Novel chip jacking device

By designing a new chip lifting device including elastic components, the problem of uneven chip lifting caused by uneven glass surface in semiconductor processing is solved, and uniform chip lifting and damage avoidance is achieved.

CN222883518UActive Publication Date: 2025-05-16SHENZHEN YITIAN SEMICON EQUIP CO LTD
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Patent Information

Application Number
CN202421151265.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-05-24
Publication Date
2025-05-16
Estimated Expiration
2034-05-24

AI Technical Summary

Technical Problem

During semiconductor processing, during the transfer and fixation of huge chips, there may be deviations when the adsorption glass mechanism is running in the Z direction, resulting in uneven glass surfaces, affecting the lifting position of the chip, and possibly causing chip damage.

Method used

A new chip hoisting device is designed, including a base, a Z-direction module, a thimble mounting assembly and an elastic assembly. The upper end of the elastic assembly is connected to the lower end of the thimble, and the lower end is connected to the Z-direction module, so that the thimble is telescopic and elastic in the Z-direction, adapting to the protrusions or concaves of different glass surfaces, ensuring that the chip can be lifted up evenly.

Benefits of technology

This device allows the thimble to move elastically in the Z direction, which can adapt to the uneven glass surface, ensure that the chip is lifted evenly, avoid chip damage, and improve the stability and reliability of the lifting device.

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Abstract

The utility model belongs to the technical field of semiconductor equipment, and particularly relates to a novel chip jacking device, which comprises a base (1), a Z-direction module (2) arranged on the base, an ejector pin mounting assembly (3) arranged on the Z-direction module, an ejector pin (4), a sleeve (5) and an elastic assembly (6) arranged in the sleeve along the axial direction of the sleeve, the upper end of the elastic assembly is connected with the lower end, located in the sleeve, of the ejector pin, and the lower end of the elastic assembly is connected with the Z-direction module (2). According to the jacking device disclosed by the utility model, the elastic component is arranged in the sleeve, the upper end of the elastic component is connected with the lower end of the ejector pin, and the lower end of the elastic component is connected with the Z-direction module, so that the ejector pin has certain telescopic elasticity in the Z direction; the chip can be jacked to a proper position, and the chip can be prevented from being damaged in the process.
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Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, and in particular refers to a device for mass transferring chips on semiconductor equipment. Background Art

[0002] The semiconductor processing involves the transfer of a huge number of chips and the fixing of these chips on the printed circuit board. In this process, the voice coil motor is usually combined with the ejector pin, that is, after the voice coil motor is started, it drives the ejector pin to move up and down, and the chip (wafer) placed on the blue film is pushed to the transfer film attached to the glass above the blue film. With this structure, the following problems may exist: 1. The mechanism for adsorbing glass may produce deviations when running in the Z direction, such as inaccurate positioning of the mechanism and different thicknesses of the incoming glass; 2. The flatness of the incoming glass is different, that is, the surface of the glass may be uneven, with some places convex and some places concave; the result is that with the same ejector pin height, the chip cannot be pushed up in some areas of the glass (such as thinner or concave areas), that is, it cannot reach the predetermined position, and in some areas, the force of lifting the chip is too large to cause damage to the chip (such as thicker or convex areas of the glass). Utility Model Content

[0003] In order to overcome the deficiencies of the prior art, the utility model aims to provide a novel chip lifting device.

[0004] The technical solution is: a new chip lifting device, including a base, a Z-direction module arranged on the base, a ejector pin mounting assembly arranged thereon, an ejector pin, and also includes a sleeve and an elastic assembly arranged axially inside the sleeve; the upper end of the elastic assembly is connected to the lower end of the ejector pin located in the sleeve, and the lower end of the elastic assembly is connected to the Z-direction module.

[0005] Preferably, the elastic component comprises a headless screw and a spring which are axially arranged inside the sleeve; the upper end of the spring is connected to the lower end of the ejector pin, and the lower end abuts against the upper end of the headless screw.

[0006] Preferably, the ejector pin installation assembly includes a needle clamping column, a vacuum guide sleeve connected to the needle clamping column, a vacuum seat sleeved outside the axial sleeve of the vacuum guide sleeve, a locking nut sleeved outside the vacuum seat and a blue film detection fixing frame; the upper end of the needle clamping column passes through the axial sleeve and the upper end of the vacuum seat in sequence along the axial direction of the axial sleeve and the vacuum seat; the upper end of the needle clamping column is connected to the sleeve.

[0007] Preferably, the base includes a needle adjustment base, an upper needle adjustment base arranged thereon, an adapter plate arranged on the upper surface of the upper needle adjustment base, a voice coil base arranged on the upper surface of the adapter plate, and a manual fine-tuning block arranged on a side of the adapter plate; the headless screw is fixedly connected to the sleeve.

[0008] Preferably, the Z-axis module includes a voice coil motor arranged on a voice coil base, a Z-axis slide rail mainboard, a slide rail sub-plate integrally formed by a horizontal plate and a vertical plate perpendicular thereto, a cross roller guide arranged on the Z-axis slide rail mainboard, and a voice coil upper seat arranged on the upper end of the Z-axis slide rail mainboard; the horizontal plate is connected to the output end of the voice coil motor, and the back of the vertical plate is connected to the cross roller guide.

[0009] Preferably, a head assembly is provided in the side of the Z-axis slide rail mainboard, which includes a head seat fixed in the side of the Z-axis slide rail mainboard, a head mounting plate provided on the head seat, and a head installed on the head mounting plate; a grating scale is provided on one side surface of the vertical plate.

[0010] Preferably, the manual fine-tuning block is provided with an adjusting bolt, and also includes a lifting guide block and two guide pillars; the upper end of the adjusting bolt is connected to the lifting guide block; the two guide pillars are parallel to each other and their upper ends are vertically connected to the bottom surface of the voice coil upper seat, and their lower ends are vertically connected to the upper surface of the voice coil base; the lifting guide block is sleeved on the two guide pillars.

[0011] Preferably, a quick connector connected to an external air source is provided on the side of the vacuum seat; and a detection optical fiber is provided on the side of the blue film detection fixing frame.

[0012] Technical effect: With the lifting device of the utility model, an elastic component is arranged in the sleeve, the upper end of the elastic component is connected to the lower end of the ejector pin, and the lower end of the elastic component is connected to the Z-direction module, so that the ejector pin has a certain elasticity in the Z direction. Regardless of whether the glass on which the transfer film is set is flat, that is, whether its surface has protrusions or depressions, the chip can be pushed to a suitable position, and damage to the chip in the process can be avoided. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 A three-dimensional diagram of an embodiment of the utility model;

[0014] Figure 2 It is a front view of an embodiment of the utility model;

[0015] Figure 3 It is a right side view of an embodiment of the utility model;

[0016] Figure 4 An exploded view of an embodiment of the utility model;

[0017] Figure 4a for Figure 4 A partial enlarged view of

[0018] Figure 5 It is a cross-sectional view of an embodiment of the utility model.

[0019] Figure numerals: base-1, needle adjustment base-101, upper needle adjustment base-102, adapter plate-103, voice coil base-104, manual fine-tuning block-105, Z-axis module-2, voice coil motor-201, Z-axis slide rail main board-202, slide rail sub-board-203, horizontal board-203a, vertical board-203b, cross roller guide rail-204, voice coil upper base-205, ejector pin installation assembly-3, needle clamping column-301, vacuum guide sleeve-302, Axial sleeve-302a, vacuum seat-303, locking nut-304, blue film detection bracket-305, ejector pin-4, sleeve-5, elastic component-6, headless screw-601, spring-602, reader assembly-7, reader seat-701, reader mounting plate-702, reader-703, grating scale-8, adjusting bolt-9, lifting guide block-10, guide pillar-11, quick connector-12, detection optical fiber-13, direct sales-14. DETAILED DESCRIPTION

[0020] In order to enable those skilled in the art to better understand the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and implementation methods.

[0021] like Figure 1-3 As shown, the embodiment of the utility model provides a novel chip lifting device, including a base 1, a Z-direction module 2 arranged on the base, an ejector pin installation assembly 3 arranged thereon, an ejector pin 4, and a sleeve 5, and an elastic assembly 6 arranged therein along the axial direction of the sleeve; the upper end of the elastic assembly is connected to the lower end of the ejector pin located in the sleeve, and the lower end of the elastic assembly is connected to the Z-direction module 2. With this structure, after the Z-direction module 2 is started, it drives the elastic assembly 6 and the ejector pin 4 to reciprocate along the Z direction (up and down), so that the ejector pin has a certain elasticity in the Z direction.

[0022] Specifically, Figure 4-5 , Figure 4a As shown, the elastic component 6 includes a headless screw 601 and a spring 602 axially arranged inside the sleeve 5; during assembly, the upper end of the spring is connected to the lower end of the ejector pin 4, and the lower end abuts against the upper end of the headless screw.

[0023] like Figure 4 As shown, specifically, the ejector pin installation assembly 3 includes a needle clamping column 301, a vacuum guide sleeve 302 connected thereto, a vacuum seat 303 sleeved outside the axial sleeve 302a of the vacuum guide sleeve, a locking nut 304 sleeved outside the vacuum seat and a blue film detection fixing bracket 305; the upper end of the needle clamping column passes through the axial sleeve and the upper end of the vacuum seat in sequence along the axial sleeve and the vacuum seat axially; the upper end of the needle clamping column 301 is connected to the sleeve 5, specifically, the two are connected by threads, that is, the two maintain synchronous movement.

[0024] like Figure 1 , Figure 4 As shown, a quick connector 12 connected to an external air source is provided on the side of the vacuum seat 303; and a detection optical fiber 13 is provided on the side of the blue film detection fixing frame 305.

[0025] like Figure 4 As shown, the base 1 includes an upper needle adjustment base 102 on which a needle adjustment base 101 is arranged, an adapter plate 103 arranged on the upper surface of the upper needle adjustment base, a voice coil base 104 arranged on the upper surface of the adapter plate, and a manual fine-tuning block 105 arranged on one side of the adapter plate; the headless screw 601 is fixedly connected to the sleeve 5. Here, the lifting and lowering guide block 10 is controlled by the manual fine-tuning block 105 and the adjusting bolt 9, and the lifting and lowering guide block 10 drives the axial sleeve 302a to move up and down, and controls the negative pressure matching gap between it and the clamping needle column 301. When the clamping needle column 301 reciprocates, it drives the sleeve 5 to reciprocate, and the headless screw 601 reciprocates with the sleeve, and then the spring 602 and the ejector pin 4 reciprocate.

[0026] like Figure 1 , Figure 4 As shown, the Z-axis module 2 includes a voice coil motor 201 arranged on the voice coil base 104, a Z-axis slide rail main board 202, and a slide rail sub-board 203, wherein the slide rail sub-board is integrally formed by a horizontal board 203a and a vertical board 203b perpendicular thereto, a cross roller guide 204 arranged on the Z-axis slide rail main board, and a voice coil upper seat 205 arranged on the upper end of the Z-axis slide rail main board 202; the horizontal board 203a is connected to the output end of the voice coil motor, and the back of the vertical board 203b is connected to the cross roller guide 204.

[0027] During assembly, the lower end of the clamping needle column 301 is fixedly connected to the upper surface of the cross plate 203a. After the voice coil motor 201 is started, it drives the cross plate 203a and the slide rail sub-plate 203 to reciprocate in the Z direction (up and down) along the Z-direction slide rail main plate 202, thereby driving the clamping needle column 301 to reciprocate along the axial sleeve 302a and the upper end of the vacuum seat 303, respectively, and then pushes the sleeve 5, the headless screw 601, the spring 602 and the ejector pin 4 to reciprocate in the Z direction (up and down).

[0028] like Figure 1 , Figure 4 As shown, a head assembly 7 is provided inside the side of the Z-axis slide rail main board 202, which includes a head seat 701 fixed inside the side of the Z-axis slide rail main board, a head mounting plate 702 arranged on the head seat, and a head 703 installed on the head mounting plate; a grating scale 8 is provided on one side surface of the vertical plate 203b.

[0029] like Figure 1 , Figure 4As shown, the manual fine-tuning block 105 is provided with an adjusting bolt 9, and also includes a lifting guide block 10 and two guide pillars 11; the upper end of the adjusting bolt is connected to the lifting guide block; the two guide pillars are parallel to each other and the upper ends of the two are vertically connected to the bottom surface of the voice coil upper seat 205, and the lower ends of the two are vertically connected to the upper surface of the voice coil base 104; the lifting guide block 10 is sleeved on the two guide pillars; the upper end of the lifting guide block 10 is connected to the bottom of the vacuum guide sleeve 302 through a straight pin 14.

[0030] In the above description, it should be noted that the terms "installed", "connected", "connected" and other corresponding terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two components; "provided in" should be understood as "installed in, set in", including fixed installation, movable installation and other installation methods.

[0031] Obviously, the embodiments described above are only some embodiments of the utility model, not all embodiments. The preferred embodiments of the utility model are given in the drawings, but they do not limit the patent scope of the utility model. The utility model can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the utility model more thorough and comprehensive. Any equivalent structure made by using the contents of the utility model specification and drawings, directly or indirectly used in other related technical fields, is also within the scope of protection of the utility model patent.

Claims

1. A novel chip lifting device, comprising a base (1), a Z-direction module (2) arranged on the base, a ejector pin mounting assembly (3) arranged thereon, and an ejector pin (4), characterized in that: It also includes a sleeve (5) and an elastic component (6) arranged inside the sleeve along the axial direction; the upper end of the elastic component is connected to the lower end of the ejector pin located inside the sleeve, and the lower end of the elastic component is connected to the Z-direction module (2).

2. A novel chip lifting device as claimed in claim 1, characterized in that: The elastic component (6) comprises a headless screw (601) and a spring (602) which are axially arranged inside the sleeve (5); the upper end of the spring is connected to the lower end of the ejector pin (4), and the lower end abuts against the upper end of the headless screw.

3. A novel chip lifting device as claimed in claim 2, characterized in that: The ejector pin installation assembly (3) comprises a needle clamping column (301), a vacuum guide sleeve (302) connected thereto, a vacuum seat (303) sleeved outside the axial sleeve (302a) of the vacuum guide sleeve, a locking nut (304) sleeved outside the vacuum seat and a blue film detection fixing frame (305); the upper end of the needle clamping column passes through the axial sleeve and the upper end of the vacuum seat in sequence along the axial direction of the axial sleeve and the vacuum seat; the upper end of the needle clamping column is connected to the sleeve (5).

4. A novel chip lifting device as claimed in claim 2, characterized in that: The base (1) comprises a needle adjustment base (101), an upper needle adjustment base (102) arranged thereon, an adapter plate (103) arranged on the upper surface of the upper needle adjustment base, a voice coil base (104) arranged on the upper surface of the adapter plate, and a manual fine-tuning block (105) arranged on a side surface of the adapter plate; the headless screw (601) is fixedly connected to the sleeve (5).

5. A novel chip lifting device as claimed in claim 4, characterized in that: The Z-direction module (2) comprises a voice coil motor (201) arranged on a voice coil base (104), a Z-direction slide rail mainboard (202), a slide rail sub-plate (203) formed integrally by a transverse plate (203a) and a vertical plate (203b) perpendicular thereto, a cross roller guide rail (204) arranged on the Z-direction slide rail mainboard, and a voice coil upper seat (205) arranged on the upper end of the Z-direction slide rail mainboard (202); the transverse plate (203a) is connected to the output end of the voice coil motor, and the back of the vertical plate (203b) is connected to the cross roller guide rail (204).

6. A novel chip lifting device as claimed in claim 5, characterized in that: A head assembly (7) is provided inside the side surface of the Z-axis slide rail main board (202), comprising a head seat (701) fixed inside the side surface of the Z-axis slide rail main board, a head mounting plate (702) provided on the head seat, and a head (703) mounted on the head mounting plate; a grating ruler (8) is provided on one side surface of the vertical plate (203b).

7. A novel chip lifting device as claimed in claim 5, characterized in that: The manual fine-tuning block (105) is provided with an adjusting bolt (9), and also includes a lifting guide block (10) and two guide pillars (11); the upper end of the adjusting bolt is connected to the lifting guide block; the two guide pillars are parallel to each other and their upper ends are vertically connected to the bottom surface of the voice coil upper seat (205), and their lower ends are vertically connected to the upper surface of the voice coil base (104); the lifting guide block (10) is sleeved on the two guide pillars.

8. A novel chip lifting device as claimed in claim 3, characterized in that: A quick connector (12) connected to an external air source is provided on the side of the vacuum seat (303); and a detection optical fiber (13) is provided on the side of the blue film detection fixing frame (305).