Heat preservation device of crystal growth furnace

Abstract

The embodiment of the utility model provides a heat preservation device of a crystal growth furnace, and relates to the technical field of silicon carbide crystal growth equipment. The heat preservation device comprises a supporting frame, a mounting frame and a heat preservation assembly. The supporting frame is used for being arranged on the outer side of the crystal growth furnace, the mounting frame is connected with the supporting frame, the mounting frame comprises a plurality of mounting pieces arranged around a preset circumference at intervals, each mounting piece is provided with a plurality of conveying pieces sequentially arranged in the height direction, the heat preservation assembly comprises a plurality of first heat preservation pieces, and each first heat preservation piece is used for mounting the corresponding conveying piece; the conveying piece is used for driving the first heat preservation piece to move in the radial direction of the preset circumference. An operator can adjust the moving condition of the first heat preservation part on the conveying part on the mounting part in the radial direction of the preset circumference to control the stretching condition of the first heat preservation part in the radial direction of the preset circumference so as to form different arrangement shapes on the crystal growth furnace, so that the condition that the operator cuts the graphite soft felt under different crystal growth conditions is avoided, and the working efficiency is improved. And the consumption cost of the graphite soft felt is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide crystal growth equipment, in particular to a heat preservation device for a crystal growth furnace. Background Art

[0002] Silicon carbide (SiC), as an emerging third-generation semiconductor core material, has excellent properties such as wide bandgap, high critical breakdown electric field strength, high electron mobility, good radiation resistance and chemical stability. This makes it an important substrate wafer material with wide applications, showing good application prospects in the fields of aviation devices, new energy vehicles, rail transportation and household appliances.

[0003] The inventors have found that, at present, the silicon carbide PVT resistor furnace needs to manually cut the graphite felt according to different situations to adjust the arrangement of the graphite felt on the top of the crystal growth furnace. Each cutting will cause the loss of graphite felt, which is very costly. Utility Model Content

[0004] The utility model aims to provide a heat preservation device for a crystal growth furnace, which can avoid cutting of graphite soft felt to reduce costs.

[0005] The embodiment of the utility model is achieved as follows:

[0006] In a first aspect, the utility model provides a heat preservation device for a crystal growth furnace, comprising:

[0007] A support frame, the support frame is used to be arranged outside the crystal growth furnace;

[0008] A mounting frame, the mounting frame is connected to the supporting frame, the mounting frame includes a plurality of mounting members arranged at intervals around a preset circumference, and the mounting member has a plurality of conveying members sequentially arranged along a height direction;

[0009] The heat-insulating component comprises a plurality of first heat-insulating parts, each of which is used to be installed on a conveying part, and the conveying part is used to drive the first heat-insulating part to move radially along a preset circle.

[0010] In an optional embodiment, the support frame is integrally formed, and the support frame is formed with an installation space for being mounted on the crystal growth furnace. The installation space is hollow cylindrical. When the support frame is mounted on the crystal growth furnace, in the radial direction of a preset circle, the installation frame is located on the side of the support frame away from the crystal growth furnace.

[0011] In an optional embodiment, the thermal insulation assembly further includes a second thermal insulation component disposed on the inner side of the support frame, and the second thermal insulation component is used to be opposite to the outer peripheral wall of the crystal growth furnace.

[0012] In an optional embodiment, the support frame is integrally formed, the number of mounting parts is two, the two mounting parts are radially spaced along a preset circumference, and the first insulation parts of the two mounting parts can approach or move away from each other under the drive of the conveying member.

[0013] In an optional embodiment, the support frame is provided with a lifting device, and the lifting device is connected to the mounting frame to drive the mounting frame to move in the height direction.

[0014] In an optional embodiment, moving wheels are provided at the bottom of the support frame.

[0015] In an optional embodiment, for conveying members of the same height, a plurality of first heat-insulating members therein can form a circular heat-insulating sheet.

[0016] In an optional embodiment, the support frame includes a plurality of support members, the plurality of support members are arranged at intervals along a preset circumference, and the plurality of support members are disposed in one-to-one correspondence with the plurality of mounting members.

[0017] In an optional embodiment, a plurality of support members are connected end to end in sequence, and / or a plurality of mounting members are connected end to end in sequence.

[0018] In an optional embodiment, the number of the supporting members and the mounting members is two, and a moving wheel is provided at the bottom of each supporting member.

[0019] The beneficial effect of the embodiment of the utility model is as follows: the embodiment of the utility model provides a heat preservation device for a crystal growth furnace, which includes a support frame, a mounting frame and a heat preservation assembly. The support frame is used to be arranged on the outside of the crystal growth furnace, the mounting frame is connected to the support frame, the mounting frame includes a plurality of mounting parts arranged at intervals around a preset circumference, the mounting part has a plurality of conveying parts arranged in sequence along the height direction, and the heat preservation assembly includes a plurality of first heat preservation parts, each of which is used to install a conveying part, and the conveying part is used to drive the first heat preservation part to move radially along a preset circumference. The operator can adjust the movement of the first heat preservation part on the conveying part on the mounting part in the radial direction of the preset circumference to control the expansion and contraction of the first heat preservation part in the radial direction of the preset circumference to form different arrangement shapes on the crystal growth furnace, thereby avoiding the operator from cutting the graphite soft felt under different crystal growth conditions to reduce the consumption cost of the graphite soft felt. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1A schematic structural diagram of a heat preservation device for a crystal growth furnace provided in an embodiment of the utility model;

[0022] Figure 2 One of the schematic diagrams of the insulation structure formed by a plurality of first insulation components in the insulation device of the crystal growth furnace provided in the embodiment of the utility model;

[0023] Figure 3 The second schematic diagram of the insulation structure formed by multiple first insulation components in the insulation device of the crystal growth furnace provided in the embodiment of the utility model.

[0024] Icons: 1- insulation device of crystal growth furnace; 100- support frame; 200- mounting frame; 210- conveying member; 300- first insulation member; 2- crystal growth furnace. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0028] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0029] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0030] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] The specific structure of a heat preservation device 1 for a crystal growth furnace provided by an embodiment of the utility model and the corresponding technical effects thereof are described in detail below in conjunction with the patent drawings.

[0032] Please refer to Figure 1-Figure 3 The embodiment of the utility model provides a heat preservation device 1 for a crystal growth furnace, which includes a support frame 100, a mounting frame 200 and a heat preservation component.

[0033] The support frame 100 is used to be arranged on the outside of the crystal growth furnace 2, and the mounting frame 200 is connected to the support frame 100. The mounting frame 200 includes a plurality of mounting parts arranged at intervals around a preset circle. The mounting parts have a plurality of conveying parts 210 arranged in sequence along the height direction. The insulation component includes a plurality of first insulation parts 300, each first insulation part 300 is used to install the conveying part 210, and the conveying part 210 is used to drive the first insulation part 300 to move radially along the preset circle.

[0034] It can be understood that when the insulation device 1 of the crystal growth furnace is set on the outside of the crystal growth furnace 2, the mounting part is set on the top of the crystal growth furnace 2, and the conveying part 210 of the mounting part is located on the outside of the crystal growth furnace 2, and the preset circle is parallel to the axis of the crystal growth furnace 2, so that the first insulation part 300 on the conveying part 210 closest to the top of the crystal growth furnace 2 can move to fit the top of the crystal growth furnace 2 under the action of the conveying part 210.

[0035] Since the conveying member 210 can drive the first insulation member 300 to move radially along a preset circle, the operator can adjust the radial movement of the first insulation member 300 on the conveying member 210 on the mounting member in the preset circle to control the expansion and contraction of the first insulation member 300 in the preset circle to form different arrangement shapes on the crystal growth furnace 2, thereby avoiding the operator from cutting the graphite felt under different crystal growth conditions to reduce the consumption cost of the graphite felt.

[0036] In some optional embodiments, the support frame 100 is an integrated support structure, and the support frame 100 is formed with an installation space for being mounted on the crystal growth furnace 2, and the installation space is in the shape of a hollow cylinder. When the support frame 100 is mounted on the crystal growth furnace 2, in the radial direction of a preset circle, the mounting frame 200 is located on the side of the support frame 100 away from the crystal growth furnace 2, that is, the orthographic projection of the mounting component in the axial direction of the crystal growth furnace 2 does not coincide with the orthographic projection of the crystal growth furnace 2 in its own axial direction.

[0037] It should be noted that, in order to facilitate user adjustment, after the support frame 100 is mounted on the crystal growth furnace 2, it can be adjusted so that the axis of the preset circle is coaxial with the axis of the crystal growth furnace 2. Of course, the coaxiality in this embodiment is not limited to being understood as coaxiality in a strict sense, as long as it is roughly coaxial.

[0038] In order to better achieve the heat preservation effect of the crystal growth furnace 2, the heat preservation assembly further includes a second heat preservation member arranged on the inner side of the support frame 100, and the second heat preservation member is used to be opposite to the outer peripheral wall of the crystal growth furnace 2. In other words, the heat preservation effect is achieved on the outer peripheral wall of the crystal growth furnace 2 by the second heat preservation member. Of course, in some embodiments, the second heat preservation member is in the shape of a hollow cylinder and the inner diameter of the second heat preservation member is the same as the outer diameter of the crystal growth furnace 2, so as to ensure that after the support frame 100 is sleeved on the outer side of the crystal growth furnace 2, the second heat preservation member is convenient for the outer peripheral wall of the crystal growth furnace 2 to fit.

[0039] In this embodiment, there are two mounting parts, and the two mounting parts are arranged at radial intervals along a preset circumference. The first heat-insulating parts 300 in the two mounting parts can approach or move away from each other under the drive of the conveying member 210 .

[0040] It should be noted that, in some optional embodiments, for the multiple conveying members 210 spaced apart along the height direction on each mounting member, the conveying member 210 can be understood as a conveying belt with a motor, and the first thermal insulation member 300 is arranged to move radially along a preset circle under the action of the conveying belt. Thus, the user can set thermal insulation structures of different shapes on the crystal growth furnace 2 through the first thermal insulation members 300 on the multiple mounting members according to different crystal growth conditions.

[0041] Of course, in some other optional embodiments, the conveying member 210 can also be understood as a slide plate that can move radially along a preset circle relative to the mounting member, wherein the mounting member can be provided with a slide rail or a slide groove for the conveying member 210 to slide. Thus, the user can manually control the extension and contraction of the first insulation member 300 on the conveying member 210 in the radial direction of the preset circle to set insulation structures of different shapes on the crystal growth furnace 2.

[0042] Among them, whether it is the above-mentioned motor-driven conveyor belt or the manually driven slide plate, they are all conventional technologies, so their specific structures are not described in detail here.

[0043] In some optional embodiments, in order to adapt to crystal growth furnaces 2 of different heights, a lifting device is provided on the support frame 100 , and the lifting device is connected to the mounting frame 200 to drive the mounting frame 200 to move in the height direction.

[0044] It should be noted that the above-mentioned lifting device is connected to multiple mounting parts at the same time. Of course, in order to improve the stability of the mounting parts moving in the height direction relative to the support frame 100, the support frame 100 can also be provided with multiple guide rails corresponding to the multiple mounting parts. The above-mentioned lifting device can be a hydraulically driven lifting device or a driving cylinder. Of course, the specific structure of the lifting device is not specifically limited here, as long as it can drive multiple mounting parts to move in the height direction at the same time.

[0045] In some optional embodiments, in order to facilitate the user to move the support frame 100, the bottom of the support frame 100 is provided with moving wheels.

[0046] In this embodiment, for the conveying members 210 at the same height, the multiple first heat-insulating members 300 therein form a circular heat-insulating sheet, where “therein” here refers to the multiple conveying members 210 at the same height.

[0047] It can be understood that since the top surface of most crystal growth furnaces 2 is a circular surface, in order to adapt to the circular surface of the top surface of the crystal growth furnace 2, the first insulation parts 300 in the multiple conveying parts 210 can form a circular insulation sheet. In this embodiment, the number of mounting parts is two, and the two first insulation sheets at the same height are both semicircular sheets.

[0048] Of course, in some other embodiments, the first thermal insulation sheet may also be in other shapes.

[0049] Of course, in some other embodiments, the support frame 100 can also be a split structure, that is, the support frame 100 includes a plurality of support members. Therefore, when it is assembled on the outside of the crystal growth furnace 2, the plurality of support members are evenly spaced along the circumference of the crystal growth furnace 2, and the plurality of mounting members are spaced around a preset circle.

[0050] Of course, in order to ensure that the multiple support members are stably arranged outside the crystal growth furnace 2, the multiple support members are connected end to end in sequence, or the multiple mounting members are connected end to end in sequence.

[0051] In this embodiment, a plurality can be understood as two or more than two. In some optional embodiments, the split support frame 100 has two support members, that is, the number of the support members and the mounting member is two.

[0052] In some optional embodiments, in order to facilitate the movement of the support frame 100, moving wheels are provided at the bottom of the support member.

[0053] In summary, the embodiment of the utility model provides a heat preservation device 1 for a crystal growth furnace, which includes a support frame 100, a mounting frame 200 and a heat preservation assembly. The support frame 100 is used to be arranged outside the crystal growth furnace 2, and the mounting frame 200 is connected to the support frame 100. The mounting frame 200 includes a plurality of mounting members arranged at intervals around a preset circumference, and the mounting member has a plurality of conveying members 210 arranged in sequence along the height direction. The heat preservation assembly includes a plurality of first heat preservation members 300, each of which is used to install the conveying member 210, and the conveying member 210 is used to drive the first heat preservation member 300 to move radially along the preset circumference. The operator can adjust the movement of the first heat preservation member 300 on the conveying member 210 on the mounting member in the radial direction of the preset circumference to control the expansion and contraction of the first heat preservation member 300 in the radial direction of the preset circumference, so as to form different arrangement shapes on the crystal growth furnace 2, thereby avoiding the operator from cutting the graphite soft felt in different crystal growth conditions, so as to reduce the consumption cost of the graphite soft felt.

[0054] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A heat preservation device for a crystal growth furnace, characterized in that: include: A support frame (100), the support frame (100) being used to be arranged outside the crystal growth furnace (2); A mounting frame (200), the mounting frame (200) being connected to the supporting frame (100), the mounting frame (200) comprising a plurality of mounting members arranged at intervals around a preset circumference, the mounting member having a plurality of conveying members (210) sequentially arranged along a height direction; The heat-insulating component comprises a plurality of first heat-insulating parts (300), each of the first heat-insulating parts (300) is used to be installed on a conveying part (210), and the conveying part (210) is used to drive the first heat-insulating part (300) to move radially along the preset circle.

2. The heat preservation device for a crystal growth furnace according to claim 1, characterized in that: The support frame (100) is integrally formed, and the support frame (100) is formed with an installation space for being mounted on the crystal growth furnace (2), and the installation space is in the shape of a hollow cylinder. When the support frame (100) is mounted on the crystal growth furnace (2), in the radial direction of the preset circle, the installation frame (200) is located on a side of the support frame (100) away from the crystal growth furnace (2).

3. The heat preservation device for a crystal growth furnace according to claim 2, characterized in that: The heat-insulating component further comprises a second heat-insulating component arranged on the inner side of the support frame (100), wherein the second heat-insulating component is used to be opposite to the outer peripheral wall of the crystal growth furnace (2).

4. The heat preservation device for a crystal growth furnace according to claim 1, characterized in that: The support frame (100) is integrally formed, the number of the mounting parts is two, the two mounting parts are arranged at radial intervals along the preset circumference, and the first heat-insulating parts (300) in the two mounting parts can be moved closer to or farther from each other under the drive of the conveying member (210).

5. The heat preservation device for a crystal growth furnace according to claim 1, characterized in that: The support frame (100) is provided with a lifting device, and the lifting device is connected to the mounting frame (200) to drive the mounting frame (200) to move in a height direction.

6. The heat preservation device for a crystal growth furnace according to claim 1, characterized in that: The bottom of the support frame (100) is provided with moving wheels.

7. The heat preservation device for a crystal growth furnace according to claim 1, characterized in that: For conveying members (210) of the same height, a plurality of the first heat-insulating members (300) therein can form a circular heat-insulating sheet.

8. The heat preservation device for a crystal growth furnace according to claim 1, characterized in that: The support frame (100) comprises a plurality of support members, the plurality of support members are arranged at intervals along the preset circumference, and the plurality of support members are arranged in a one-to-one correspondence with the plurality of mounting members.

9. The heat preservation device for a crystal growth furnace according to claim 8, characterized in that: The plurality of support members are connected end to end in sequence, and / or the plurality of mounting members are connected end to end in sequence.

10. The heat preservation device for a crystal growth furnace according to claim 8, characterized in that: The number of the supporting members and the mounting members is two, and a moving wheel is arranged at the bottom of each supporting member.

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