Detection jig equipment capable of fixing semiconductor butterfly valve

Abstract

The utility model relates to the technical field of detection jig equipment, and discloses detection jig equipment capable of fixing a semiconductor butterfly valve, which comprises a detection box, a limiting plate fixedly mounted at the top of the detection box, a connecting block fixedly mounted at the bottom of the limiting plate, and a fixing assembly arranged at the top of the limiting plate. Semiconductor butterfly valve bodies are movably installed at the bottom of the fixing assembly, and a plurality of first springs are fixedly installed above each semiconductor butterfly valve body and located in the fixing assembly. According to the utility model, the effect of stably and firmly fixing the semiconductor butterfly valve body is achieved, and the problems that the semiconductor butterfly valve is not firmly fixed and is easy to loosen due to the external influence, the detection effect is influenced, and the detection efficiency is improved due to the monotonous fixing mode of the detection jig equipment for the semiconductor butterfly valve are solved. And the semiconductor butterfly valve and the detection jig are easy to damage due to falling of the semiconductor butterfly valve, so that the practicability of the detection jig equipment is reduced.

Description

Technical field:

[0001] The utility model relates to the technical field of detection fixture equipment, in particular to a detection fixture equipment capable of fixing a semiconductor butterfly valve. Background technology:

[0002] Semiconductor vacuum butterfly valve is a key equipment used in the semiconductor industry. Its function is to control the flow of gas, maintain the vacuum environment, and ensure the stability and reliability of the semiconductor production process. The semiconductor vacuum butterfly valve is used to control the flow of gas and ensure that they enter the reaction chamber in a predetermined proportion and flow rate, thereby ensuring the accuracy and stability of the reaction.

[0003] After searching, a Chinese patent with publication number CN206470030U discloses an exhaust butterfly valve detection device, including a mounting bracket, a hollow groove is provided on the mounting bracket, an air outlet of the exhaust butterfly valve is pressed against the groove of the hollow groove and forms a detection cavity together with the hollow groove, an air inlet of the exhaust butterfly valve is connected with a first air inlet pipe, and the hollow groove is connected with a second air inlet pipe, and also includes a detection port, on which an intelligent pressure detector is installed, which changes the disadvantages of the traditional exhaust butterfly valve detection device that uses compressed air for detection, and there is a large gap between the detection pressure and the actual working pressure of the exhaust butterfly valve, and the detection accuracy is low. In addition to avoiding the misjudgment of the product's qualified rate due to low detection accuracy, the operator's labor intensity is low, and the product pressure value data of the double pressure is detected more accurately.

[0004] Based on the above search and combined with the prior art, we found that:

[0005] The method of fixing the semiconductor butterfly valve in the detection fixture equipment of the above scheme is relatively monotonous, which may easily lead to the semiconductor butterfly valve being loosely fixed due to external influences, which will not only affect the detection effect, but the falling of the semiconductor butterfly valve may also easily cause damage to the semiconductor butterfly valve and the detection fixture, reducing the practicality of the detection fixture equipment, so there are certain limitations. Utility model content:

[0006] The purpose of the utility model is to provide a detection fixture device that can fix the semiconductor butterfly valve in order to solve the above-mentioned problems. The device utilizes the cooperation between the first spring, the fixing block and the fixing groove to make the semiconductor butterfly valve body more firmly fixed, prevent the semiconductor butterfly valve body from loosening due to external influences and affecting the detection effect, and solve the problems mentioned in the background technology.

[0007] In order to solve the above problems, the utility model provides a technical solution:

[0008] A detection fixture device capable of fixing a semiconductor butterfly valve comprises a detection box, a semiconductor butterfly valve body, a first spring, a fixed block and a fixed groove, wherein a limit plate is fixedly mounted on the top of the detection box, a connecting block is fixedly mounted on the bottom of the limit plate, a fixed assembly is arranged on the top of the limit plate, a semiconductor butterfly valve body is movably mounted on the bottom of the fixed assembly, a plurality of first springs are fixedly mounted above each semiconductor butterfly valve body and inside the fixed assembly, a fixed block is fixedly mounted on one end of each of the first springs, and a fixed groove is arranged on the outer end of the fixed block.

[0009] As a preferred solution of the utility model, an anti-loosening component is provided on one side of the detection box, a connecting head is movably installed inside the anti-loosening component, and a connecting pipe is fixedly installed on one side of the connecting head.

[0010] As a preferred solution of the utility model, the fixing assembly includes a driving motor, the driving motor is fixedly mounted on the top of the limiting plate, a connecting shaft is fixedly mounted on the output end of the driving motor, a first adjusting rod is fixedly mounted on one side of the connecting shaft, and a connecting rod is rotatably connected between the two first adjusting rods.

[0011] As a preferred solution of the utility model, a connecting column is fixedly installed at the bottom of the two first adjusting rods, and the connecting column extends to the interior of the connecting block and is rotatably connected. An L-shaped clamping block is fixedly installed at the bottom of the two connecting columns, and a clamping groove is provided at the outer end of the L-shaped clamping block, and the clamping groove is opened at the top of the semiconductor butterfly valve body.

[0012] As a preferred solution of the utility model, the anti-loosening component includes a connector, which is fixedly installed on one side of the detection box. A plurality of installation grooves are opened inside the connector, and a second spring is fixedly installed inside each of the installation grooves.

[0013] As a preferred solution of the utility model, a pressing plate is fixedly installed at one end of each of the second springs, and a first electromagnetic coil is fixedly installed on the top of each of the pressing plates, and a second electromagnetic coil is fixedly installed above the first electromagnetic coil and on the inner wall of the mounting groove.

[0014] Compared with the prior art, the present invention has the following significant advantages:

[0015] First, the utility model connects the semiconductor butterfly valve body with the connecting block, drives the first adjusting rod to move through the driving motor, drives another first adjusting rod to move through the arranged connecting rod, and drives the connecting column to rotate through the eccentric arrangement of the first adjusting rod and the connecting column, thereby driving the L-shaped clamping block to rotate, so that it is clamped and fixed with the clamping groove, thereby fixing the connecting block and then fixing the semiconductor butterfly valve body. In addition, through the cooperation between the first spring, the fixing block and the fixing groove, the fixing block can be adjusted with the aid of the elasticity of the first spring, and the sizes of the fixing block and the fixing groove are adapted, so that the L-shaped clamping block can be reinforced and fixed, so that the semiconductor butterfly valve body is fixed more firmly, and the semiconductor butterfly valve body is prevented from being loosened due to external influences and affecting the detection effect, thereby improving the fixing firmness of the detection fixture equipment that can fix the semiconductor butterfly valve.

[0016] Second: The utility model is provided with an anti-loosening component, and utilizes the first electromagnetic coil and the second electromagnetic coil, and with the assistance of the second spring, the electromagnetic coil is energized, and there is a repulsive force between the second electromagnetic coil and the first electromagnetic coil. The pressing plate is adjusted, and the connector is fixedly connected with four pressing plates to ensure better detection effect.

[0017] The detection fixture equipment of the above solution solves the problem that the way of fixing the semiconductor butterfly valve is relatively monotonous, which may easily lead to the semiconductor butterfly valve being loosened due to external influences due to loose fixation, which will not only affect the detection effect, but the falling of the semiconductor butterfly valve may also easily cause damage to the semiconductor butterfly valve and the detection fixture, reducing the practicality of the detection fixture equipment. Description of the drawings:

[0018] For ease of explanation, the present invention is described in detail by the following specific implementations and drawings.

[0019] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0020] Figure 2 It is a detailed structural diagram of the fixing assembly of the utility model;

[0021] Figure 3 It is a schematic diagram of the structure of the fixed component of the utility model;

[0022] Figure 4 This is a schematic diagram of the structure of the anti-loosening component of the utility model;

[0023] Figure 5 This utility model Figure 3 Enlarged view of point A in the middle.

[0024] In the figure: 1. detection box; 2. limit plate; 3. connecting block; 4. fixing component; 41. driving motor; 42. connecting shaft; 43. first adjusting rod; 44. connecting rod; 45. connecting column; 46. L-shaped block; 47. slot; 5. semiconductor butterfly valve body; 6. first spring; 7. fixing block; 8. fixing slot; 9. anti-loosening component; 91. connector; 92. mounting slot; 93. second spring; 94. pressing plate; 95. first electromagnetic coil; 96. second electromagnetic coil; 10. connector; 11. connecting pipe. Specific implementation method:

[0025] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0026] Example:

[0027] like Figure 1 - Figure 5 As shown, the utility model provides a technical solution: a detection fixture device for fixing a semiconductor butterfly valve, comprising a detection box 1, a semiconductor butterfly valve body 5, a first spring 6, a fixing block 7 and a fixing groove 8, and the model of the semiconductor butterfly valve body 5 is D341X-16Q, a limit plate 2 is fixedly installed on the top of the detection box 1, the limit plate 2 is made of aluminum alloy, a connecting block 3 is fixedly installed on the bottom of the limit plate 2, a fixing component 4 is arranged on the top of the limit plate 2, a semiconductor butterfly valve body 5 is movably installed on the bottom of the fixing component 4, a plurality of first springs 6 are fixedly installed above each semiconductor butterfly valve body 5 and inside the fixing component 4, the first spring 6 plays a role of pressing and assisting adjustment, and a fixing block 7 is fixedly installed on one end of each first spring 6, a fixing groove 8 is arranged on the outer end of the fixing block 7, and the sizes of the fixing block 7 and the fixing groove 8 are adapted to make the connection more firm.

[0028] Furthermore, an anti-loosening component 9 is provided on one side of the detection box 1, a connector 10 is movably installed inside the anti-loosening component 9, a connecting pipe 11 is fixedly installed on one side of the connecting head 10, and an outer end of the connecting pipe 11 has an insulating pad to prevent electric shock.

[0029] Furthermore, the fixing component 4 includes a driving motor 41. The model of the driving motor 41 is ZR-SHJDJ. The driving motor 41 is fixedly installed on the top of the limit plate 2. A connecting shaft 42 is fixedly installed on the output end of the driving motor 41. The connecting shaft 42 is made of cast steel. A first adjusting rod 43 is fixedly installed on one side of the connecting shaft 42. A connecting rod 44 is rotatably connected between the two first adjusting rods 43. The first adjusting rod 43 is moved by the driving motor 41, and the connecting rod 44 is rotated by the first adjusting rod 43. The rotating connecting rod 44 moves the other first adjusting rod 43, thereby achieving a linkage effect.

[0030] Furthermore, a connecting column 45 is fixedly installed at the bottom of the two first adjusting rods 43, and the connecting column 45 extends to the interior of the connecting block 3 and is rotatably connected. An L-shaped clamping block 46 is fixedly installed at the bottom of the two connecting columns 45, and a clamping groove 47 is provided at the outer end of the L-shaped clamping block 46. The size of the clamping groove 47 of the L-shaped clamping block 46 is adapted, and the clamping groove 47 is opened at the top of the semiconductor butterfly valve body 5. When the first adjusting rod 43 moves, the eccentric setting between the first adjusting rod 43 and the connecting column 45 can rotate with the connecting column 45, thereby rotating with the L-shaped clamping block 46, so that the L-shaped clamping block 46 is clamped in the interior of the clamping groove 47, thereby fixing the semiconductor butterfly valve body 5.

[0031] Furthermore, the anti-loosening component 9 includes a connector 91, which is fixedly mounted on one side of the detection box 1. A plurality of mounting grooves 92 are provided inside the connector 91. A second spring 93 is fixedly mounted inside each mounting groove 92. The second spring 93 is elastic and easy to press.

[0032] Furthermore, a pressing plate 94 is fixedly installed at one end of each second spring 93, and a first electromagnetic coil 95 is fixedly installed on the top of each pressing plate 94. A second electromagnetic coil 96 is fixedly installed above the first electromagnetic coil 95 and on the inner wall of the mounting groove 92. The first electromagnetic coil 95 and the second electromagnetic coil 96 have the same magnetic poles and have mutual repulsion.

[0033] Working principle: The staff inserts the upper part of the semiconductor butterfly valve body 5 of model D341X-16Q into the interior of the connecting block 3, starts the driving motor 41, and the driving motor 41 drives the connecting shaft 42 to rotate, and the connecting shaft 42 drives the first adjusting rod 43 to rotate. When the first adjusting rod 43 moves, it will drive the connecting rod 44 to rotate, and then drive the other first adjusting rod 43 to move. By using the eccentric connection between the first adjusting rod 43 and the connecting column 45, when the two first adjusting rods 43 move, they can drive the connecting column 45 to rotate, and the two connecting columns 45 drive the two L-shaped blocks 46 to rotate. Adjustment is performed, and the L-shaped block 46 is stuck in the inside of the slot 47 to fix the semiconductor butterfly valve body 5. During the fixing process, when the L-shaped block 46 is stuck in the slot 47, the fixing block 7 is stuck in the inside of the fixing slot 8 with the help of the elasticity of the first spring 6, so that the fixation is more firm. Then the semiconductor butterfly valve body 5 is placed in the inside of the detection box 1, and the connecting head 10 is inserted into the inside of the connector 91. The second electromagnetic coil 96 is energized, and there is a repulsive force between the second electromagnetic coil 96 and the first electromagnetic coil 95. The pressing plate 94 is adjusted, and the connector 91 is fixedly connected with four pressing plates 94 to achieve a better detection effect.

[0034] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A detection fixture device capable of fixing a semiconductor butterfly valve, comprising a detection box (1), a semiconductor butterfly valve body (5), a first spring (6), a fixing block (7) and a fixing groove (8), characterized in that: A limit plate (2) is fixedly mounted on the top of the detection box (1), a connecting block (3) is fixedly mounted on the bottom of the limit plate (2), a fixing assembly (4) is arranged on the top of the limit plate (2), a semiconductor butterfly valve body (5) is movably mounted on the bottom of the fixing assembly (4), a plurality of first springs (6) are fixedly mounted above each semiconductor butterfly valve body (5) and inside the fixing assembly (4), and a fixing block (7) is fixedly mounted on one end of each first spring (6), and a fixing groove (8) is arranged on the outer end of the fixing block (7).

2. According to claim 1, a detection fixture device capable of fixing a semiconductor butterfly valve is characterized in that: An anti-loosening component (9) is provided on one side of the detection box (1), a connecting head (10) is movably installed inside the anti-loosening component (9), and a connecting pipe (11) is fixedly installed on one side of the connecting head (10).

3. The detection fixture device capable of fixing a semiconductor butterfly valve according to claim 1 is characterized in that: The fixing assembly (4) comprises a driving motor (41), the driving motor (41) being fixedly mounted on the top of the limiting plate (2), a connecting shaft (42) being fixedly mounted on the output end of the driving motor (41), a first adjusting rod (43) being fixedly mounted on one side of the connecting shaft (42), and a connecting rod (44) being rotatably connected between the two first adjusting rods (43).

4. The detection fixture device capable of fixing a semiconductor butterfly valve according to claim 3 is characterized in that: A connecting column (45) is fixedly installed at the bottom of the two first adjusting rods (43), and the connecting column (45) extends to the inside of the connecting block (3) and is rotatably connected. An L-shaped clamping block (46) is fixedly installed at the bottom of the two connecting columns (45), and a clamping groove (47) is provided at the outer end of the L-shaped clamping block (46), and the clamping groove (47) is opened at the top of the semiconductor butterfly valve body (5).

5. The detection fixture device capable of fixing a semiconductor butterfly valve according to claim 2 is characterized in that: The anti-loosening component (9) comprises a connector (91), wherein the connector (91) is fixedly mounted on one side of the detection box (1), a plurality of mounting grooves (92) are provided inside the connector (91), and a second spring (93) is fixedly mounted inside each mounting groove (92).

6. The detection fixture device capable of fixing a semiconductor butterfly valve according to claim 5 is characterized in that: A pressing plate (94) is fixedly mounted on one end of each of the second springs (93), and a first electromagnetic coil (95) is fixedly mounted on the top of each of the pressing plates (94); a second electromagnetic coil (96) is fixedly mounted above the first electromagnetic coil (95) and on the inner wall of the mounting groove (92).

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