Film thickness measuring instrument

Abstract

The utility model provides a film thickness measuring instrument. The film thickness measuring instrument comprises an objective table, a probe module, a probe driving module and a controller, a to-be-tested film is placed on the objective table; the probe module comprises a light source module and a photoelectric conversion module, the light source module emits light to the to-be-detected film, and the photoelectric conversion module converts a light signal reflected by the to-be-detected film into an electric signal; the probe driving module is arranged on the objective table, and the probe module is arranged on the probe driving module; the controller controls the probe driving module to drive the probe module to move according to a plurality of preset detection coordinates and processes an electric signal measured by the probe module to obtain film thickness data; the automatic measurement of the thickness of the film is realized, the labor cost is saved, and the measurement accuracy is improved.

Description

Technical Field

[0001] The embodiments of the present application relate to the field of measuring instruments, and in particular to a film thickness measuring instrument. Background Art

[0002] Thin films are widely used in semiconductors, liquid crystal displays, optical coatings and other fields. The thickness and thickness uniformity of the film will have different effects on the quality of thin film products. For example, the thickness of the photoresist film has a crucial impact in the photolithography process. It is directly related to the accuracy and resolution of the pattern and the effect of subsequent etching steps, because the value of the photoresist film thickness needs to be monitored to ensure the yield of the photoresist.

[0003] For some large-size thin film products, hundreds or even thousands of points on the thin film products need to be tested. If the method of manually measuring the film thickness is used, there are problems such as large workload, long time consumption, random sampling points, and low efficiency. Utility Model Content

[0004] The following is a summary of the subject matter described in detail herein. This summary is not intended to limit the scope of the claims.

[0005] The purpose of the present application is to solve one of the technical problems existing in the related art to at least a certain extent. The embodiment of the present application provides a film thickness measuring instrument that can realize automatic measurement of film thickness.

[0006] An embodiment of the present application is a film thickness measuring instrument, comprising:

[0007] A stage, the stage is used to place the film to be tested;

[0008] A probe module, the probe module comprising a light source module and a photoelectric conversion module, the light source module is used to emit light to the film to be tested, and the photoelectric conversion module is used to convert the light signal reflected by the film to be tested into an electrical signal;

[0009] A probe driving module, wherein the probe driving module is arranged on the stage, and the probe module is arranged on the probe driving module;

[0010] The controller is used to control the probe driving module to drive the probe module to move according to a plurality of preset detection coordinates, and to process the electrical signal measured by the probe module to obtain film thickness data.

[0011] According to an embodiment of the present application, the light source module is provided with a halogen lamp and a heat dissipation lamp holder, the halogen lamp is mounted on the heat dissipation lamp holder, and the heat dissipation lamp holder is provided with a heat dissipation fan.

[0012] According to an embodiment of the present application, the light source module is provided with a focusing cup and a focusing lens.

[0013] According to an embodiment of the present application, the photoelectric conversion module includes a grating and a photodetector, and the grating is arranged between the light inlet of the photoelectric conversion module and the photodetector.

[0014] According to an embodiment of the present application, the light source module and the photoelectric conversion module are connected through an optical fiber, and the optical fiber includes a first beam splitting segment, a second beam splitting segment and a common segment, one end of the first beam splitting segment, one end of the second beam splitting segment and one end of the common segment are connected, the other end of the first beam splitting segment is connected to the light outlet of the light source module, and the other end of the second beam splitting segment is connected to the light inlet of the photoelectric conversion module.

[0015] According to an embodiment of the present application, the probe driving module includes a first slide rail and two second slide rails, two ends of the first slide rail are respectively slidably connected to the two second slide rails, and the probe module is slidably connected to the first slide rail.

[0016] According to an embodiment of the present application, the first slide rail includes a first motor, a first turntable, a second turntable, a first belt, a first rail body and a first mounting seat; the first motor is connected to the first turntable, and the first belt is wound between the first turntable and the second turntable; the first mounting seat is fixed on the first belt and is slidably connected to the first rail body through a roller; the probe module is installed on the first mounting seat.

[0017] According to an embodiment of the present application, the second slide rail includes a second motor, a third turntable, a fourth turntable, a second belt, a second rail body and a second mounting seat; the second motor is connected to the third turntable, and the second belt is wound between the third turntable and the fourth turntable; the second mounting seat is fixed on the second belt and is slidably connected to the second rail body through a roller; the first slide rail is installed on the second mounting seat.

[0018] According to an embodiment of the present application, a foot cup is provided at the bottom of the loading platform.

[0019] According to an embodiment of the present application, the foot cup is provided with an anti-slip pad.

[0020] The above scheme has at least the following beneficial effects: the film to be tested is placed on the stage, multiple detection coordinates are input into the controller through the input device, the controller controls the probe driving module to drive the probe module to move to a detection coordinate, when the probe module reaches the detection coordinate, the light source module emits light to the film to be tested, the film to be tested reflects the light emitted by the light source module, the photoelectric conversion module receives the light signal reflected by the film to be tested, and converts the light signal reflected by the film to be tested into an electrical signal, and outputs the electrical signal to the controller; the controller processes the electrical signal measured by the probe module to obtain film thickness data. After completing one detection coordinate, the controller controls the probe driving module to drive the probe module to move to another detection coordinate to continue to detect the film to be tested until all detection coordinates are completed; the automatic measurement of film thickness is realized, labor costs are saved, and measurement accuracy is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings are used to provide further understanding of the technical solution of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the technical solution of the present application and do not constitute a limitation on the technical solution of the present application.

[0022] Figure 1 is a structural diagram of a film thickness measuring instrument provided in an embodiment of the present application;

[0023] Figure 2 It is a structural diagram of a probe module and a probe driving module provided in an embodiment of the present application. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0025] It should be noted that, although the functional modules are divided in the device schematic diagram and the logical order is shown in the flowchart, in some cases, the steps shown or described may be performed in a different order than the module division in the device or the order in the flowchart. The terms "first", "second", etc. in the specification, claims or the above drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence.

[0026] An embodiment of the present application provides a film thickness measuring instrument that can automatically measure the thickness of a film.

[0027] The embodiments of the present application are further described below in conjunction with the accompanying drawings.

[0028] Reference Figure 1 and Figure 2The film thickness measuring instrument includes: a stage 100, a probe module 300, a probe driving module 200 and a controller 400.

[0029] Among them, the stage 100 is used to place the film to be tested; the probe module 300 includes a light source module and a photoelectric conversion module, the light source module is used to emit light to the film to be tested, and the photoelectric conversion module is used to convert the light signal reflected by the film to be tested into an electrical signal; the probe driving module 200 is arranged on the stage 100, and the probe module 300 is arranged on the probe driving module 200; the controller 400 is used to control the probe driving module 200 to drive the probe module 300 to move according to a plurality of preset detection coordinates, and obtain film thickness data according to the electrical signal measured by the probe module 300.

[0030] In this embodiment, the film to be tested is placed on the stage 100, and multiple detection coordinates are input into the controller 400 through the input device. The controller 400 controls the probe driving module 200 to drive the probe module 300 to move to a detection coordinate. When the probe module 300 reaches the detection coordinate, the light source module emits light to the film to be tested, and the film to be tested reflects the light emitted by the light source module. The photoelectric conversion module receives the light signal reflected by the film to be tested, and converts the light signal reflected by the film to be tested into an electrical signal, and outputs the electrical signal to the controller 400; the controller 400 processes the electrical signal measured by the probe module 300 to obtain film thickness data. After completing one detection coordinate, the controller 400 controls the probe driving module 200 to drive the probe module 300 to move to another detection coordinate to continue to detect the film to be tested until all detection coordinates are completed; the thickness of the film is automatically measured, labor costs are saved, and measurement accuracy is improved.

[0031] It is understandable that the controller 400 is installed with a computer system and existing processing software for calculating film thickness data, and the film thickness data is obtained by processing the electrical signal measured by the probe module 300 through the processing software.

[0032] For the stage 100, the stage 100 includes a shell 122 and a platform 121, and the platform 121 is placed in the shell 122. The shell 122 is 1.7 meters long, 1 meter wide and 0.9 meters high. A foot cup is provided at the bottom of the shell 122. When the ground is uneven, the height of the foot cup can be fine-tuned to keep the test surface level. The contact surface between the foot cup and the ground is provided with an anti-slip pad, which further increases the stability of the platform 121. The shell 122 is hollow, and an electrical box is also installed in the shell 122. The six sides of the shell 122 are surrounded by panels, and the front panel is provided with a switch door, which can be opened and closed. Open the door, place the film to be tested on the stage 100, and then close the door.

[0033] For the probe module 300, the light source module is provided with a halogen lamp, which is specifically a long-life wide-spectrum halogen lamp light source, which can provide a wide-band detection light of 380 nanometers to 2500 nanometers. The halogen lamp is installed on a heat sink holder, and the heat sink holder is provided with a heat dissipation fan. On the one hand, after the halogen lamp is started, the heat dissipation fan is immediately started for heat dissipation. On the other hand, the light source module is provided with a temperature sensor, which detects the temperature of the light source module through the temperature sensor. When the temperature of the light source module exceeds the preset temperature threshold, the heat dissipation fan is started for heat dissipation.

[0034] The light source module is provided with a focusing cup. The focusing cup is fixed on the heat sink holder. The light emitted by the halogen lamp is reflected by the focusing cup to achieve focusing. The light outlet of the light source module is provided with a focusing lens, and the light that is about to leave the light outlet of the light source module is focused by the focusing lens. The focusing lens can be a plano-convex lens, a concave-convex lens, etc., and the focusing point of the focusing lens is the optical fiber interface.

[0035] The light source module is connected to the photoelectric conversion module through an optical fiber, which includes a first beam splitting section, a second beam splitting section and a common section. One end of the first beam splitting section, one end of the second beam splitting section and one end of the common section are connected, the other end of the first beam splitting section is connected to the light outlet of the light source module, the other end of the second beam splitting section is connected to the light inlet of the photoelectric conversion module, and the other end of the common section is connected to the light inlet of the lens. The light inlet of the lens is provided with an adjustable diaphragm, and the size of the detected light spot is adjusted by adjusting the size of the diaphragm opening.

[0036] The light emitted by the halogen lamp is focused and coupled into the optical fiber from the other end of the first beam splitting section of the optical fiber. The light passes through the aperture and the lens from the other end of the common section and is set on the film to be tested. The film to be tested reflects the light. The reflected light returns to the lens and enters the second beam splitting section, and enters the light inlet of the photoelectric conversion module from the other end of the second beam splitting section.

[0037] The photoelectric conversion module comprises a grating and a photoelectric detector, wherein the grating is arranged between the light inlet of the photoelectric conversion module and the photoelectric detector.

[0038] The light inlet of the photoelectric conversion module is provided with a slit. After the reflected light passes through the slit, it is collimated onto the grating for spectrometry. The grating decomposes the composite light of the reflected light signal into monochromatic light. The monochromatic light then passes through the photodetector. The photodetector converts the optical signal into an electrical signal and transmits it to the controller 400 via a USB data cable. The processing software of the controller 400 processes the electrical signal into image spectrum and film thickness data, and outputs the image spectrum and film thickness data.

[0039] The probe driving module 200 includes a first slide rail 210 and two second slide rails 220 . Two ends of the first slide rail 210 are slidably connected to the two second slide rails 220 , respectively. The probe module 300 is slidably connected to the first slide rail 210 .

[0040] The first slide rail 210 includes a first motor, a first turntable, a second turntable, a first belt, a first rail body and a first mounting seat; the first motor is connected to the first turntable, and the first belt is wound between the first turntable and the second turntable; the first mounting seat is fixed on the first belt and is slidably connected to the first rail body through rollers; the probe module 300 is installed on the first mounting seat.

[0041] Specifically, the rotor of the first motor is rotatably connected to the connecting rod of the first turntable, the outer edge of the first turntable is a wide and long gear stripe, and the outer edge of the first turntable is meshed with the inner gear of the first belt, and the outer edge of the second turntable is a wide and long gear stripe, and the outer edge of the second turntable is meshed with the inner gear of the first belt. The connecting rods at both ends of the first turntable are rotatably connected to the inside of the first bearing, and the first bearing is installed on the first square shell. The connecting rods at both ends of the second turntable are rotatably connected to the inside of the second bearing, and the second bearing is installed on the second square shell. The first square shell and the second square shell are respectively connected to the first rail body, and the first belt is embedded in the first groove of the first rail body. The first mounting seat is fixed on the first belt, and rollers are provided at both ends of the first mounting seat. The rollers of the first mounting seat are embedded in the second groove of the first rail body, so that the first mounting seat can slide along the second groove of the first rail body.

[0042] The wires and data lines of the first motor and the probe module 300 are installed in the chain, passing through the housing 122 of the stage 100 and connected to the electrical box in the housing 122. When the probe module 300 moves, the chain will converge up and down to improve the stability of the wire circuit.

[0043] When the first motor is started, the first motor rotates forward, the first turntable rotates counterclockwise to drive the first belt to move in the positive direction of the X-axis, and drives the first mounting seat to move in the positive direction of the X-axis, so that the probe module 300 moves in the positive direction of the X-axis. The first motor rotates reversely, the first turntable rotates clockwise to drive the first belt to move in the negative direction of the X-axis, and drives the first mounting seat to move in the negative direction of the X-axis, so that the probe module 300 moves in the negative direction of the X-axis.

[0044] The second slide rail 220 includes a second motor, a third turntable, a fourth turntable, a second belt, a second rail body and a second mounting seat; the second motor is connected to the third turntable, and the second belt is wound between the third turntable and the fourth turntable; the second mounting seat is fixed on the second belt and is slidably connected to the second rail body through rollers; the first slide rail 210 is installed on the second mounting seat.

[0045] Specifically, the rotor of the second motor is rotatably connected to the connecting rod of the third turntable, the outer edge of the third turntable is a wide and long gear stripe, and the outer edge of the third turntable is meshed with the inner gear of the second belt, and the outer edge of the fourth turntable is a wide and long gear stripe, and the outer edge of the fourth turntable is meshed with the inner gear of the second belt. The connecting rods at both ends of the third turntable are rotatably connected to the inside of the third bearing, and the third bearing is mounted on the third square shell. The connecting rods at both ends of the fourth turntable are rotatably connected to the inside of the fourth bearing, and the fourth bearing is mounted on the fourth square shell. The third square shell and the fourth square shell are respectively connected to the second rail body, and the second belt is embedded in the third groove of the second rail body. The second mounting seat is fixed on the second belt, and rollers are provided at both ends of the second mounting seat. The rollers of the second mounting seat are embedded in the fourth groove of the second rail body, so that the second mounting seat can slide along the fourth groove of the second rail body.

[0046] When the second motor is started, the second motor rotates forward, the second turntable rotates counterclockwise to drive the second belt to move in the positive direction of the Y axis, and drives the second mounting seat to move in the positive direction of the Y axis, so that the probe module 300 moves in the positive direction of the Y axis. The second motor rotates in the reverse direction, the second turntable rotates clockwise to drive the second belt to move in the negative direction of the Y axis, and drives the second mounting seat to move in the negative direction of the Y axis, so that the first slide rail 210 and the probe module 300 on the first slide rail 210 move in the negative direction of the Y axis.

[0047] The above is a specific description of the preferred implementation of the present application, but the present application is not limited to the embodiments. Technical personnel familiar with the field can make various equivalent modifications or substitutions without violating the spirit of the present application. These equivalent modifications or substitutions are all included in the scope defined by the claims of the present application.

Claims

1. A film thickness measuring instrument, characterized in that: include: A stage, the stage is used to place the film to be tested; A probe module, the probe module comprising a light source module and a photoelectric conversion module, the light source module is used to emit light to the film to be tested, and the photoelectric conversion module is used to convert the light signal reflected by the film to be tested into an electrical signal; A probe driving module, wherein the probe driving module is arranged on the stage, and the probe module is arranged on the probe driving module; The controller is used to control the probe driving module to drive the probe module to move according to a plurality of preset detection coordinates, and to process the electrical signal measured by the probe module to obtain film thickness data.

2. A film thickness measuring instrument according to claim 1, characterized in that: The light source module is provided with a halogen lamp and a heat dissipation lamp holder, the halogen lamp is mounted on the heat dissipation lamp holder, and the heat dissipation lamp holder is provided with a heat dissipation fan.

3. A film thickness measuring instrument according to claim 1, characterized in that: The light source module is provided with a focusing cup and a focusing lens.

4. A film thickness measuring instrument according to claim 1, characterized in that: The photoelectric conversion module comprises a grating and a photoelectric detector, and the grating is arranged between a light inlet of the photoelectric conversion module and the photoelectric detector.

5. The film thickness measuring instrument according to claim 1, characterized in that: The light source module is connected to the photoelectric conversion module through an optical fiber, which includes a first beam splitting segment, a second beam splitting segment and a common segment. One end of the first beam splitting segment, one end of the second beam splitting segment and one end of the common segment are connected, the other end of the first beam splitting segment is connected to the light outlet of the light source module, and the other end of the second beam splitting segment is connected to the light inlet of the photoelectric conversion module.

6. A film thickness measuring instrument according to claim 1, characterized in that: The probe driving module comprises a first slide rail and two second slide rails, two ends of the first slide rail are respectively slidably connected to the two second slide rails, and the probe module is slidably connected to the first slide rail.

7. A film thickness measuring instrument according to claim 6, characterized in that: The first slide rail includes a first motor, a first turntable, a second turntable, a first belt, a first rail body and a first mounting seat; the first motor is connected to the first turntable, and the first belt is wound between the first turntable and the second turntable; the first mounting seat is fixed on the first belt and is slidably connected to the first rail body through a roller; the probe module is installed on the first mounting seat.

8. A film thickness measuring instrument according to claim 6, characterized in that: The second slide rail includes a second motor, a third turntable, a fourth turntable, a second belt, a second rail body and a second mounting seat; the second motor is connected to the third turntable, and the second belt is wound between the third turntable and the fourth turntable; the second mounting seat is fixed on the second belt and is slidably connected to the second rail body through rollers; the first slide rail is installed on the second mounting seat.

9. The film thickness measuring instrument according to claim 1, characterized in that: A foot cup is arranged at the bottom of the loading platform.

10. A film thickness measuring instrument according to claim 9, characterized in that: The foot cup is provided with an anti-slip pad.

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