Reagent placing assembly, wet process machine table and automatic liquid changing system

Abstract

The utility model relates to the technical field of semiconductor production, and particularly discloses a reagent placing assembly, a wet process machine table and an automatic liquid changing system. The reagent placing assembly comprises a supporting piece and a liquid receiving piece, a placing area is arranged on the supporting piece and is used for placing a reagent bottle; and the liquid receiving piece is arranged beside the placing area and is used for receiving drippings of the liquid taking pipe. And a liquid receiving piece of the reagent placing assembly can receive drippings of the liquid taking pipe. According to the scheme, dripping objects can be received through the liquid receiving piece, so that in the process of replacing the reagent bottle, after a bottle cap of the reagent bottle is taken down, the bottle cap can be moved to the position above the liquid receiving piece, the dripping objects of a liquid taking pipe on the bottle cap are received, pollution of reagents to a machine table and the working environment is effectively prevented, and the cleaning burden of workers is reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor production technology, and in particular to a reagent placement component, a wet process machine, and an automatic liquid replacement system. Background Art

[0002] In the semiconductor manufacturing process, the wet process is a process that uses liquid reagents to react chemically or physically with semiconductor materials to achieve cleaning, etching and removal of impurities on the surface of the wafer. Generally, the wet process includes steps such as cleaning, etching and photoresist development.

[0003] The cleaning step refers to the use of cleaning fluid to remove impurities such as organic matter, metal ions and particles on the surface of semiconductor wafers. During the cleaning process, the cleaning fluid reacts chemically or physically adsorbs with the contaminants to remove the contaminants from the wafer surface, ensuring the cleanliness of the wafer surface and providing a good foundation for subsequent manufacturing processes.

[0004] Etching is the process of selectively removing semiconductor materials by chemical or physical methods to form specific patterns and structures. In the chemical etching process, the etching solution needs to react chemically with the semiconductor material to dissolve and remove the unwanted parts.

[0005] Photoresist development is a process in which the developer reacts with the exposed photoresist to dissolve the soluble part and reveal the hidden pattern on the photoresist. After development, the wafer needs to be rinsed with deionized water.

[0006] As can be seen from the above, a variety of liquid reagents such as cleaning agents, chemicals and deionized water are required in the semiconductor wet process. During the preparation process, the reagents will be consumed. For example, the active ingredients in the cleaning liquid and etching liquid will be consumed due to chemical reactions, resulting in a reduction in the amount of reagents and a reduction in concentration, which will reduce the cleaning and etching effects, thereby affecting the manufacturing quality of the wafer. Therefore, during the preparation process, the reagent bottles need to be replaced in a timely manner to maintain the effectiveness and purity of the reagents.

[0007] In order to facilitate the machine to take liquid from the reagent bottle, a liquid collection tube is generally provided on the reagent bottle to pass through the bottle cap. When replacing the reagent bottle, the bottle cap and the liquid collection tube need to be removed from the reagent bottle, and then the reagent bottle is replaced; after removing the bottle cap and the liquid collection tube, the reagent adhering to the liquid collection tube will drip and pollute the working environment, while increasing the cleaning workload of the staff. Utility Model Content

[0008] In view of this, the purpose of the present application is to provide a reagent placement component, a wet process machine and an automatic liquid replacement system to solve the problem that the process of replacing reagent bottles will pollute the working environment.

[0009] In order to achieve the above technical objectives, the first aspect of the present application provides a reagent placement assembly, comprising:

[0010] A support member, wherein a placement area is provided on the support member, and the placement area is used for placing the reagent bottle;

[0011] A liquid receiving part is arranged beside the placement area and is used to receive drippings from the liquid collection tube.

[0012] Further, the liquid contact part includes a manifold;

[0013] The busbar is provided with a bus channel;

[0014] The confluence channel is used to receive the drippings from the liquid taking pipe;

[0015] The confluence channel is provided with an inlet and an outlet;

[0016] The top of the inlet and outlet is an open structure.

[0017] Furthermore, the liquid receiving member can move on the supporting member to drive the inlet and outlet to move closer to or away from the bottle mouth of the reagent bottle.

[0018] Furthermore, the liquid contacting member is rotatable on the supporting member.

[0019] Further, it also includes: a driving member;

[0020] The output end of the driving member is connected to the liquid contacting member for driving the liquid contacting member to rotate.

[0021] Further, the liquid contact part includes a manifold;

[0022] The conduit is connected to the conduit channel.

[0023] Further, the manifold comprises a first inlet and a second inlet;

[0024] The first inlet opens toward the top and is used for the liquid extraction tube to be placed therein;

[0025] The second inlet opens toward the side and is communicated with the confluence channel;

[0026] The first inlet is a bell-mouth structure;

[0027] The top of the confluence channel is an open structure.

[0028] Furthermore, the confluence channel is inclined from top to bottom in a direction from away from to close to the confluence pipe.

[0029] Furthermore, a fence is provided on the periphery of the placement area.

[0030] A second aspect of the present application provides a wet process machine, comprising: a machine and a plurality of the above-mentioned reagent placement components;

[0031] A storage bin is provided on the machine platform;

[0032] The supporting member of the reagent placement assembly is arranged in the storage bin.

[0033] Furthermore, the machine platform is provided with a warehouse opening connected to the storage warehouse;

[0034] The support member can slide in a horizontal direction and slide into or out of the bay opening.

[0035] Furthermore, it also includes a translation drive member;

[0036] The translation driving component is disposed in the machine platform, and an output end of the translation driving component is connected to the supporting component.

[0037] Furthermore, the hatch is provided with an openable and closable hatch door.

[0038] Furthermore, the warehouse door is a folding door that can slide in a vertical direction.

[0039] Further, it also includes: an air intake port and an exhaust pipe;

[0040] The exhaust pipe passes through the bottle cap of the reagent bottle;

[0041] The air inlet is arranged on the support member and faces the placement area on the support member.

[0042] A third aspect of the present application provides an automatic liquid exchange system, comprising: a liquid exchange robot and any of the above-mentioned wet process machines;

[0043] The liquid exchange robot comprises: a multi-axis mechanical arm and a rotating gripper;

[0044] The rotating gripper can be detachably connected to the multi-axis robotic arm;

[0045] The rotating gripper is used to loosen or tighten the bottle cap of the reagent bottle;

[0046] The multi-axis robot arm is used to drive the rotating gripper to move to grab the bottle cap after being connected to the rotating gripper.

[0047] Further, the liquid exchange robot comprises: a grasping claw;

[0048] The grabbing claw can be detachably connected to the multi-axis robotic arm;

[0049] The grabbing gripper is used to grab the reagent bottle;

[0050] The multi-axis robot arm is used to drive the grasping claw to move to the place where the reagent bottle is grasped and placed or removed from the placement area after being connected to the grasping claw.

[0051] Further, a mobile station is included;

[0052] The multi-axis mechanical arm is arranged on the moving platform.

[0053] It can be seen from the above technical solutions that the present application provides a reagent placement component, a wet process machine and an automatic liquid exchange system. Among them, the reagent placement component includes: a support member and a liquid receiving member; a placement area is provided on the support member, and the placement area is used for placing reagent bottles; the liquid receiving member is arranged beside the placement area, and is used to receive drippings from the liquid collection tube. The liquid receiving member includes a confluence plate; a confluence channel is provided on the confluence plate; the confluence channel is used to receive drippings from the liquid collection tube; the confluence channel is provided with an inlet and outlet; the inlet and outlet are open in the horizontal direction and the vertical direction.

[0054] In this solution, the liquid receiving part can catch dripping materials, so that during the process of replacing the reagent bottle, after the bottle cap of the reagent bottle is removed, the bottle cap can be moved above the manifold of the liquid receiving part, so that the dripping materials from the liquid collection tube on the bottle cap can be caught, effectively preventing the reagent from contaminating the machine and the working environment, and reducing the cleaning burden of the staff. BRIEF DESCRIPTION OF THE DRAWINGS

[0055] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0056] Figure 1 A schematic structural diagram of a reagent placement assembly provided in an embodiment of the present application when the first inlet does not have a bell-mouth structure;

[0057] Figure 2 A schematic diagram of the rotation process of a manifold of a reagent placement assembly provided in an embodiment of the present application;

[0058] Figure 3 A schematic diagram of the structure of a wet process machine provided in an embodiment of the present application;

[0059] Figure 4 A schematic diagram of a wet process machine provided in an embodiment of the present application when a support member slides out of a hatch;

[0060] Figure 5 A schematic diagram of a liquid exchange robot in an automatic liquid exchange system provided in an embodiment of the present application;

[0061] In the figure:

[0062] 10. Support; 11. Placement area; 12. Fence;

[0063] 20, liquid contact parts; 21, manifold; 211, manifold channel; 212, inlet and outlet; 22, manifold; 221, first inlet; 222, second inlet;

[0064] 30. Machine; 31. Storage bin; 32. Bin opening; 33. Bin door;

[0065] 40. Air intake; 41. Exhaust pipe;

[0066] 50. Fluid exchange robot; 51. Multi-axis robotic arm; 52. Rotating gripper; 53. Grasping gripper; 54. Moving platform;

[0067] 110. Reagent bottle; 120. Liquid collection tube; 130. Bottle cap. DETAILED DESCRIPTION

[0068] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the specification of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection requested by the present application.

[0069] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0070] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0071] See also Figure 1 and Figure 2 In the first aspect of the embodiment of the present application, a reagent placement assembly is provided, comprising: a support member 10 and a liquid receiving member 20. A placement area 11 is provided on the support member 10, and the placement area 11 is used for placing a reagent bottle 110; the liquid receiving member 20 is provided beside the placement area 11, and is used to receive drippings from a liquid collection tube 120.

[0072] In this embodiment, the reagent bottle 110 refers to a storage bottle that can be used for chemical reagents prepared by wet method. A bottle cap 130 is installed on the reagent bottle 110; a liquid collection tube 120 is provided through the bottle cap 130. One end of the liquid collection tube 120 is located outside the bottle cap 130, and the other end passes through the bottle cap and extends into the reagent bottle 110; wherein, one end of the liquid collection tube 120 can be connected to the liquid collection mechanism of the machine, so that the machine can obtain the reagent inside the reagent bottle 110 through the liquid collection tube 120.

[0073] In this embodiment, the support member 10 can be a plate-shaped, cabinet-shaped structure that can be used to place the reagent bottle 110, or it can refer to a machine for performing a wet process. A groove, a protrusion or other form of positioning structure can be provided on the support member 10, and the positioning structure surrounds the outer periphery of the placement area 11 to ensure the stable positioning of the reagent bottle 110. For example, the positioning structure can be a fence 12 provided on the outer periphery of the placement area 11, and the fence 12 can be made of metal or plastic material to adapt to different use environments and corrosion resistance requirements.

[0074] In this embodiment, the liquid receiving member 20 may be in a plate shape, a groove shape, or other shapes capable of collecting liquid. For example, the liquid receiving member 20 may be a funnel-shaped structure, specifically, the liquid receiving member 20 may receive drippings from the liquid collection tube 120 .

[0075] Specifically, take the example of a staff member manually replacing a reagent bottle 110. The staff member loosens the bottle cap 130 regularly or after receiving a signal from the machine, and then lifts the bottle cap 130 to separate the bottle cap 130 and the liquid collection tube 120 from the reagent bottle 110; the lifted liquid collection tube 120 is moved above the liquid receiving part 20 to collect its drippings onto the liquid receiving part 20 to avoid contaminating the machine and the working environment.

[0076] As an embodiment, the liquid receiving part 20 can be fixedly arranged on the support part 10, and one end of the liquid receiving part 20 extends to the bottle mouth position after the reagent bottle 110 is placed. Correspondingly, in order to facilitate the placement of the reagent bottle 110, the placement area 11 is provided with a horizontally open placement opening, allowing the reagent bottle to be easily placed in or taken out in the horizontal direction while avoiding interference from the liquid receiving part 20.

[0077] In one embodiment, see Figure 1 and Figure 2The liquid receiving part 20 includes a confluence plate 21 ; a confluence channel 211 is provided on the confluence plate 21 ; the confluence channel 211 is used to receive the dripping material of the liquid taking pipe 120 ; the confluence channel 211 is provided with an inlet and outlet 212 opened toward the top surface.

[0078] In this embodiment, the top of the inlet and outlet 212 is an open structure, which facilitates dripping of objects into the inlet and outlet 212 and into the confluence channel 211. The bottom of the confluence channel 211 can be designed to have a certain inclination angle to ensure that the liquid can flow smoothly and prevent liquid accumulation. Specifically, the confluence channel 211 is inclined from top to bottom along the direction away from the confluence tube 22 to the direction close to the confluence tube 22.

[0079] Optionally, the inlet and outlet 212 is open toward the top and the outer end toward the horizontal direction is an open structure, so that the liquid extraction tube 120 can enter from the horizontal direction and effectively guide the dripping reagent into the confluence channel 211 to maintain the cleanliness and safety of the working area. In addition, the bottom of the confluence channel 211 can be connected to a drain port to facilitate the outflow of liquid.

[0080] Optionally, when the confluence channel 211 is a horizontal plane without an inclined surface, the inlet and outlet 212 can be configured as a structure with an open top and a closed outer end in the horizontal direction. In this way, the received objects entering the confluence channel 211 from the inlet and outlet 212 cannot flow out from the outer end of the confluence channel 211 (i.e., the end away from the confluence tube 22 described below), and the same receiving effect can be achieved on the liquid extraction tube 120.

[0081] In one embodiment, the liquid receiving part 20 includes a manifold 22; the manifold 22 is connected to the manifold 211. The manifold 22 can collect the liquid flowing into the manifold 211 and guide the liquid to the waste liquid treatment mechanism in the machine. The material of the manifold 22 can be selected from chemically resistant plastic or metal to ensure reliability for long-term use. In addition, the outlet end of the manifold 22 can be designed as a detachable or adjustable structure to facilitate cleaning and maintenance by the staff. In order to ensure the smooth operation of the manifold 22, a filter net or sieve can be set inside it to prevent solid particles from clogging the waste liquid treatment mechanism.

[0082] In a more specific embodiment, the manifold 22 includes a first inlet 221 and a second inlet 222 ; the first inlet 221 opens toward the top for inserting the liquid extraction tube 120 ; the second inlet 222 opens toward the side and communicates with the manifold 211 .

[0083] In this embodiment, when replacing the reagent bottle 110, the liquid collection tube 120 is taken out from the bottle mouth, gradually moved to the first inlet 221, and then penetrated into the manifold 22 through the first inlet 221 to complete the placement of the liquid collection tube 120. In the process of moving the liquid collection tube 120, the dripping material of the liquid collection tube 120 flows through the manifold 211 through the second inlet 222 and enters the manifold 22 to collect the droplets. In this way, the dripping material after the liquid collection tube 120 is effectively removed can fall to other areas of the support 10.

[0084] It should be noted that, in this embodiment, the height of the first inlet 221 is higher than the second inlet 222, so that the liquid collection tube 120 can be placed in the first inlet 221. At the same time, by providing the first inlet 221 and the second inlet 222, it is possible to avoid clogging the manifold 22 after the liquid collection tube 120 penetrates into the manifold 22, so that the dripping matter cannot flow into the manifold 22.

[0085] Optionally, the first inlet 221 is a bell-mouth structure to further facilitate the insertion of the liquid extraction tube 120. Figure 1 In the case shown, if the first inlet 221 on the manifold 22 does not adopt a bell-mouth structure, but is in a cylindrical tube shape; in this case, after the liquid extraction tube 120 is taken out, it is difficult to align the liquid extraction tube 120 with the first inlet 221. Figure 2 As shown, in this embodiment, the first inlet 221 is configured as a bell-mouth structure, so that the first inlet 221 is funnel-shaped, which is convenient for the liquid collection tube 120 to penetrate, and at the same time ensures that all dripping objects on the liquid collection tube 120 can be effectively received.

[0086] It should be noted that, in the above-mentioned other embodiments, the confluence channel 211 can be configured to have a top opening structure only at the inlet and outlet 212, so that the drippings from the liquid collection tube 120 can drip from top to bottom into the inlet and outlet 212. In this embodiment, since the liquid collection tube 120 needs to move along the confluence channel 211 to the first inlet 221, the top of the confluence channel 211 needs to be configured as an open structure, so that when the liquid collection tube 120 moves along the confluence channel 211 and above the confluence channel 211, its drippings can all fall onto the confluence channel 211.

[0087] In another embodiment provided by the present application, the liquid receiving member 20 is a movable structure. Specifically, the liquid receiving member 20 can move on the support member 10 to drive the inlet and outlet 212 to approach or move away from the bottle mouth of the reagent bottle 110 .

[0088] In this embodiment, the process of replacing the reagent bottle 110 may include the following steps:

[0089] First, the bottle cap 130 on the reagent bottle 110 is loosened to prepare to remove the bottle cap 130 and the liquid collection tube 120. At this time, the liquid receiving part 20 drives the end where the inlet and outlet 212 are located close to the bottle mouth of the reagent bottle 110 to ensure that the dripping materials can be received in time.

[0090] Afterwards, the liquid collection tube 120 is taken out from the reagent bottle 110 , and the liquid collection tube 120 is moved along the direction of the confluence channel 211 to the first inlet 221 , and then continues to slide to above the first inlet 221 and penetrates into the confluence tube 22 .

[0091] Then, the liquid contact part 20 is controlled to move to drive the inlet and outlet 212 away from the placement area 11 to avoid the reagent bottle 110, so that the reagent bottle 110 to be replaced can be taken out from the placement area 11, and a new reagent bottle 110 is loaded.

[0092] Finally, the liquid receiving part 20 is controlled to move so as to drive the end where the inlet and outlet 212 are located close to the bottle mouth of the reagent bottle 110; after moving into position, the liquid collection tube 120 is taken out from the manifold 22, and moved along the manifold 211 to the top of the reagent bottle 110, placed in the bottle and tightened, thereby completing the replacement of the reagent bottle.

[0093] As an implementation, see Figure 2 The liquid receiving member 20 can rotate on the supporting member 10. That is, in this embodiment, the liquid receiving member 20 drives its inlet and outlet 212 to approach or move away from the reagent bottle 110 by rotating.

[0094] Specifically, the assembly may include a driving member; the output end of the driving member is connected to the liquid contact member 20, and is used to drive the liquid contact member 20 to rotate. The manifold 22 is connected to the support member 10 through a bearing, so that the manifold 22 can rotate. The driving member may be a rotating motor, and is connected to the manifold 22 through a transmission structure such as a gear.

[0095] In the manual replacement mode, the start and stop of the driving member can be manually controlled by the staff. For example, a start and stop button is provided on the support member 10. After the staff clicks the button each time, the driving member drives the manifold 22 to rotate a fixed angle to control the manifold 22 to rotate within a fixed range.

[0096] In the automatic liquid replacement method such as the following robot, the start and stop of the driving member can be accurately controlled by the control system to ensure that the rotation of the manifold 22 and the insertion and removal of the liquid extraction tube 120 are coordinated.

[0097] See also Figures 1 to 4 In a second aspect, the present application provides a wet process machine, comprising: a machine 30 and a plurality of the above-mentioned reagent placement components; a storage bin 31 is provided on the machine 30; and a support member 10 of the reagent placement component is provided in the storage bin 31.

[0098] In this embodiment, the machine 30 can be used as a wet process machine for performing a single step of cleaning, etching and photoresist development, or it can be a wet process machine that can perform the above steps simultaneously. Taking the latter as an example, a plurality of reagent placement components can be placed in the storage bin 31 on the machine 30, and different reagent placement components can be placed in different reagent bottles 110.

[0099] In this embodiment, the machine 30 may configure a sensor for each reagent placement component. The sensor may be, for example, a liquid level sensor, so that the control system in the machine 30 can obtain the liquid level information in the reagent bottle 110 .

[0100] In a further improved embodiment, Figure 3 and Figure 4 As shown, a bay opening 32 communicating with the storage bin 31 is disposed on the machine platform 30 ; the support member 10 can slide in or out of the bay opening 32 along a horizontal direction.

[0101] In this embodiment, a translation driver may be provided in the machine 30, and the output end of the translation driver is connected to the support 10. The translation driver may be, for example, a linear motor, a rotary motor or a cylinder, etc., which can drive the support 10 to slide when it is started.

[0102] It should be noted that each support member 10 in this embodiment is individually connected to a translation driving member to achieve individual control of each support member 10 and the reagent bottle 110 on the support member 10 .

[0103] As an implementation method, the translation drive of each support 10 can also be connected to a displacement sensor to ensure that during the translation process, the sensor can monitor the position information of the support 10 in real time. The machine 30 uses a control system to accurately control the movement of each support 10 based on the position information, thereby ensuring that the reagent bottle 110 can be accurately positioned to meet the requirements of wet processing and reagent bottle 110 replacement.

[0104] In one embodiment, an openable and closable door 33 is provided on the hatch 32. When the machine 30 is in operation, the door 33 can close the hatch 32.

[0105] In this embodiment, the door 33 is a folding door that can slide in the vertical direction, that is, when the door 33 is opened, it can slide in the vertical direction to fold. This method can avoid the door 33 occupying the space on both sides of the machine 30 when it is opened, and facilitates the operation of the robot during automatic operation and the movement between the machines 30.

[0106] In one embodiment, the machine 30 further includes: an air inlet 40 and an exhaust pipe 41 ; the exhaust pipe 41 passes through a bottle cap 130 disposed on the reagent bottle 110 ; the air inlet 40 is disposed on the support 10 and faces the placement area 11 on the support 10 .

[0107] The exhaust pipe 41 can exhaust or inhale the reagent bottle 110 during the operation of the machine 30 to maintain the pressure balance in the reagent bottle 110 and ensure the stability of the flow of liquid in the liquid collection pipe 120. The exhaust pipe 41 is precisely controlled by an electromagnetic valve connected to the control system and can be opened or closed when needed.

[0108] At the same time, the gas exhausted from the exhaust pipe 41 is guided to the gas processing mechanism inside the machine 30 through the air inlet 40 to prevent the gas from affecting the working environment.

[0109] See also Figures 1 to 5 In a third aspect, the present application provides an automatic liquid exchange system, comprising: a liquid exchange robot 50 and any of the above-mentioned wet process machines; the liquid exchange robot 50 comprises: a multi-axis robotic arm 51 and a rotating gripper 52; the rotating gripper 52 can be detachably connected to the multi-axis robotic arm 51; the rotating gripper 52 is used to loosen or tighten the bottle cap 130 of the reagent bottle 110; the multi-axis robotic arm 51 is used to drive the rotating gripper 52 to move to grab the bottle cap 130 after being connected to the rotating gripper 52.

[0110] In this embodiment, the multi-axis mechanical arm 51 and the rotating gripper 52 can be electrically connected to the control system in the machine 30. The multi-axis mechanical arm 51 has multiple degrees of freedom, and can drive the gripper and the reagent bottle 110 to move flexibly in space. In addition, the multi-axis mechanical arm 51 can be provided with recognition tools such as cameras to identify the exact position of the reagent bottle 110. The rotating gripper 52 can be provided with a gripper that can be opened and closed, and a rotating motor for controlling the rotation of the gripper.

[0111] When the reagent bottle 110 needs to be replaced, the connection end of the multi-axis robot 51 can be moved to a detachable connection with the rotating gripper 52, and then the rotating gripper 52 is driven to move to the precise position of the reagent bottle 110, and the rotating gripper 52 is controlled to clamp the bottle cap 130; then, the rotating gripper 52 controls the gripper to rotate and loosen the bottle cap. Subsequently, the multi-axis robot 51 controls the rotating gripper 52 and the bottle cap 130 to move along the confluence channel 211 and penetrate into the confluence pipe 22, completing the automatic placement of the liquid collection tube 120 and the bottle cap 130.

[0112] In a more specific embodiment, the liquid exchange robot 50 includes: a grasping gripper 53; the grasping gripper 53 can be detachably connected to the multi-axis robotic arm 51; the grasping gripper 53 is used to grasp the reagent bottle 110; the multi-axis robotic arm 51 is used to drive the grasping gripper 53 to move to grasp the reagent bottle 110 and place it in the placement area 11 or move it out of the placement area 11 after connecting to the grasping gripper 53.

[0113] After the liquid collection tube 120 is placed on the liquid receiving part 20, the control system controls the manifold 22 to rotate so that the inlet and outlet 212 of the manifold 21 is away from the reagent bottle 110. At the same time, the multi-axis robot 51 moves to place the rotating gripper 52 and disconnects from the rotating gripper 52, and then moves to connect with the grab gripper 53. Subsequently, the multi-axis robot 51 controls the grab gripper 53 to clamp the reagent bottle 110 to remove the reagent bottle 110 from the placement area 11, and moves to grab a new reagent bottle 110 and put it into the placement area 11, completing the replacement of the reagent bottle 110.

[0114] After the reagent bottle 110 is replaced, the multi-axis robot arm 51 moves to place the grabbing gripper 53 and disconnects the grabbing gripper 53, and then moves to connect with the rotating gripper 52. At the same time, the control system controls the manifold 22 to rotate so that the inlet and outlet 212 of the manifold 21 is close to the bottle mouth of the reagent bottle 110. After that, the multi-axis robot arm 51 drives the rotating gripper 52 to move to grab the bottle cap 130, drives the bottle cap 130 to move along the manifold 211 to load into the new reagent bottle 110 and tighten the bottle cap 130. After completing the replacement of the reagent bottle 110, the control system immediately instructs the multi-axis robot arm 51 to move the rotating gripper 52 back to the initial position to wait for the next operation instruction. The whole process is smooth and uninterrupted, ensuring the continuity and efficiency of the experimental process.

[0115] As an implementation method, the gripping gripper 53 and the rotating gripper 52 can be integrated into the same gripper to avoid the step of replacing the gripper of the multi-axis robot 51. The integrated gripper can have the functions of taking and placing the reagent bottle 110, taking and placing the bottle cap 130, and rotating the bottle cap 130.

[0116] In a further improved embodiment, a moving platform 54 is further included; the multi-axis robot arm 51 is disposed on the moving platform 54 .

[0117] In this embodiment, the grabbing gripper 53 and the rotating gripper 52 can be placed on the moving platform 54 when not in use. In other embodiments, the grabbing gripper 53 and the rotating gripper 52 can also be set on the machine platform 30.

[0118] The bottom of the mobile platform 54 is provided with a driving wheel, which can drive the multi-axis robot 51 to move along the horizontal plane; and the driving wheel is provided with a processing component, which can be controlled by the control system to start and stop and move the route. In addition, when the reagent bottle 110 needs to be replaced, the multi-axis robot 51 can carry the new reagent bottle 110 to the mobile platform 54, so as to realize the transportation of the reagent bottle 110 through the mobile platform 54. Similarly, the replaced reagent bottle 110 can also be carried to the mobile platform 54.

[0119] The automatic liquid replacement system provided in this embodiment can realize an automated process from receiving signals, identifying the positions of reagent bottles 110 and bottle caps 130 to replacing reagent bottles 110 by precisely controlling and coordinating various mechanical components. This not only reduces human operating errors, but also avoids contaminating the working environment and improves work efficiency.

[0120] The above are only preferred embodiments of the present application and are not intended to limit the present utility model. Although the present application has been described in detail with reference to the examples, those skilled in the art can still modify the technical solutions recorded in the aforementioned examples or make equivalent substitutions for some of the technical features therein. However, any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A reagent placement component, characterized in that: include: A support member (10), wherein a placement area (11) is provided on the support member (10), and the placement area (11) is used for placing a reagent bottle (110); A liquid receiving part (20), the liquid receiving part (20) being arranged beside the placement area (11) and being used to receive drippings from the liquid collection tube (120); The liquid contact part (20) comprises a manifold (21); The busbar (21) is provided with a bus channel (211); The confluence channel (211) is used to receive drippings from the liquid extraction pipe (120); The confluence channel (211) is provided with an inlet and outlet (212); The top of the inlet and outlet (212) is an open structure.

2. The reagent placement assembly according to claim 1, characterized in that: The liquid receiving member (20) is movable on the supporting member (10) to drive the inlet and outlet (212) to move closer to or farther away from the bottle mouth of the reagent bottle (110).

3. The reagent placement assembly according to claim 2, characterized in that: The liquid contact part (20) is rotatable on the support part (10).

4. The reagent placement assembly according to claim 3, characterized in that: Also includes: Driving parts; The output end of the driving member is connected to the liquid contact member (20) and is used to drive the liquid contact member (20) to rotate.

5. The reagent placement assembly according to any one of claims 1 to 4, characterized in that: The liquid contact part (20) comprises a manifold (22); The confluence pipe (22) is in communication with the confluence channel (211).

6. The reagent placement assembly according to claim 5, characterized in that: The manifold (22) comprises a first inlet (221) and a second inlet (222); The first inlet (221) opens toward the top and is used for the liquid extraction tube (120) to be placed therein; The second inlet (222) opens toward the side and is in communication with the confluence channel (211); The first inlet (221) is a bell-mouth structure; The top of the confluence channel (211) is an open structure.

7. The reagent placement assembly according to claim 5, characterized in that: The confluence channel (211) is inclined from top to bottom in a direction away from the confluence pipe (22) to approach the confluence pipe (22).

8. The reagent placement assembly according to claim 1, characterized in that: A fence (12) is provided on the outer periphery of the placement area (11).

9. A wet process machine, characterized in that: include: A machine (30) and a plurality of reagent placement components according to any one of claims 1 to 8; The machine platform (30) is provided with a storage bin (31); The supporting member (10) of the reagent placement assembly is arranged in the storage bin (31).

10. The wet process machine according to claim 9, characterized in that: The machine platform (30) is provided with a warehouse opening (32) which is connected to the storage warehouse (31); The support member (10) can slide in a horizontal direction and slide into or out of the warehouse opening (32).

11. The wet process machine according to claim 10, characterized in that: Also included is a translation drive member; The translation driving component is arranged in the machine platform (30), and the output end of the translation driving component is connected to the support component (10).

12. The wet process machine according to claim 10, characterized in that: The warehouse opening (32) is provided with a warehouse door (33) that can be opened and closed.

13. The wet process machine according to claim 12, characterized in that: The warehouse door (33) is a folding door that can slide in a vertical direction.

14. The wet process machine according to claim 9, characterized in that: Also includes: An air intake port (40) and an exhaust pipe (41); The exhaust pipe (41) penetrates the bottle cap (130) of the reagent bottle (110); The air inlet (40) is arranged on the support member (10) and faces the placement area (11) on the support member (10).

15. An automatic liquid replacement system, characterized in that: include: A liquid changing robot (50) and a wet process machine as claimed in any one of claims 9 to 14; The liquid exchange robot (50) comprises: a multi-axis mechanical arm (51) and a rotating gripper (52); The rotating gripper (52) can be detachably connected to the multi-axis mechanical arm (51); The rotating gripper (52) is used to loosen or tighten the bottle cap (130) of the reagent bottle (110); The multi-axis mechanical arm (51) is used to drive the rotating gripper (52) to move to grab the bottle cap (130) after being connected to the rotating gripper (52).

16. The automatic liquid replacement system according to claim 15, characterized in that: The liquid exchange robot (50) comprises: a grasping claw (53); The grasping claw (53) can be detachably connected to the multi-axis mechanical arm (51); The grasping claw (53) is used to grasp the reagent bottle (110); The multi-axis mechanical arm (51) is used to drive the grasping claw (53) to move to grasp the reagent bottle (110) and place it in the placement area (11) or move it out of the placement area (11) after being connected to the grasping claw (53).

17. The automatic liquid replacement system according to claim 15 or 16, characterized in that: Also included is a mobile station (54); The multi-axis mechanical arm (51) is arranged on the moving platform (54).

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