Automatic wafer expanding machine

Abstract

The utility model relates to the technical field of semiconductor packaging, in particular to an automatic wafer expanding machine, which comprises a working table, a blue film fixing frame is fixedly mounted on the working table, a first mounting block and a second mounting block are mounted on the working table through spring rods, a cover plate is rotatably mounted on the first mounting block, and the second mounting block is rotatably mounted on the cover plate. A locking assembly used for locking the cover plate is arranged on the second mounting block, rectangular holes are formed in the first mounting block and the second mounting block, an electric control air cylinder is fixedly mounted on the workbench, a U-shaped rod is fixedly mounted on an output shaft of the electric control air cylinder, and trapezoidal blocks are fixedly mounted at the two ends of the U-shaped rod. According to the utility model, the cover plate is horizontally pressed on the blue film, and the applied pressure is vertically downward, so that the pressure applied on the blue film is uniform, the film expansion tension is balanced in the wafer expansion process, and the qualified rate of products is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor packaging, in particular to an automatic wafer expansion machine. Background Art

[0002] During the wafer production process, in order to facilitate the cutting and mounting of wafers, the wafer assembly needs to be expanded to increase the spacing between multiple crystal elements on the wafer assembly.

[0003] A Chinese patent with publication number CN207719157U discloses an automatic wafer expanding machine, including a pressure ring cylinder, a cylinder fixing bracket, a pressure ring cylinder telescopic rod, a pressure ring disk, a blue film fixing bracket, a wafer expanding disk, a wafer expanding cylinder telescopic rod, a wafer expanding cylinder and a control box. The utility model wafer expanding machine is simple and convenient to operate, and the wafer expanding spacing is controllable. The automatic wafer expanding machine has a blue film heating function and a wide chip spacing after wafer expansion, which solves the problem of difficulty in removing chips from an automatic wafer loading machine.

[0004] In the above patent document, when fixing the blue film, it is mainly fixed by a cover plate and a pin. The cover plate is pressed on the blue film by a rotating cover plate, and then locked by the pin. However, when the rotating cover plate is pressed on the blue film, it is impossible to ensure that the pressure applied to the blue film is uniform. During the crystal expansion process, it will cause uneven film expansion tension, affecting the product qualification rate. Utility Model Content

[0005] The purpose of the utility model is to solve the following shortcomings in the prior art: when the cover plate is pressed on the blue film, it is impossible to ensure that the pressure applied to the blue film is uniform. During the crystal expansion process, it will cause uneven film expansion tension, affecting the product qualification rate, and an automatic wafer expansion machine is proposed.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] An automatic wafer expansion machine comprises a workbench, a blue film fixing frame is fixedly installed on the workbench, and a wafer expansion disk is installed on the workbench through a wafer expansion cylinder;

[0008] A first mounting block and a second mounting block are mounted on the workbench via a spring rod, a cover plate is rotatably mounted on the first mounting block, and a locking assembly for locking the cover plate is provided on the second mounting block;

[0009] Rectangular holes are provided on the first mounting block and the second mounting block, an electric control cylinder is fixedly installed on the workbench, a U-shaped rod is fixedly installed on the output shaft of the electric control cylinder, trapezoidal blocks are fixedly installed on both ends of the U-shaped rod, one end of the two trapezoidal blocks are respectively inserted into the two rectangular holes, and the hypotenuse of the trapezoidal block is in contact with one end of the rectangular hole.

[0010] Preferably, the locking assembly includes a positioning block fixedly mounted on the side of the cover plate, a mounting plate mounted on the second mounting block through an adjusting component, and a trapezoidal clamping block fixedly mounted on the mounting plate, wherein a triangular groove is provided on the positioning block, and the trapezoidal clamping block is inserted into the triangular groove.

[0011] Preferably, the adjusting component comprises a supporting block fixedly mounted on the second mounting block, a threaded rod and an adjusting rod fixedly mounted at one end of the threaded rod, a threaded hole is opened on the supporting block, the threaded rod is threadedly inserted in the threaded hole, and one end is rotatably connected to the mounting plate.

[0012] Preferably, a limiting hole is provided on the support block, a limiting rod is slidably inserted into the limiting hole, one end of the limiting rod is fixedly connected to the mounting plate, and the limiting rod is parallel to the threaded rod.

[0013] Preferably, a magnet is fixedly mounted on the upper surface of the cover plate, and an L-shaped metal rod is vertically fixedly mounted on the workbench.

[0014] Preferably, the upper surfaces of the first mounting block and the second mounting block are on the same horizontal plane, and the two rectangular holes are at the same height.

[0015] In the utility model, the beneficial effects are:

[0016] When the blue film needs to be fixed, the cover plate is placed horizontally on the first mounting block and the second mounting block, and then the first mounting block and the second mounting block are driven to move vertically downward through the cooperation of the electric control cylinder, the U-shaped rod and the trapezoidal block, so that the cover plate is horizontally pressed on the blue film, and the pressure applied is vertically downward, thereby ensuring that the pressure applied to the blue film is uniform. During the crystal expansion process, the film expansion tension is balanced, effectively improving the product qualification rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the front view of a three-dimensional structure of an automatic wafer expansion machine proposed by the utility model;

[0018] Figure 2 It is a schematic diagram of the three-dimensional structure of the workbench;

[0019] Figure 3 is a schematic diagram of the three-dimensional structure of the positioning block;

[0020] Figure 4 for Figure 1 A magnified view of the structure at center;

[0021] Figure 5 for Figure 2 Enlarged view of the structure at point B in the middle.

[0022] In the figure: 1 workbench, 2 blue film fixing frame, 3 wafer expansion plate, 4 spring rod, 5 first mounting block, 6 second mounting block, 7 cover plate, 8 electric control cylinder, 9 U-shaped rod, 10 trapezoidal block, 11 positioning block, 12 mounting plate, 13 trapezoidal clamping block, 14 triangular groove, 15 support block, 16 threaded rod, 17 adjustment rod, 18 limit rod, 19 magnet, 20 metal rod. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0024] Reference Figure 1-Figure 5 A wafer automatic expansion machine includes a workbench 1, on which a blue film fixing frame 2 is fixedly installed. A wafer expansion disk 3 is installed on the workbench 1 through a wafer expansion cylinder. The blue film fixing frame 2 is used to place the blue film. During wafer expansion, the wafer expansion disk 3 is driven by the wafer expansion cylinder to move vertically upward to perform wafer expansion processing of the blue film.

[0025] A first mounting block 5 and a second mounting block 6 are installed on the workbench 1 through a spring rod 4, a cover plate 7 is rotatably installed on the first mounting block 5, and a locking assembly for locking the cover plate 7 is provided on the second mounting block 6. The upper surfaces of the first mounting block 5 and the second mounting block 6 are on the same horizontal plane, and the two rectangular holes are at the same height. The locking assembly includes a positioning block 11 fixedly installed on the side of the cover plate 7, a mounting plate 12 installed on the second mounting block 6 through an adjusting component, and a trapezoidal clamping block 13 fixedly installed on the mounting plate 12. A triangular groove 14 is provided on the positioning block 11, and the trapezoidal clamping block 13 is inserted in the triangular groove 14. The adjusting component includes a supporting block 15 fixedly installed on the second mounting block 6, a threaded rod 16 and an adjusting rod 17 fixedly installed at one end of the threaded rod 16. A threaded hole is provided on the supporting block 15, and the threaded rod 16 is threadedly inserted in the threaded hole, and one end is rotatably connected to the mounting plate 12.

[0026] The cover plate 7 is rotatably mounted on the first mounting block 5. Since the upper surfaces of the first mounting block 5 and the second mounting block 6 are on the same horizontal plane, when the cover plate 7 is rotated and placed horizontally on the first mounting block 5 and the second mounting block 6, the cover plate 7 and the blue film fixing frame 2 are in a parallel state. When the cover plate 7 is placed horizontally on the second mounting block 6, the positioning block 11 contacts the upper surface of the second mounting block 6, and then the adjusting rod 17 can be rotated to drive the mounting plate 12 to move toward the positioning block 11 through the threaded rod 16, and then the mounting plate 12 is driven to drive one end of the trapezoidal clamping block 13 to be inserted into the triangular groove 14 through the mounting plate 12, and the inclined surface of the trapezoidal clamping block 13 contacts the inclined wall of the triangular groove 14, thereby applying an inclined downward pressure on the positioning block 11, thereby effectively locking the cover plate 7 on the second mounting block 6.

[0027] A limiting hole is provided on the support block 15, and a limiting rod 18 is slidably inserted into the limiting hole. One end of the limiting rod 18 is fixedly connected to the mounting plate 12, and the limiting rod 18 is parallel to the threaded rod 16. When the threaded rod 16 drives the mounting plate 12 to move horizontally toward the positioning block 11, the limiting rod 18 can prevent the mounting plate 12 from rotating during the movement.

[0028] Rectangular holes are provided on the first mounting block 5 and the second mounting block 6. An electric control cylinder 8 is fixedly installed on the workbench 1. A U-shaped rod 9 is fixedly installed on the output shaft of the electric control cylinder 8. Trapezoidal blocks 10 are fixedly installed at both ends of the U-shaped rod 9. One ends of the two trapezoidal blocks 10 are respectively inserted into the two rectangular holes, and the hypotenuse of the trapezoidal block 10 contacts one end of the rectangular hole.

[0029] When the cover plate 7 is in a horizontal state and is directly above the blue film, the electric control cylinder 8 is started to drive the U-shaped rod 9 to move toward the blue film fixing frame 2, and then the two trapezoidal blocks 10 are driven to move into the rectangular hole through the U-shaped rod 9, with the inclined surface of the trapezoidal block 10 facing downward. Under the action of the inclined surface, the two trapezoidal blocks 10 will simultaneously drive the first mounting block 5 and the second mounting block 6 to move vertically downward, and the spring rod 4 is compressed, thereby driving the cover plate 7 to move vertically toward the blue film fixing frame 2, squeezing the blue film vertically downward above the blue film, and applying pressure vertically downward, thereby ensuring that the pressure applied to the blue film is uniform. During the crystal expansion process, the film expansion tension is balanced, effectively improving the product qualification rate.

[0030] A magnet 19 is fixedly mounted on the upper surface of the cover plate 7, and an L-shaped metal rod 20 is vertically fixedly mounted on the workbench 1. When the device is not in use, the cover plate 7 is rotated to make the cover plate 7 in a vertical state, and one end of the metal rod 20 is brought into contact with the magnet 19 on the cover plate 7, so that the cover plate 7 is prevented from rotating under the action of magnetic force.

[0031] In the utility model, when expanding the crystal, the cover plate 7 is horizontally placed on the first mounting block 5 and the second mounting block 6, and then the cover plate 7 is locked by the locking assembly to limit the rotation of the cover plate 7, and then the electric control cylinder 8 is started, and the two trapezoidal blocks 10 are driven to move into the rectangular hole through the U-shaped rod 9. Under the action of the inclined surface of the trapezoidal block 10, the two trapezoidal blocks 10 will simultaneously drive the first mounting block 5 and the second mounting block 6 to move vertically downward, thereby driving the cover plate 7 to move vertically toward the blue film fixing frame 2, and vertically squeeze the blue film downward above the blue film, and the pressure applied is vertically downward, thereby ensuring that the pressure applied to the blue film is uniform, and in the process of crystal expansion, the film expansion tension is balanced, and the qualified rate of the product is effectively improved.

[0032] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. An automatic wafer expansion machine, comprising a workbench (1), characterized in that: A blue film fixing frame (2) is fixedly mounted on the workbench (1), and a wafer expansion disc (3) is mounted on the workbench (1) via a wafer expansion cylinder; A first mounting block (5) and a second mounting block (6) are mounted on the workbench (1) via a spring rod (4); a cover plate (7) is rotatably mounted on the first mounting block (5); and a locking assembly for locking the cover plate (7) is provided on the second mounting block (6); Rectangular holes are provided on the first mounting block (5) and the second mounting block (6); an electric control cylinder (8) is fixedly mounted on the workbench (1); a U-shaped rod (9) is fixedly mounted on the output shaft of the electric control cylinder (8); trapezoidal blocks (10) are fixedly mounted on both ends of the U-shaped rod (9); one end of the two trapezoidal blocks (10) are respectively inserted into the two rectangular holes, and the hypotenuse of the trapezoidal block (10) contacts one end of the rectangular hole.

2. The automatic wafer expansion machine according to claim 1, characterized in that: The locking assembly comprises a positioning block (11) fixedly mounted on the side of the cover plate (7), a mounting plate (12) mounted on the second mounting block (6) via an adjusting component, and a trapezoidal clamping block (13) fixedly mounted on the mounting plate (12); a triangular groove (14) is formed on the positioning block (11), and the trapezoidal clamping block (13) is inserted into the triangular groove (14).

3. The automatic wafer expansion machine according to claim 2, characterized in that: The adjusting component comprises a support block (15) fixedly mounted on the second mounting block (6), a threaded rod (16) and an adjusting rod (17) fixedly mounted on one end of the threaded rod (16); a threaded hole is provided on the support block (15); the threaded rod (16) is threadedly inserted into the threaded hole and one end of the threaded rod is rotatably connected to the mounting plate (12).

4. The automatic wafer expansion machine according to claim 3, characterized in that: The support block (15) is provided with a limiting hole, a limiting rod (18) is slidably inserted into the limiting hole, one end of the limiting rod (18) is fixedly connected to the mounting plate (12), and the limiting rod (18) is parallel to the threaded rod (16).

5. The automatic wafer expansion machine according to claim 1, characterized in that: A magnet (19) is fixedly mounted on the upper surface of the cover plate (7), and an L-shaped metal rod (20) is vertically fixedly mounted on the workbench (1).

6. The automatic wafer expansion machine according to claim 1, characterized in that: The upper surfaces of the first mounting block (5) and the second mounting block (6) are on the same horizontal plane, and the two rectangular holes are at the same height.

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