Oxidizing furnace tool with fixed structure

Abstract

The utility model relates to the technical field of oxidation furnace tools, and discloses an oxidation furnace tool with a fixed structure, which comprises a lower furnace body, the bottom of the lower furnace body is fixedly connected with a feeding and discharging module, the interior of the lower furnace body is fixedly connected with a lifting module, and the exterior of the feeding and discharging module is slidably connected with a first white jade corundum brick. The bottom of the first white jade corundum sand brick makes contact with the exterior of the lifting module, a plurality of second white jade corundum sand bricks are arranged on the left side and the right side of the top of the first white jade corundum sand brick, silicon carbide support tools are placed on the tops of the two second white jade corundum sand bricks, and a plurality of circular grooves are formed in the tops of the silicon carbide support tools. According to the silicon carbide support tool, stacking placement is changed into hanging placement through different placement modes of a plurality of second white jade corundum sand bricks, the round grooves are formed in the silicon carbide support tool, the contact area of products is increased, and when a plurality of products need to be processed, the product yield is increased.

Description

Technical Field

[0001] The utility model relates to the technical field of oxidation furnace tooling, in particular to an oxidation furnace tooling with a fixed structure. Background Art

[0002] Oxidation furnace tooling usually refers to the tools and equipment used in the operation of an oxidation furnace. Oxidation furnaces are equipment used to oxidize or calcine materials, and are commonly found in metal processing, ceramic manufacturing, semiconductor industry and other fields.

[0003] In the prior art, some SIC RINGs are stacked and placed flat in an oxidation furnace during the oxidation process. When there are too many products, the products are stacked together, which will cause uneven oxidation on the product surface. Utility Model Content

[0004] The utility model provides an oxidation furnace tool with a fixed structure, aiming to improve the problem that some devices cannot oxidize the surface uniformly.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A fixed-structure oxidation furnace tooling comprises a lower furnace body, a loading and unloading module is fixedly connected to the bottom of the lower furnace body, a lifting module is fixedly connected to the interior of the lower furnace body, a white jade corundum brick 1 is slidably connected to the outside of the loading and unloading module, the bottom of the white jade corundum brick 1 is in contact with the outside of the lifting module, a plurality of white jade corundum bricks 2 are arranged on the left and right sides of the top of the white jade corundum brick 1, wherein silicon carbide support tooling is placed on the top of two of the white jade corundum bricks 2, and a plurality of circular grooves are provided on the top of the silicon carbide support tooling.

[0007] As a further description of the above technical solution:

[0008] The loading and unloading module comprises a plurality of support frames, the tops of the support frames are fixedly connected with rails, and the outsides of the plurality of rails are in contact with the bottoms of the white jade corundum bricks.

[0009] As a further description of the above technical solution:

[0010] The lifting module comprises a shell, the exterior of the shell is fixedly connected to the inner wall of the lower furnace body, the interior of the shell is fixedly connected to a double-headed motor, and the output end of the double-headed motor is fixedly connected to a driving shaft.

[0011] As a further description of the above technical solution:

[0012] The outside of the driving shaft is fixedly connected with a driving bevel gear, the left and right sides of the inside of the lower furnace body are rotatably connected with screw rods, and the bottom of the screw rod is fixedly connected with a driven bevel gear.

[0013] As a further description of the above technical solution:

[0014] The external thread of the screw rod is connected with a follower rod, and the adjacent sides of the two follower rods are fixedly connected with two fixing rods.

[0015] As a further description of the above technical solution:

[0016] The outside of the driving bevel gear contacts the outside of the driven bevel gear, and two limiting plates are fixedly connected to the front and rear sides of the lower furnace body.

[0017] As a further description of the above technical solution:

[0018] The top of the lower furnace body is fixedly connected to the upper furnace body, and the inner wall of the upper furnace body is fixedly connected to the furnace cavity.

[0019] As a further description of the above technical solution:

[0020] The utility model has the following beneficial effects:

[0021] In the utility model, a plurality of white jade corundum bricks are placed in two different ways to change the stacking placement into hanging placement, and a circular groove is opened on the silicon carbide bracket tooling to increase the contact area of ​​the product. When multiple products need to be processed, the product yield is increased. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A three-dimensional diagram of an oxidation furnace tooling with a fixed structure proposed by the utility model;

[0023] Figure 2 A schematic diagram of the track structure of a fixed structure oxidation furnace tooling proposed by the utility model;

[0024] Figure 3 This is a cross-sectional view of the upper furnace structure of a fixed structure oxidation furnace tooling proposed by the utility model;

[0025] Figure 4 This is a cross-sectional view of the lower furnace structure of a fixed structure oxidation furnace tooling proposed by the utility model;

[0026] Figure 5 A schematic diagram of the structure of a white jade corundum brick of a fixed structure oxidation furnace tooling proposed by the utility model;

[0027] Figure 6 This is a schematic diagram of the structure of a silicon carbide support tooling of a fixed structure oxidation furnace tooling proposed by the utility model.

[0028] Legend:

[0029] 1. Lower furnace body; 2. Support frame; 3. Track; 4. Casing; 5. Double-head motor; 6. Driving shaft; 7. Active bevel gear; 8. Screw; 9. Driven bevel gear; 10. Follower rod; 11. Fixed rod; 12. White jade corundum brick one; 13. White jade corundum brick two; 14. Silicon carbide bracket tooling; 15. Round groove; 16. Limit plate; 17. Furnace cavity; 18. Upper furnace body. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] Embodiment 1:

[0032] Reference Figure 1-Figure 3 , Figure 6 ;

[0033] The utility model provides an embodiment: an oxidation furnace tooling with a fixed structure, including a lower furnace body 1, a loading and unloading module is fixedly connected to the bottom of the lower furnace body 1, the loading and unloading module includes a plurality of support frames 2, the top of the support frames 2 is fixedly connected to a track 3, the outer parts of the plurality of tracks 3 are in contact with the bottom of a white jade corundum brick 12, the interior of the lower furnace body 1 is fixedly connected to a lifting module, the lifting module includes a shell 4, the outer part of the shell 4 is fixedly connected to the inner wall of the lower furnace body 1, the interior of the shell 4 is fixedly connected to a double-headed motor 5, the double-headed motor The output end of 5 is fixedly connected to the driving shaft 6, and the external sliding connection of the loading and unloading module is connected to the white jade corundum brick 12, the bottom of the white jade corundum brick 12 is in contact with the external part of the lifting module, and a plurality of white jade corundum bricks 13 are arranged on the left and right sides of the top of the white jade corundum brick 12, and the material inside the oxidation furnace is adopted. The white jade corundum bricks 13 here are stacked together vertically, and the white jade corundum bricks 12 are placed on the oxidation furnace platform, and the tops of two of the white jade corundum bricks 13 are placed with silicon carbide bracket tooling 14, using CVD SIC is consistent with the material of the product, which can avoid product defects caused by tooling problems. The same material will not affect its thermal conductivity, and the contact end of the product and the tooling can also be heated evenly. At the same time, the surface is polished into a smooth curved surface with a certain curvature to avoid the risk of scratching the product with sharp edges during placement. Grooves with a length of 10MM, a depth of 5MM, and an interval of 50MM are also opened on the curved surface. These grooves can place the product stably on the tooling to avoid the product from shaking in the furnace or even colliding. At the same time, the number of products operating in the oxidation furnace at the same time can also be limited to ensure the product yield. The upper end of the silicon carbide bracket tooling 14 is an arc, which can effectively avoid the collapse and breakage of the inner diameter of the product due to contact with edges during the firing process, thereby improving the product yield. A plurality of circular grooves 15 are opened on the top of the silicon carbide bracket tooling 14, and the top of the lower furnace body 1 is fixedly connected to the upper furnace body 18, and the inner wall of the upper furnace body 18 is fixedly connected to the furnace cavity 17.

[0034] Reference Figure 1 , Figure 4 ;

[0035] The outside of the driving shaft 6 is fixedly connected to a driving bevel gear 7, the left and right sides of the inside of the lower furnace body 1 are rotatably connected to screw rods 8, the bottom of the screw rod 8 is fixedly connected to a driven bevel gear 9, the outside of the screw rod 8 is threadedly connected to a follower rod 10, and the adjacent sides of the two follower rods 10 are fixedly connected to two fixed rods 11, the outside of the driving bevel gear 7 is in contact with the outside of the driven bevel gear 9, and the front and rear sides of the lower furnace body 1 are fixedly connected to two 16 limit plates.

[0036] Embodiment 2:

[0037] Reference Figure 1 , Figure 4 , Figure 5 ,

[0038] If the product is small, place two white jade corundum bricks 13 horizontally, and mount the silicon carbide support fixture 14 on the top of the two white jade corundum bricks 13, so that the diameter of the object that the device can bear becomes shorter, and the firing is carried out in the same way as above. The firing process is suspended, the contact area between the product and the air in the oxidation furnace is large, and the product oxide film is well produced.

[0039] Compared with some devices in the prior art, the above content uses multiple white jade corundum bricks 13 in different placement methods to change the stacking placement into a hanging placement, and opens a circular groove 15 on the silicon carbide support tooling 14 to increase the contact area of ​​the product. When multiple products need to be processed, the product yield is increased.

[0040] Working principle: white jade corundum brick 13 is placed on the oxidation furnace platform, and the placement method of silicon carbide bracket tooling 14 is determined according to the size of the product. When the diameter of the product is too large, it can be erected, and silicon carbide bracket tooling 14 is placed on both sides, and then silicon carbide bracket tooling 14 is placed on silicon carbide bracket tooling 14. The position is adjusted so that silicon carbide bracket tooling 14 can be placed stably on white jade corundum brick 13, and then the product is placed in the groove of silicon carbide bracket tooling 14, and the inner diameter of the product is selected to contact silicon carbide bracket tooling 14. Because of the presence of the groove, the product is not easy to shake during the firing process, thereby reducing the collision between products.

[0041] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A fixed structure oxidation furnace tooling, comprising a lower furnace body (1), characterized in that: The bottom of the lower furnace body (1) is fixedly connected to a loading and unloading module, the interior of the lower furnace body (1) is fixedly connected to a lifting module, the exterior of the loading and unloading module is slidably connected to a white jade corundum brick (12), the bottom of the white jade corundum brick (12) is in contact with the exterior of the lifting module, a plurality of white jade corundum bricks (13) are arranged on the left and right sides of the top of the white jade corundum brick (12), wherein silicon carbide support fixtures (14) are placed on the tops of two of the white jade corundum bricks (13), and a plurality of circular grooves (15) are provided on the top of the silicon carbide support fixture (14).

2. The fixed structure oxidation furnace tooling according to claim 1, characterized in that: The loading and unloading module comprises a plurality of support frames (2), the top of each support frame (2) is fixedly connected with a track (3), and the outside of each track (3) is in contact with the bottom of the white jade corundum brick (12).

3. The fixed structure oxidation furnace tooling according to claim 1, characterized in that: The lifting module comprises a shell (4), the exterior of the shell (4) is fixedly connected to the inner wall of the lower furnace body (1), the interior of the shell (4) is fixedly connected to a double-headed motor (5), and the output end of the double-headed motor (5) is fixedly connected to a drive shaft (6).

4. The fixed structure oxidation furnace tooling according to claim 3, characterized in that: The outside of the driving shaft (6) is fixedly connected to a driving bevel gear (7), the inside of the lower furnace body (1) is rotatably connected to screw rods (8) on both left and right sides, and the bottom of the screw rod (8) is fixedly connected to a driven bevel gear (9).

5. The fixed structure oxidation furnace tooling according to claim 4, characterized in that: The external thread of the screw rod (8) is connected to a follower rod (10), and adjacent sides of the two follower rods (10) are fixedly connected to two fixed rods (11).

6. The fixed structure oxidation furnace tooling according to claim 4, characterized in that: The exterior of the active bevel gear (7) contacts the exterior of the driven bevel gear (9), and two (16) limiting plates are fixedly connected to the front and rear sides of the lower furnace body (1).

7. The fixed structure oxidation furnace tooling according to claim 1, characterized in that: The top of the lower furnace body (1) is fixedly connected to the upper furnace body (18), and the inner wall of the upper furnace body (18) is fixedly connected to the furnace cavity (17).

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