Box opening and closing mechanism for wafer box

Abstract

The utility model provides a box opening and closing mechanism for a wafer box, and belongs to the technical field of semiconductors. In order to solve the problems that the box opening and closing mechanism is large in operation noise and low in reliability, the box opening and closing mechanism for the wafer box comprises a box opening plate, a plurality of unlocking pieces and a plurality of unlocking driving assemblies, the unlocking pieces and the unlocking driving assemblies are arranged on the box opening plate, and the unlocking pieces are correspondingly connected with the independently-arranged unlocking driving assemblies respectively; the unlocking piece is provided with an unlocking position and a locking position; the unlocking driving assembly comprises a telescopic rod and a transmission rod, the two ends of the telescopic rod are rotationally connected with the box opening plate and the transmission rod correspondingly, and the end, away from the telescopic rod, of the transmission rod is connected with the unlocking piece. The telescopic rod stretches out and draws back to drive the transmission rod to rotate, and the transmission rod rotates to drive the unlocking piece to rotate so that the unlocking piece can be switched between the unlocking position and the locking position. According to the invention, through rotational connection of a plurality of components, the unlocking piece is driven to rotate to open and close the lock, the operation noise is reduced, and the operation reliability is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a switch box mechanism for a wafer box. Background Art

[0002] Wafer boxes are storage devices used to temporarily store wafers during the wafer transportation process and maintain their sealed state. Figure 1 The figure shows a front-opening wafer transfer box (FOUP) currently in common use. The wafer box includes a box body with a side opening, a box cover that can seal and cover the side opening, and a base plate arranged at the bottom of the box body. A locking mechanism is arranged between the box cover and the box body. The box cover can be unlocked by extending an external unlocking piece into a locking hole on the box cover, and the box cover can be transferred by fixing it to the box cover with an external fixing piece, so that the box cover can be completely detached from the box body.

[0003] Usually, a wafer box loading device (Loadport) is set in front of the wafer process equipment, and cooperates with the wafer box transfer robot arm and the process equipment wafer transfer robot arm to realize wafer placement. Taking the removal of wafers as an example, the following steps are implemented in a cycle: the wafer box transfer robot arm places the wafer box on the loading device → the loading device opens the box and detects → the process equipment wafer transfer robot arm transfers the wafer → the wafer box is empty, the loading device closes the box → the wafer box transfer robot arm takes the wafer box away. Among them, the wafer box loading device realizes the opening and closing of the wafer box cover through the switch box mechanism.

[0004] The current switch box mechanism is usually structured as shown in the wafer box conveying and loading system with a publication date of 2017-12-5 and publication number CN206711878U, that is, the first driving member drives the transmission plate to move left and right, and a waist-shaped hole is arranged at the end of the transmission plate. The unlocking member slides and rotates in the waist-shaped hole driven by the left and right movement of the transmission member, thereby realizing the switch lock, but the switch box mechanism has a large operating noise and low reliability. Utility Model Content

[0005] The purpose of this application is to solve the problem of high operating noise and low reliability of the switch box mechanism in the prior art. Therefore, this application provides a switch box mechanism for a wafer box, which drives the unlocking member to rotate the switch lock through the rotation connection of multiple components, reduces the operating noise, and improves the operating reliability.

[0006] The embodiment of the present application provides a switch box mechanism for a wafer box, comprising a box opening plate, and a plurality of unlocking members and a plurality of unlocking drive assemblies arranged on the box opening plate, wherein the plurality of unlocking members are respectively connected to a plurality of independently arranged unlocking drive assemblies;

[0007] The unlocking member has an unlocking position and a locking position;

[0008] The unlocking drive assembly comprises a telescopic rod and a transmission rod, the two ends of the telescopic rod are rotatably connected to the box opening plate and the transmission rod respectively, and one end of the transmission rod away from the telescopic rod is connected to the unlocking member;

[0009] The extension and retraction of the telescopic rod drives the transmission rod to rotate, and the rotation of the transmission rod drives the unlocking member to rotate, so that the unlocking member is switched between the unlocking position and the locking position.

[0010] By adopting the above technical solution, the transmission rod is driven to rotate by the telescopic rod, and the transmission rod drives the unlocking piece to rotate to realize the switch lock. Compared with the conventional waist-shaped hole sliding and rotating to realize the switch lock, the operation noise is small and the operation reliability is higher; and multiple unlocking drive components can be debugged separately, thereby improving the matching accuracy of each unlocking piece and the lock hole on the wafer box cover, further improving the operation reliability, reducing the debugging difficulty and processing difficulty, and multiple unlocking drive components can be maintained separately, reducing maintenance costs.

[0011] In some embodiments, the unlocking member includes a lock catch and a lock rod fixedly connected to the lock catch, the lock catch and the unlocking drive assembly are respectively arranged on both sides of the box opening plate, and the lock rod passes through the box opening plate and is connected to the transmission rod;

[0012] A mounting seat is arranged on one side of the box opening plate away from the lock catch, and the locking rod is rotatably connected to the mounting seat.

[0013] By adopting the above technical solution, the lock buckle and the unlocking drive assembly are separately arranged on both sides of the box opening plate, so that the unlocking drive assembly can be sealed on the other side of the box opening plate, thereby extending the service life of the mechanism; and the locking rod and the mounting seat are rotatably connected to improve the stability of the unlocking piece, thereby improving the reliability of the lock opening and closing operation.

[0014] In some embodiments, a connecting piece is provided between one end of the telescopic rod and the transmission rod, one end of the connecting piece is fixedly connected to one end of the telescopic rod, and the other end is rotatably connected to the transmission rod, and an avoidance groove is provided on one side of the connecting piece facing the mounting seat to avoid the mounting seat.

[0015] By adopting the above technical solution, the compactness between the telescopic rod, the transmission rod and the unlocking member is improved, thereby improving the compactness between the multiple unlocking drive components on the box opening plate, effectively controlling the area of ​​the box opening plate, and thus controlling the volume of the mechanism.

[0016] In some embodiments, a first stopper and a second stopper are provided on a side of the box opening plate away from the lock catch, so as to allow the transmission rod to rotate between the first position and the second position;

[0017] When the transmission rod is in the first position, the transmission rod drives the unlocking member to be in the unlocking position;

[0018] When the transmission rod is in the second position, the transmission rod drives the unlocking member to be in the locking position.

[0019] By adopting the above technical solution, the reliability and safety of the synchronously moving unlocking parts are improved by limiting the movement trajectory of the transmission rod.

[0020] In some embodiments, a first position detection member and a second position detection member are provided on a side of the box opening plate away from the lock catch, and a sensing member adapted to both the first position detection member and the second position detection member is provided on the connecting member;

[0021] When the unlocking member is in the unlocking position, the sensing member on the connecting member is detected by the first position detecting member;

[0022] When the unlocking member is in the locking position, the sensing member on the connecting member is detected by the second position detecting member.

[0023] By adopting the above technical solution, the unlocking member status can be detected by detecting the position of the connecting member, thereby improving the reliability of information control of the mechanism.

[0024] In some embodiments, the telescopic rod is a pneumatic telescopic rod.

[0025] The embodiment of the present application further provides a switch box mechanism for a wafer box, characterized in that it includes a box opening plate, and two unlocking members and an unlocking drive assembly arranged on the box opening plate, wherein the two unlocking members are connected to the unlocking drive assembly;

[0026] The unlocking member has an unlocking position and a locking position;

[0027] The unlocking drive assembly comprises a double-headed telescopic rod and two transmission rods, the middle of the telescopic rod is rotatably connected to the box opening plate, the two ends of the telescopic rod are respectively rotatably connected to the two transmission rods, and the ends of the two transmission rods facing away from the telescopic rod are respectively connected to the two unlocking members;

[0028] The extension and retraction of the telescopic rod drives the transmission rod to rotate, and the rotation of the transmission rod drives the unlocking member to rotate, so that the unlocking member is switched between the unlocking position and the locking position.

[0029] By adopting the above technical solution, the transmission rod is driven to rotate by the telescopic rod, and the transmission rod drives the unlocking piece to rotate to realize the switch lock. Compared with the conventional waist-shaped hole sliding and rotating to realize the switch lock, the operation noise is small and the operation reliability is higher. At the same time, the rotation connection processing and maintenance costs are low.

[0030] Other features and corresponding beneficial effects of the present application are described in the latter part of the specification, and it should be understood that at least some of the beneficial effects become obvious from the records in the specification of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic diagram of the structure of a front-opening wafer transfer box;

[0032] Figure 2 This is a schematic diagram of the structure of the switch box mechanism of the present application;

[0033] Figure 3 This is a schematic structural diagram of the switch box mechanism of the present application from another angle;

[0034] Figure 4 It is a partial structural schematic diagram of the switch box mechanism of the present application.

[0035] Description of reference numerals:

[0036] 10. Wafer box; 11. Box body; 12. Box cover; 13. Bottom plate; 14. Lock hole;

[0037] 100, box opening plate; 110, mounting seat; 120, first position limiting member; 121, second position limiting member; 130, first position detecting member; 131, second position detecting member;

[0038] 200, unlocking piece; 210, lock catch; 220, locking rod.

[0039] 300, unlocking drive assembly; 310, telescopic rod; 320, connecting piece; 321, avoidance groove; 322, induction piece; 330, transmission rod. DETAILED DESCRIPTION

[0040] The following specific embodiments illustrate the implementation of the present application, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Although the description of the present application will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this application are limited to the implementation. On the contrary, the purpose of introducing the application in conjunction with the implementation is to cover other options or modifications that may be extended based on the claims of the present application. In order to provide a deep understanding of the present application, the following description will include many specific details. The present application can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present application, some specific details will be omitted in the description. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict.

[0041] It should be noted that in this specification, similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0042] The technical solution of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present application.

[0043] In the description of the present application, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description created by the present application, unless otherwise specified, "multiple" means two or more.

[0044] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0045] In order to make the objectives, technical solutions and advantages of the present application clearer, the implementation methods of the present application will be further described in detail below in conjunction with the accompanying drawings.

[0046] Embodiment 1:

[0047] See also Figure 1 , Figure 1 It is a schematic diagram of the structure of a front-opening wafer transfer box.

[0048] The front-opening wafer transfer box is a common wafer box 10, which includes a box body 11 with a side opening, a box cover 12 that can cover the side opening in a sealed manner, and a bottom plate 13 disposed at the bottom of the box body 11. A locking mechanism is disposed between the box cover 12 and the box body 11, and the box cover 12 can be unlocked by extending an external unlocking member into a lock hole 14 on the box cover 12, and the box cover 12 can be transferred by fixing the box cover 12 with an external fixing member, so that the box cover 12 can be completely separated from the box body 11. At the same time, the two lock holes 14 on the box cover 12 are independent of each other and can be opened and closed separately.

[0049] See also Figure 2-4 , Figure 2 This is a schematic diagram of the structure of the switch box mechanism of the present application; Figure 3 This is a schematic structural diagram of the switch box mechanism of the present application from another angle; Figure 4 It is a partial structural schematic diagram of the switch box mechanism of the present application.

[0050] With respect to the front-opening wafer transfer box and the wafer box 10 with a similar structure, the embodiment of the present application provides a switch box mechanism for the wafer box 10 , which is used to be arranged on a wafer box loading device to realize opening of the wafer box 10 .

[0051] The mechanism includes a box opening plate 100, and a plurality of unlocking parts 200 and a plurality of unlocking drive components 300 arranged on the box opening plate 100. The plurality of unlocking parts 200 are respectively connected to a plurality of independently arranged unlocking drive components 300, and the plurality of unlocking drive components 300 can be debugged separately, thereby improving the matching accuracy between each unlocking part 200 and the lock hole 14 on the box cover 12 of the wafer box 10, improving the operating reliability, reducing the debugging difficulty and the processing difficulty, and the plurality of unlocking drive components 300 can be maintained separately, thereby reducing the maintenance cost.

[0052] Generally speaking, two unlocking members 200 are provided, and correspondingly, two unlocking drive assemblies 300 are provided.

[0053] It can be understood that multiple unlocking drive components 300 can be controlled by the same driving signal to ensure the synchronization of movement, and since the two locking mechanisms corresponding to the two lock holes 14 of the wafer box 10 are independent of each other, the switch lock of the wafer box 10 does not require high synchronization of movement, and multiple unlocking drive components 300 only need basic synchronization.

[0054] It should be noted that the switch box mechanism in the current wafer box loading equipment usually adopts the structure shown in the wafer box conveying and loading system with a publication date of 2017-12-5 and a publication number of CN206711878U, that is, the first driving member drives the transmission plate to move left and right, and a waist-shaped hole is set at the end of the transmission plate. The unlocking member slides and rotates in the waist-shaped hole driven by the left and right movement of the transmission member, thereby realizing the switch lock. In order to ensure that the unlocking member moves smoothly in the waist-shaped hole, there is a gap between the unlocking member and the inner wall of the waist-shaped hole, resulting in a collision with the inner wall of the waist-shaped hole during the movement of the unlocking member, resulting in a large noise, and also aggravating the wear of the unlocking member and the transmission plate, thereby further increasing the noise and reducing the operating accuracy, thereby reducing the switch lock operation accuracy.

[0055] Therefore, in one embodiment, the unlocking member 200 has an unlocking position and a locking position.

[0056] The unlocking drive assembly 300 includes a telescopic rod 310 and a transmission rod 330 . The two ends of the telescopic rod 310 are rotatably connected to the box opening plate 100 and the transmission rod 330 , respectively. The end of the transmission rod 330 away from the telescopic rod 310 is connected to the unlocking member 200 .

[0057] The telescopic rod 310 is extended and retracted to drive the transmission rod 330 to rotate, and the rotation of the transmission rod 330 drives the unlocking member 200 to rotate, so that the unlocking member 200 is switched between the unlocking position and the locking position.

[0058] In this method, the telescopic rod 310 drives the transmission rod 330 to rotate, and the transmission rod 330 drives the unlocking piece 200 to rotate to realize the switch lock. Compared with the conventional switch lock structure that slides and rotates in a waist-shaped hole to realize the switch lock, the operation noise is small and the operation reliability is higher. At the same time, compared with the conventional switch lock structure, the thickness of this method is thinner, the structure is more compact, and it saves more space.

[0059] Furthermore, by arranging bearings at the rotating connection, the stability of the rotating operation can be further improved and the noise can be reduced.

[0060] In one embodiment, the telescopic rod 310 is a pneumatic telescopic rod, so that the volume of the telescopic rod 310 can be controlled, thereby controlling the volume of the mechanism.

[0061] In one embodiment, the unlocking member 200 includes a lock catch 210 and a lock rod 220 fixedly connected to the lock catch 210. The lock catch 210 and the unlocking drive assembly 300 are respectively arranged on both sides of the box opening plate 100, and the lock rod 220 penetrates the box opening plate 100 and is connected to the transmission rod 330, so that the unlocking drive assembly 300 can be sealed on the other side of the box opening plate 100, thereby extending the service life of the mechanism.

[0062] In one embodiment, a mounting seat 110 is provided on the side of the opening plate 100 facing away from the lock catch 210, and the locking rod 220 is rotatably connected to the mounting seat 110, which improves the stability of the unlocking member 200 and thus improves the reliability of the lock opening and closing operation.

[0063] In one embodiment, a connecting member 320 is provided between one end of the telescopic rod 310 and the transmission rod 330, one end of the connecting member 320 is fixedly connected to one end of the telescopic rod 310, and the other end is rotatably connected to the transmission rod 330, and an avoidance groove 321 is provided on the side of the connecting member 320 facing the mounting seat 110 to avoid the mounting seat 110, thereby improving the compactness between the telescopic rod 310, the transmission rod 330 and the unlocking member 200, thereby improving the compactness between the multiple unlocking drive components 300 on the box opening plate 100, effectively controlling the area of ​​the box opening plate 100, and thus controlling the volume of the mechanism.

[0064] In one embodiment, a first limiting member 120 and a second limiting member 121 are disposed on a side of the box opening plate 100 facing away from the lock catch 210 , so as to allow the transmission rod 330 to rotate between the first position and the second position.

[0065] When the transmission rod 330 is in the first position, the transmission rod 330 drives the unlocking member 200 to be in the unlocking position; when the transmission rod 330 is in the second position, the transmission rod 330 drives the unlocking member 200 to be in the locking position.

[0066] This method improves the reliability and safety of the operation of the synchronously moving unlocking member 200 by limiting the movement trajectory of the transmission rod 330.

[0067] In one embodiment, a first position detection member 130 and a second position detection member 131 are disposed on the side of the box opening plate 100 facing away from the lock buckle 210 , and a sensing member 322 adapted to both the first position detection member 130 and the second position detection member 131 is disposed on the connecting member 320 .

[0068] When the unlocking member 200 is in the unlocking position, the sensing member 322 on the connecting member 320 is detected by the first position detecting member 130 ; when the unlocking member 200 is in the locking position, the sensing member 322 on the connecting member 320 is detected by the second position detecting member 131 .

[0069] This method detects the state of the unlocking member 200 by detecting the position of the connecting member 320, thereby improving the reliability of information control of the mechanism.

[0070] Embodiment 2:

[0071] The embodiment of the present application also provides a switch box mechanism for a wafer box 10. Compared with the embodiment 1, the switch box mechanism in the present embodiment drives two unlocking members 200 to operate simultaneously only through one unlocking drive assembly 300. Specifically, the mechanism includes an opening plate 100, and two unlocking members 200 and an unlocking drive assembly 300 disposed on the opening plate 100, and the two unlocking members 200 are connected to the unlocking drive assembly 300.

[0072] The unlocking member 200 has an unlocking position and a locking position.

[0073] The unlocking drive assembly 300 includes a double-headed telescopic rod 310 and two transmission rods 330. The middle of the telescopic rod 310 is rotatably connected to the box opening plate 100, and the two ends of the telescopic rod 310 are respectively rotatably connected to the two transmission rods 330. The ends of the two transmission rods 330 facing away from the telescopic rod 310 are respectively connected to the two unlocking parts 200.

[0074] The telescopic rod 310 is extended and retracted to drive the transmission rod 330 to rotate, and the rotation of the transmission rod 330 drives the unlocking member 200 to rotate, so that the unlocking member 200 is switched between the unlocking position and the locking position.

[0075] In this method, the telescopic rod 310 drives the transmission rod 330 to rotate, and the transmission rod 330 drives the unlocking piece 200 to rotate to realize the opening and closing of the lock. Compared with the conventional waist-shaped hole sliding and rotating to realize the opening and closing of the lock, the operation noise is small and the operation reliability is higher. At the same time, the processing and maintenance costs of the rotating connection are low.

[0076] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A switch box mechanism for a wafer box, characterized in that: It comprises a box opening plate, and a plurality of unlocking parts and a plurality of unlocking drive components arranged on the box opening plate, wherein the plurality of unlocking parts are respectively connected to a plurality of independently arranged unlocking drive components; The unlocking member has an unlocking position and a locking position; The unlocking drive assembly comprises a telescopic rod and a transmission rod, the two ends of the telescopic rod are rotatably connected to the box opening plate and the transmission rod respectively, and one end of the transmission rod away from the telescopic rod is connected to the unlocking member; The extension and retraction of the telescopic rod drives the transmission rod to rotate, and the rotation of the transmission rod drives the unlocking member to rotate, so that the unlocking member is switched between the unlocking position and the locking position.

2. The switch box mechanism for a wafer box according to claim 1, characterized in that: The unlocking member comprises a lock catch and a lock rod fixedly connected to the lock catch, the lock catch and the unlocking drive assembly are respectively arranged on both sides of the box opening plate, and the lock rod passes through the box opening plate and is connected to the transmission rod; A mounting seat is arranged on one side of the box opening plate away from the lock catch, and the locking rod is rotatably connected to the mounting seat.

3. The switch box mechanism for a wafer box according to claim 2, characterized in that: A connecting piece is provided between one end of the telescopic rod and the transmission rod, one end of the connecting piece is fixedly connected to one end of the telescopic rod, and the other end is rotatably connected to the transmission rod, and an avoidance groove is provided on one side of the connecting piece facing the mounting seat to avoid the mounting seat.

4. The switch box mechanism for a wafer box according to claim 3, characterized in that: A first limiting member and a second limiting member are provided on a side of the box opening plate away from the lock catch, so as to enable the transmission rod to rotate between the first position and the second position; When the transmission rod is in the first position, the transmission rod drives the unlocking member to be in the unlocking position; When the transmission rod is in the second position, the transmission rod drives the unlocking member to be in the locking position.

5. The switch box mechanism for a wafer box according to claim 4, characterized in that: A first position detection member and a second position detection member are provided on a side of the box opening plate away from the lock catch, and a sensing member adapted to both the first position detection member and the second position detection member is provided on the connecting member; When the unlocking member is in the unlocking position, the sensing member on the connecting member is detected by the first position detecting member; When the unlocking member is in the locking position, the sensing member on the connecting member is detected by the second position detecting member.

6. The switch box mechanism for a wafer box according to any one of claims 1 to 5, characterized in that: The telescopic rod is a pneumatic telescopic rod.

7. A switch box mechanism for a wafer box, characterized in that: It comprises a box opening plate, and two unlocking parts and an unlocking drive assembly arranged on the box opening plate, wherein the two unlocking parts are connected to the unlocking drive assembly; The unlocking member has an unlocking position and a locking position; The unlocking drive assembly comprises a double-headed telescopic rod and two transmission rods, the middle of the telescopic rod is rotatably connected to the box opening plate, the two ends of the telescopic rod are respectively rotatably connected to the two transmission rods, and the ends of the two transmission rods facing away from the telescopic rod are respectively connected to the two unlocking members; The extension and retraction of the telescopic rod drives the transmission rod to rotate, and the rotation of the transmission rod drives the unlocking member to rotate, so that the unlocking member is switched between the unlocking position and the locking position.

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