Vacuum rotary power suction cup

Abstract

The utility model relates to the technical field of wafer processing, and discloses a vacuum rotary power suction cup which comprises a support, a motor arranged at the lower end of the right side of the support, a motor shaft connected to the front end of the motor, penetrating through the support and arranged above the support, a first belt wheel connected with a belt, and a second belt wheel connected to the other end of the belt. The fixing frame is fixed to the upper surface of the left side of the support through screws, the vacuum suction cup is arranged on the left side of the support, one end of the vacuum suction cup penetrates through the second belt wheel and is arranged below the support, and the other end of the vacuum suction cup is arranged above the fixing frame. According to the utility model, the wafer is adsorbed on the suction cup through the vacuum head and the vacuum tube, and the suction cup rotates through the mutual cooperation of the belt, the belt wheel I and the belt wheel II, so that the liquid medicine is more uniform on the wafer, and meanwhile, the wafer can be quickly dried through quick rotation.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a vacuum rotary power sucker. Background Art

[0002] The wafer production process needs to be processed by a vacuum suction cup. In the wafer manufacturing equipment, the wafer needs to be firmly fixed to ensure that the wafer does not slide or warp during the processing. At the same time, the chemical solution needs to be evenly distributed on the wafer during the processing. The existing technology can only statically fix the wafer, but is not suitable for rotational fixation of the wafer. Therefore, in response to the above problems, a vacuum rotary power suction cup is proposed. Utility Model Content

[0003] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a vacuum rotary power suction cup, comprising a bracket, a motor is arranged at the lower end of the right side of the bracket, the front end of the motor is connected to the motor shaft, the motor shaft passes through the bracket and is arranged above the bracket, the motor shaft is connected to pulley one, the pulley one is connected to a belt, the other end of the belt is connected to pulley two, the pulley two is arranged on the left side of the bracket, the pulley two is arranged in a fixed frame, the fixed frame is fixed to the upper surface of the left side of the bracket by screws, a vacuum suction cup is arranged on the left side of the bracket, one end of the vacuum suction cup passes through pulley two and is arranged below the bracket, and the other end of the vacuum suction cup is arranged above the fixed frame.

[0004] Furthermore, the vacuum suction cup includes a vacuum head, which is arranged below the bracket. A vacuum tube is arranged above the vacuum head. The vacuum tube passes through the bracket and the fixed frame and is clamped with the second pulley. A suction cup is arranged above the vacuum tube. The vacuum head, vacuum tube and suction cup are hollow inside.

[0005] Furthermore, a circular hole is arranged on the upper surface of the suction cup and is connected to the inside of the suction cup. A plurality of arc-shaped protrusions are arranged in a circular array on the upper surface of the suction cup with the circular hole as the center, and an air duct is formed between two adjacent arc-shaped protrusions.

[0006] Furthermore, an air gap is formed between two adjacent protrusions on the left and right, and the plurality of air gaps are respectively connected to the circular hole and the plurality of air ducts.

[0007] Furthermore, the belt does not completely overlap with the first pulley and the second pulley.

[0008] The utility model has the following beneficial effects:

[0009] In the utility model, the wafer is adsorbed on the suction cup by the vacuum head and the vacuum tube, and the suction cup is rotated by the cooperation of the belt, the first pulley and the second pulley, so that the drug solution on the wafer is more uniform, and the wafer can be dried quickly by rapid rotation. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 This is a structural schematic diagram of a vacuum rotary power suction cup proposed by the utility model;

[0011] Figure 2 This is a schematic structural diagram of the suction cup proposed by the utility model.

[0012] Legend:

[0013] 1. Bracket; 2. Motor; 21. Motor shaft; 3. Pulley 1; 4. Belt; 5. Pulley 2; 6. Fixing frame; 7. Vacuum suction cup; 8. Vacuum head; 9. Vacuum tube; 10. Suction cup; 11. Round hole; 12. Protrusion; 13. Air duct; 14. Air gap. DETAILED DESCRIPTION

[0014] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0015] Reference Figure 1-2 As shown, an embodiment of the utility model is provided: a vacuum rotary power suction cup, comprising a bracket 1, a motor 2 is arranged at the lower end of the right side of the bracket 1, the front end of the motor 2 is connected to the motor shaft 21, the motor shaft 21 passes through the bracket 1 and is arranged above the bracket 1, the motor shaft 21 is connected to a pulley 3, the pulley 3 is connected to a belt 4, the other end of the belt 4 is connected to a pulley 2 5, the pulley 2 5 is arranged on the left side of the bracket 1, the pulley 2 5 is arranged in a fixed frame 6, the fixed frame 6 is fixed to the upper surface of the left side of the bracket 1 by screws, a vacuum suction cup 7 is arranged on the left side of the bracket 1, one end of the vacuum suction cup 7 passes through the pulley 2 5 and is arranged below the bracket 1, and the other end of the vacuum suction cup 7 is arranged above the fixed frame 6, the motor 2 rotates, driving the pulley 1 3 to rotate, so that the pulley 1 3 drives the belt 4 and the pulley 2 5 to rotate together, so that the vacuum suction cup 7 rotates to achieve a more uniform drug solution on the wafer, and at the same time, the rapid rotation can accelerate the drying of the wafer.

[0016] Furthermore, the vacuum suction cup 7 includes a vacuum head 8, which is arranged below the bracket 1. A vacuum tube 9 is arranged above the vacuum head 8. The vacuum tube 9 passes through the bracket 1 and the fixed frame 6 and is clamped with the pulley 2 5. A suction cup 10 is arranged above the vacuum tube 9. The vacuum head 8, the vacuum tube 9 and the suction cup 10 are hollow inside. The vacuum head 8 is connected to an air pump for suction, so that a vacuum is achieved in the vacuum tube 9 and the suction cup 10, thereby fixing the wafer on the upper surface of the suction cup 10.

[0017] Furthermore, a circular hole 11 is provided on the upper surface of the suction cup 10 and is connected with the inside of the suction cup 10. A plurality of arc-shaped protrusions 12 are provided on the upper surface of the suction cup 10 in a circular array with the circular hole 11 as the center. An air duct 13 is formed between two adjacent arc-shaped protrusions 12 in front and back, and an air gap 14 is formed between two adjacent protrusions 12 in the left and right. The plurality of air gaps 14 are respectively connected with the circular hole 11 and the plurality of air ducts 13. The circular hole 11 is connected with the inside of the suction cup 10. After the wafer contacts the protrusion 12, the air duct 13 under the wafer is connected with the circular hole 11 through the air gap 14, so that the air duct 13 and the air gap 14 under the wafer also achieve vacuum, so that the wafer is more firmly fixed on the suction cup 10 and will not fall off under high-speed movement.

[0018] Furthermore, the belt 4 does not completely overlap with the pulley 1 3 and the pulley 2 5. The incomplete overlap between the belt 4 and the pulley 1 3 and the pulley 2 5 can be used to adjust the tension of the belt 4. The belt 4 may generate vibration and noise during operation. By making the belt 4 do not completely overlap with the pulley 1 3 and the pulley 2 5, the relative speed difference between the contact surfaces of the belt 4 and the pulley 1 3 and the pulley 2 5 can be reduced, thereby reducing the generation of vibration and noise.

[0019] Working principle: When using the equipment, the staff first places the wafer on the upper surface of the suction cup 10, and the vacuum head 8 is connected to the air pump to suck air to fix the wafer on the suction cup 10, and then the motor 2 is started. The rotation speed of the motor 2 is adjusted according to different working conditions. The rotation of the motor 2 drives the motor shaft 21 to rotate, and the motor shaft 21 drives the pulley 1 3 to rotate, the pulley 1 3 drives the belt 4 to rotate, and the belt 4 drives the pulley 2 5 to rotate. The vacuum tube 9 rotates together with the pulley 2 5, driving the upper suction cup 10 to rotate together, so that the drug liquid on the wafer is evenly distributed on the wafer. When the drug liquid is evenly distributed, the rotation speed of the motor 2 can be adjusted to make the wafer surface dry quickly.

[0020] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum rotary power suction cup, characterized in that: The invention comprises a bracket (1), a motor (2) is arranged at the lower end of the right side of the bracket (1), the front end of the motor (2) is connected to a motor shaft (21), the motor shaft (21) passes through the bracket (1) and is arranged above the bracket (1), the motor shaft (21) is connected to a pulley 1 (3), the pulley 1 (3) is connected to a belt (4), the other end of the belt (4) is connected to a pulley 2 (5), the pulley 2 (5) is arranged on the left side of the bracket (1), the pulley 2 (5) is arranged in a fixing frame (6), the fixing frame (6) is fixed to the upper surface of the left side of the bracket (1) by screws, a vacuum suction cup (7) is arranged on the left side of the bracket (1), one end of the vacuum suction cup (7) passes through the pulley 2 (5) and is arranged below the bracket (1), and the other end of the vacuum suction cup (7) is arranged above the fixing frame (6).

2. A vacuum rotary power suction cup according to claim 1, characterized in that: The vacuum suction cup (7) comprises a vacuum head (8), the vacuum head (8) is arranged below the bracket (1), a vacuum tube (9) is arranged above the vacuum head (8), the vacuum tube (9) passes through the bracket (1) and the fixing frame (6), and is clamped with the second pulley (5), a suction cup (10) is arranged above the vacuum tube (9), and the vacuum head (8), the vacuum tube (9) and the suction cup (10) are hollow inside.

3. A vacuum rotary power suction cup according to claim 2, characterized in that: A circular hole (11) is provided on the upper surface of the suction cup (10) and is connected to the inside of the suction cup (10); a plurality of arc-shaped protrusions (12) are provided on the upper surface of the suction cup (10) in a circular array with the circular hole (11) as the center, and an air duct (13) is formed between two adjacent arc-shaped protrusions (12) in front and behind.

4. A vacuum rotary power suction cup according to claim 3, characterized in that: An air gap (14) is formed between two adjacent protrusions (12) on the left and right, and the plurality of air gaps (14) are respectively connected to the circular hole (11) and the plurality of air ducts (13).

5. The vacuum rotary power suction cup according to claim 1, characterized in that: The belt (4) does not completely overlap with the pulley one (3) and the pulley two (5).

Images