Device for improving coating uniformity and production line

Abstract

The utility model relates to a device for improving coating uniformity and a production line. The device comprises a base and a movable sheet assembly, the base is arranged above the evaporation source, and a correction window is formed in the base; the number of the moving piece assemblies is two, the two moving piece assemblies are oppositely arranged on the base, each moving piece assembly comprises a first moving piece and two second moving pieces, the first moving pieces are movably connected to the base in the X-axis direction and extend into the correction window, and the second moving pieces are movably connected to the base in the X-axis direction and extend into the correction window. The two second moving pieces are movably arranged on the section, located in the correction window, of the first moving piece in the Y-axis direction. According to the device, the size width of the correction window in the X-axis direction and the Y-axis direction can be controlled by moving the positions of the first moving piece and the second moving piece, so that the range of evaporation particles output by an evaporation source is shielded and controlled, film layers in the middle area and the areas on the two sides of a substrate have higher uniformity, and the uniformity of the film layers is improved. And the requirements of customers are met.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a device and a production line for improving coating uniformity. Background Art

[0002] Vacuum coating refers to a method of heating metal or non-metal materials under high vacuum conditions to evaporate and condense on the surface of the coated object (metal, semiconductor or insulator) to form a thin film. Vacuum coating equipment generally includes structures such as evaporation source and crystal oscillator.

[0003] In the vacuum coating process, when the substrate flowing on the production line is coated by an evaporation source, the film thickness in the middle area of ​​the substrate is often thicker than the film thickness in the areas on both sides of the substrate, which cannot meet customers' higher requirements for product coating uniformity. Utility Model Content

[0004] To this end, the technical problem to be solved by the utility model is to overcome the problem that in the prior art, when a substrate flowing on a production line is coated by an evaporation source, the film thickness in the middle area of ​​the substrate is often thicker than the film thickness in the areas on both sides of the substrate, and the customer's higher requirements for product coating uniformity cannot be met.

[0005] In order to solve the above technical problems, the utility model provides a device for improving the uniformity of coating, which is used to assist vacuum coating equipment in improving the uniformity of film formation. The vacuum coating equipment includes a vertically arranged evaporation source, including:

[0006] A base, the base is horizontally arranged above the evaporation source, and a correction window is provided on the base;

[0007] A moving sheet assembly, wherein the moving sheet assembly is provided with two groups, and the two groups of moving sheet assemblies are arranged opposite to each other on the base, and the moving sheet assemblies each include a first moving sheet and two second moving sheets, the first moving sheet is movably connected to the base along the X-axis direction and extends into the correction window, and the two second moving sheets are movably arranged along the Y-axis direction on the section of the first moving sheet located in the correction window.

[0008] In one embodiment of the utility model, the first movable plate is T-shaped, including a first section and a second section vertically connected to the middle position of the first section, and the two ends of the first section are respectively provided with a first waist-shaped hole extending along its width direction, and the base is provided with first connecting holes corresponding to the two first waist-shaped holes respectively, and the first movable plate is movably connected to the base at the first waist-shaped hole and the first connecting hole by bolts; the second section extends into the correction window, and the second movable plate is movably connected to the second section parallel to the length direction of the first section.

[0009] In one embodiment of the utility model, a plurality of second waist-shaped holes extending along the length direction are opened at one end of the second movable plate, and a plurality of second connecting holes corresponding to the second waist-shaped holes are symmetrically opened on both sides of the second section, and the second movable plate is movably connected to the second section at the second waist-shaped holes and the second connecting holes by bolts.

[0010] In one embodiment of the present invention, the length of the second moving piece is smaller than the length of the first section, and the width of the second moving piece is equal to the length of the second section.

[0011] In one embodiment of the present invention, the correction window is a rectangular through hole, the two first movable sheets are movably connected to positions close to the long sides of the correction window, and the length of the first section is equal to the length of the correction window.

[0012] In an embodiment of the present invention, two extension parts are symmetrically arranged on both sides of the base, and bolt holes are opened on the extension parts.

[0013] In one embodiment of the present invention, a top plate is further included. The top plate is a ring-shaped structure. The top plate is connected to the first moving sheet in parallel and surrounds the second moving sheet.

[0014] In an embodiment of the present invention, the base, the first movable piece and the second movable piece are all metal sheet parts.

[0015] In one embodiment of the present invention, one end of the second movable piece away from the first movable piece is arc-shaped.

[0016] A production line comprises a device for improving the uniformity of coating as described in any one of the above items.

[0017] The above technical solution of the utility model has the following advantages compared with the prior art:

[0018] The utility model discloses a device and production line for improving the uniformity of coating, comprising a base and a moving sheet assembly; the base is arranged above the evaporation source, and a correction window is provided on the base; the moving sheet assembly is provided with two groups, and the two groups of moving sheet assemblies are arranged opposite to each other on the base, and the moving sheet assemblies each include a first moving sheet and two second moving sheets, the first moving sheet is movably connected to the base along the X-axis direction and extends into the correction window, and the two second moving sheets are movably arranged along the Y-axis direction on the section of the first moving sheet located in the correction window. By moving the positions of the first moving sheet and the second moving sheet, the device can control the size width of the correction window in the X-axis direction and the Y-axis direction, thereby shielding and controlling the range of the evaporated particles output by the evaporation source, so that the film layer in the middle area and the two side areas of the substrate has higher uniformity to meet the needs of customers. The structure of the whole device is simple, and it is convenient to install and maintain, and is suitable for practical use. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to make the content of the utility model easier to understand, the utility model is further described in detail according to the specific embodiments of the utility model in combination with the accompanying drawings, wherein

[0020] Figure 1 It is a schematic diagram of the relative positions between the device for improving the uniformity of coating and the evaporation source in a preferred embodiment of the utility model;

[0021] Figure 2 It is a structural schematic diagram of a base of a device for improving coating uniformity in a preferred embodiment of the utility model;

[0022] Figure 3 It is a schematic diagram of the overall structure of a device for improving the uniformity of coating according to a preferred embodiment of the utility model;

[0023] Figure 4 It is a schematic diagram of the overall structure of a moving sheet assembly of a device for improving coating uniformity in a preferred embodiment of the utility model;

[0024] Figure 5 It is an exploded view of a moving sheet assembly of a device for improving coating uniformity according to a preferred embodiment of the utility model.

[0025] Explanation of the reference numerals in the specification: 1. base; 11. correction window; 12. extension portion; 2. movable sheet assembly; 21. first movable sheet; 211. first section; 212. second section; 213. first waist-shaped hole; 22. second movable sheet; 221. second waist-shaped hole; A. evaporation source. DETAILED DESCRIPTION

[0026] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0027] Embodiment 1

[0028] Reference Figure 1-Figure 5 As shown, the utility model is a device for improving the uniformity of coating, which is used to assist the vacuum coating equipment to improve the uniformity of film formation. The vacuum coating equipment includes a vertically arranged evaporation source, including:

[0029] A base 1, the base 1 is horizontally arranged above the evaporation source A, and a correction window 11 is opened on the base 1;

[0030] The movable sheet assembly 2 is provided with two groups, and the two groups of movable sheet assemblies 2 are arranged opposite to each other on the base 1. The movable sheet assembly 2 includes a first movable sheet 21 and two second movable sheets 22. The first movable sheet 21 is movably connected to the base 1 along the X-axis direction and extends into the correction window 11. The two second movable sheets 22 are movably arranged along the Y-axis direction on the section of the first movable sheet 21 located in the correction window 11.

[0031] Specifically, during vacuum coating, the substrate is transported by the conveying device to the position of the base 1. When the substrate passes through the correction window 11 of the base 1, the evaporation source located below the correction window 11 coats the moving substrate. By moving the positions of the first movable sheet 21 and the second movable sheet 22, the size width of the correction window 11 in the X-axis direction and the Y-axis direction (i.e., the direction in which the substrate moves and the direction perpendicular to the direction in which the substrate moves) can be controlled, thereby shielding and controlling the range of evaporated particles output by the evaporation source, so that the film layer in the middle area and the two side areas of the substrate has higher uniformity to meet customer needs.

[0032] Reference Figure 3 , Figure 4 and Figure 5 As shown, further, the first movable sheet 21 is T-shaped, including a first section 211 and a second section 212 vertically connected to the middle position of the first section 211, and both ends of the first section 211 are respectively provided with a first waist-shaped hole 213 extending along its width direction, and the base 1 is provided with first connecting holes corresponding to the two first waist-shaped holes 213 respectively, and the first movable sheet 21 is movably connected to the base 1 at the first waist-shaped hole 213 and the first connecting hole by bolts; the second section 212 extends into the correction window 11, and the second movable sheet 22 is movably connected to the second section 212 parallel to the length direction of the first section 211.

[0033] Furthermore, a plurality of second waist-shaped holes 221 extending along the length direction are provided at one end of the second movable sheet 22, and a plurality of second connection holes corresponding to the second waist-shaped holes 221 are symmetrically provided on both sides of the second section 212, and the second movable sheet 22 is movably connected to the second section 212 at the second waist-shaped holes 221 and the second connection holes by bolts. Specifically, the first waist-shaped hole 213 and the second waist-shaped hole 221 can be used to adjust the position of the first movable sheet 21 and the second movable sheet 22 in a small range, so as to adjust the size of the correction window 11 in a wide range. Specifically, the first movable sheet 21 and the second movable sheet 22 can be fastened by bolts and nuts, and when the two movable sheets need to be adjusted, the fastening method of bolts and nuts is also convenient for disassembly and assembly, and is more convenient to use.

[0034] Furthermore, the length of the second movable piece 22 is smaller than the length of the first section 211 , and the width of the second movable piece 22 is equal to the length of the second section 212 .

[0035] Reference Figure 2 As shown, further, the correction window 11 is a rectangular through hole, the two first movable pieces 21 are movably connected to positions close to the long sides of the correction window 11 , and the length of the first section 211 is equal to the length of the correction window 11 .

[0036] Furthermore, two extension parts 12 are symmetrically arranged on both sides of the base 1 , and bolt holes are provided on the extension parts 12 to facilitate the connection and fixation of the base 1 .

[0037] Furthermore, it also includes a top plate, which is a ring-shaped structure, connected in parallel to the first moving sheet 21 and surrounds the second moving sheet 22. It can be imagined that the second moving sheet 22 is connected to the top of the first moving sheet 21, and the top of the entire moving sheet assembly 2 is not flat; the top plate is arranged in parallel on the first moving sheet 21, so that the top of the top plate is not lower than the top of the second moving sheet 22, so that the substrate can pass through the correction window 11 smoothly through the top surface of the top plate to complete the coating.

[0038] Furthermore, the base 1 , the first movable piece 21 and the second movable piece 22 are all metal sheet metal parts, but are not limited to metal parts.

[0039] Furthermore, the end of the second moving piece 22 away from the first moving piece 21 is arc-shaped. The first moving piece 21 and the second moving piece 22 are formed of multiple lines, including straight lines and curves, and the specific shapes of the two moving pieces can be set according to actual conditions.

[0040] Embodiment 2

[0041] The utility model also discloses a production line, comprising a device for improving the uniformity of coating as described in any one of the above items, as well as an evaporation source and a crystal oscillator.

[0042] Obviously, the above embodiments are merely examples for the purpose of clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention of the utility model.

Claims

1. A device for improving the uniformity of coating, used to assist vacuum coating equipment in improving the uniformity of film formation, the vacuum coating equipment comprising a vertically arranged evaporation source, characterized in that: include: A base, the base is horizontally arranged above the evaporation source, and a correction window is provided on the base; A moving sheet assembly, wherein the moving sheet assembly is provided with two groups, and the two groups of moving sheet assemblies are arranged opposite to each other on the base, and the moving sheet assemblies each include a first moving sheet and two second moving sheets, the first moving sheet is movably connected to the base along the X-axis direction and extends into the correction window, and the two second moving sheets are movably arranged along the Y-axis direction on the section of the first moving sheet located in the correction window.

2. The device for improving coating uniformity according to claim 1, characterized in that: The first movable plate is T-shaped, including a first section and a second section vertically connected to the middle of the first section. The two ends of the first section are respectively provided with a first waist-shaped hole extending along its width direction. The base is provided with first connecting holes corresponding to the two first waist-shaped holes respectively. The first movable plate is movably connected to the base at the first waist-shaped hole and the first connecting hole by bolts; the second section extends into the correction window, and the second movable plate is movably connected to the second section parallel to the length direction of the first section.

3. The device for improving coating uniformity according to claim 2, characterized in that: One end of the second movable plate is provided with a plurality of second waist-shaped holes extending along its length direction, and both sides of the second section are symmetrically provided with a plurality of second connecting holes corresponding to the second waist-shaped holes respectively, and the second movable plate is movably connected to the second section at the second waist-shaped holes and the second connecting holes by bolts.

4. The device for improving coating uniformity according to claim 2, characterized in that: The length of the second moving piece is smaller than the length of the first section, and the width of the second moving piece is equal to the length of the second section.

5. The device for improving coating uniformity according to claim 4, characterized in that: The correction window is a rectangular through hole, the two first movable sheets are movably connected to positions close to the long sides of the correction window, and the length of the first section is equal to the length of the correction window.

6. The device for improving coating uniformity according to claim 1, characterized in that: Two extension parts are symmetrically arranged on both sides of the base, and bolt holes are opened on the extension parts.

7. The device for improving coating uniformity according to claim 1, characterized in that: It also includes a top plate, which is a ring-shaped structure. The top plate is parallelly connected to the first moving sheet and surrounds the second moving sheet.

8. The device for improving coating uniformity according to claim 1, characterized in that: The base, the first movable piece and the second movable piece are all metal sheet parts.

9. The device for improving coating uniformity according to claim 1, characterized in that: One end of the second moving piece away from the first moving piece is arc-shaped.

10. A production line, characterized in that: The invention comprises a device for improving coating uniformity as described in any one of claims 1 to 9.

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