Vacuum low-temperature magnetron sputtering coating device

Abstract

The utility model relates to the technical field of magnetron sputtering, in particular to a vacuum low-temperature magnetron sputtering coating device which comprises a vacuum box, an adjusting assembly is arranged on the side face of the vacuum box, and a fixing assembly is arranged in the vacuum box. According to the magnetic control target adjusting device, the magnetic control target is arranged on a moving block, then the moving block drives a first electric telescopic rod to adjust the magnetic control target left and right, then the magnetic control target is adjusted up and down through the first electric telescopic rod, then the magnetic control target can be adjusted up, down, left and right, and the practicability and the working efficiency are improved; and a damping spring is arranged between a guide plate and a limiting plate, so that a damping effect is achieved when the workpiece is clamped, meanwhile, the situation that the outer surface of the workpiece is damaged due to too large clamping force is avoided, and the convenience and the stability are improved.

Description

Technical Field

[0001] The utility model relates to the field of magnetron sputtering, in particular to a vacuum low-temperature magnetron sputtering coating device. Background Art

[0002] Magnetron sputtering is a type of physical vapor deposition. General sputtering can be used to prepare metals, semiconductors, insulators and other materials. It has the advantages of simple equipment, easy control, large coating area and strong adhesion. The magnetron sputtering method developed in the 1970s has achieved high speed, low temperature and low damage. Because high-speed sputtering is carried out under low pressure, the ionization rate of the gas must be effectively increased. Magnetron sputtering introduces a magnetic field on the target cathode surface and uses the magnetic field to constrain charged particles to increase the plasma density and increase the sputtering rate. Magnetron sputtering can then be used on coating equipment.

[0003] Existing technologies, such as: CN220812600U, a magnetron sputtering coating device, has a soft pad set between two clamping blocks, so that when the workpiece is held, the damage to the workpiece can be reduced and the integrity of the workpiece can be ensured. A collection box and a pull-out box are set in the vacuum chamber, so that when the workpiece is processed, it is convenient to collect and process waste chips and impurities, and pull columns and grooves are set on the pull-out box to facilitate the movement of the pull-out box.

[0004] However, the device still has certain shortcomings during use. When the device is adjusted, the motor needs to drive the turntable to adjust the magnetron target. At the same time, the position of the magnetron target cannot move up and down, but can only move left and right, which reduces its practicality. When installing and fixing the workpiece, since the telescopic part of the No. 2 electric telescopic rod extends into the collection box, and the collection box is located in the vacuum chamber, it is inconvenient to fix the workpiece, which reduces work efficiency. Utility Model Content

[0005] The purpose of the utility model is to provide a vacuum low-temperature magnetron sputtering coating device to solve the problem proposed in the above background technology that when the device is adjusted, the motor needs to drive the turntable to adjust the magnetron target, and the position of the magnetron target cannot be moved up and down, but can only move left and right, thereby reducing practicality. When the workpiece is installed and fixed, the telescopic part of the No. 2 electric telescopic rod extends into the collection box, and the collection box is located in the vacuum chamber, so it is inconvenient to fix the workpiece, thereby reducing the work efficiency.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A vacuum low-temperature magnetron sputtering coating device comprises a vacuum box, an adjusting component is arranged on the side of the vacuum box, and a fixing component is arranged inside the vacuum box;

[0008] The adjustment assembly includes a driving motor installed on the side of the vacuum box, the output end of the driving motor is fixedly connected to a threaded rod, the inner surface wall of the vacuum box is fixedly connected to a rotating shaft, the threaded rod penetrates the vacuum box and extends into the rotating shaft, the threaded rods are rotatably connected to the rotating shaft and the vacuum box, the outer surface of the threaded rod is threadedly connected to a moving block, the bottom of the moving block is fixedly connected to a connecting plate, the bottom of the connecting plate is installed with a rotating motor, the output end of the rotating motor is fixedly connected to a first electric telescopic rod, the bottom of the first electric telescopic rod is fixedly connected to a mounting frame, and the bottom of the mounting frame is fixedly connected to a magnetron target;

[0009] The fixing assembly includes a fixing frame in the vacuum box, the inner surface wall of the vacuum box is fixedly connected with a mounting plate, a side of the mounting plate is provided with a sliding groove, a side of the fixing frame is fixedly connected with a sliding plate, and the sliding plate extends into the sliding groove and is slidably connected with the sliding groove.

[0010] As a preferred solution of the utility model, a second electric telescopic rod is fixedly connected to the side of the fixed frame, the second electric telescopic rod is positioned opposite to the sliding plate, the end of the second electric telescopic rod is fixedly connected to a guide plate, a limiting plate is provided on the side of the guide plate, a shock-absorbing spring is provided between the limiting plate and the guide plate, and a damper is provided inside the shock-absorbing spring.

[0011] As a preferred solution of the utility model, a sealing door is hinged on the side of the vacuum box, an observation hole is opened on the side of the sealing door, and a transparent glass is fixedly connected in the observation hole.

[0012] As a preferred solution of the utility model, a fixing rod is arranged on the top of the mounting plate, the fixing rod passes through the mounting plate and extends into the sliding plate, and the fixing rod is plugged into the mounting plate.

[0013] As a preferred solution of the utility model, a side surface of the limiting plate is fixedly connected with an anti-skid pad, and the material of the anti-skid pad is rubber.

[0014] As a preferred solution of the utility model, a door handle is fixedly connected to the side of the sealed door, and the material of the door handle is solid wood.

[0015] As a preferred solution of the utility model, the rotating shaft is located on the top of the mounting plate, and the magnetron target is located on the top of the fixing frame.

[0016] As a preferred solution of the utility model, a collection box is slidably connected to the inner bottom wall of the vacuum box, and a handle is fixedly connected to the side of the collection box.

[0017] Compared with the prior art, the beneficial effects of the utility model are:

[0018] 1. In the present utility model, by providing an adjustment component, when the magnetron target needs to be adjusted, the driving motor is started to rotate the threaded rod, and then the moving block drives the first electric telescopic rod to adjust the magnetron target left and right. Then, the magnetron target is adjusted up and down through the first electric telescopic rod. Thus, the magnetron target can be adjusted up, down, left, and right, improving the practicability and working efficiency.

[0019] 2. In the present utility model, by providing a fixing component, since the fixing frame is slidably connected to the mounting plate through the sliding groove, it is convenient to pull the fixing frame out of the vacuum chamber to fix the workpiece to be processed. The second electric telescopic rod is started to fix the workpiece through the limiting plate. Since a damping spring is provided between the guiding plate and the limiting plate, it has a damping effect when clamping the workpiece, and at the same time, it avoids damaging the outer surface of the workpiece due to excessive clamping force, thus improving the convenience and stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a schematic diagram of the overall structure of the present utility model;

[0021] Figure 2 is a schematic diagram of the internal structure of the vacuum chamber of the present utility model;

[0022] Figure 3 is a schematic diagram of the adjustment component structure of the present utility model;

[0023] Figure 4 is a schematic diagram of the fixing component structure of the present utility model.

[0024] In the figure: 1. Vacuum chamber; 2. Adjustment component; 201. Driving motor; 202. Threaded rod; 203. Moving block; 204. Rotating shaft; 205. Connecting plate; 206. Rotating motor; 207. Mounting frame; 208. Magnetron target; 209. First electric telescopic rod; 3. Sealing door; 4. Observation hole; 5. Transparent glass; 6. Door handle; 7. Fixing component; 701. Mounting plate; 702. Sliding groove; 703. Fixed rod; 704. Fixing frame; 705. Sliding plate; 706. Second electric telescopic rod; 707. Guiding plate; 708. Damping spring; 709. Limiting plate; 710. Anti-slip pad; 8. Collection box; 9. Pull handle. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0025] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0026] Embodiment, please refer to Figure 1-Figure 4 , the utility model provides a technical solution:

[0027] The vacuum low-temperature magnetron sputtering coating device comprises a vacuum box 1 , an adjusting component 2 is arranged on the side of the vacuum box 1 , and a fixing component 7 is arranged inside the vacuum box 1 .

[0028] In this embodiment, according to Figure 1 , Figure 2 and Figure 3 As shown, the adjustment component 2 includes a driving motor 201 installed on the side of the vacuum box 1, the output end of the driving motor 201 is fixedly connected to a threaded rod 202, the inner surface wall of the vacuum box 1 is fixedly connected to a rotating shaft 204, the threaded rod 202 penetrates the vacuum box 1 and extends into the rotating shaft 204, the threaded rod 202 is rotatably connected to the rotating shaft 204 and the vacuum box 1, the outer surface of the threaded rod 202 is threadedly connected to a moving block 203, the bottom of the moving block 203 is fixedly connected to a connecting plate 205, the bottom of the connecting plate 205 is installed with a rotating motor 206, the output end of the rotating motor 206 is fixedly connected to a first electric telescopic rod 209, the bottom of the first electric telescopic rod 209 is fixedly connected to a mounting frame 207, the bottom of the mounting frame 207 is fixedly connected to a magnetron target 208, the rotating shaft 204 is located at the top of the mounting plate 701, and the magnetron target 208 is located at the top of the fixing frame 704.

[0029] Among them, the driving motor 201 rotates the threaded rod 202, and then the moving block 203 drives the first electric telescopic rod 209 to adjust the magnetron target 208 left and right, and then the magnetron target 208 is adjusted up and down through the first electric telescopic rod 209, and then the magnetron target 208 can be adjusted up and down and left and right, thereby improving practicality and work efficiency.

[0030] In this embodiment, according to Figure 1 , Figure 2 and Figure 4As shown, the fixing assembly 7 includes a fixing frame 704 in the vacuum box 1, the inner surface wall of the vacuum box 1 is fixedly connected with a mounting plate 701, a sliding groove 702 is provided on the side of the mounting plate 701, a sliding plate 705 is fixedly connected to the side of the fixing frame 704, the sliding plate 705 extends into the sliding groove 702 and is slidably connected to the sliding groove 702, a second electric telescopic rod 706 is fixedly connected to the side of the fixing frame 704, the second electric telescopic rod 706 is opposite to the sliding plate 705, a guide plate 707 is fixedly connected to the end of the second electric telescopic rod 706, a limiting plate 709 is provided on the side of the guide plate 707, and a shock absorbing plate 709 is provided between the limiting plate 709 and the guide plate 707. Spring 708, a damper is arranged in the shock-absorbing spring 708, a sealing door 3 is hinged on the side of the vacuum box 1, an observation hole 4 is opened on the side of the sealing door 3, a transparent glass 5 is fixedly connected in the observation hole 4, a fixing rod 703 is arranged on the top of the mounting plate 701, the fixing rod 703 penetrates the mounting plate 701 and extends into the sliding plate 705, the fixing rod 703 is plugged into the mounting plate 701, a non-slip pad 710 is fixedly connected to the side of the limiting plate 709, the material of the non-slip pad 710 is rubber, a door handle 6 is fixedly connected to the side of the sealing door 3, the material of the door handle 6 is solid wood, a collecting box 8 is slidably connected to the inner bottom wall of the vacuum box 1, and a pull handle 9 is fixedly connected to the side of the collecting box 8.

[0031] Among them, it has a shock-absorbing effect when clamping the workpiece, and at the same time avoids excessive clamping force to damage the outer surface of the workpiece, thereby improving convenience and stability.

[0032] The working process of the utility model: when the vacuum low-temperature magnetron sputtering coating device designed by the present invention is used, first check whether the device is used normally, move the device to a suitable working area, pull the fixed frame 704 out of the vacuum box 1, start the second electric telescopic rod 706 to clamp the workpiece to be processed, wherein the fixed frame 704 is slidably connected with the mounting plate 701 through the sliding groove 702, so as to facilitate pulling the fixed frame 704 out of the vacuum box 1 to fix the workpiece to be processed, start the second electric telescopic rod 706 to fix the workpiece through the limit plate 709, and since a shock-absorbing spring 708 is provided between the guide plate 707 and the limit plate 709, it has a shock-absorbing effect when clamping the workpiece. The clamping force is too large to damage the outer surface of the workpiece, thereby improving convenience and stability. Then, the fixing frame 704 is pushed into the vacuum box 1, and the fixing rod 703 is inserted into the mounting plate 701 to fix the fixing frame 704. The sealing door 3 is closed, and the vacuum box 1 is vacuumed by the vacuum equipment. When the magnetron target 208 needs to be adjusted, the driving motor 201 is started to rotate the threaded rod 202, and then the moving block 203 brings the first electric telescopic rod 209 to adjust the magnetron target 208 left and right, and then the magnetron target 208 is adjusted up and down by the first electric telescopic rod 209, and then the magnetron target 208 can be adjusted up and down and left and right, thereby improving practicality and work efficiency.

[0033] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum low-temperature magnetron sputtering coating device, comprising a vacuum box (1), characterized in that: An adjusting component (2) is arranged on the side of the vacuum box (1), and a fixing component (7) is arranged inside the vacuum box (1); The adjustment assembly (2) comprises a drive motor (201) mounted on the side of the vacuum box (1); the output end of the drive motor (201) is fixedly connected to a threaded rod (202); the inner surface wall of the vacuum box (1) is fixedly connected to a rotating shaft (204); the threaded rod (202) penetrates the vacuum box (1) and extends into the rotating shaft (204); the threaded rod (202) is rotatably connected to the rotating shaft (204) and the vacuum box (1); the outer surface of the threaded rod (202) is threadedly connected to a moving block (203); the bottom of the moving block (203) is fixedly connected to a connecting plate (205); the bottom of the connecting plate (205) is mounted with a rotating motor (206); the output end of the rotating motor (206) is fixedly connected to a first electric telescopic rod (209); the bottom of the first electric telescopic rod (209) is fixedly connected to a mounting frame (207); the bottom of the mounting frame (207) is fixedly connected to a magnetron target (208); The fixing assembly (7) comprises a fixing frame (704) in the vacuum box (1); a mounting plate (701) is fixedly connected to the inner surface wall of the vacuum box (1); a sliding groove (702) is provided on the side of the mounting plate (701); a sliding plate (705) is fixedly connected to the side of the fixing frame (704); the sliding plate (705) extends into the sliding groove (702) and is slidably connected to the sliding groove (702).

2. The vacuum low-temperature magnetron sputtering coating device according to claim 1, characterized in that: A second electric telescopic rod (706) is fixedly connected to the side of the fixed frame (704); the second electric telescopic rod (706) is opposite to the sliding plate (705); the end of the second electric telescopic rod (706) is fixedly connected to a guide plate (707); a limit plate (709) is arranged on the side of the guide plate (707); a shock absorbing spring (708) is arranged between the limit plate (709) and the guide plate (707); and a damper is arranged inside the shock absorbing spring (708).

3. The vacuum low-temperature magnetron sputtering coating device according to claim 1, characterized in that: A sealed door (3) is hingedly connected to the side of the vacuum box (1), an observation hole (4) is opened on the side of the sealed door (3), and a transparent glass (5) is fixedly connected inside the observation hole (4).

4. The vacuum low-temperature magnetron sputtering coating device according to claim 1, characterized in that: A fixing rod (703) is arranged on the top of the mounting plate (701), the fixing rod (703) penetrates the mounting plate (701) and extends into the sliding plate (705), and the fixing rod (703) is plugged into the mounting plate (701).

5. The vacuum low-temperature magnetron sputtering coating device according to claim 2, characterized in that: The side surface of the limiting plate (709) is fixedly connected with an anti-skid pad (710), and the material of the anti-skid pad (710) is rubber.

6. The vacuum low-temperature magnetron sputtering coating device according to claim 3, characterized in that: A door handle (6) is fixedly connected to the side of the sealed door (3), and the material of the door handle (6) is solid wood.

7. The vacuum low-temperature magnetron sputtering coating device according to claim 1, characterized in that: The rotating shaft (204) is located on the top of the mounting plate (701), and the magnetron target (208) is located on the top of the fixing frame (704).

8. The vacuum low-temperature magnetron sputtering coating device according to claim 1, characterized in that: The inner bottom wall of the vacuum box (1) is slidably connected to a collection box (8), and the side of the collection box (8) is fixedly connected to a handle (9).

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