Diamond carbon film deposition device

Abstract

The utility model discloses a diamond carbon film deposition device, and particularly relates to the field of deposition coating, which comprises a device main body, an electrode is fixedly arranged in the device main body, a target material pot is arranged at the top of the electrode, a fixing bolt is inserted in the target material pot, and the fixing bolt is connected in the electrode through threads. A spiral groove is formed in the device body, an elastic baffle is inserted into the spiral groove, a first supporting rod is fixedly connected to the outer wall of the elastic baffle, and the first supporting rod is slidably connected into the spiral groove. By arranging the elastic baffle and the blocking piece, the target material can be effectively prevented from being adhered to the inner wall of the device main body, and the size of the sealed space formed by the elastic baffle and the blocking piece is adjusted according to the size of the substrate, so that the settling time of substances generated by evaporation of the target material in the sealed space is shortened; and furthermore, substances generated by evaporation of the target material are quickly deposited on the substrate, and the film coating efficiency of the substrate is improved.

Description

Technical Field

[0001] The utility model relates to the field of precipitation coating, and more specifically, to a diamond carbon film deposition device. Background Art

[0002] The object to be coated is called a substrate, and the material to be coated is called a target. The substrate and the target are in the same vacuum chamber. Evaporation coating generally involves heating the target so that the surface components are evaporated in the form of atomic groups or ions and deposited on the surface of the substrate.

[0003] Chinese utility model CN219239754U discloses a deposition device for coating diamond-like carbon film, including a coating chamber, a bottom cover fixedly connected to the lower end of the coating chamber, a stabilizing mechanism inserted and fixedly connected to the outer surface of the bottom cover, a chamber door movably connected to the rear of the outer surface of the coating chamber, a top cover fixedly connected to the upper end of the coating chamber, a film coater and a vacuum machine fixedly installed on the upper end of the top cover, an output end of the film coater passes through the top cover and is fixedly connected to a coating nozzle, and two electromagnetic locks are fixedly connected to the front of the outer surface of the coating chamber and the front of the outer surface of the chamber door. The utility model is a deposition device for coating diamond-like carbon film, which effectively prevents the problem of the coating raw materials adhering to the inner wall of the coating chamber when the device is in use by arranging a protective mechanism inside the coating chamber.

[0004] However, when this arrangement is used to protect the vacuum chamber of the coating chamber, it is impossible to adjust the size of the protection mechanism according to the size of the substrate to be coated, resulting in an increase in the diffusion area of ​​the target material after heating and evaporation, affecting the coating efficiency of the substrate. To address this problem, it is necessary for technicians in this field to develop a diamond carbon film deposition device. Utility Model Content

[0005] In order to overcome the above-mentioned defects of the prior art, an embodiment of the utility model provides a diamond carbon film deposition device, which can effectively prevent the target material from adhering to the inner wall of the device body by setting an elastic baffle and a baffle, and the size of the sealed space formed by the elastic baffle and the baffle is adjusted according to the size of the substrate, so that the time for the substance produced by the evaporation of the target material to settle in the sealed space is reduced, and then the substance produced by the evaporation of the target material is quickly deposited on the substrate, thereby improving the efficiency of substrate coating, so as to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a diamond carbon film deposition device, comprising a device body, an electrode is fixedly installed inside the device body, a target pot is arranged on the top of the electrode, a fixing bolt is inserted into the inside of the target pot, and the fixing bolt is connected to the inside of the electrode through a thread, a spiral groove is opened inside the device body, an elastic baffle is inserted into the inside of the spiral groove, a first support rod is fixedly connected to the outer wall of the elastic baffle, the first support rod is slidably connected to the inside of the spiral groove, a clockwork spring is fixedly connected to the outer wall of the first support rod, a shell is arranged on the outer wall of the clockwork spring, and the shell is fixedly installed inside the device body.

[0007] In a preferred embodiment, a second support rod is fixedly connected to the outer wall of the elastic baffle, and the second support rod is slidably connected to the inside of the spiral groove.

[0008] In a preferred embodiment, a stopper is inserted into the interior of the device body, the second support rod is inserted into the interior of the stopper, and a handle is fixedly connected to the top of the stopper.

[0009] In a preferred embodiment, a vent and a vent hole are provided inside the baffle.

[0010] In a preferred embodiment, a sliding block is fixedly connected to the outer wall of the stopper, and an annular groove is provided inside the device body.

[0011] In a preferred embodiment, the sliding block is inserted into the annular groove, and a guide groove is provided inside the device body.

[0012] In a preferred embodiment, a sealing cover is hinged on the top of the device body.

[0013] Technical effects and advantages of the utility model:

[0014] 1. The utility model can effectively prevent the target material from adhering to the inner wall of the device body by setting up the elastic baffle and the baffle, and the size of the sealed space formed by the elastic baffle and the baffle is adjusted according to the size of the substrate, so that the time for the substances generated by the evaporation of the target material to settle in the sealed space is reduced, and then the substances generated by the evaporation of the target material are quickly deposited on the substrate, thereby improving the efficiency of substrate coating;

[0015] 2. The utility model is provided with a clockwork spring and a housing. After the substrate is coated and the staff takes the baffle out of the device body, the clockwork spring will pull the elastic baffle and the second support rod to reset through the first support rod, so as to achieve the effect of automatically resetting the sealed space created by the elastic baffle, without the need for the staff to manually reset the elastic baffle. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2 It is a cross-sectional view of the blocking member of the utility model;

[0018] Figure 3 For this utility model Figure 2 A magnified view of the structure of part A;

[0019] Figure 4 This is a cross-sectional view of the device body of the utility model;

[0020] Figure 5 For this utility model Figure 4 Enlarged view of the structure of part B.

[0021] The accompanying drawings are marked as follows: 1. device body; 2. electrode; 3. target pot; 4. fixing bolt; 5. spiral groove; 6. elastic baffle; 7. first support rod; 8. clockwork spring; 9. outer shell; 10. second support rod; 11. baffle; 12. handle; 13. vent; 14. vent hole; 15. slider; 16. annular groove; 17. guide groove; 18. sealing cover. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] Example 1: Refer to the attached specification Figure 1-5 The utility model is a diamond carbon film deposition device, comprising a device body 1, see Figure 2 The device body 1 has an electrode 2 fixedly installed inside (the electrode is divided into positive and negative electrodes), a target pot 3 is arranged on the top of the electrode 2, a fixing bolt 4 is inserted inside the target pot 3, and the fixing bolt 4 is connected to the inside of the electrode 2 through a thread, a spiral groove 5 is opened inside the device body 1, and an elastic baffle 6 is inserted inside the spiral groove 5, see Figure 3 The outer wall of the elastic baffle 6 is fixedly connected with a first support rod 7, the first support rod 7 is slidably connected to the inside of the spiral groove 5, the outer wall of the first support rod 7 is fixedly connected with a clockwork spring 8, the outer wall of the clockwork spring 8 is provided with a shell 9, and the shell 9 is fixedly installed inside the device body 1;

[0024] See Figure 5The outer wall of the elastic baffle 6 is fixedly connected with a second support rod 10 (the second support rod 10 is longer than the first support rod 7), the second support rod 10 is slidably connected to the inside of the spiral groove 5, a baffle 11 is inserted into the inside of the baffle 11, a handle 12 is fixedly connected to the top of the baffle 11, a vent 13 and a vent hole 14 are provided inside the baffle 11, a slider 15 is fixedly connected to the outer wall of the baffle 11, an annular groove 16 is provided inside the device body 1, the slider 15 is inserted into the inside of the annular groove 16, and a guide groove 17 is provided inside the device body 1, see Figure 4 A sealing cover 18 is hinged on the top of the device body 1.

[0025] It should be noted that, when coating is required, the staff can place the target material inside the target material pot 3, and then place a suitable support frame inside the device body 1 and the outer wall of the electrode 2 according to the size of the substrate, and then fix the substrate on the support frame. Then the staff can put the baffle 11 into the device body 1 through the handle 12, so that the slider 15 on the baffle 11 falls into the annular groove 16 through the guide groove 17, and then the baffle 11 is inserted into the outer wall of the second support rod 10. At this time, the staff can turn the handle 12 to make the handle 12 drive the second support rod 10 to rotate, and then the second support rod 10 drives the elastic baffle 6 to slide along the inside of the spiral groove 5, and the elastic baffle 6 drives the first support rod 7 to slide along the inside of the spiral groove 5. In this process, the elastic baffle 6 will gradually retract and shrink until the elastic baffle 6 stops after being sleeved on the outer wall of the support frame where the substrate is installed, and the first support rod 7 slides along the inside of the spiral groove 5 to pull the clockwork spring 8 out of the inside of the shell 9 and into the spiral groove 5. , then the staff can seal the sealing cover 18 on the top of the device body 1, and control the vacuum inside the device body 1 through the control panel, so that the gas in the device body 1 that is interconnected through the vent 13, the vent hole 14 and the elastic baffle 6 direct gap is extracted from the inside of the device body 1, so that the inside of the device body 1 reaches a suitable vacuum degree, and then the staff can control the electrode 2 to be energized through the control panel, so that the electrode 2 heats the target material through the target pot 3, thereby evaporating the target material, and allowing the substance generated by the evaporation of the target material to be deposited in the sealed space formed by the elastic baffle 6 and the baffle 11, so that the target material is deposited on the substrate, and the substance generated by the evaporation of the target material is prevented from drifting to the inner wall of the device body 1, which can effectively prevent the target material from adhering to the inner wall of the device body 1, and the size of the sealed space formed by the elastic baffle 6 and the baffle 11 is adjusted according to the size of the substrate, so that the time for the substance generated by the evaporation of the target material to settle in the sealed space is reduced, thereby allowing the substance generated by the evaporation of the target material to be quickly deposited on the substrate, thereby improving the efficiency of substrate coating;

[0026] Furthermore, after the substrate coating is completed, the staff can open the sealing cover 18 and turn the handle 12 after the heat dissipation and vacuum recovery are completed, so that the handle 12 drives the slider 15 to move to the bottom of the guide groove 17 through the baffle 11. At this time, the staff can remove the baffle 11 from the inside of the device body 1 through the handle 12, so that the baffle 11 drives the slider 15 to rise along the guide groove 17 and separate from the inside of the device body 1, so that the second support rod 10 loses the weight squeezing of the baffle 11, and the winding force of the clockwork spring 8 can pull the first support rod 7 to slide and reset along the inside of the spiral groove 5, so that the first support rod 7 pulls the second support rod 10 to rotate and reset through the elastic baffle 6, waiting for the next use, so as to achieve the effect of automatically resetting the sealed space generated by the elastic baffle 6, without the need for the staff to manually reset the elastic baffle 6.

[0027] Finally, a few points should be explained: First, in the description of this application, it should be noted that, unless otherwise specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, which can be a mechanical connection or an electrical connection, or the internal communication of two components, or a direct connection. "upper", "lower", "left" and "right" are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may change;

[0028] Secondly: In the drawings of the embodiments disclosed in the present utility model, only the structures related to the embodiments disclosed in the present utility model are involved, and other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of the present utility model can be combined with each other;

[0029] Finally: The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A diamond carbon film deposition device, comprising a device body (1), characterized in that: An electrode (2) is fixedly installed inside the device body (1), a target pot (3) is arranged on the top of the electrode (2), a fixing bolt (4) is inserted into the inside of the target pot (3), and the fixing bolt (4) is connected to the inside of the electrode (2) through a thread, a spiral groove (5) is opened inside the device body (1), an elastic baffle (6) is inserted into the inside of the spiral groove (5), a first support rod (7) is fixedly connected to the outer wall of the elastic baffle (6), the first support rod (7) is slidably connected to the inside of the spiral groove (5), a spring (8) is fixedly connected to the outer wall of the first support rod (7), and an outer wall of the spring (8) is provided with an outer shell (9), and the outer shell (9) is fixedly installed inside the device body (1).

2. The diamond carbon film deposition device according to claim 1, characterized in that: The outer wall of the elastic baffle (6) is fixedly connected to a second support rod (10), and the second support rod (10) is slidably connected to the inside of the spiral groove (5).

3. The diamond carbon film deposition device according to claim 2, characterized in that: A stopper (11) is inserted into the interior of the device body (1), the second support rod (10) is inserted into the interior of the stopper (11), and a handle (12) is fixedly connected to the top of the stopper (11).

4. The diamond carbon film deposition device according to claim 3, characterized in that: The baffle (11) is provided with a vent (13) and a vent hole (14) inside.

5. The diamond carbon film deposition device according to claim 4, characterized in that: The outer wall of the blocking member (11) is fixedly connected with a sliding block (15), and an annular groove (16) is provided inside the device body (1).

6. The diamond carbon film deposition device according to claim 5, characterized in that: The sliding block (15) is inserted into the annular groove (16), and a guide groove (17) is provided inside the device body (1).

7. The diamond carbon film deposition device according to claim 6, characterized in that: A sealing cover (18) is hingedly connected to the top of the device body (1).

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