Vacuum continuous detection structure of X-ray spectrometer

Abstract

The utility model discloses a vacuum continuous detection structure of an X-ray spectrometer. The vacuum continuous detection structure comprises a ray tube working head module, an upper closed cavity cover plate, an XY movable platform module, a lower cavity base and an operable cavity cover plate, the ray tube working head module comprises an anti-radiation shell and a camera module, and the anti-radiation shell is installed at the top end of the camera module. When the device is used, the ray tube working head module for measurement is placed on the upper side, and a sample can continuously move on the lower side and is not influenced by interference of a working table structure; the operable cavity is preposed and independently serves as a module, so that the required opening space is effectively reduced, and the operation is convenient; the cavity is closed, so that a vacuumizing state can be realized, and the detection effect is improved; and the sample continuously moves on the XY moving workbench, and the position can be randomly selected and edited, so that the use is convenient for a user.

Description

Technical Field

[0001] The utility model relates to the technical field of spectrometers, in particular to a vacuum continuous detection structure of an X-ray spectrometer. Background Art

[0002] At present, the vacuum X-ray fluorescence spectrometers on the market are basically fixed, that is, the X-ray tube is under the sample, and the sample is fixedly placed to measure a certain point; in addition, there are rotatable multi-group measurements, that is, multiple groups of measurement samples are placed on a rotating table in a specific way, and multiple groups of samples can be measured continuously by rotation.

[0003] With the popularity of XRF non-destructive testing, there are many application requirements for continuous measurement of large samples in the semiconductor field. The main sample size range is about 150-400mm. The measurement points can be quickly edited and measured continuously. The existing vacuum spectrometer cannot meet such requirements.

[0004] Therefore, how to provide a vacuum continuous detection structure for an X-ray spectrometer to solve the problems existing in the prior art is of great significance to its application. Utility Model Content

[0005] In view of this, the purpose of the present application is to provide an X-ray spectrometer vacuum continuous detection structure to solve the problem.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] An X-ray spectrometer vacuum continuous detection structure comprises a ray tube working head module, an upper closed cavity cover plate, an XY movable platform module, a lower cavity base and an operable cavity cover plate;

[0008] The ray tube working head module comprises a radiation-proof housing and a camera module, wherein the radiation-proof housing is installed at the top of the camera module;

[0009] A detection window is provided at the top of the upper closed cavity cover plate, and a hinge is installed on the side of the detection window;

[0010] The XY movable platform module includes a Y-axis moving module, an X-axis moving module, and a sample placement platform, wherein the Y-axis moving module is installed at the movable end of the X-axis moving module, and the sample placement platform is installed at the movable end of the Y-axis moving module;

[0011] The XY movable platform module is installed inside the lower cavity base, the upper closed cavity cover is installed on the top of the lower cavity base, the operable cavity cover is installed on the top of the upper closed cavity cover, and the ray tube working head module is installed on the top of the upper closed cavity cover.

[0012] Preferably, the operable cavity cover is hinged to the top of the detection window through a hinge, and a handle is installed on the side of the operable cavity cover.

[0013] Preferably, a circular hole is formed on the surface of the upper closed cavity cover plate, and the viewfinder of the camera module is located above the circular hole.

[0014] Preferably, a foot is installed at the bottom end of the lower cavity base, and the foot is adjustable.

[0015] Compared with the prior art, the beneficial effects of the utility model are:

[0016] 1. Place the measuring ray tube head module on the upper side, and the sample can move continuously on the lower side without being affected by the interference of the workbench structure;

[0017] 2. The operable cavity is placed in front and acts as a separate module, which effectively reduces the required opening space and facilitates operation;

[0018] 3. The closed cavity can achieve vacuum state and improve the detection effect;

[0019] 4. The sample moves continuously on the XY moving workbench, and the position can be selected and edited at will, which is convenient for users.

[0020] The utility model has the following effects: it meets the vacuum measurement requirements of large-area samples, the measurement position and the measurement interval can be edited at will, and has a compact structure and is easy to operate.

[0021] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application so that it can be implemented in accordance with the contents of the specification, and to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the following is a detailed description of the preferred embodiments of the present application in conjunction with the accompanying drawings as follows.

[0022] Based on the detailed description of the specific embodiments of the present application in combination with the accompanying drawings below, those skilled in the art will become more aware of the above and other objects, advantages and features of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can also be obtained based on these drawings without creative work. In all drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, each element or part is not necessarily drawn according to the actual scale.

[0024] Figure 1 It is a schematic diagram of the structure of the utility model;

[0025] Figure 2 It is an exploded view of the utility model.

[0026] In the figure: 1. X-ray tube working head module; 2. Upper closed cavity cover; 3. XY movable platform module; 4. Lower cavity base; 5. Operable cavity cover; 11. Radiation protection shell; 12. Camera module; 21. Hinge; 22. Detection window; 31. Y-axis moving module; 32. X-axis moving module; 33. Sample placement platform; 41. Bottom foot; 51. Handle. DETAILED DESCRIPTION

[0027] To make the purpose, technical scheme and advantages of the embodiment of the present application clearer, the technical scheme in the embodiment of the present application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiment of the present application. Obviously, the described embodiment is a part of the embodiment of the present application, rather than all of the embodiments. In the following description, specific details such as specific configuration and components are provided only to help fully understand the embodiments of the present application. Therefore, it should be clear to those skilled in the art that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the present application. In addition, for clarity and brevity, the description of known functions and structures is omitted in the embodiment.

[0028] In addition, the present application may repeat reference numerals and / or letters in different examples. This repetition is for the purpose of simplicity and clarity, and does not in itself indicate the relationship between the various embodiments and / or settings discussed.

[0029] The term "and / or" in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can mean: A exists alone, B exists alone, and A and B exist at the same time. The term " / and" in this article describes another type of association object relationship, indicating that there can be two relationships. For example, A / and B can mean: A exists alone, and A and B exist alone. In addition, the character " / " in this article generally indicates that the previous and next associated objects are in an "or" relationship.

[0030] It should also be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusions.

[0031] See also Figure 1-2, the present invention provides a technical solution of a vacuum continuous detection structure of an X-ray spectrometer: comprising a ray tube working head module 1, an upper closed cavity cover plate 2, an XY movable platform module 3, a lower cavity base 4 and an operable cavity cover plate 5;

[0032] The ray tube working head module 1 comprises a radiation-proof housing 11 and a camera module 12, wherein the radiation-proof housing 11 is mounted on the top of the camera module 12;

[0033] A detection window 22 is provided at the top of the upper closed cavity cover plate 2, and a hinge 21 is installed on the side of the detection window 22;

[0034] The XY movable platform module 3 includes a Y-axis movable module 31 , an X-axis movable module 32 , and a sample placement platform 33 . The Y-axis movable module 31 is mounted on the movable end of the X-axis movable module 32 , and the sample placement platform 33 is mounted on the movable end of the Y-axis movable module 31 .

[0035] The Y-axis moving module 31 and the X-axis moving module 32 are both composed of a motor, a threaded rod, a slider and a slide rail. The motor is installed at one end of the slide rail, the threaded rod is installed inside the slide rail, the slider is slidably connected to the slide rail, the threaded rod and the slider are threadedly connected, and the slider is the movable end of the Y-axis moving module 31 and the X-axis moving module 32.

[0036] The XY movable platform module 3 is installed inside the lower cavity base 4, the upper closed cavity cover plate 2 is installed on the top of the lower cavity base 4, the operable cavity cover plate 5 is installed on the top of the upper closed cavity cover plate 2, and the X-ray tube working head module 1 is installed on the top of the upper closed cavity cover plate 2.

[0037] The operable cavity cover plate 5 is hinged to the top of the detection window 22 through a hinge 21 , and a handle 51 is installed on the side of the operable cavity cover plate 5 to facilitate opening and closing of the operable cavity cover plate.

[0038] A circular hole is formed on the surface of the upper closed cavity cover plate 2, and the viewfinder of the camera module 12 is located above the circular hole.

[0039] A foot 41 is installed at the bottom end of the lower cavity base 4, and the foot 41 is adjustable to facilitate leveling of the equipment.

[0040] During specific use, the X-ray tube working head module 1 is screwed to the upper cavity cover 2; the upper cavity cover 2 is screwed to the lower cavity base 4 to form an integral cavity for placing the XY movable platform module 3 and the sample; the XY movable platform module 3 is screwed to the lower cavity base 4; the operable cavity cover 5 is screwed to the upper closed cavity cover 2, and the sample can be placed on the platform 33 when it is opened and retrieved after the measurement is completed; after the operable cavity cover 5 is closed, it can form a cavity closed from the outside with the lower cavity base 4.

[0041] The above description is only the preferred embodiment of the utility model, which does not limit the protection scope of the utility model. For those skilled in the art, the utility model can be modified and varied in various ways. Any changes, modifications, substitutions, integrations and parameter changes to these embodiments within the spirit and principle of the utility model through conventional substitutions or capable of achieving the same functions without departing from the principles and spirit of the utility model shall fall within the protection scope of the utility model.

Claims

1. A vacuum continuous detection structure for an X-ray spectrometer, characterized in that: It comprises a ray tube working head module (1), an upper closed cavity cover plate (2), an XY movable platform module (3), a lower cavity base (4) and an operable cavity cover plate (5); The ray tube working head module (1) comprises a radiation-proof housing (11) and a camera module (12), wherein the radiation-proof housing (11) is mounted on the top of the camera module (12); A detection window (22) is provided at the top of the upper closed cavity cover plate (2), and a hinge (21) is installed on the side of the detection window (22); The XY movable platform module (3) comprises a Y-axis movable module (31), an X-axis movable module (32), and a sample placement platform (33), wherein the Y-axis movable module (31) is mounted on the movable end of the X-axis movable module (32), and the sample placement platform (33) is mounted on the movable end of the Y-axis movable module (31); The XY movable platform module (3) is installed inside the lower cavity base (4), the upper closed cavity cover plate (2) is installed on the top of the lower cavity base (4), the operable cavity cover plate (5) is installed on the top of the upper closed cavity cover plate (2), and the ray tube working head module (1) is installed on the top of the upper closed cavity cover plate (2).

2. The X-ray spectrometer vacuum continuous detection structure according to claim 1, characterized in that: The operable cavity cover plate (5) is hinged to the top of the detection window (22) via a hinge (21), and a handle (51) is installed on the side of the operable cavity cover plate (5).

3. The vacuum continuous detection structure of an X-ray spectrometer as claimed in claim 2, characterized in that: A circular hole is provided on the surface of the upper closed cavity cover plate (2), and the viewfinder of the camera module (12) is located above the circular hole.

4. The X-ray spectrometer vacuum continuous detection structure as claimed in claim 3, characterized in that: A foot (41) is installed at the bottom end of the lower cavity base (4), and the foot (41) is adjustable.

Images