Hydrofluoric acid recovery device

Abstract

The utility model relates to a hydrofluoric acid recovery device which comprises a tank body, a guide assembly, a primary treatment assembly and a secondary treatment assembly, the guide assembly is arranged at the upper part of the tank body, the primary treatment assembly is connected with the guide assembly, and the secondary treatment assembly is connected with the primary treatment assembly; when hydrofluoric acid waste liquid needs to be recycled in the using process of hydrofluoric acid, the hydrofluoric acid waste liquid can be guided into the tank body through the feeding opening, meanwhile, the guiding assembly is operated, harmful gas generated by volatilization of the hydrofluoric acid waste liquid is guided into the first treatment pipeline through the guiding assembly, and meanwhile, the spraying assembly is operated; the spraying assembly sprays harmful gas, then the residual harmful gas enters the second treatment pipeline, the residual harmful gas is subjected to multi-treatment through the multi-stage treatment assembly, and the treated gas is discharged, so that hydrofluoric acid can be better recycled; leakage of harmful gas generated by volatilization of hydrofluoric acid is avoided, and health of workers is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical material recycling, in particular to a hydrofluoric acid recovery device. Background Art

[0002] With the rapid development of semiconductor technology, silicon and silicon compound raw materials are often used in related photovoltaic, liquid crystal and other industries. Hydrofluoric acid is often used in processes such as cleaning and etching of such raw materials, resulting in a large amount of hydrofluoric acid waste liquid. The main components of the hydrofluoric acid waste liquid are hydrofluoric acid, fluorosilicic acid and water, etc. Its pH value is low, with strong corrosiveness, oxidizing property and volatility. Direct discharge will cause serious pollution to the environment. Therefore, hydrofluoric acid needs to be recycled in time after use to avoid pollution.

[0003] Traditional hydrofluoric acid recovery usually uses plastic barrels for storage to avoid reaction with hydrofluoric acid. However, hydrofluoric acid is prone to volatilize and generate harmful gases during storage, and ordinary plastic barrels have poor airtightness, and gas leakage is likely to occur during discharge and introduction, resulting in the leakage of harmful gases and affecting the health of workers. Summary of the Utility Model

[0004] (1) Technical Problems to be Solved

[0005] In order to solve the above problems of the prior art, the utility model provides a hydrofluoric acid recovery device, which can better recycle hydrofluoric acid and avoid the leakage of harmful gases generated by the volatilization of hydrofluoric acid, ensuring the health of workers.

[0006] (2) Technical Solutions

[0007] In order to achieve the above purpose, the main technical solutions adopted by the utility model include:

[0008] A hydrofluoric acid recovery device includes a tank body, a guiding component, a primary treatment component and a secondary treatment component. The guiding component is arranged at the upper part of the tank body. The primary treatment component is connected to the guiding component, and the secondary treatment component is connected to the primary treatment component;

[0009] A feed inlet is arranged at the top of the tank body, and a feed component is installed on the feed inlet. A discharge port is arranged at the bottom of the tank body, and a discharge component is installed on the discharge port;

[0010] The primary treatment component includes a first treatment pipeline and a spraying component. One end of the first treatment pipeline is connected to the guiding component, the other end of the first treatment pipeline is connected to the secondary treatment component, and the spraying component is connected to the upper part of the first treatment pipeline;

[0011] The secondary treatment component includes a second treatment pipeline and a multi-stage treatment component. The second treatment pipeline is connected to the other end of the first treatment pipeline, and the multi-stage treatment component is arranged in the second treatment pipeline.

[0012] Furthermore, the guiding component includes a guiding pipe and a guiding fan. One end of the guiding pipe is connected to the upper part of the tank body, and the guiding fan is installed at the other end of the guiding pipe. The guiding fan is connected to one end of the first treatment pipeline.

[0013] Furthermore, the spraying component includes a water tank, a water pump, a water inlet pipe, a spraying pipe, and atomizing nozzles. The water tank is installed at the top of the tank body, the water pump is arranged inside the water tank, the spraying pipe is arranged inside the first treatment pipeline, the water pump is connected to the upper part of the spraying pipe through the water inlet pipe, and several atomizing nozzles are arranged at the lower part of the spraying pipe.

[0014] Furthermore, a water storage tank is also included, and the water storage tank is connected to the lower part of the first treatment pipeline.

[0015] Furthermore, the multi-stage treatment component includes a sand filter plate, a lime filter plate, and a soda ash filter plate. The sand filter plate, the lime filter plate, and the soda ash filter plate are all arranged in sequence inside the second treatment pipeline.

[0016] Furthermore, the feeding component includes a feeding pipe and a valve body. The feeding pipe is fixedly connected to the feeding port, and the valve body is arranged inside the feeding pipe.

[0017] Furthermore, the discharging component includes a discharging pipe and a sealing plug. One end of the discharging pipe is fixedly connected to the discharging port, and the sealing plug is arranged at the other end of the discharging pipe.

[0018] Furthermore, a support frame is also included, and the support frame is fixedly connected to the lower part of the tank body.

[0019] Furthermore, a PLC controller is also included, and the PLC controller is electrically connected to the guiding component and the preliminary treatment component respectively.

[0020] (III) Beneficial effects

[0021] The beneficial effects of the present utility model are as follows: When it is necessary to recover hydrofluoric acid waste liquid during the use of hydrofluoric acid, the hydrofluoric acid waste liquid can be introduced into the interior of the tank body through the feed inlet. At the same time, the guiding assembly is operated to guide the harmful gas generated by the volatilization of the hydrofluoric acid waste liquid into the interior of the first treatment pipeline. At the same time, the spraying assembly is operated to spray and treat the harmful gas. Subsequently, the remaining harmful gas enters the interior of the second treatment pipeline, and the multi-stage treatment assembly performs multiple treatments on the remaining harmful gas and discharges the treated gas. Thus, it is possible to better recover hydrofluoric acid and avoid the leakage of harmful gas generated by the volatilization of hydrofluoric acid, ensuring the health of the staff. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a schematic diagram of the overall structure of the hydrofluoric acid recovery device according to an embodiment of the present utility model;

[0023] Figure 2 is a schematic diagram of the overall structure of the hydrofluoric acid recovery device according to an embodiment of the present utility model;

[0024] Figure 3 is a cross-sectional view of the overall structure of the hydrofluoric acid recovery device according to an embodiment of the present utility model;

[0025]

DESCRIPTION OF THE REFERENCE NUMERALS

[0026] Feed pipe 1, tank body 2, support frame 3, sealing plug 4, water storage tank 5, second treatment pipeline 6, first treatment pipeline 7, guiding pipe 8, water guiding pipe 9, water tank 10, discharge pipe 11, fixing frame 12, guiding fan 13, valve body 14, water pump 15, spraying pipe 16, atomizing nozzle 17, sandy soil filter plate 18, lime filter plate 19, soda ash filter plate 20. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0027] In order to better explain the present utility model for easy understanding, the present utility model will be described in detail below with reference to the accompanying drawings and through specific embodiments.

[0028] Please refer to Figures 1 to 3 As shown, a hydrofluoric acid recovery device of the present utility model includes a tank body 2, a guiding assembly, a preliminary treatment assembly, and a secondary treatment assembly. The guiding assembly is arranged on the upper part of the tank body 2. The preliminary treatment assembly is connected to the guiding assembly, and the secondary treatment assembly is connected to the preliminary treatment assembly;

[0029] A feed inlet is arranged at the top of the tank body 2, and a feed assembly is installed on the feed inlet. A discharge port is arranged at the bottom of the tank body 2, and a discharge assembly is installed on the discharge port;

[0030] The preliminary treatment component includes a first treatment pipeline 7 and a spraying component. One end of the first treatment pipeline 7 is connected to the guiding component, the other end of the first treatment pipeline 7 is connected to the secondary treatment component, and the spraying component is connected to the upper part of the first treatment pipeline 7;

[0031] The secondary treatment component includes a second treatment pipeline 6 and a multi-stage treatment component. The second treatment pipeline 6 is connected to the other end of the first treatment pipeline 7, and the multi-stage treatment component is arranged on the second treatment pipeline 6.

[0032] The working principle of the present utility model is as follows: During the use of hydrofluoric acid, when it is necessary to recover the hydrofluoric acid waste liquid, the hydrofluoric acid waste liquid can be introduced into the interior of the tank body 2 through the feed port. At the same time, the guiding component is operated to guide the harmful gas generated by the volatilization of the hydrofluoric acid waste liquid into the interior of the first treatment pipeline 7. At the same time, the spraying component is operated to spray and treat the harmful gas. Subsequently, the remaining harmful gas enters the interior of the second treatment pipeline 6, and the multi-stage treatment component performs multiple treatments on the remaining harmful gas and discharges the treated gas.

[0033] Further, the guiding component includes a guiding pipe 8 and a guiding fan 13. One end of the guiding pipe 8 is connected to the upper part of the tank body 2, the other end of the guiding pipe 8 is provided with the guiding fan 13, and the guiding fan 13 is connected to one end of the first treatment pipeline 7.

[0034] As can be seen from the above description, it is beneficial to operate the guiding fan 13 to guide the harmful gas generated by the volatilization of the hydrofluoric acid waste liquid into the interior of the first treatment pipeline 7 through the guiding pipe 8.

[0035] Further, the spraying component includes a water tank 10, a water pump 15, a water guiding pipe 9, a spraying pipe 16 and atomizing nozzles 17. The water tank 10 is installed on the top of the tank body 2, the water pump 15 is arranged inside the water tank 10, the spraying pipe 16 is arranged inside the first treatment pipeline 7, the water pump 15 is connected to the upper part of the spraying pipe 16 through the water guiding pipe 9, and several atomizing nozzles 17 are arranged at the lower part of the spraying pipe 16.

[0036] As can be seen from the above description, when it is necessary to spray and treat the harmful gas, it is beneficial to operate the water pump 15 to make the water pump 15 pump the water in the water tank 10 into the interior of the spraying pipe 16 through the water guiding pipe 9. Subsequently, the water in the spraying pipe 16 is sprayed into the interior of the first treatment pipeline 7 through the atomizing nozzles 17 and sprays and treats the harmful gas inside the first treatment pipeline 7.

[0037] Further, it further includes a water storage tank 5, and the water storage tank 5 is connected to the lower part of the first treatment pipeline 7.

[0038] As can be seen from the above description, it is beneficial for the wastewater generated inside the first treatment pipeline 7 to flow into the water storage tank 5 for storage.

[0039] Furthermore, the multi-stage treatment component includes a sand filter plate 18, a lime filter plate 19, and a soda ash filter plate 20, and the sand filter plate 18, the lime filter plate 19, and the soda ash filter plate 20 are all arranged and installed in sequence inside the second treatment pipeline 6.

[0040] As can be seen from the above description, it is beneficial to perform multiple treatments on the residual harmful gases through the sand filter plate 18, the lime filter plate 19, and the soda ash filter plate 20.

[0041] Furthermore, the feeding component includes a feeding pipe 1 and a valve body 14. The feeding pipe 1 is fixedly connected to the feeding port, and the valve body 14 is arranged inside the feeding pipe 1.

[0042] As can be seen from the above description, it is beneficial to guide the hydrofluoric acid waste liquid into the tank body 2 through the feeding pipe 1 and seal the feeding pipe 1 through the valve body 14.

[0043] Furthermore, the discharging component includes a discharging pipe 11 and a sealing plug 4. One end of the discharging pipe 11 is fixedly connected to the discharging port, and the sealing plug 4 is arranged at the other end of the discharging pipe 11.

[0044] As can be seen from the above description, it is beneficial to discharge the stored waste liquid through the discharging pipe 11 and seal the discharging pipe 11 through the sealing plug 4.

[0045] Furthermore, it further includes a support frame 3, and the support frame 3 is fixedly connected to the lower part of the tank body 2.

[0046] As can be seen from the above description, it is beneficial to support the overall device through the support frame 3.

[0047] Furthermore, it further includes a PLC controller, and the PLC controller is electrically connected to the guiding component and the preliminary treatment component respectively.

[0048] As can be seen from the above description, it is beneficial to better control the overall device through the PLC controller.

[0049] Embodiment 1

[0050] Please refer to Figures 1 to 3 , a hydrofluoric acid recovery device, including a tank body 2, a guiding component, a preliminary treatment component, and a secondary treatment component. The guiding component is arranged at the upper part of the tank body 2, the preliminary treatment component is connected to the guiding component, and the secondary treatment component is connected to the preliminary treatment component;

[0051] A feed inlet is provided at the top of the tank body 2, and a feed assembly is installed on the feed inlet. A discharge port is provided at the bottom of the tank body 2, and a discharge assembly is installed on the discharge port.

[0052] The preliminary treatment assembly includes a first treatment pipeline 7 and a spray assembly. One end of the first treatment pipeline 7 is connected to the guiding assembly, the other end of the first treatment pipeline 7 is connected to the secondary treatment assembly, and the spray assembly is connected to the upper part of the first treatment pipeline 7.

[0053] The first treatment pipeline 7 is fixedly connected to the outer surface of the tank body 2 through a fixing frame 12.

[0054] The secondary treatment assembly includes a second treatment pipeline 6 and a multi-stage treatment assembly. The second treatment pipeline 6 is connected to the other end of the first treatment pipeline 7, and the multi-stage treatment assembly is provided on the second treatment pipeline 6.

[0055] The guiding assembly includes a guiding pipe 8 and a guiding fan 13. One end of the guiding pipe 8 is connected to the upper part of the tank body 2 and is welded. The guiding pipe 8 is communicated with the inside of the tank body 2. The other end of the guiding pipe 8 is installed with the guiding fan 13, and the guiding fan 13 is connected to one end of the first treatment pipeline 7 through bolts.

[0056] The spray assembly includes a water tank 10, a water pump 15, a water inlet pipe 9, a spray pipe 16 and atomizing nozzles 17. The water tank 10 is installed on the top of the tank body 2 through bolts. The water pump 15 is arranged inside the water tank 10. The spray pipe 16 is arranged inside the first treatment pipeline 7 through bolts. The water pump 15 is connected to the upper part of the spray pipe 16 through the water inlet pipe 9. A plurality of atomizing nozzles 17 are arranged at the lower part of the spray pipe 16.

[0057] It further includes a water storage tank 5, and the water storage tank 5 is connected to the lower part of the first treatment pipeline 7 through a connecting pipe.

[0058] The multi-stage treatment assembly includes a sand filter plate 18, a lime filter plate 19 and a soda ash filter plate 20. The sand filter plate 18, the lime filter plate 19 and the soda ash filter plate 20 are all arranged in sequence inside the second treatment pipeline 6.

[0059] The feed assembly includes a feed pipe 1 and a valve body 14. The feed pipe 1 is fixedly connected to the feed inlet and is welded. The valve body 14 is arranged inside the feed pipe 1.

[0060] The valve body 14 is a butterfly valve.

[0061] The discharging assembly includes a discharging pipe 11 and a sealing plug 4. One end of the discharging pipe 11 is fixedly connected to the discharging port by welding. The other end of the discharging pipe 11 is provided with the sealing plug 4.

[0062] It further includes a support frame 3. The lower part of the tank body 2 is fixedly connected to the support frame 3 by welding.

[0063] It further includes a PLC controller. The PLC controller is electrically connected to the guiding assembly and the preliminary treatment assembly respectively.

[0064] The model of the PLC controller is DATA-7311.

[0065] The PLC controller is electrically connected to the guiding fan 13, the water pump 15 and the valve body 14 respectively.

[0066] The above shows and describes the basic principles, main features and advantages of the present invention. The standard parts used in the present invention can be purchased from the market. The special-shaped parts can be customized according to the records in the specification and the drawings. The specific connection methods of each part all adopt conventional means such as bolts, rivets and welding which are mature in the prior art. The machines, parts and equipment all adopt conventional models in the prior art. Plus, the circuit connection adopts the conventional connection method in the prior art, which will not be elaborated here.

[0067] The above are only the embodiments of the present invention, and do not limit the patent scope of the present invention accordingly. All equivalent transformations made by using the content of the specification and drawings of the present invention, or directly or indirectly applied in the related technical fields, are similarly included in the patent protection scope of the present invention.

Claims

1. A hydrofluoric acid recovery device, characterized in that: It comprises a tank body, a guide assembly, a primary processing assembly and a secondary processing assembly, wherein the guide assembly is arranged on the upper part of the tank body, the primary processing assembly is connected to the guide assembly, and the secondary processing assembly is connected to the primary processing assembly; The top of the tank body is provided with a feed port, on which a feed assembly is installed, and the bottom of the tank body is provided with a discharge port, on which a discharge assembly is installed; The primary treatment component includes a first treatment pipeline and a spray component, one end of the first treatment pipeline is connected to the guide component, the other end of the first treatment pipeline is connected to the secondary treatment component, and the spray component is connected to the upper part of the first treatment pipeline; The secondary processing component includes a second processing pipeline and a multi-stage processing component. The second processing pipeline is connected to the other end of the first processing pipeline, and the second processing pipeline is provided with the multi-stage processing component.

2. The hydrofluoric acid recovery device according to claim 1, characterized in that: The guide assembly includes a guide pipe and a guide fan, one end of the guide pipe is connected to the upper part of the tank body, the other end of the guide pipe is equipped with the guide fan, and the guide fan is connected to one end of the first processing pipeline.

3. The hydrofluoric acid recovery device according to claim 1, characterized in that: The spray assembly includes a water tank, a water pump, a water diversion pipe, a spray pipe and an atomizing nozzle. The water tank is installed on the top of the tank body, the water pump is arranged inside the water tank, the spray pipe is arranged inside the first processing pipeline, the water pump is connected to the upper part of the spray pipe through the water diversion pipe, and a plurality of the atomizing nozzles are arranged at the lower part of the spray pipe.

4. The hydrofluoric acid recovery device according to claim 3, characterized in that: It also includes a water storage tank, which is connected to the lower part of the first processing pipeline.

5. The hydrofluoric acid recovery device according to claim 1, characterized in that: The multi-stage treatment component includes a sand filter plate, a lime filter plate and a soda ash filter plate, and the sand filter plate, the lime filter plate and the soda ash filter plate are sequentially arranged and installed inside the second treatment pipeline.

6. The hydrofluoric acid recovery device according to claim 1, characterized in that: The feed assembly comprises a feed pipe and a valve body. The feed pipe is fixedly connected to the feed port, and the valve body is arranged inside the feed pipe.

7. The hydrofluoric acid recovery device according to claim 1, characterized in that: The discharge assembly comprises a discharge pipe and a sealing plug. One end of the discharge pipe is fixedly connected to the discharge port, and the other end of the discharge pipe is provided with the sealing plug.

8. The hydrofluoric acid recovery device according to claim 1, characterized in that: It also includes a support frame, and the lower part of the tank body is fixedly connected to the support frame.

9. The hydrofluoric acid recovery device according to claim 1, characterized in that: It also includes a PLC controller, which is electrically connected to the guiding component and the preliminary processing component respectively.

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