Package and optical structure

Abstract

The utility model provides a packaging body comprising an optical engine attached to a packaging substrate, and the optical engine comprises a first guided wave; and a guided wave structure attached to the package substrate adjacent to the optical engine, where the guided wave structure includes a second guided wave within a transparent block, where a bottom surface of the transparent block is non-planar, where the second guided wave is a fixed distance from the bottom surface along its length, where the second guided wave is optically coupled to the first guided wave.

Description

Technical Field

[0001] The embodiments of the present disclosure relate to packaging technology, and in particular to a package body and an optical structure with waveguide. Background Art

[0002] Electrical signaling and processing is a technology used for signal transmission and processing. Optical signaling and processing has been increasingly used in more applications in recent years, especially due to the use of optical fiber related applications for signal transmission.

[0003] Optical communication and processing are often combined with electronic communication and processing to provide full-fledged applications. For example, optical fibers can be used for long-range signal transmission, and electronic signals can be used for short-range signal transmission and processing and control. Thus, devices integrating optical and electronic components are formed for converting between optical and electronic signals and for processing optical and electronic signals. A package may thus include both an optical (photonic) die including an optical device and an electronic die including an electronic device. Utility Model Content

[0004] The purpose of the present disclosure is to provide a package and an optical structure to solve at least one of the above problems.

[0005] A package includes an optical engine attached to a packaging substrate, wherein the optical engine includes a first waveguide; and a waveguide structure attached to the packaging substrate adjacent to the optical engine, wherein the waveguide structure includes a second waveguide within a transparent block, wherein a bottom surface of the transparent block is non-planar, wherein the second waveguide is a fixed distance from the bottom surface along its length, and wherein the second waveguide is optically coupled to the first waveguide.

[0006] According to an embodiment of the present invention, the fixed distance is in a range of 5 micrometers to 700 micrometers.

[0007] According to an embodiment of the present invention, the transparent block includes a plurality of lenses protruding from a plurality of side walls of the transparent block, wherein the plurality of lenses are adjacent to corresponding ends of the second waveguide.

[0008] According to an embodiment of the present invention, the second waveguide is a laser writing waveguide.

[0009] According to an embodiment of the present invention, a first portion of the bottom surface is close to a first end of the transparent block, a second portion of the bottom surface is close to a second end of the transparent block opposite to the first end, and the first portion of the bottom surface is closer to the packaging substrate than the second portion.

[0010] According to an embodiment of the present invention, the second waveguide is optically coupled to the first waveguide through an edge coupler in the optical engine.

[0011] An optical structure includes: a glass block having a first end and a second end opposite the first end, wherein a first thickness at the first end of the glass block is greater than a second thickness at the second end of the glass block, wherein the glass block includes a curved surface extending from the first end to the second end; a plurality of waveguides located within the glass block, wherein the waveguides extend between the first end and the second end, wherein each of the waveguides has a curvature corresponding to the curvature of the curved surface; and a fixture surrounding the second end of the glass block, wherein the fixture is configured to connect an optical fiber.

[0012] According to an embodiment of the present invention, the glass block includes a top surface opposite to the curved surface, and the plurality of waveguides are closer to the curved surface than to the top surface.

[0013] According to an embodiment of the present invention, the top surface is flat.

[0014] According to an embodiment of the present invention, the waveguides have a first pitch close to the first end and a second pitch close to the second end, wherein the first pitch is different from the second pitch. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The following will be described in detail with the accompanying drawings. It should be noted that, in accordance with standard practice in the industry, various components are not drawn to scale and are only used for illustration. In fact, the size of the components can be arbitrarily enlarged or reduced to clearly show the components of the embodiments of the present disclosure.

[0016] Figures 1 to 9 FIG. 2 shows the formation of an optical package according to some embodiments.

[0017] Fig.10 and Fig.11 FIG. 1 is a diagram illustrating a photonic package according to some embodiments.

[0018] Fig.12 and Fig.13 FIG. 2 shows the formation of a waveguide structure according to some embodiments.

[0019] Fig.14 , Fig.15and Fig.16 is a schematic diagram illustrating a waveguide structure according to some embodiments.

[0020] Fig.17 is a diagram showing a coupling structure according to some embodiments.

[0021] Fig.18 and Fig.19 2 is a diagram illustrating formation of a photonic system according to some embodiments. Fig. 20 and Fig.21 2 is a diagram illustrating a photonic system according to some embodiments.

[0022] Fig. 22 and Fig.23 FIG. 2 is a diagram illustrating a waveguide structure according to some embodiments.

[0023] The accompanying drawings are described as follows:

[0024] 100: Optical Engine

[0025] 102: (buried oxide) substrate

[0026] 102A: Silicon layer

[0027] 102B: Oxide layer

[0028] 102C / 214: Base

[0029] 104: Waveguide

[0030] 106: Photonic components

[0031] 107:Edge Coupler

[0032] 108 / 115 / 117 / 121: Dielectric layer

[0033] 110: Photonic Wiring Structure

[0034] 112: Guide hole

[0035] 113: Contact

[0036] 114: Conductive parts

[0037] 116: Conductive pad

[0038] 120: Rewiring structure

[0039] 122:Electronic grains

[0040] 124: Die connector

[0041] 125: Support

[0042] 126: Dielectric materials

[0043] 127: Adhesive layer

[0044] 200: Photonic package

[0045] 202: Semiconductor grains

[0046] 210: Interconnect substrate

[0047] 212: Interconnection structure

[0048] 216: Through hole

[0049] 218: Conductive connector

[0050] 300 / 320 / 330 / 340: Waveguide structure

[0051] 300': Shape block

[0052] 301A: curved surface / (first) surface

[0053] 301B: (Second) Surface

[0054] 302A / 302B: Lens

[0055] 303A / 303B: End

[0056] 304: Waveguide

[0057] 304A: The first group of waveguides

[0058] 304B: The second waveguide

[0059] 321: Laser writing device

[0060] 341: Depression

[0061] 342: Pinhole

[0062] 400: Fixer

[0063] 450: Coupling structure

[0064] 500 / 520 / 530: Photonic Systems

[0065] 510: packaging substrate

[0066] 512: Conductive connector

[0067] 514:Optical Adhesive

[0068] D1 / D2: Depth

[0069] HA / HB: Height

[0070] L1: Width

[0071] L2: Distance

[0072] PA / PB: Pitch

[0073] TA / TB:Thickness

[0074] TC: Thickness difference. DETAILED DESCRIPTION

[0075] The following disclosure provides many embodiments or examples for implementing different elements of the subject matter provided. Specific examples of each element and its configuration are described below to simplify the description of the embodiments of the present disclosure. Of course, these are merely examples and are not intended to limit the embodiments of the present disclosure. For example, if the description mentions that a first element is formed on a second element, an embodiment in which the first and second elements are in direct contact may be included, and an embodiment in which an additional element is formed between the first and second elements so that they are not in direct contact may also be included. In addition, the embodiments of the present disclosure may repeat reference numbers and / or letters in various examples. Such repetition is for the purpose of simplicity and clarity, rather than for indicating the relationship between the different embodiments and / or configurations discussed.

[0076] Furthermore, spatially relative terms such as "under", "below", "lower", "above", "upper" and the like may be used to facilitate description of the relationship between one component or parts and another component or parts in the drawings. Spatially relative terms are used to include different orientations of the device in use or operation, as well as the orientations described in the drawings. When the device is turned to a different orientation (rotated 90 degrees or other orientations), the spatially relative adjectives used therein will also be interpreted based on the turned orientation.

[0077] Provided is a photonic system and a method for manufacturing the same, the photonic system comprising a waveguide structure for integrating an optical fiber with an optical engine. The waveguide structure comprises a waveguide formed by laser-writing a curved surface of the waveguide structure. Forming a waveguide structure having a curved surface allows the laser-written waveguide to conform to the contour of the curved surface, which allows the waveguide to be formed at a consistent shallow depth below the curved surface, and forming the waveguide at a shallow depth can improve the quality of the waveguide. The laser-written waveguide transmits optical signals and / or optical power between the optical fiber and other optical components (such as waveguides and / or edge couplers). The embodiments discussed herein will provide examples of the subject matter of the present disclosure that can be implemented or used, and those skilled in the art will readily appreciate that modifications can be made while maintaining the intended scope of different embodiments. In the various schematic diagrams and illustrative embodiments, similar reference numerals represent similar elements. Although method embodiments may be discussed as being performed in a particular order, other method embodiments may be performed in any logical order.

[0078] Figures 1 to 9According to some embodiments, an optical engine 100 (see Fig. 9 ). In some embodiments, the optical engine 100 can act as an input / output (I / O) interface between optical signals and electronic signals. One or more optical engines can be used in a photonic package, a photonic structure, a photonic system, etc. For example, one or more optical engines 100 can be used in a photonic system (such as the one described below for Fig.10 The photonic package 200 described above), the photonic system (such as the one described below for Fig.19 In some embodiments, multiple optical engines 100 are formed on the same substrate (eg, Figure 1 102), and then subsequently separated into individual optical engines 100.

[0079] See first Figure 1 According to some embodiments, a buried oxide (BOX) substrate 102 is provided. The BOX substrate 102 includes an oxide layer 102B formed on a substrate 102C and a silicon layer 102A formed on the oxide layer 102B. For example, the substrate 102C may be a material such as glass, ceramic, dielectric, semiconductor, etc., or a combination of the foregoing. In some embodiments, the substrate 102C may be a semiconductor substrate such as a bulk semiconductor, which may be doped (e.g., with p-type or n-type dopants) or undoped. The substrate 102C may be a wafer such as a silicon wafer (e.g., a 12-inch silicon wafer). Other substrates, such as a multilayer substrate or a gradient substrate, may also be used. In some embodiments, the semiconductor material of the substrate 102C may include silicon; germanium; a compound semiconductor including silicon carbide, gallium arsenide, gallium phosphide, indium phosphide, indium arsenide and / or indium antimonide; an alloy semiconductor including silicon germanium (SiGe), gallium arsenide phosphide (GaAsP), aluminum indium arsenide (AlInAs), aluminum gallium arsenide (AlGaAs), gallium indium arsenide (GaInAs), gallium indium phosphide (GaInP) and / or gallium indium arsenide phosphide (GaInAsP); or a combination of the foregoing. For example, the oxide layer 102B may be silicon oxide, etc. In some embodiments, the oxide layer 102B may have a thickness between about 0.5 microns and about 4 microns. In some embodiments, the silicon layer 102A may have a thickness between about 0.1 microns and about 1.5 microns. Other thicknesses or materials are also possible. The BOX substrate 102 may be referred to as having a front side or front surface (e.g., Figure 1 the side facing upward) and the dorsal side or surface (e.g. Figure 1 side facing downward).

[0080] exist Figure 2In some embodiments, the silicon layer 102A is patterned to form silicon regions of the waveguide 104, the photonic element 106, and / or the edge coupler 107. The silicon layer 102A may be patterned using suitable photolithography and etching techniques. For example, in some embodiments, a hard mask layer (e.g., a nitride layer or other dielectric material, Figure 2 104 ) and patterned. The pattern of the hard mask layer may then be transferred to the silicon layer 102A using one or more etching techniques (e.g., dry etching and / or wet etching techniques). For example, the silicon layer 102A may be etched to form a recess that defines the waveguide 104, with the remaining unrecessed sidewalls defining the sidewalls of the waveguide 104. In some embodiments, more than one photolithography and etching sequence may be used to pattern the silicon layer 102A. One waveguide 104 or multiple waveguides 104 may be patterned from the silicon layer 102A. If multiple waveguides 104 are formed, the multiple waveguides 104 may be separate individual waveguides 104 or connected as a single continuous structure. In some embodiments, one or more of the waveguides 104 form a continuous loop. Other configurations or arrangements of the waveguides 104, the photonic elements 106, or the edge couplers 107 are possible. In some cases, the waveguides 104, the photonic elements 106, and the edge couplers 107 may be collectively referred to as a "photonic layer."

[0081] In some embodiments, the photonic element 106 may be integrated with the waveguide 104 and may be formed together with the waveguide 104. The photonic element 106 may be physically and / or optically coupled to the waveguide 104 to interact with the optical signal in the waveguide 104. For example, the photonic element 106 may include photodetectors and / or modulators, etc. For example, the photodetector may be optically coupled to the waveguide 104 to detect the optical signal in the waveguide 104 and generate an electronic signal corresponding to the optical signal. The modulator may be optically coupled to the waveguide 104 to receive the electronic signal and generate a corresponding optical signal in the waveguide 104 by modulating the optical power in the waveguide 104. In this way, the photonic element 106 can facilitate the input / output (I / O) of the optical signal to the waveguide 104. In other embodiments, the photonic elements may include other active or passive elements, such as laser diodes, light-emitting diodes (LEDs), optical signal splitters, phase shifters, resonators, amplifiers, optical cavities, evanescent couplers, grating couplers, or other types of structures or devices. For example, the optical power may be provided by an optical fiber (e.g., coupled to an external light source (e.g., via edge coupler 107 or grating coupler)) coupled to an external light source (e.g., via edge coupler 107 or grating coupler). Fig. 9 ) to the waveguide 104, or the optical power may be provided by a photonic element (such as a laser diode, etc.) within the optical engine 100. Figures 1 to 9 In some embodiments, optical power and / or optical signals may be transmitted to the waveguide 104 from an adjacent optical engine, a photonic package, a photonic structure, a photonic system, a photonic element, etc.

[0082] In some embodiments, for example, an optical element 106 such as a photodetector may be formed by partially etching a region of the waveguide 104 and growing an epitaxial material on the remaining silicon of the etched region. The waveguide 104 may be etched using suitable photolithography and etching techniques. For example, the epitaxial material may include a semiconductor material such as germanium (Ge), which may be doped or undoped. In some embodiments, an implantation process may be performed to introduce dopants (e.g., p-type dopants, n-type dopants, or a combination thereof) into the silicon of the etched region or into the epitaxial material. In some embodiments, for example, an optical element 106 such as a modulator may be formed by partially etching a region of the waveguide 104 and then implanting appropriate dopants (e.g., p-type dopants, n-type dopants, or a combination thereof) into the remaining silicon of the etched region. The waveguide 104 may be etched using suitable photolithography and etching techniques. In some embodiments, the etched region for the photodetector and the etched region for the modulator may be formed using one or more of the same photolithography or etching steps. In some embodiments, the etched region for the photodetector and the etched region for the modulator may be implanted using one or more of the same implantation steps. Other fabrication steps of other photonic elements 106 are possible.

[0083] In some embodiments, one or more edge couplers 107 may be integrated with the waveguide 104 and may be formed together with the waveguide 104. The edge coupler 107 may be continuous with the waveguide 104 and may be formed in the same process step as the waveguide 104 or other photonic elements 106. The edge coupler 107 allows optical signals and / or optical power to be transmitted between the waveguide 104 and an optical element or photonic element near an adjacent sidewall of the optical engine 100. For example, the edge coupler 107 may be optically coupled to, for example, another waveguide (e.g., the waveguide 304 described below), another optical engine, another photonic package, another photonic system, an optical fiber, an external laser diode, etc. The optical engine 100 may include a single edge coupler 107 or multiple edge couplers 107. In some embodiments, the edge coupler 107 may be formed using acceptable photolithography and etching techniques. In some embodiments, the edge coupler 107 may be formed using the same photolithography or etching steps as the waveguide 104 and / or photonic elements 106. In other embodiments, the edge coupler 107 is formed after the waveguide 104 and / or the photonic element 106 are formed.

[0084] exist Figure 3In some embodiments, a dielectric layer 108 is formed on the front side of the BOX substrate 102 to form a photonic wiring structure 110. The dielectric layer 108 is formed over the waveguide 104, the photonic element 106, the edge coupler 107, and the oxide layer 102B. The dielectric layer 108 may be formed of one or more layers of silicon oxide, silicon nitride, combinations thereof, and may be formed by chemical vapor deposition (CVD), physical vapor deposition (PVD), atomic layer deposition (ALD), spin-on-dielectric, or combinations thereof. In some embodiments, the dielectric layer 108 may be formed by high density plasma chemical vapor deposition (HDP-CVD), flowable chemical vapor deposition (FCVD), or combinations thereof. Other dielectric materials formed by any acceptable process may be used. In some embodiments, the dielectric layer 108 is then planarized using a planarization process such as a chemical mechanical polish (CMP) process, a grinding process, etc. In some embodiments, the dielectric layer 108 may be formed to have a thickness between about 50 nanometers and about 500 nanometers over the oxide layer 102B, or may be formed to have a thickness between about 10 nanometers and about 200 nanometers over the waveguide 104. Other thicknesses are also possible.

[0085] Due to the different refractive indices of the materials of the waveguide 104 and the dielectric layer 108, the waveguide 104 has a high internal reflection, so that the light is substantially confined within the waveguide 104, depending on the wavelength of the light and the refractive index of the corresponding material. In one embodiment, the refractive index of the material of the waveguide 104 is higher than the refractive index of the material of the dielectric layer 108. For example, the waveguide 104 may include silicon, and the dielectric layer 108 may include silicon oxide and / or silicon nitride. In other embodiments, the waveguide 104 may be formed of silicon nitride, etc. Other materials are also possible.

[0086] exist Figure 4 In some embodiments, vias 112 and contacts 113 are formed. Vias 112 extend into substrate 102C and allow electrical connections to be made on the back side of optical engine 100. Contacts 113 allow electronic signals and / or power to be transmitted to or from appropriate photonic elements 106. In this way, photonic elements 106 can transmit electronic signals (e.g., from electronic die 122, see Figure 7 ) is converted into an optical signal transmitted by the waveguide 104, or the photonic element 106 can convert the optical signal within the waveguide 104 into an electronic signal (for example, which can be received by the electronic grain 122). For example, the guide hole 112 and / or the contact 113 can be formed by forming an opening (not shown separately) in the dielectric layer 108. According to some embodiments, the opening that subsequently forms the guide hole 112 can extend through the dielectric layer 108, through the oxide layer 102B, and partially into the substrate 102C. The opening can be formed by acceptable photolithography and etching techniques, such as by forming and patterning a photoresist, and then performing an etching process using the patterned photoresist as an etching mask. For example, the etching process can include a dry etching process and / or a wet etching process. The opening for the guide hole 112 and the opening for the contact 113 can be formed separately or can be formed using one or more simultaneous steps.

[0087] According to some embodiments, a conductive material is then deposited in the opening to form the via 112 and the contact 113. In some embodiments, a liner (not shown) such as a diffusion barrier layer, an adhesion layer, etc. may be first deposited in the opening. For example, the liner may include tantalum nitride, tantalum (Ta), titanium nitride, titanium (Ti), cobalt tungsten, etc., and may be formed using a suitable deposition process such as CVD, PVD, ALD, etc. In some embodiments, the via 112 and / or the contact 113 may be formed by depositing a seed layer (not shown) in the opening, and if present, the seed layer may be deposited on the liner. In some embodiments, the seed layer may include copper, a copper alloy, etc. A conductive material may then be formed in the opening using, for example, electrochemical plating (ECP) or chemical plating. For example, the conductive material may include a metal or a metal alloy such as copper, silver, gold, tungsten, cobalt, ruthenium, aluminum, or an alloy of the foregoing. A planarization process (e.g., a CMP process or a grinding process) may be performed to remove excess conductive material along the top surface of the dielectric layer 108 so that the top surface of the vias 112, the contacts 113, and / or the dielectric layer 108 are flush. This is an example, and the vias 112 and / or the contacts 113 may be formed using any suitable technique, such as by a damascene process (e.g., single damascene or dual damascene), or another process. The contacts 113 may be formed before or after the vias 112 are formed, and the formation of the contacts 113 and the formation of the vias 112 may share some steps, such as deposition and / or planarization of conductive material. In other embodiments, other techniques or materials may be used to form the vias 112 and the contacts 113. The vias 112 and the contacts 113 may be formed using similar techniques or materials or different techniques or materials. More or fewer vias 112 or contacts 113 may be formed than shown in the drawings, and in some other embodiments, the vias 112 are not formed.

[0088] exist Figure 5 In some embodiments, a redistribution structure 120 is formed above the dielectric layer 108. The redistribution structure 120 includes one or more dielectric layers 117 and conductive features 114 formed in the dielectric layer 117, and the conductive features 114 provide interconnection and electrical wiring. For example, the interconnection structure 120 can connect the vias 112, the contacts 113, and / or electronic chips 122 (see Figure 7) overlying element. In some other embodiments, the redistribution structure 120 can be electrically connected to the photonic component 106 instead of the contact 113, or the contact 113 can be considered to be part of the redistribution structure 120. For example, the dielectric layer 117 can be an insulating layer or a passivation layer, and can include one or more materials similar to the above-mentioned dielectric layer 108 (such as silicon oxide or silicon nitride), or can include different materials. In some embodiments, the dielectric layer 117 and the dielectric layer 108 can be transparent or nearly transparent to light in the same wavelength range. The dielectric layer 117 can be formed using techniques similar to the above-mentioned dielectric layer 108 or using different techniques. The conductive component 114 may include wires and vias, and the conductive component 114 may be formed by a damascene process (e.g., single damascene, dual damascene, etc.) or other processes. As Figure 5 As shown, the conductive pad 116 is formed in the topmost dielectric layer 117. A planarization process (e.g., a CMP process, etc.) may be performed after forming the conductive pad 116 so that the surface of the conductive pad 116 is substantially coplanar (e.g., flush) with the topmost dielectric layer 117. The redistribution structure 120 may include Figure 5 More or fewer dielectric layers 117, conductive features 114, or conductive pads 116 are shown, and may have different arrangements or configurations. In some embodiments, the redistribution structure 120 may be formed to have a thickness between about 4 microns and about 6 microns. Other thicknesses are also possible.

[0089] exist Figure 6 In some embodiments, portions of the rewiring structure 120 are removed and replaced by the dielectric layer 115. For example, acceptable photolithography and etching techniques can be used to remove portions of the rewiring structure 120, such as by forming and patterning a photoresist, and then performing an etching process using the patterned photoresist as an etching mask to remove the dielectric layer 117. For example, the etching process can include a dry etching process and / or a wet etching process. In some embodiments, removing portions of the rewiring structure 120 can expose the dielectric layer 108. In other embodiments, after removing portions of the rewiring structure 120, the dielectric layer 108 can remain covered by one or more layers of the dielectric layer 117.

[0090] After removing the portion of the rewiring structure, a dielectric layer 115 may then be deposited to replace the removed portion of the rewiring structure 120. The dielectric layer 115 may include one or more materials similar to the dielectric layer 108 described above, such as silicon oxide or silicon nitride, or may include different materials. The dielectric layer 115 may be formed using a technique similar to the dielectric layer 108 described above or using a different technique. In some embodiments, a planarization process (e.g., a CMP or grinding process) is used to remove excess material of the dielectric layer 115. The planarization process may also expose the conductive pad 116. After performing the planarization process, the dielectric layer 115, the topmost dielectric layer 117, and / or the conductive pad 116 may have a substantially flush surface. In some cases, replacing a portion of the rewiring structure 120 with the dielectric layer 115 may improve optical confinement within the waveguide 104 beneath the dielectric layer 115. In other embodiments, the rewiring structure 120 is not etched and the dielectric layer 115 is not formed. In other embodiments, the rewiring structure 120 is etched to divide the rewiring structure 120 into a plurality of separate regions.

[0091] exist Figure 7 According to some embodiments, one or more electronic dies 122 are bonded to the redistribution structure 120. For example, the electronic dies 122 can be semiconductor devices, dies, or chips that communicate with the photonic device 106 using electronic signals. Figure 7 1 , but in other embodiments, the optical engine 100 may include two or more electronic dies 122. In some cases, multiple electronic dies 122 may be incorporated into a single optical engine 100 to reduce process costs. The electronic die 122 may include a die connector 124, which may be, for example, a conductive pad, a conductive column, or the like.

[0092] The electronic die 122 may include an integrated circuit for interfacing with the photonic element 106, such as a circuit for controlling the operation of the photonic element 106. For example, the electronic die 122 may include a controller, a driver, a transimpedance amplifier, or the like, or a combination thereof, and the electronic die 122 may also include a central processing unit (CPU). In some embodiments, the electronic die 122 includes a circuit for processing an electronic signal received from the photonic element 106, such as a circuit for processing an electronic signal received from the photonic element 106 including a photodetector. In some embodiments, the electronic die 122 may control the high frequency signal of the photonic element 106 according to an electronic signal (digital or analog) received from another device or die. In some embodiments, the electronic die 122 may be an electronic integrated circuit (EIC) that provides a serializer / deserializer (SerDes) function, etc. In this way, the electronic die 122 can act as part of the I / O interface between optical signals and electronic signals within the optical engine 100, and the optical engine 100 described herein can be considered a system-on-chip (SoC) device or a system-on-integrated-circuit (SoIC) device.

[0093] In some embodiments, the electronic die 122 is bonded to the rewiring structure 120 by dielectric-to-dielectric bonding and / or metal-to-metal bonding (e.g., direct bonding, fusion bonding, oxide-to-oxide bonding, hybrid bonding, etc.). In such embodiments, covalent bonds may be formed between bonding layers, such as between the topmost dielectric layer 117 and a surface dielectric layer (not shown) of the electronic die 122. The bonding layer may be an oxide layer or other dielectric material layer. During bonding, metal-to-metal bonding may also occur between the die connector 124 of the electronic die 122 and the conductive pad 116 of the rewiring structure 120. In other embodiments, the electronic die 122 may be bonded to the rewiring structure 120 using solder bonding, solder bumps, etc.

[0094] exist Figure 8In some embodiments, a dielectric material 126 is formed over the electronic grain 122 and the redistribution structure 120. The dielectric material 126 may be formed of silicon oxide, glass, silicon nitride, polymer, etc., or a combination thereof. The dielectric material 126 may be formed by CVD, PVD, ALD, a spin coating process, etc., or a combination thereof. In some embodiments, the dielectric material 126 may be formed by HDP-CVD, FCVD, etc., or a combination thereof. In some embodiments, the dielectric material 126 may be a gap filling material, which may include one or more of the exemplary materials described above. Other dielectric materials formed by any suitable process may be used. A planarization process such as a CMP process, a grinding process, etc. may be used to planarize the dielectric material 126. In some embodiments, the planarization process may expose the electronic grain 122 so that the surface of the electronic grain 122 is substantially coplanar with the surface of the dielectric material 126. The oxide layer 102B, the dielectric layer 108, the dielectric layer 115, and the dielectric material 126 may be collectively referred to herein as a dielectric layer 121.

[0095] exist Fig. 9 In some embodiments, an optional support 125 is attached to the structure. The support 125 is attached to the structure to provide structural or mechanical stability. The support 125 is used as a support, and the use of the support 125 can reduce warping or bending, which can improve the performance of optical structures such as waveguides 104 or photonic elements 106. The support 125 may include one or more materials, such as silicon (e.g., silicon wafers, bulk silicon, etc.), silicon oxide, silicon oxynitride, silicon carbonitride, metal, organic core material, etc., or other types of materials. The support 125 can be attached to the structure (e.g., to the dielectric material 126 and / or the electronic grain 122) using an adhesive layer 127 or the like. In other embodiments, the support 125 can be attached using direct bonding (e.g., dielectric-to-dielectric bonding, fusion bonding, etc.) or other suitable techniques. The support 125 may also have a lateral dimension (e.g., length, width, and / or area) that is greater than, approximately equal to, or less than the underlying structure. In other embodiments, the support 125 is attached in a subsequent process step during the manufacture of the illustrated optical engine 100. In some embodiments, the support 125 can be subsequently thinned using a CMP process, a grinding process, etc. Fig. 9 According to some embodiments, the back side of the substrate 102C may be thinned to expose the vias 112. The substrate 102C may be thinned using a CMP process, a grinding process, an etching process, or the like, or a combination thereof.

[0096] exist Fig.10In some embodiments, the optical engine 100 is optionally attached to an interconnect substrate 210 to form a photonic package 200. In some embodiments, the interconnect substrate 210 may include an interconnect structure 212 on a substrate 214. The interconnect substrate 210 may also have a via 216 extending through the substrate 214, which is electrically connected to the interconnect structure 212. Fig.10 The interconnect substrate 210 shown is an example, and other interconnect substrates or configurations thereof are possible. In some embodiments, the interconnect substrate 210 may be considered an interposer or the like. In some embodiments, the interconnect substrate 210 may include active or passive devices. In other embodiments, more than one optical engine 100 may be attached to the interconnect substrate 210. In other embodiments, one or more semiconductor devices may also be attached to the interconnect substrate 210, as described below with respect to FIG. Fig.11 An example thereof is described.

[0097] The substrate 214 of the interconnect substrate 210 may include, for example, a glass substrate, a ceramic substrate, a dielectric substrate, an organic substrate (e.g., an organic core), a semiconductor substrate (e.g., a semiconductor wafer), etc., or a combination thereof. The via 216 extends through the substrate 214 and may be formed using a material or technique similar to that of the via 112 or using a different material or technique.

[0098] In some embodiments, the interconnect structure 212 of the interconnect substrate 210 includes a dielectric layer and a conductive component formed in the dielectric layer. The interconnect structure 212 provides interconnection and electrical routing, and can be electrically connected to the via 216 and / or the via 112. For example, the dielectric layer can be an insulating layer or a passivation layer, and can include materials similar to those described above for the dielectric layer 108 or the dielectric layer 117. For example, the dielectric layer of the interconnect structure 212 can include materials such as silicon oxide, silicon nitride, etc. The conductive components of the interconnect structure 212 can include wires and vias, and can be formed using materials or techniques similar to the conductive components 114 or using different materials or techniques. For example, the conductive components of the interconnect structure 212 can be formed using a damascene process (e.g., dual damascene, single damascene, etc.).

[0099] In some embodiments, the optical engine 100 is bonded to the interconnect substrate 210 by dielectric-to-dielectric bonding and / or metal-to-metal bonding (e.g., direct bonding, fusion bonding, oxide-to-oxide bonding, hybrid bonding, etc.). For example, the back side of the optical engine 100 (e.g., the back side of the substrate 102C) can be bonded to the interconnect structure 212. In some embodiments, the vias 112 of the optical engine 100 are bonded to the conductive features of the interconnect structure 212 to physically and electrically connect the optical engine 100 to the interconnect substrate 210. In some embodiments, a bonding layer can be formed on the back side of the substrate 102C before bonding to the interconnect substrate 210. In other embodiments, the optical engine 100 can be bonded to the interconnect substrate 210 using solder bonding, solder bumps, etc.

[0100] In some embodiments, the conductive connector 218 is formed on the interconnect substrate 210. The conductive connector 218 is electrically connected to the interconnect substrate 210 through the via 216. In some embodiments, the conductive connector 218 includes a conductive pad formed on the via 216 and the substrate 214. For example, the conductive pad can be an aluminum pad or an aluminum copper pad, but other metal pads can also be used. In some embodiments, the conductive pad can include an under bump metallurgies (UBMs).

[0101] In some embodiments, the conductive connector 218 may include solder balls, solder bumps, etc. formed on the conductive pad. The conductive connector 218 may include ball grid array (BGA) connectors, solder balls, metal pillars, controlled collapse chip connection (C4) bumps, micro bumps, bumps formed by electroless nickel-electroless palladium-immersion gold (ENEPIG), etc. The conductive connector 218 may include conductive materials such as solder, copper, aluminum, gold, nickel, silver, palladium, tin, etc. or a combination of the foregoing. In some embodiments, the conductive connector 218 is formed by initially forming a solder layer by commonly used methods such as evaporation, electroplating, printing, solder transfer, ball placement, etc. Once a layer of solder is formed on the structure, reflow can be performed to shape the material into the desired bump shape. In another embodiment, the conductive connector 218 is a metal pillar (such as a copper pillar) formed by sputtering, printing, electroplating, chemical plating, CVD, etc. The metal pillars may be solder-free and have substantially vertical sidewalls. In some embodiments, a metal capping layer (not shown) is formed on top of the conductive connector 218. The metal capping layer may include nickel, tin, tin-lead, gold, silver, palladium, indium, nickel-palladium-gold, nickel-gold, etc., or a combination of the foregoing, and may be formed by an electroplating process.

[0102] In some embodiments, in addition to the optical engine 100, the photonic package 200 may further include one or more semiconductor dies connected to the interconnect substrate 210. For example, according to some embodiments, Fig.11 A photonic package 200 is shown including a single semiconductor die 202. For example, the one or more semiconductor dies may include a wafer, a die, a system on chip (SoC) device, a system on integrated circuit (SoIC) device, a package, or the like, or a combination thereof. The semiconductor die may include one or more processing devices, such as a central processing unit (CPU), a graphics processing unit (GPU), an application-specific integrated circuit (ASIC), a high performance computing (HPC) die, or the like, or a combination thereof. The semiconductor die may include one or more memory devices, which may be volatile memory, such as a dynamic random access memory (DRAM), a static random access memory (SRAM), a high-bandwidth memory (HBM), another type of memory, or the like. The one or more semiconductor dies may be attached to an interconnect structure 212 of an interconnect substrate 210 using direct bonding, solder bumps, or the like. In this manner, the semiconductor die is electrically connected to the interconnect substrate 210 , and may be electrically coupled to one or more optical engines 100 through the interconnect substrate 210 . Fig.11 The photonic package 200 shown is an example, and other photonic packages or configurations thereof are possible.

[0103] Fig.12 and Fig.13 3 is a cross-sectional view showing an intermediate step of forming a waveguide structure 300 according to some embodiments. According to some embodiments, the waveguide structure 300 is a structure that provides optical coupling between a waveguide (e.g., the waveguide 104 of the optical engine 100) and an external optical fiber. For example, the waveguide structure 300 can be used in a photonic system (such as the following for Fig.19 The described photonic system 500, etc.) provides optical coupling.

[0104] Fig.123 is a cross-sectional view of a shaped block 300' according to some embodiments. Then, one or more waveguides 304 are formed in the shaped block 300' using a laser writing process or the like. Fig.13 301A, 302B, and 301A are described in more detail. Therefore, the material of the shape block 300' may include a material suitable for laser writing, such as borosilicate glass, soda-lime-silicon glass, fluoride glass (e.g., fluorozirconate glass, etc.), another type of glass, a high silicon (e.g., mainly silicon oxide) material, a polymer, etc. The material of the shape block 300' may be transparent at an appropriate laser wavelength. In some cases, the shape block 300' may be considered a "waveguide substrate". The shape block 300' may be formed using a suitable technique for forming the shape block 300' into a single object, such as glass molding technology, etc. For example, the shape block 300' may be formed into a single object material having the desired shape of the lenses 302A, 302B and the curved surface 301A, as described in more detail below. In some cases, the various components of the shape block 300' may be formed or designed according to the specifications or configuration of the photonic system in which it is used. Forming the shaped block 300 ′ using a glass molding process or the like may allow for design flexibility, improve structural stability, reduce cost, and / or reduce the size of the photonic system.

[0105] refer to Fig.12 , the shape block 300' has a first end 303A and a second end 303B opposite to the first end 303A. In some embodiments, the shape block 300' may have different thicknesses (eg, different heights) at the first end 303A and the second end 303B. For example, Fig.12 The shape block 300' shown has a first end 303A with a first thickness TA and a second end 303B with a second thickness TB, wherein the first thickness TA is less than the second thickness TB. In some embodiments, the first thickness TA can be in the range of about 200 microns to about 2000 microns, and the second thickness TB can be in the range of about 200 microns to about 2000 microns. In some embodiments, the thickness difference TC between the first thickness TA and the second thickness TB is in the range of about 0 microns to about 1000 microns. Other thicknesses or relative thicknesses are also possible. The ends 303A, 303B of the shape block 300' can be formed to have different thicknesses to facilitate the formation and alignment of the subsequently formed waveguide 304 (see Fig.13 Specifically, the thickness difference TC of the shape block 300' can be controlled or configured to form a waveguide 304 (see Fig.13 ) are aligned with respective ends of an optical component (such as an edge coupler 107 of the photonic package 200, an optical fiber, an optical fiber array, etc., or other optical element), as described in more detail below.

[0106] The ends 303A, 303B of the shape block 300' may be flat, concave, convex, irregular, stepped, or curved. In some embodiments, each end 303A, 303B may include one or more lenses 302 (e.g., Fig.12 302B in the shape block 300'). Each lens 302 may be formed as a portion of a surface of a respective end 303A, 303B that protrudes from a surrounding surface (e.g., a "non-lens surface"). In some cases, forming the lenses 302A, 302B as part of the shape block 300' rather than forming them individually may allow for improved optical coupling. The lenses 302A, 302B are described in more detail below. In some embodiments, the distance between the opposing ends 303, 303B of the shape block 300' is in the range of about 300 microns to about 3000 microns in length, but other lengths are possible.

[0107] about Fig.12 , the shape block 300' has a first surface 301A on the top side or front side of the shape block 300' and a second surface 301B on the bottom side or back side of the shape block 300'. The surfaces 301A, 301B extend from the first end 303A to the second end 303B. Fig.12 In some embodiments, the first surface 301A is a curved (e.g., non-planar) surface, and the second surface 301B is a flat (e.g., planar) surface. In some embodiments, the first surface 301A may have an "S-shaped" profile, a "sigmoid" profile, a "smooth step" profile, a "spline-like" profile, another type of profile, etc. For example, some areas of the first surface 301A at or near the ends 303A, 303B may be approximately horizontal (e.g., approximately parallel to the Fig.12 The second surface 301B is formed on the first surface 301A, and some areas of the first surface 301A located at or near the center of the first surface 301A can be angled, inclined or curved. Fig.12 The shape block 300' is an example, and in other embodiments, the surface 301A and / or 301B may have other shapes, curvatures, slopes, shapes or contours. For example, one or both of the surfaces 301A, 301B may be flat, convex, concave, stepped, irregular or angled. In some cases, the second surface 301B may have steps, notches, grooves, etc. that facilitate placement or installation in the fixture, which are exemplified below for Fig.13 In some cases, forming a shaped block 300' having a curved first surface 301A as described herein can allow for the formation of an improved waveguide 304, as described below with respect to Fig.13 Describe in more detail.

[0108] As previously described, one or more lenses 302A are formed on the first end 303A, and one or more lenses 302B are formed on the second end 303B. One or more lenses 302A, 302B may be formed during the formation of the shape block 300' itself. For example, the lenses 302A, 302B may protrude from the surrounding (e.g., "non-lens") surface of the ends 303A, 303B. In some embodiments, each lens 302 may correspond to a subsequently formed waveguide 304 (see Fig.13 ). For example, the waveguide 304 may have a corresponding lens 302A near one end of the waveguide 304 and a corresponding lens 302B near the opposite end of the waveguide 304. In other embodiments, the waveguide 304 may have only the lens 302A or the lens 302B. The lenses 302A, 302B may be formed on the ends 303A, 303B near the first surface 301A. The lenses 302A, 302B may provide improved optical coupling between the waveguide 304 and other optical components (e.g., the edge coupler 107 or other optical components), and may allow for greater misalignment tolerance. The lenses 302A, 302B may be convex, circular, spherical, elliptical, ellipsoidal, annular, rectangular, cylindrical, or have other suitable shapes. For example, in some embodiments, the lenses 302A, 302B may have a width L1 in the range of about 30 microns to about 500 microns (see Figure 14 to Figure 15 ), and may protrude a distance L2 ranging from about 10 microns to about 500 microns (see Fig.16 ), but other sizes are possible. In some embodiments, the width L1 and / or distance L2 of lens 302A may be different from that of lens 302B.

[0109] Fig.13 is a cross-sectional view showing a waveguide 304 formed in a shape block 300 ′ to form a waveguide structure 300 according to some embodiments. Fig.14 , Fig.15 ,as well as Fig.16 Shows something like Fig.13 Various schematic diagrams of the waveguide structure 300 are shown. Fig.14 A schematic diagram showing the waveguide structure 300 toward the first end 303A, Fig.15 A schematic diagram showing the waveguide structure 300 toward the second end 303B, Fig.16 A top view of the waveguide structure 300 facing the first surface 301A is shown.

[0110] For example, the waveguide 304 can be formed using a laser writing process, such as Fig.13300', represented by a laser writing device 321. The laser writing process focuses the laser on a local area within the shape block 300', changing the material properties of the local area. For example, the laser can increase the refractive index of the local area relative to the adjacent (e.g., non-laser written) area of ​​the shape block 300'. By performing the laser writing process along a path within the shape block 300', a continuous laser written portion of the shape block 300' can be formed, which acts as a waveguide (e.g., waveguide 304). The laser writing process can be performed multiple times to form multiple waveguides 304 within the shape block 300'. In some embodiments, the laser writing process used to form the waveguide 304 can be a femtosecond direct laser writing process (Femtosecond Direct Laser Writing process) or the like. In some embodiments, the size, shape, position, optical properties, or other characteristics of the waveguide 304 may depend on the material of the shaped block 300' or may be controlled by controlling parameters such as laser wavelength, laser pulse energy, focal spot size, laser intensity profile or phase profile, laser pulse width (e.g., duration), laser pulse repetition rate or duty cycle, laser writing path speed, laser writing direction, laser polarization, or other parameters.

[0111] In some embodiments, waveguide 304 is formed in shape block 300 ' near first surface 301A. In other words, the laser of laser writing process is guided through first surface 301A to form waveguide 304 under first surface 301A. In some embodiments, waveguide 304 is formed at approximately constant depth D1 under first surface 301A. In this way, the path of each waveguide 304 can roughly follow the profile or shape of first surface 301A above. Depth D1 under first surface 301A can be a distance in the range of about 5 microns to about 700 microns, but other distances are also possible. Depth D1 can correspond to the vertical distance between the approximate center point of first surface 301A and waveguide 304 below. In some embodiments, first surface 301A is closer to waveguide 304 than second surface 301B. In other embodiments, a portion of the waveguide 304 near the first end 303A may be closer to the second surface 301B than the first surface 301A, but a portion of the waveguide 304 near the second end 303B may be closer to the first surface 301A than the second surface 301B. In this manner, an end of the waveguide 304 near the first end 303A may be approximately at a first height (HA-D1) above the second surface 301B, and an end of the waveguide 304 near the second end 303B may be approximately at a second height (HB-D1) above the second surface 301B.

[0112] In some cases, areas deeper below the surface may be more susceptible to undesirable optical phenomena, such as spherical aberration, during the laser writing process. For example, this may result in poor positioning of the deeper laser writing area, or may result in the laser writing area having different shapes at different depths. Therefore, in some cases, a waveguide formed relatively far from the surface may have worse optical characteristics or performance (e.g., worse propagation loss) than a waveguide formed relatively close to the surface. In addition, forming a single waveguide having multiple portions located at different depths below the surface may result in those waveguide portions having inconsistent optical or physical characteristics, such as different propagation losses or different cross-sectional shapes. Therefore, the curved first surface 301A of the shape block 300' allows the waveguide 304 to be formed at an approximately constant shallow depth (e.g., depth D1) below the surface, rather than at different depths below the surface, even if the ends of the waveguide 304 are at different heights. In this way, an improved laser-written waveguide can be formed that extends from a first height to a second height, which can allow for more efficient optical coupling, improved device performance, and more flexible waveguide design.

[0113] In some embodiments, the waveguide 304 is formed so that each lens 302A, 302B is adjacent to and associated with a respective end of the waveguide 304. In some embodiments, some or all of the ends of the waveguide 304 are not adjacent to the respective lenses 302A, 302B. In other words, in some embodiments, the associated lenses 302A, 302B may not be formed for some or all of the ends of the waveguide 304. In some embodiments, the ends of the waveguide 304 may be formed so that each end protrudes into its associated lens 302A, 302B, or the ends of the waveguide 304 may be formed so that each end is separated from its associated lens 302A, 302B. In other words, one end of the waveguide 304 may be substantially aligned (e.g., flush) with a non-lens surface adjacent to the ends 303A, 302B, or may not be aligned with a non-lens surface adjacent to the ends 303A, 302B.

[0114] In addition to providing coupling between optical components (e.g., edge couplers 107 or other optical elements) at different heights, the waveguide structure 300 described herein can also provide coupling between optical components at different pitches or configurations. Figures 14 to 16, the waveguide 304 of the waveguide structure 300 can be formed to have a first pitch PA at the first end 303A and a second pitch PB at the second end 303B. In some embodiments, the first pitch PA can be in the range of about 100 microns to about 500 microns, and the second pitch PB can be in the range of about 30 microns to about 500 microns, but other pitches are also possible. In this way, the waveguide structure 300 can be considered as a "fan-in" structure or a "fan-out" structure for optical coupling, and allows optical coupling between optical components of different sizes or different configurations. Fig.16 As shown in the top view of FIG. 3 , the waveguide 304 may be formed to extend or expand laterally (e.g., horizontally or transversely) between the end 303A and the end 303B. When viewed in the top view, the waveguide 304 may be substantially linear or may be curved, and Fig.16 The top view of FIG. 304 shows both a linear waveguide 304 and a curved waveguide 304 as representative illustrations. In some embodiments, the width of the waveguide 304 may be different at one end than at the other end to provide improved coupling with end-specific optical components.

[0115] Fig.17 Attachment of a waveguide structure 300 in a fixture 400 is shown according to some embodiments. The fixture 400 fixes the waveguide structure 300 and facilitates optical coupling of a waveguide 304 of the waveguide structure 300 with an optical component (not shown). For example, the fixture 400 can be connected or mounted to an optical element, such as an optical fiber, a mechanical transfer ferrule (MT ferrule), an optical fiber array (e.g., an optical fiber array unit), a multi-fiber pullon (MPO) connector, a multi-fiber termination push on (MTP) connector, an optical cable, etc., so that the optical element is optically coupled to the waveguide 304 of the waveguide structure 300. In some embodiments, a portion of the waveguide structure 300 near the first end 303A can be inserted or placed into an opening in the fixture 400. In some embodiments, the opening in the fixture 400 can have a shape corresponding to the shape of the inserted portion of the waveguide structure 300. In this way, the waveguide structure 300 can be more securely fixed by the fixture 400. In some cases, the waveguide structure 300 can be further fixed to the fixture 400 using an adhesive. The fixture 400 can also be shaped or configured to allow an optical element to be connected or mounted to the fixture 400 so that the optical element is optically aligned with the waveguide 304 at the first end 303A. In some cases, the lens 302A can improve the optical coupling and misalignment tolerance between the waveguide 304 and the optical element connected to the fixture 400. Fig.17The fixture 400 shown is a representative illustration, and other fixtures 400 having other shapes, sizes, or configurations are possible. The waveguide structure 300 and the fixture 400 may be collectively referred to herein as a coupling structure 450 .

[0116] Fig.18 and Fig.19 According to some embodiments, a photonic system 500 is shown (see Fig.19 ). Fig.18 In some embodiments, the photonic package 200 is connected to the packaging substrate 510. The photonic package 200 can be similar to the previous embodiment of the present invention. Fig.10 and Fig.11 The photonic package 200 described above. In other embodiments, multiple photonic packages 200 can be attached to the packaging substrate 510. In some embodiments, the packaging substrate 510 includes conductive pads, conductive wiring and / or other conductive components, such as through substrate vias (TSVs). In some embodiments, the packaging substrate 510 may include an interposer, a semiconductor substrate, a rewiring structure, a core substrate, a printed circuit board (PCB), or a structure different from these examples. In some embodiments, the packaging substrate 510 includes active and / or passive devices. In other embodiments, the packaging substrate 510 does not have active and / or passive devices. In some embodiments, the conductive connector 512 is formed on the packaging substrate 510, such as Fig.18 As shown. The conductive connector 512 can be similar to the conductive connector 218 described previously, and can be formed using similar materials or techniques. For example, the conductive connector 512 can include a solder bump or the like.

[0117] In some embodiments, the conductive connectors 218 of the photonic package 200 are placed on corresponding conductive pads of the package substrate 510, and then a reflow process is performed to bond the photonic package 200 to the package substrate 510. In this way, the photonic package 200 can be electrically connected to the package substrate 510. In other embodiments, the photonic package 200 can be bonded to the package substrate 510 using dielectric-to-dielectric bonding and / or metal-to-metal bonding (e.g., direct bonding, fusion bonding, oxide-to-oxide bonding, hybrid bonding, etc.).

[0118] exist Fig.19In some embodiments, the coupling structure 450 is attached to the packaging substrate 510 to form the photonic system 500, and in other embodiments, multiple coupling structures 450 may be attached. In some embodiments, the coupling structure 450 may be placed on the packaging substrate 510 so that the waveguide 304 of the waveguide structure 300 is optically aligned with the corresponding edge coupler 107 of the photonic package 200. In some cases, the lens 302B may improve the optical coupling and the misalignment tolerance between the waveguide 304 and the photonic package 200. In some embodiments, the coupling structure 450 may be actively aligned with the photonic package 200, wherein the optical signal strength is monitored during the alignment. In some embodiments, an optical adhesive 514 or the like may be deposited between the coupling structure 450 and the photonic package 200 and / or between the coupling structure 450 and the packaging substrate 510. In this manner, a photonic system 500 may be formed in which the coupling structure 450 facilitates the transmission of optical signals and / or optical power between the photonic package 200 and the optical element.

[0119] Fig. 20 1 is a diagram showing a photon system 520 according to some embodiments. The photon system 520 is similar to the photon system 500, except that the waveguide structure 320 of the photon system 520 does not have lenses 302A, 302B. In other embodiments, the lens may be formed only on one end (e.g., 303A or 303B) of the waveguide structure.

[0120] Fig.21 5 , photon system 530 is shown according to some embodiments. Photon system 530 is similar to photon system 500, except that optical engine 100 is not connected to interconnect substrate 210, but is connected to packaging substrate 510. In some embodiments, conductive connectors can be formed on optical engine 100 and then bonded to conductive pads of packaging substrate 510. The conductive connectors can be similar to conductive connectors 218 or conductive connectors 512 described previously. In other embodiments, optical engine 100 can be bonded to packaging substrate 510 using dielectric-to-dielectric bonding and / or metal-to-metal bonding (e.g., direct bonding, fusion bonding, oxide-to-oxide bonding, hybrid bonding, etc.).

[0121] Fig. 2230. A waveguide structure 330 is shown according to some embodiments. The waveguide structure 330 is similar to the waveguide structure 300, except that the waveguide structure 330 includes waveguides formed at different depths from the first surface 301A. For example, the waveguide structure 330 includes a first group of waveguides 304A at a depth D1 and a second group of waveguides 304B at a depth D2, wherein the depth D2 is greater than the depth D1. More groups of waveguides are possible. In some embodiments, the waveguide structure 330 can be formed by forming the second group of waveguides 304B using a laser writing process and then forming the first group of waveguides 304A using a laser writing process. The waveguide structure 330 may include optional lenses 302A, 302B.

[0122] Fig.23 According to some embodiments, a waveguide structure 340 is shown. The waveguide structure 340 is similar to the waveguide structure 300, except that the waveguide structure 340 includes a recess 341 in the second surface 301B. For example, the recess 341 can be a groove, a notch, a slit, etc. that engages with the fixture 400 to facilitate the insertion, placement or alignment of the waveguide structure 340 in the fixture 400. For example, the protrusion of the fixture 400 can fit in the recess 341, or the side wall of the recess 341 can act as a stop against the side wall of the fixture 400. Other illustrations or applications are also possible. According to some embodiments, the waveguide structure 340 also shows a pinhole 342 formed in the first end 303A. One or more pinholes 342 can be formed in the waveguide structure 340 to facilitate alignment with the optical component. For example, the optical element can include a pin that is inserted into the pinhole 342 when the optical element is connected to the fixture (e.g., the fixture 400). The various components of the various embodiments of the optical engines, photonic packages, photonic systems, waveguide structures, and fixtures described herein may be combined or reconfigured, and all such variations are considered to be within the scope of the present disclosure.

[0123] Embodiments of the present disclosure have some advantageous components. By forming a waveguide structure in which a laser-written waveguide is included, an optical element (e.g., an optical fiber) can be integrated with an optical engine. The waveguide structure allows optical power and / or optical signals to be transmitted between an optical component and an optical element of an optical engine (e.g., an edge coupler), wherein the optical component and the optical element have different sizes, pitches, or heights. In this way, the waveguide structure described herein can act as a fiber array unit (FAU). In addition, by forming a waveguide structure from a block with a curved surface, the waveguide can be laser-written at a consistent depth, which can improve the quality and uniformity of the waveguide. Even if different parts of the waveguide have different heights, the curved surface allows the waveguide to be laser-written at a consistent depth. For example, the block can be formed of molded glass, etc., which allows the waveguide structure to be customized for various applications or configurations.

[0124] In one embodiment of the present disclosure, a package includes an optical engine attached to a packaging substrate, wherein the optical engine includes a first waveguide; and a waveguide structure attached to the packaging substrate adjacent to the optical engine, wherein the waveguide structure includes a second waveguide within a transparent block, wherein the bottom surface of the transparent block is non-planar, wherein the second waveguide is a fixed distance from the bottom surface along its length, and wherein the second waveguide is optically coupled to the first waveguide. In one embodiment, the fixed distance is in the range of 5 microns to 700 microns. In one embodiment, the transparent block and the second waveguide are the same material. In one embodiment, the transparent block includes a plurality of lenses protruding from a plurality of sidewalls of the transparent block, wherein the lenses are adjacent to respective plurality of ends of the second waveguide. In one embodiment, the second waveguide is a laser-written waveguide. In one embodiment, a first portion of the bottom surface is proximate to a first end of the transparent block, a second portion of the bottom surface is proximate to a second end of the transparent block opposite to the first end, and the first portion of the bottom surface is closer to the packaging substrate than the second portion. In one embodiment, the second waveguide is optically coupled to the first waveguide via an edge coupler within the optical engine. In one embodiment, the package further comprises a holder, wherein the transparent block is held by the holder, wherein the holder is configured to be attached to an optical fiber, wherein when the optical fiber is attached to the holder, the second waveguide is optically coupled to the optical fiber.

[0125] In one embodiment of the present disclosure, an optical structure includes: a glass block having a first end and a second end opposite the first end, wherein a first thickness at the first end of the glass block is greater than a second thickness at the second end of the glass block, wherein the glass block includes a curved surface extending from the first end to the second end; a plurality of waveguides located within the glass block, wherein the waveguides extend between the first end and the second end, wherein each of the waveguides has a curvature corresponding to the curvature of the curved surface; and a fixture surrounding the second end of the glass block, wherein the fixture is configured to connect an optical fiber. In one embodiment, the first thickness is greater than the second thickness by 0 microns to 1000 microns. In one embodiment, the glass block includes a top surface opposite the curved surface, wherein the waveguides are closer to the curved surface than to the top surface. In one embodiment, the top surface is flat. In one embodiment, the waveguides have a first pitch near the first end and a second pitch near the second end, wherein the first pitch is different from the second pitch.

[0126] In one embodiment of the present disclosure, a method for manufacturing an optical structure includes: forming a transparent block using a molding process, wherein the transparent block includes a flat bottom surface and a curved top surface opposite to the flat bottom surface; and performing a laser writing process through the curved top surface to form a waveguide under the curved top surface, wherein each portion of the waveguide has the same depth under the portion covered by the curved top surface. In one embodiment, the curved top surface has an S-shaped profile. In one embodiment, the transparent block includes a lens protruding from a side wall of the transparent block. In one embodiment, the method for manufacturing the optical structure further includes attaching the transparent block to a fixture to form a coupling structure and attaching an optical fiber element to the fixture, wherein the optical fiber element is optically coupled to the waveguide. In one embodiment, the optical fiber element is a mechanical transmission ferrule (MT ferrule). In one embodiment, the method for manufacturing the optical structure further includes attaching the coupling structure to a photonic package, wherein an edge coupler of the photonic package is optically coupled to the waveguide.

[0127] The above summarizes the components of several embodiments so that those skilled in the art can more easily understand the concepts of the embodiments of the present disclosure. Those skilled in the art should understand that they can design or modify other processes and structures based on the embodiments of the present disclosure to achieve the same purposes and / or advantages as the embodiments introduced herein. Those skilled in the art should also understand that such equivalent processes and structures do not deviate from the spirit and scope of the present disclosure, and that they can make various changes, substitutions and replacements without violating the spirit and scope of the present disclosure.

Claims

1. A package, characterized in that: include: an optical engine attached to a packaging substrate, wherein the optical engine includes a first waveguide; as well as A waveguide structure is attached to the packaging substrate adjacent to the optical engine, wherein the waveguide structure includes a second waveguide within a transparent block, wherein a bottom surface of the transparent block is non-planar, wherein the second waveguide is a fixed distance from the bottom surface along its length, and wherein the second waveguide is optically coupled to the first waveguide.

2. The package according to claim 1, wherein: The fixed distance is in the range of 5 micrometers to 700 micrometers.

3. The package according to claim 1 or 2, characterized in that: The transparent block includes a plurality of lenses protruding from a plurality of side walls of the transparent block, wherein the plurality of lenses are adjacent to corresponding plurality of ends of the second waveguide.

4. The package according to claim 1, wherein: The second waveguide is a laser writing waveguide.

5. The package according to claim 1, wherein: A first portion of the bottom surface is close to a first end of the transparent block, a second portion of the bottom surface is close to a second end of the transparent block opposite to the first end, and the first portion of the bottom surface is closer to the packaging substrate than the second portion.

6. The package according to claim 1, wherein: The second waveguide is optically coupled to the first waveguide through an edge coupler in the optical engine.

7. An optical structure, characterized in that: include: A glass block having a first end and a second end opposite to the first end, wherein a first thickness at the first end of the glass block is greater than a second thickness at the second end of the glass block, wherein the glass block includes a curved surface extending from the first end to the second end; a plurality of waveguides disposed within the glass block, wherein the plurality of waveguides extend between the first end and the second end, wherein each of the plurality of waveguides has a curvature corresponding to a curvature of the curved surface; as well as A fixture surrounds the second end of the glass block, wherein the fixture is configured to connect an optical fiber.

8. The optical structure according to claim 7, characterized in that: The glass block includes a top surface opposite to the curved surface, and the plurality of waveguides are closer to the curved surface than to the top surface.

9. The optical structure according to claim 8, characterized in that: Wherein the top surface is flat.

10. The optical structure according to claim 7, characterized in that: The plurality of waveguides have a first pitch close to the first end and a second pitch close to the second end, wherein the first pitch is different from the second pitch.

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