Planar sample stage suitable for SALD equipment
By using a groove-like structure to fix the anti-slip structure on the sample table of the SALD equipment and using a flexible anti-slip structure to increase the contact area, the problem that the sample table is difficult to compatible with substrates of different sizes and materials is solved, and the stable fixation of the substrate and uniformity of the film layer are achieved.
Patent Information
- Application Number
- CN202421499624.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-27
- Publication Date
- 2025-05-16
- Estimated Expiration
- 2034-06-27
AI Technical Summary
The existing SALD equipment sample tables are difficult to compatible with substrates of different sizes and materials, and the presence of a limiting device will affect the airflow above the substrate, resulting in uneven film layers.
A planar sample table suitable for SALD equipment is designed, and the anti-slip structure is fixed with a groove-like structure, the substrate is fixed by friction between the anti-slip structure and the substrate, and the flexible anti-slip structure is used to increase the contact area and improve the anti-slip effect.
Compatibility with substrates of different sizes and materials is achieved, the influence of the limiting device on air flow is avoided, and the fixing stability of the substrate and the uniformity of the film layer are improved.
Smart Images
Figure CN222878083U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of atomic layer deposition equipment, and particularly relates to a planar sample stage suitable for SALD equipment. Background Art
[0002] In atomic layer deposition (ALD), precursors are sequentially deposited onto the substrate via short pulses while being physically separated by an intermediate purge step. Spatial atomic layer deposition (SALD) is a variant of ALD, where film growth is achieved by exposing the substrate to locations containing different precursors via the movement of the sample stage. Normally, the movement direction of the SALD sample stage is perpendicular to the injection direction of the precursors. In order to prevent the reciprocating motion of the sample stage from causing the precursor molecules to be entrained from the injected area to the area where another precursor is injected, the sample stage is required to have a faster movement speed. The substrate is fixed on the sample stage and reciprocates with the sample stage. There are usually two ways to fix the substrate. The first method is to place the substrate in the sample slot on the sample stage, and the second method is to limit the movement of the substrate with a limit device.
[0003] The first method has the following disadvantages: different materials have different thermal expansion coefficients. For a single material substrate (such as aluminum alloy, the thermal expansion coefficient is 22.3-23.9*10 -6 / ℃) is not compatible with other materials with large differences in thermal expansion coefficients (such as nickel-chromium steel, 14*10 -6 / ℃). Assuming that the sample stage size is determined based on the thermal expansion coefficient of aluminum alloy, when the substrate is replaced with glass with a smaller thermal expansion coefficient, the sample moves relative to the groove and continuously hits both sides, causing uneven ALD reaction and substrate breakage. If it is replaced with a material with a larger thermal expansion coefficient (such as aluminum alloy, the thermal expansion coefficient is 22.3-23.9*10 -6 / ℃), the sample cannot fall into the groove.
[0004] Although the second method can reduce the influence of thermal expansion by fine-tuning the limiting device, the existence of the limiting device will inevitably affect the airflow above the substrate, which may easily lead to uneven film layer on the substrate. Utility Model Content
[0005] In view of the deficiencies of the prior art, the purpose of the present utility model is to provide a planar sample stage which is compatible with substrates of different sizes and does not require a limiting device.
[0006] In order to achieve the above-mentioned utility model purpose, the technical solution adopted by the utility model includes:
[0007] A planar sample stage suitable for SALD equipment comprises a sample stage and at least one anti-slip structure.
[0008] The sample stage has a flat bearing surface, and at least one groove-shaped structure is arranged on the bearing surface;
[0009] The anti-slip structure comprises a first part and a second part which are fixedly combined, wherein the first part is fixedly arranged inside the groove-shaped structure, and the second part protrudes above the supporting table, and the friction resistance provided by the second part to the substrate placed on the supporting table is greater than the friction resistance provided by the supporting table to the substrate.
[0010] Furthermore, at least the second part of the anti-slip structure is a flexible structure, and when the second part is pressed by the substrate, the second part can undergo a recoverable deformation, thereby increasing the contact area between the substrate and the second part.
[0011] Furthermore, the anti-slip structure is a flexible structure as a whole.
[0012] Furthermore, a plurality of groove structures are arranged on the bearing plane.
[0013] Furthermore, a plurality of anti-slip structures arranged in the same groove-shaped structure are arranged at intervals along the lateral extension direction of the groove-shaped structure.
[0014] Furthermore, an anti-slip structure is correspondingly arranged in each groove-shaped structure, a first part of the anti-slip structure completely fills the groove-shaped structure, and a second part of the anti-slip structure has the same contour structure as the groove-shaped structure.
[0015] Furthermore, each groove-shaped structure extends along the first direction, and a plurality of groove-shaped structures are arranged at intervals along the second direction. The first direction intersects the second direction, and the first direction and the second direction are parallel to the bearing table.
[0016] Furthermore, the groove-shaped structure is a linear structure or a non-linear structure.
[0017] Furthermore, the non-linear structure includes a W-shaped, S-shaped or serpentine structure.
[0018] Furthermore, the plurality of groove-shaped structures have the same shape structure, or at least two of the plurality of groove-shaped structures have different shape structures.
[0019] Compared with the prior art, the advantages of the utility model include:
[0020] 1) The utility model provides a flat sample stage suitable for SALD equipment, which fixes the anti-slip structure through a groove structure, and fixes the substrate through the friction between the anti-slip structure and the substrate. Compared with the traditional fixing method, the utility model has strong versatility and can be compatible with substrates of various sizes and materials. At the same time, the utility model can fix the substrate without a limiting device;
[0021] 2) The utility model provides a planar sample stage suitable for SALD equipment, wherein at least a portion of the anti-slip structure close to the substrate is a flexible structure. When compressed by the substrate, the flexible structure can undergo a recoverable deformation, thereby increasing the contact area between the substrate and the flexible portion, thereby achieving a better anti-slip effect on the substrate. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0023] Figure 1 This is a front view of the first embodiment of the sample stage provided by the utility model;
[0024] Figure 2 It is a top view of the first embodiment of the sample stage provided by the utility model;
[0025] Figure 3 It is a right side view of the first embodiment of the sample stage provided by the utility model;
[0026] Figure 4 It is a top view of the second embodiment of the sample stage provided by the utility model;
[0027] Figure 5 It is a right side view of the second embodiment of the sample stage provided by the utility model;
[0028] Figure 6 It is a top view of the third embodiment of the sample stage provided by the utility model;
[0029] Figure 7 It is a right side view of the third embodiment of the sample stage provided by the utility model;
[0030] Figure 8 This is a front view of a fourth embodiment of a sample stage provided by the utility model;
[0031] Fig. 9 This is a front view of a fifth embodiment of a sample stage provided by the utility model;
[0032] Explanation of the accompanying drawings: 1. Sample table; 2. Groove structure; 3. Anti-slip structure. DETAILED DESCRIPTION
[0033] In view of the deficiencies in the prior art, the inventor of this case has proposed the technical solution of the utility model after long-term research and extensive practice. The technical solution, its implementation process and principle will be further explained as follows.
[0034] The utility model provides a planar sample stage suitable for a SALD device, the planar sample stage comprising a sample stage and at least one anti-slip structure, the sample stage having a flat bearing surface, at least one groove-shaped structure being arranged on the bearing surface, one groove-shaped structure or multiple groove-shaped structures being arranged on the bearing surface, more specifically, each groove-shaped structure extends along a first direction, multiple groove-shaped structures are arranged at intervals along a second direction, the first direction intersects with the second direction, and the first direction and the second direction are parallel to the bearing surface.
[0035] The anti-slip structure comprises a first part and a second part which are fixedly combined, the first part being fixedly arranged inside the groove-shaped structure, the second part being protruded above the bearing table, the friction resistance provided by the second part to the substrate placed on the bearing table being greater than the friction resistance provided by the bearing table to the substrate, and the substrate is fixed by the friction force between the part of the anti-slip structure protruding above the bearing table and the substrate. Compared with the traditional fixing method, the utility model has strong versatility and can be compatible with substrates of various sizes and various materials. At the same time, the utility model can fix the substrate without a limiting device.
[0036] On the basis of the above, at least the second part of the anti-slip structure is a flexible structure. When the second part is compressed by the substrate, the second part can undergo a recoverable deformation, and the contact area between the substrate and the second part increases accordingly, so that the anti-slip effect of the substrate is better. Preferably, the anti-slip structure as a whole is a flexible structure. The flexible structure is a heat-resistant flexible structure. Since SALD equipment usually needs to be heated, the heating temperature is 100-180°C. The sample stage is in the chamber and is in a heated state for a long time, so the anti-slip structure needs to have the function of long-term heat-resistant work. The material of the anti-slip structure is preferably silicone rubber (such as methyl vinyl silicone rubber (MVQ), etc.), and secondly it can also be fluororubber, hydrogenated nitrile rubber (HNBR), etc.
[0037] In some embodiments, multiple anti-slip mechanisms can be set in the same groove-like structure (for example, multiple anti-slip structures are arranged at intervals along the lateral extension direction of the groove-like structure), or one anti-slip structure can be set. Specifically, the first part of the anti-slip structure completely fills the groove-like structure, and the second part of the anti-slip structure has the same contour structure as the groove-like structure, that is, the second part of the anti-slip structure can be the same shape as the groove-like structure, or it can be a shape similar to the groove-like structure.
[0038] Specifically, the groove-like structure can be a linear structure or a non-linear structure; more specifically, the non-linear structure includes a W-shaped, S-shaped or serpentine structure; multiple groove-like structures can be structures of the same shape or at least two can have structures of different shapes.
[0039] Embodiment 1:
[0040] like Figure 1-3 As shown, a planar sample stage suitable for SALD equipment includes a sample stage 1, on which a linear groove structure 2 is provided, and the linear groove structure 2 is filled with an anti-slip structure 3 made of methyl vinyl silicone rubber, and the uppermost end of the anti-slip structure 3 is 1 mm higher than the uppermost end of the sample stage 1.
[0041] Embodiment 2:
[0042] like Figure 4-5 As shown, a planar sample stage suitable for SALD equipment includes a sample stage 1, on which a W-shaped groove structure 2 is provided. The W-shaped groove structure 2 is filled with a fluororubber anti-slip structure 3, and the uppermost end of the anti-slip structure 3 is 0.5 mm higher than the uppermost end of the sample stage 1.
[0043] Embodiment three:
[0044] like Figure 6-7 As shown, a planar sample stage suitable for SALD equipment includes a sample stage 1, on which a serpentine groove structure 2 is provided, and the serpentine groove structure 2 is filled with a hydrogenated nitrile rubber anti-slip structure 3, and the uppermost end of the anti-slip structure 3 is 0.8 mm higher than the uppermost end of the sample stage 1.
[0045] Embodiment 4:
[0046] The difference between this embodiment and the first embodiment is that: Figure 8 As shown, the anti-slip structure 3 is intermittently arranged in the linear groove structure 2.
[0047] Embodiment five:
[0048] The difference between this embodiment and the first embodiment is that: Fig. 9 As shown, the uppermost end of the anti-slip structure 3 is flush with the uppermost end of the sample stage 1 .
[0049] It should be understood that the above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.
Claims
1. A planar sample stage suitable for a SALD device, characterized in that: include: A sample stage, wherein the sample stage has a flat bearing surface, and at least one groove-shaped structure is arranged on the bearing surface; At least one anti-slip structure, the anti-slip structure has a first part and a second part fixedly combined, the first part is fixedly arranged inside the groove-shaped structure, the second part protrudes above the supporting table, and the friction resistance provided by the second part to the substrate placed on the supporting table is greater than the friction resistance provided by the supporting table to the substrate.
2. A planar sample stage suitable for SALD equipment according to claim 1, characterized in that: At least the second part of the anti-slip structure is a flexible structure, and when the second part is pressed by the substrate, the second part can undergo a recoverable deformation, thereby increasing the contact area between the substrate and the second part; And / or, the flexible structure is a heat-resistant flexible structure.
3. A planar sample stage suitable for SALD equipment according to claim 2, characterized in that: The anti-slip structure is a flexible structure as a whole.
4. The planar sample stage suitable for SALD equipment according to claim 1, characterized in that: A plurality of groove-shaped structures are arranged on the bearing plane.
5. The planar sample stage suitable for SALD equipment according to claim 1, characterized in that: The plurality of anti-slip structures arranged in the same groove-shaped structure are arranged at intervals along the lateral extension direction of the groove-shaped structure.
6. The planar sample stage suitable for SALD equipment according to claim 1, characterized in that: An anti-slip structure is correspondingly arranged in each groove-shaped structure, a first part of the anti-slip structure completely fills the groove-shaped structure, and a second part of the anti-slip structure has the same contour structure as the groove-shaped structure.
7. A planar sample stage suitable for SALD equipment according to claim 5 or 6, characterized in that: Each groove-shaped structure extends along the first direction, and a plurality of groove-shaped structures are arranged at intervals along the second direction. The first direction intersects the second direction, and the first direction and the second direction are parallel to the bearing table surface.
8. A planar sample stage suitable for SALD equipment according to claim 7, characterized in that: The groove-shaped structure is a linear structure or a non-linear structure.
9. A planar sample stage suitable for SALD equipment according to claim 8, characterized in that: Non-linear structures include W-shaped, S-shaped or serpentine structures.
10. A planar sample stage suitable for SALD equipment according to claim 9, characterized in that: The plurality of groove-shaped structures are of the same shape, or at least two of the plurality of groove-shaped structures are of different shape.