Rotary joint assembly and wet chemical equipment

Abstract

The utility model discloses a rotary joint assembly and wet chemical equipment, the rotary joint assembly comprises a rotary joint, and the rotary joint comprises a joint stator and a joint rotor which are rotatably connected; a mounting hole penetrating into the joint stator is formed in the axial side part of the joint stator; and an air pipe joint penetrating into the joint stator is mounted through the mounting hole. The gas pipe connector is installed on the side portion of the rotary connector, when the rotary connector works, external gas can be connected through the gas pipe connector to ventilate the interior of the rotary connector, positive pressure ventilation is generated in the contact space of the connector stator and the connector rotor, acid gas is effectively isolated from the exterior of the rotary connector, and therefore the acid gas is effectively isolated from the exterior of the rotary connector. The working condition in the rotary joint is guaranteed, and the service life of the rotary joint is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cells, in particular to photovoltaic cell wet process equipment, specifically to a rotary joint component and wet chemical equipment. Background Art

[0002] When silicon wafers are subjected to surface wet chemical treatment, the current wet chemical equipment rotary joint serves to connect the external power supply and the conductive parts inside the equipment. When the rotary joint is in operation, due to the acid gas contained in the equipment, crystals will be generated at the conductive rotating part of the rotary joint or enter the joint from the rotating part, causing the rotary joint to rotate unsmoothly, the equipment to malfunction, and unable to operate normally, affecting the production efficiency. To this end, a rotary joint assembly for wet chemical equipment is proposed. Utility Model Content

[0003] In order to solve the above technical problems, the utility model provides the following technical solutions: a rotary joint assembly of a wet chemical device, comprising a rotary joint, wherein the rotary joint comprises a joint stator and a joint rotor which are rotatably connected;

[0004] An installation hole penetrating into the interior of the joint stator is provided on the axial side of the joint stator, and an air pipe joint penetrating into the interior of the joint stator is installed through the installation hole.

[0005] Furthermore: it also includes a sealing sleeve for realizing a sealed connection between the power cord sheath and the external connection end of the connector stator; an installation groove is axially opened on the radial outer side of the external connection end of the connector stator, and a limit block cooperating with the installation groove is arranged on the axial inner side of the sealing sleeve, and the sealing sleeve and the external connection end of the connector stator are sleeved together by the cooperation of the limit block and the installation groove.

[0006] Furthermore: an anti-drop unit is also provided on the radial outer side of the external connection end of the connector stator to prevent the power line sheath from falling off from the external connection end of the connector stator.

[0007] Wherein: the anti-slip unit includes an adjusting screw vertically arranged on the radially outer side of the external connection end of the joint stator, an adjusting plate threadedly connected to the adjusting screw and arranged along the axially outer side of the external connection end of the joint stator, a rotating wheel arranged at the end of the adjusting screw, and a pressure plate arranged on the inner side of the adjusting plate and corresponding to the outer surface of the external connection end of the joint stator, the curvature of the inner side of the pressure plate is consistent with the curvature of the outer surface of the external connection end of the joint stator, and the inner side of the pressure plate is provided with an anti-slip layer corresponding to the outer surface of the external connection end of the joint stator.

[0008] Furthermore: it also includes a fixing seat and a pressure gauge, wherein the pressure gauge is installed on the radial outer side of the joint stator through the fixing seat and is connected to the inside of the joint stator for displaying the ventilation positive pressure value inside the joint stator.

[0009] Compared with the prior art, the beneficial effects of the utility model are:

[0010] By installing an air pipe joint on the side of the rotary joint, when the rotary joint is working, external gas can be ventilated to the inside of the rotary joint through the air pipe joint, thereby generating positive pressure ventilation in the contact space between the joint stator and the joint rotor, thereby effectively isolating the acid gas outside the rotary joint to ensure the working condition inside the rotary joint and extend the service life of the rotary joint. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model.

[0012] In the figure: 10. joint stator, 11. mounting hole, 12. fixing seat, 13. pressure gauge, 14. mounting groove, 15. sealing sleeve, 161. rotating wheel, 162. adjusting screw, 163. adjusting plate, 164. pressing plate, 165. anti-skid layer, 20. joint rotor, 30. air pipe joint. DETAILED DESCRIPTION

[0013] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0014] Embodiment 1:

[0015] See also Figure 1 The rotary joint assembly provided in this embodiment 1 includes a rotary joint, and the rotary joint includes a joint stator 10 and a joint rotor 20 that are rotatably connected; an axial side of the joint stator 10 is provided with a mounting hole 11 that passes through the interior of the joint stator 10, and a trachea joint 30 that passes through the interior of the joint stator 10 is installed through the mounting hole 11.

[0016] In this embodiment 1, by installing an air pipe joint 30 on the side of the rotary joint, when the rotary joint is working, external gas can be ventilated to the inside of the rotary joint through the air pipe joint 30, thereby generating positive pressure ventilation in the contact space between the joint stator 10 and the joint rotor 20, thereby effectively isolating the acid gas outside the rotary joint to ensure the working condition inside the rotary joint and extend the service life of the rotary joint.

[0017] Embodiment 2:

[0018] Based on Example 1, when the external end of the joint stator 10 is connected to the power cord, in order to ensure the safety of the power cord at the connection end to avoid acid gas from entering the rotary joint from this end to cause corrosion, and to perform other safety protections on the power cord at the connection end, it is necessary to sleeve a certain length of power cord sheath on the outside of the connection end of the power cord, and connect the power cord sheath to the external end of the joint stator 10. Therefore, this Example 2 also includes a sealing sleeve 15 for realizing a sealed connection between the power cord sheath and the external end of the joint stator 10; wherein, an installation groove 14 is axially provided on the radial outer side of the external end of the joint stator 10, and a limit block cooperating with the installation groove 14 is provided on the axial inner side of the sealing sleeve 15, and the sealing sleeve 15 is sleeved with the external end of the joint stator 10 through the cooperation of the limit block and the installation groove 14.

[0019] Embodiment 3:

[0020] Based on Example 2, in this Example 3, an anti-detachment unit is further provided on the radial outer side of the external connection end of the joint stator 10, and the anti-detachment unit includes an adjusting screw 162 vertically arranged on the radial outer side of the external connection end of the joint stator 10, an adjusting plate 163 threadedly connected to the adjusting screw 162 and arranged along the axial outer side of the external connection end of the joint stator 10, a rotating wheel 161 arranged at the end of the adjusting screw 162, and a pressure plate 164 arranged on the inner side of the adjusting plate 163 and corresponding to the outer surface of the external connection end of the joint stator 10, the curvature of the inner side of the pressure plate 164 is consistent with the curvature of the outer surface of the external connection end of the joint stator 10, and the inner side of the pressure plate 164 is provided with an anti-slip layer 165 corresponding to the outer surface of the external connection end of the joint stator 10.

[0021] When the anti-drop unit is working, the rotating wheel 161 is rotated to realize the rotation of the adjusting screw 162, thereby driving the adjusting plate 163 threadably connected thereto to approach the external end of the connector stator 10, and making the anti-slip layer 165 on the inner side of the pressure plate 164 contact and press the power cord sheath sleeved on the external end of the connector stator 10, thereby preventing the power cord sheath from falling off from the external end of the connector stator 10.

[0022] Embodiment 4:

[0023] Based on Example 1, this Example 4 also includes a fixing seat 12 and a pressure gauge 13. The pressure gauge 13 is installed on the radial outside of the joint stator 10 through the fixing seat 12 and is connected to the inside of the joint stator 10 for displaying the ventilation positive pressure value inside the joint stator 10, so that it can be intuitively confirmed whether the internal positive pressure is normal.

[0024] Embodiment 5:

[0025] This embodiment 5 also provides a wet chemical equipment, which includes the rotary joint assembly described in any one of the above embodiments 1-4, and is used for wet chemical surface treatment of products such as silicon wafers.

[0026] The above are only embodiments of the present invention, and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A rotary joint assembly, comprising a rotary joint, wherein the rotary joint comprises a joint stator (10) and a joint rotor (20) which are rotatably connected; Features: An installation hole (11) penetrating into the interior of the joint stator (10) is provided on the axial side of the joint stator (10), and an air pipe joint (30) penetrating into the interior of the joint stator (10) is installed through the installation hole (11).

2. The rotary joint assembly according to claim 1, characterized in that: It also comprises a sealing sleeve (15); a mounting groove (14) is axially provided on the radial outer side of the external connection end of the joint stator (10); a limiting block cooperating with the mounting groove (14) is provided on the axial inner side of the sealing sleeve (15); and the sealing sleeve (15) and the external connection end of the joint stator (10) are sleeved together by the cooperation between the limiting block and the mounting groove (14).

3. The rotary joint assembly according to claim 1, characterized in that: An anti-drop unit is also provided radially outside the external connection end of the joint stator (10) to prevent the power line sheath from falling off the external connection end of the joint stator (10).

4. The rotary joint assembly according to claim 3, characterized in that: The anti-drop unit comprises an adjusting screw (162) vertically arranged on the radially outer side of the external end of the joint stator (10), an adjusting plate (163) threadedly connected to the adjusting screw (162) and arranged along the axially outer side of the external end of the joint stator (10), a rotating wheel (161) arranged at the end of the adjusting screw (162), and a pressing plate (164) arranged on the inner side of the adjusting plate (163) and corresponding to the outer surface of the external end of the joint stator (10), the curvature of the inner side of the pressing plate (164) being consistent with the curvature of the outer surface of the external end of the joint stator (10), and an anti-slip layer (165) corresponding to the outer surface of the external end of the joint stator (10) is arranged on the inner side of the pressing plate (164).

5. The rotary joint assembly according to claim 1, characterized in that: It also comprises a fixing seat (12) and a pressure gauge (13); the pressure gauge (13) is installed on the radially outer side of the joint stator (10) through the fixing seat (12) and is connected to the inside of the joint stator (10) for displaying the ventilation positive pressure value inside the joint stator (10).

6. A wet chemical device, characterized in that: The invention comprises a rotary joint assembly as described in any one of claims 1 to 5.

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