 can be a thin layer structure coated on the outside of the positive electrode plate 21, or it can be other forms such as a shell structure.

[0050] like Figure 1 , Figure 2 and Figure 4 As shown, optionally, the cross-sectional area of ​​the positive electrode plate 21 is the same as the cross-sectional area of ​​the cavity. Since the material vapor and the electrons emitted by the filament body 31 are distributed in the cavity, making the cross-sectional area of ​​the positive electrode plate 21 and the cavity the same helps to form an electric field with a sufficient range in the cavity, ensuring that the electrons in the cavity can be affected by the electric field, accelerating the filament body 31 to pass through the window portion 121 to the second end plate 13, and improving the utilization rate of the electrons.

[0051] like Figure 1 , Figure 2 and Figure 4 As shown, optionally, the device further includes a power supply 4, which is independent of the discharge chamber body 1, and the positive electrode assembly 2 further includes a positive wiring member 23. The positive wiring member 23 electrically connects the positive electrode plate 21 and the power supply 4 respectively, so that the positive electrode plate 21 can be used as a positive electrode to form an electric field with the filament body 31 as a negative electrode.

[0052] Optionally, the positive wiring member 23 includes a conductive portion and an insulating portion. The conductive portion electrically connects the positive electrode plate 21 and the power supply member 4, respectively, so that the positive electrode plate 21 is positively charged. Since the positive electrode assembly 2 is disposed in the embedded groove 131 of the second end plate 13, and the positive electrode assembly 2 needs to be relatively insulated from the second end plate 13, the conductive portion led out from the positive electrode plate 21 needs to be relatively insulated from the discharge chamber body 1. The insulating portion is sleeved on the periphery of the conductive portion, so that the conductive portion and the discharge chamber body 1 are relatively insulated, avoiding the problem that the discharge chamber body 1 is charged and easily contacts and short-circuits with the filament body 31. Specifically, the conductive portion can be a wire; the insulating portion can be an insulating ceramic, which is coated on the periphery of the wire with the insulating ceramic.

[0053] like Figure 2 , Figure 4 and Figure 5 As shown, optionally, the positive electrode assembly 2 further includes a clamping member 24 and a conductive member 25. The clamping member 24 is electrically connected to the positive wiring member 23, and the clamping member 24 clamps one end of the conductive member 25 to achieve electrical connection, so that the positive wiring member 23 can be electrically connected to the conductive member 25. The other end of the conductive member 25 is electrically connected to the power supply member 4, thereby achieving electrical connection between the positive wiring member 23 and the power supply member 4. The conductive member 25 is used to achieve electrical connection between the clamping member 24 and the power supply member 4. The clamping member 24 achieves electrical connection between the positive wiring member 23 and the conductive member 25 by clamping, so that the electric energy of the power supply member 4 can be transmitted to the positive electrode plate 21 through the conductive member 25, the clamping member 24 and the positive wiring member 23, so that the positive electrode plate 21 is positively charged. The arrangement of the clamping member 24 helps to conveniently connect or disconnect the circuit, thereby facilitating disassembly.

[0054] The clamping member 24 may include a U-shaped portion and a fastening portion. The U-shaped portion clamps the positive wiring member 23 and the conductive member 25 to achieve electrical connection between the positive wiring member 23 and the conductive member 25 through the U-shaped portion, and then the two ends of the U-shaped portion are fixed by the fastening portion to achieve reliable connection. The U-shaped portion may be a plate-like structure with a U-shaped cross section, and the fastening portion may be a bolt-nut screw connection structure or other structures such as a screw. The U-shaped portion is clamped by the fastening portion to the positive wiring member 23 and the conductive member 25, so that the positive wiring member 23 and the conductive member 25 maintain reliable contact, thereby achieving electrical connection. The conductive member 25 may be a wire or a conductive rod.

[0055] like Figure 1 , Figure 2 and Figure 4As shown, optionally, the filament assembly 3 further includes a connector 32, and the connector 32 electrically connects the filament body 31 and the power supply 4 respectively. The connector 32 is used to realize the electrical connection between the filament body 31 and the power supply 4, so that the filament body 31 is negatively charged, so that it can be energized as a negative electrode to work together with the positive electrode assembly 2, thereby forming an electric field in the cavity, so that the electrons can be accelerated. The connector 32 is a structure that can realize the electrical connection between the filament body 31 and the power supply 4, which can be a wire, a conductive rod or other conductive structure, or a structure that is the same as the positive wiring member 23. The power supply 4 can be a structure that can provide power for the device, and the power supply 4 can be supported and installed by a supporting structure. Its specific structure, setting position and size are not limited, and can be set as needed; the positive electrode plate 21 is electrically connected to the positive electrode plate 21 through the positive electrode of the power supply 4, and the negative electrode of the power supply 4 is electrically connected to the filament body 31, so that the positive electrode plate 21 and the filament body 31 are respectively positively charged and negatively charged, so that an electric field for accelerating electrons can be formed in the cavity. Since the contact between the filament body 31 and the first end plate 12 does not cause a short circuit, the sudden load change of the power supply unit 4 can be alleviated, and the protection of the power supply unit 4 can be improved. The filament body 31 can be arranged at one end of the discharge chamber body 1 through a filament support, and the structure of the filament support is not limited. The structure and material parameters of the filament body 31 can be determined according to actual conditions.

[0056] It is understandable that the device also includes necessary structures for connection, support, drive, limit, conduction, insulation and control functions so that the device can operate normally; the shape, size and number of each part of the device can be determined as needed to achieve the corresponding function. Since the principle of arcing in the arc chamber 100, the movement and function of electrons in the discharge chamber body 1, etc. have related technologies, they will not be described in detail here.

[0057] The implementation principle of an arc chamber discharge device in the embodiment of the present application is as follows: the positive electrode assembly 2 is embedded in the second end plate 13, and the filament body 31 is spaced apart on the side of the first end plate 12 away from the second end plate 13, and power is supplied through the power supply unit 4, so that the positive electrode assembly 2 is used as the positive electrode and the filament body 31 is used as the negative electrode, and an electric field is formed between the filament body 31 and the positive electrode assembly 2, so that the electric field range is from the filament assembly 3 to the second end plate 13, so that there is an electric field in the cavity, so that the electrons emitted by the filament body 31 can be accelerated between the filament body 31 and the positive electrode assembly 2; compared with setting the positive electrode assembly 2 in the first end plate 13, the positive electrode assembly 2 is arranged in the second end plate 13, and the positive electrode assembly 2 is arranged in the second end plate 13. In one end plate 12, the device can increase the acceleration distance of electrons, so that the electrons can obtain a greater speed, thereby having better penetration ability, and helping to interact with the material vapor below the cavity near the second end plate 13, so that arcing can be easier and the arcing time can be shortened; and since the positive electrode assembly 2 is arranged on the second end plate 13, the positive electrode assembly 2 is relatively insulated from the discharge chamber body 1, so when the filament body 31 sinks and contacts the discharge chamber body 1, since the discharge chamber body 1 is not charged, the problem of short circuit caused by the negatively charged filament body 31 contacting the discharge chamber body 1 can be avoided, thereby ensuring the normal use of the power supply 4.

[0058] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. An arc chamber discharge device, characterized in that: The arc chamber (100) is connected to a crucible (200), and the crucible (200) is used to transport material vapor to the arc chamber (100). The arc chamber discharge device comprises: A discharge chamber body (1), the discharge chamber body (1) comprising an outer shell (11), a first end plate (12) and a second end plate (13), the first end plate (12) and the second end plate (13) being respectively arranged at two opposite ends of the outer shell (11) along a length direction, a cavity being formed between the outer shell (11), the first end plate (12) and the second end plate (13), the cavity containing material vapor, and a window portion (121) being provided on the first end plate (12); A positive electrode assembly (2), the positive electrode assembly (2) being arranged on the second end plate (13), the positive electrode assembly (2) being used to form a positive electrode when energized, and the positive electrode assembly (2) being relatively insulated from the discharge chamber body (1); The filament assembly (3) comprises a filament body (31), wherein the filament body (31) is energized to form a negative electrode, the filament body (31) is arranged on a side of the first end plate (12) away from the second end plate (13), the filament body (31) and the window portion (121) are arranged at a distance, the filament body (31) is used to emit electrons, and the electrons can pass through the window portion (121) and enter the cavity of the discharge chamber body (1) to ionize the material vapor, and an acceleration region is formed between the filament body (31) and the positive electrode assembly (2), so that the electrons are accelerated in the acceleration region.

2. The arc chamber discharge device according to claim 1, characterized in that: The positive electrode assembly (2) comprises a positive electrode plate (21) and an insulating member (22); the insulating member (22) is provided on the outer periphery of the positive electrode plate (21); an embedded groove (131) is provided in the second end plate (13); and the positive electrode plate (21) covered with the insulating member (22) is arranged in the embedded groove (131).

3. The arc chamber discharge device according to claim 2, characterized in that: The cross-sectional area of ​​the positive electrode plate (21) is the same as the cross-sectional area of ​​the cavity.

4. The arc chamber discharge device according to claim 2, characterized in that: It also comprises a power supply component (4), the power supply component (4) being independent of the discharge chamber body (1), and the positive electrode assembly (2) further comprising a positive wiring component (23), the positive wiring component (23) being electrically connected to the positive electrode plate (21) and the power supply component (4) respectively.

5. The arc chamber discharge device according to claim 4, characterized in that: The positive wiring member (23) comprises a conductive portion and an insulating portion, the conductive portion being electrically connected to the positive electrode plate (21) and the power supply member (4) respectively, and the insulating portion being sleeved on the outer periphery of the conductive portion.

6. The arc chamber discharge device according to claim 4, characterized in that: The positive electrode assembly (2) further comprises a clamping member (24) and a conductive member (25), wherein the clamping member (24) is electrically connected to the positive terminal member (23), and the clamping member (24) clamps one end of the conductive member (25) to achieve electrical connection, and the other end of the conductive member (25) is electrically connected to the power supply member (4).

7. The arc chamber discharge device according to claim 4, characterized in that: The filament assembly (3) further comprises a connecting piece (32), wherein the connecting piece (32) electrically connects the filament body (31) and the power supply unit (4) respectively.

8. The arc chamber discharge device according to claim 2, characterized in that: The insulating member (22) is made of boron nitride.

9. The arc chamber discharge device according to claim 1, characterized in that: The thickness of the first end plate (12) and the second end plate (13) are both greater than or equal to 4 mm.

10. The arc chamber discharge device according to claim 1, characterized in that: The discharge chamber body (1) is made of graphite.

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