Integrated pump body and fluid machine

Abstract

The utility model belongs to the technical field of vacuum pumps, and particularly relates to an integrated pump body and a composite vacuum pump. Aiming at the defects of high production cost and large volume of a composite pump body of the conventional Roots screw composite vacuum pump, the utility model adopts the following technical scheme that the integrated pump body comprises a first rotor cavity, a second rotor cavity, a third rotor cavity and a fourth rotor cavity, a whole or a radial portion of the second rotor cavity; the connecting channel is communicated with the first rotor cavity and the second rotor cavity; the axis of the first rotor cavity is parallel to the axis of the second rotor cavity, and the first rotor cavity and the second rotor cavity are distributed in the radial direction of the integrated pump body. According to the integrated pump body, the first rotor cavity and the second rotor cavity do not need to be connected through an additional pipeline or an assembly structure, the number of parts to be machined is reduced, and the machining cost is remarkably reduced; the first rotor and the second rotor can be driven by different motors respectively, and the compression ratio of the vacuum pump is adjustable.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum pumps, and in particular relates to an integrated pump body and a fluid machine. Background Art

[0002] With the rapid growth of vacuum processing demand, traditional single vacuum pumps cannot meet the increasingly complex vacuum needs. It is necessary to combine and transform vacuum pumps with different functions to form a combined vacuum pump unit. The vacuum pump unit integrates multiple vacuum pumps of different types to meet diverse needs. The Roots screw unit integrates Roots pumps and screw pumps and is a common vacuum pump unit.

[0003] Traditional Roots screw units usually stack a Roots vacuum pump on a screw vacuum pump and connect them through a short pipe. During processing, the Roots vacuum pump and the screw vacuum pump are produced and assembled separately. The processing technology of the Roots pump body and the screw pump body usually includes blank-rough processing-aging treatment-finishing processing-coating treatment, etc. The processing methods of the Roots pump body and the screw pump body require multiple turnovers, and the production cost is high. In addition, the method of producing them separately and then connecting them through short pipes usually requires the installation of a bracket, which makes the volume of the unit usually larger.

[0004] On the basis of the traditional Roots screw unit, the screw-Roots compound vacuum pump has emerged. The screw-Roots compound vacuum pump installs the Roots blades and the screw rotor on the same main shaft. Although this structure improves the integration, it is longer, and because the screw-Roots rotor is driven by the same motor / motor unit, it is impossible to achieve individual speed regulation, resulting in a constant pumping speed ratio (that is, compression ratio) of the Roots and screw, which limits the application scenarios (different process requirements have different compression ratios and pumping efficiency requirements). At the same time, in this axial composite structure, the Roots pump body and the screw pump body are usually processed separately and then assembled, and the production cost is still high.

[0005] Therefore, by improving the structure of the composite pump body, reducing the processing cost of the pump body, and reducing the volume and weight of the composite pump, it has positive significance. Furthermore, when the composite pump body is applied to a vacuum pump or a compressor, the compression ratio can be adjusted. The composite vacuum pump can be a Roots screw pump or other combinations. Summary of the invention

[0006] The utility model aims to solve the problems of axial distribution of the Roots pump body and the screw pump body of the existing Roots screw compound vacuum pump, high production cost and large volume, and provides an integrated pump body, which integrates all or part of the first rotor cavity and the second rotor cavity, reduces processing cost, volume and weight. The utility model also provides a fluid machinery using the integrated pump body.

[0007] To achieve the above object, the utility model adopts the following technical scheme: an integrated pump body, and the integrated pump body includes:

[0008] A first rotor cavity having an air inlet;

[0009] All or a radial part of the second rotor cavity;

[0010] A connecting channel communicating the first rotor cavity and the second rotor cavity;

[0011] Wherein, the axes of the first rotor cavity and the second rotor cavity are parallel.

[0012] The integrated pump body of the utility model integrally forms all or a radial part of the connected first rotor cavity and second rotor cavity. Compared with the method of separately processing two pump bodies of the existing unit and then connecting them through pipelines or assembling two pump bodies of an axial composite pump together after separate processing, the processing cost is significantly reduced; the connecting channel communicates the first rotor cavity and the second rotor cavity, and there is no need to connect the first rotor cavity and the second rotor cavity through additional pipelines or assembling structures; different from the coaxial distribution of the first rotor cavity and the second rotor cavity of a conventional axial composite pump, the axes of the first rotor cavity and the second rotor cavity are parallel (not coincident), that is, distributed non-axially, so that the first rotor and the second rotor can be driven by different motors respectively, and the compression ratio of the vacuum pump can be adjusted (of course, when not needed, the two rotors can also be driven by the same motor through a transmission component); all of the first rotor cavity and the second rotor cavity are integrally formed, which is suitable for compounding such as roots screws; the first rotor cavity and a half cavity are integrally formed instead of the first rotor cavity and the entire second rotor cavity being integrally formed, which is particularly suitable for the case where the second rotor cavity is a multi-stage pump cavity. The integrated type means that it is not an assembled type, that is, it is directly integrally formed during the processing process.

[0013] As an improvement, the integrated pump body includes all of the second rotor cavity, an air outlet is provided on the second rotor cavity, the first rotor cavity is a roots rotor cavity, and the second rotor cavity is a screw rotor cavity or a roots screw rotor cavity. In the existing method of separately processing two pump bodies, the processing technologies of the two pump bodies are basically the same. Therefore, although the processing of the integrated pump body puts higher requirements on the processing equipment, it only needs to be transferred once, thereby effectively reducing the production cost and improving the production efficiency.

[0014] As an improvement, the first rotor cavity is a roots rotor cavity, and the second rotor cavity is a multi-stage dry rotor cavity. In the prior art, for roots and multi-stage dry units, it is necessary to separately process two half cavities of the roots rotor cavity and the multi-stage dry rotor cavity, that is, three components need to be processed. The scheme of the utility model integrally forms the first rotor cavity and a half cavity of the multi-stage dry rotor cavity, so only two components need to be processed.

[0015] As an improvement, the one-piece pump body includes a radial half of the second rotor cavity, and the second rotor cavity has a plurality of radial partitions.

[0016] As an improvement, the connecting channel is connected to the first stage or the second stage of the second rotor cavity; the exhaust channel connecting each stage of the chamber of the second rotor cavity is located in the partition between two adjacent stages of the rotor or in the radial outside.

[0017] As an improvement, the first rotor cavity and the second rotor cavity are both horizontally arranged and distributed up and down.

[0018] As an improvement, the first rotor cavity and the second rotor cavity are both arranged horizontally and in parallel.

[0019] As an improvement, the first rotor cavity and the second rotor cavity are both arranged vertically.

[0020] As an improvement, the one-piece pump body further comprises a connecting portion between the first rotor cavity and the half cavity, the connecting portion being connected to the first rotor cavity and the second rotor cavity, and the connecting portion having an opening to form the connecting channel.

[0021] A fluid machinery, comprising the aforementioned integrated pump body, and further comprising a first rotor assembly located in the first rotor cavity, a second rotor assembly located in the second rotor cavity, and one or two power sources for simultaneously or separately driving the first rotor assembly and the second rotor assembly.

[0022] As an improvement of the fluid machinery, the integrated pump body includes the entire second rotor cavity.

[0023] As an improvement of the fluid machinery, the fluid machinery further comprises an integrated end cover and an integrated oil tank, and the first rotor cavity and the second rotor cavity share the same end cover and the same oil tank; and / or

[0024] The length of the first rotor cavity is smaller than that of the second rotor cavity, and the fluid machinery further comprises an extended pump body which is coaxial with the first rotor cavity and detachably connected; and / or,

[0025] The first rotor shaft of the first rotor assembly forms a motor shaft of a first electric machine, and the second rotor shaft of the second rotor assembly forms a motor shaft of a second electric machine.

[0026] As an improvement of the fluid machinery, the fluid machinery further comprises another part of the second rotor cavity, and an exhaust port is provided on the another part of the cavity.

[0027] As an improvement of the fluid machinery, the fluid machinery is a vacuum pump or a compressor, and the fluid machinery can be horizontal (axis horizontal) or vertical (axis vertical).

[0028] The beneficial effects of the one-piece pump body of the utility model are as follows: the first rotor cavity and the second rotor cavity are all or partially formed in a radial direction as a whole, which significantly reduces the processing cost compared with the existing two pump bodies that are processed separately and then connected or assembled together through pipes; the connecting channel connects the first rotor cavity and the second rotor cavity, and there is no need to connect through additional pipes or set up an assembly structure; the first rotor cavity and the second rotor cavity are distributed radially, that is, different from the coaxial distribution of the first rotor cavity and the second rotor cavity of the conventional compound pump, so that the first rotor and the second rotor can be driven by different motors respectively, and the compression ratio of the vacuum pump is adjustable; the first rotor cavity and the second rotor cavity are all formed in one piece, which is suitable for compounds such as Roots screws; the radial partial one-piece molding of the first rotor cavity and the second rotor cavity instead of the first rotor cavity and the entire second rotor cavity is particularly suitable for the case where the second rotor cavity is a multi-stage pump cavity, and is also conducive to the processing of the connecting channel.

[0029] The fluid machinery of the utility model adopts the integrated pump body of the utility model and has all the beneficial effects of the integrated pump body of the utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 and Figure 2 It is a cross-sectional view at different angles of the integrated pump body of the first embodiment of the utility model.

[0031] Figure 3 It is a cross-sectional view of the integrated pump body of the second embodiment of the utility model.

[0032] Figure 4 and Figure 5 It is a cross-sectional view at different angles of the composite vacuum pump of the third embodiment of the utility model.

[0033] Figure 6 and Figure 7 It is a cross-sectional view at different angles of the composite vacuum pump of the fourth embodiment of the utility model.

[0034] Figure 8 It is a cross-sectional view of the composite vacuum pump of the fifth embodiment of the present utility model.

[0035] In the figure, 1, integrated pump body; 11, first rotor cavity; 12, second rotor cavity; 13, connecting channel; 14, air inlet; 15, exhaust port; 16, support part; 17, half cavity;

[0036] 2. Lengthen the pump body; 21. Ring groove;

[0037] 3. A first rotor assembly;

[0038] 4. The first motor;

[0039] 5. Second rotor assembly; 51. Roots section; 52. Screw section;

[0040] 6. Second motor;

[0041] 7. End cap;

[0042] 8. Fuel tank. DETAILED DESCRIPTION

[0043] The technical solutions of the embodiments of the present invention are explained and described below, but the following embodiments are only preferred embodiments of the present invention, not all. Based on the embodiments in the implementation mode, other embodiments obtained by those skilled in the art without creative work are all within the protection scope of the present invention.

[0044] See also Figures 1 to 8 The one-piece pump body of the utility model embodiment comprises:

[0045] A first rotor cavity having an air inlet;

[0046] The whole or radial part of the second rotor cavity;

[0047] A connecting channel connecting the first rotor cavity and the second rotor cavity;

[0048] The axes of the first rotor cavity and the second rotor cavity are parallel, and the first rotor cavity and the second rotor cavity are distributed along the radial direction of the integrated pump body.

[0049] The integrated pump body of the utility model is integrally formed to form the entire or radial part of the first rotor cavity and the second rotor cavity that are connected. Compared with the two pump bodies of the existing unit that are separately processed and then connected by pipelines or the two pump bodies of the axial compound pump that are separately processed and then assembled together, the processing cost is significantly reduced; the connecting channel connects the first rotor cavity and the second rotor cavity, and there is no need to connect them through additional pipelines or assembly structures; unlike the coaxial distribution of the first rotor cavity and the second rotor cavity of the conventional axial compound pump, the axes of the first rotor cavity and the second rotor cavity are parallel, that is, they are distributed along the non-axial direction, so that the first rotor and the second rotor can be driven by different motors respectively, and the compression ratio of the vacuum pump is adjustable (of course, the two rotors can also be driven by the same motor when not needed); the first rotor cavity and the second rotor cavity are integrally formed, which is suitable for composites such as Roots screws; the first rotor cavity and half of the cavity are integrally formed instead of the first rotor cavity and the entire second rotor cavity, which is particularly suitable for the case where the second rotor cavity is a multi-stage pump cavity. Integral means that it is not assembled, that is, it is directly integrally formed during the processing process.

[0050] Embodiment 1

[0051] See also Figure 1 and Figure 2 The integrated pump body 1 of the first embodiment of the utility model comprises:

[0052] The entire first rotor cavity 11, the first rotor cavity 11 has an air inlet 14;

[0053] A radial half cavity 17 of the second rotor cavity 12;

[0054] A connecting channel 13, connecting the radial half cavity 17 of the first rotor cavity 11 and the second rotor cavity 12;

[0055] The first rotor cavity 11 and the half cavity 17 are parallel, and the first rotor cavity 11 and the second rotor cavity 12 are distributed along the radial direction of the integrated pump body 1 .

[0056] In this embodiment, the integrated pump body 1 includes a radial half cavity 17 of the second rotor cavity 12 instead of a small half or a large half, which facilitates the processing and assembly of the two half cavities of the second rotor cavity 12 .

[0057] In this embodiment, the other half of the second rotor cavity 12 is not shown.

[0058] In this embodiment, the first rotor cavity 11 is a Roots rotor cavity, and the second rotor cavity 12 is a multi-stage dry rotor cavity. In the prior art, for Roots and multi-stage dry units, it is necessary to process the two halves of the Roots rotor cavity and the multi-stage dry rotor cavity, respectively, that is, it is necessary to process three parts. If the first rotor cavity 11 and the half cavity 17 of the multi-stage dry rotor cavity are integrally formed, only two parts need to be processed.

[0059] In this embodiment, the connecting channel 13 is connected to the first stage of the second rotor cavity 12. The hole of the connecting channel 13 is cone-shaped, and the hole diameter at one end of the connecting channel 13 located at the first rotor cavity 11 is larger than the hole diameter at one end of the connecting channel 13 located at the second rotor cavity 12. The number of multi-stage dry pumps is usually 5 to 7, and in this embodiment, it can be 2 to 10.

[0060] In this embodiment, the exhaust passages connecting the various chambers of the second rotor cavity 12 are located in the partition or radially outside between two adjacent rotor stages. The shape of each stage of the multi-stage dry pump can be a two-leaf Roots, three-leaf Roots, four-leaf, five-leaf Roots or other multi-leaf Roots blades. The shape of each stage of the multi-stage dry pump can also be a claw-type or screw-shaped curved surface. Each stage of the multi-stage dry pump can also be a helical twisted or non-helical cross-sectional stretching body based on the above shape. In this embodiment, the first rotor cavity 11 and the half cavity 17 are horizontally arranged and distributed up and down, and the air inlet 14 is located at the upper radial center and / or axial center of the first rotor cavity 11.

[0061] In this embodiment, the connecting channel 13 is located at the radial center of the first rotor cavity 11 .

[0062] In this embodiment, the integrated pump body 1 also includes a connecting portion located between the first rotor cavity 11 and the half cavity 17, the connecting portion is connected to the first rotor cavity 11 and the half cavity 17, and a hole is opened on the connecting portion to form the connecting channel 13.

[0063] In other embodiments, the first rotor cavity and the half cavity may also be arranged horizontally and in parallel, and the air inlet is located at the radial center of the first rotor cavity.

[0064] In other embodiments, the first rotor cavity and the half cavity may also be arranged vertically.

[0065] The beneficial effects of the integrated pump body 1 of the first embodiment of the utility model are as follows: the first rotor cavity 11 and the half cavity 17 of the second rotor cavity 12 are integrally formed, which significantly reduces the processing cost compared with the existing two pump bodies that are processed separately and then connected by pipelines; the connecting channel 13 connects the first rotor cavity 11 and the half cavity 17 of the second rotor cavity 12 without the need for additional pipeline connection; the half cavity 17 of the first rotor cavity 11 and the second rotor cavity 12 are distributed radially, that is, different from the coaxial distribution of the first rotor cavity 11 and the second rotor cavity 12 of the conventional compound pump, so that the first rotor and the second rotor can be driven by different motors respectively, and the compression ratio of the vacuum pump is adjustable; the first rotor cavity 11 and the half cavity 17 are integrally formed instead of the first rotor cavity 11 and the entire second rotor cavity 12, which is particularly suitable for the case where the second rotor cavity 12 is a multi-stage pump cavity, and is also conducive to the processing of the connecting channel 13.

[0066] Embodiment 2

[0067] The difference between the second embodiment and the first embodiment lies in the arrangement of the connecting channel 13 .

[0068] In this embodiment, the connecting channel 13 is connected to the second stage of the second rotor cavity 12. Since the air inlet 14 is located in the middle of the axial direction of the integrated pump body 1, when the connecting channel 13 is connected to the second stage of the second rotor cavity 12, the hole of the connecting channel 13 can be basically radial without being tilted at a significant angle relative to the axial direction, and the processing of the connecting channel 13 is easier than when it is connected to the first stage of the second rotor cavity 12. The hole of the connecting channel 13 is conical, and its hole diameter at one end of the first rotor cavity 11 is larger than that at one end of the second rotor cavity 12.

[0069] In some harsh applications such as semiconductor processing, crystal particles often appear. When the first rotor cavity 11 is connected to the first stage of the second rotor cavity 12, since the first stage is usually in close contact with the bearing, the crystals will enter the bearing in a gaseous state and deposit in a solid state, thereby damaging the bearing. Connecting the connecting channel 13 to the second stage of the second rotor cavity 12 can better prevent the crystal particles from being deposited in the bearing and can better balance the smoothness of the air path. If the connecting channel 13 is connected to the third stage of the second rotor cavity 12, although it can also prevent the crystals from being deposited in the bearing, the airway is too long, resulting in a decrease in the ultimate vacuum that can be achieved and low efficiency.

[0070] The embodiment of the utility model also provides a fluid machine, the fluid machine includes the integrated pump body 1 of the above-mentioned embodiment 1 or embodiment 2, and the fluid machine also includes the other half cavity of the second rotor cavity 12, and the other half cavity is provided with an exhaust port 15. The half cavity 17 and the other half cavity are assembled to form the second rotor cavity 12.

[0071] The motor and rotor of the fluid machinery of this embodiment can be driven flexibly or rigidly.

[0072] The fluid machinery of this embodiment can be water-cooled or air-cooled.

[0073] The fluid machinery of this embodiment can be vertical or horizontal. When it is horizontal, the first rotor cavity 11 and the second rotor cavity 12 can be stacked up and down or arranged horizontally.

[0074] Embodiment 3

[0075] See also Figure 4 and Figure 5 The fluid machinery of the third embodiment of the present utility model is a Roots screw compound vacuum pump, comprising an integrally formed one-piece pump body 1, wherein the one-piece pump body 1 comprises:

[0076] A first rotor cavity 11;

[0077] A second rotor cavity 12;

[0078] A connecting channel 13, connecting the first rotor cavity 11 and the second rotor cavity 12;

[0079] The first rotor cavity 11 and the second rotor cavity 12 are parallel, and the first rotor cavity 11 and the second rotor cavity 12 are distributed along the radial direction of the integrated pump body 1 .

[0080] In this embodiment, the first rotor cavity 11 and the second rotor cavity 12 are distributed up and down, which reduces the horizontal area occupied and only requires one set of support legs. In the existing traditional Roots screw vacuum pump unit, both the Roots vacuum pump and the screw vacuum pump need to be independently supported (support legs are set). The volume size of the first rotor cavity 11 and the second rotor cavity 12 can be set accordingly as needed.

[0081] In this embodiment, an air inlet 14 is provided at the upper portion of the first rotor cavity 11, and an air outlet 15 is provided at the lower portion of the second rotor cavity 12. The air inlet 14 is vertically arranged, and the air outlet 15 is vertically arranged.

[0082] In this embodiment, the connecting channel 13 is located at an end of the first rotor cavity 11 axially away from the motor, and the exhaust port 15 is located at an end of the first rotor cavity 11 axially close to the motor; the connecting channel 13 is located at the radial center of the first rotor cavity 11. The connecting channel 13 is vertically arranged.

[0083] In this embodiment, the first rotor cavity 11 is a Roots rotor cavity, and the second rotor cavity 12 is a screw rotor cavity. In other embodiments, the second rotor cavity may also be a Roots-screw compound rotor cavity.

[0084] In this embodiment, the integrated pump body 1 further includes a support portion 16 located between the first rotor cavity 11 and the second rotor cavity 12, and the support portion 16 is integrally connected to the first rotor cavity 11 and the second rotor cavity 12. Since the connecting channel 13 is located at an end of the first rotor cavity 11 axially away from the motor, the support portion 16 is provided to improve the structural strength.

[0085] In this embodiment, the middle portion of the support portion 16 is radially penetrated to form a shock-absorbing hole, thereby reducing material usage and weight.

[0086] In this embodiment, the first rotor cavity 11 and the second rotor cavity 12 of the integrated pump body 1 are both horizontally arranged and distributed up and down, and the fluid machinery is a horizontal pump. In other embodiments, when still applied to a horizontal pump, the first rotor cavity and the second rotor cavity can also be horizontally arranged (axis horizontal) and horizontally parallel (heights are basically the same). This arrangement is suitable for occasions where the horizontal area is not limited but the height is limited. At this time, the position form of the air inlet, exhaust port, connecting channel, support structure, etc. can be adjusted accordingly as needed. In other embodiments, the first rotor cavity and the second rotor cavity of the integrated pump body can also be vertically arranged (axis vertical), that is, applied to a vertical pump, the two rotor cavities can be distributed front and back or left and right, at this time, the connecting channel, the air inlet and the exhaust port are horizontal.

[0087] In this embodiment, the length of the first rotor cavity 11 is smaller than that of the screw rotor cavity.

[0088] In this embodiment, the two motors are located at the same end.

[0089] In this embodiment, a first rotor assembly 3 (Roots rotor assembly) is disposed in the first rotor cavity 11 , and the first rotor assembly 3 is driven by a first motor 4 .

[0090] In this embodiment, a second rotor assembly 5 (screw rotor assembly) is disposed in the second rotor cavity 12 , and the second rotor assembly 5 is driven by a second motor 6 .

[0091] In this embodiment, the radial cross-sectional shapes of the first rotor cavity 11 and the screw rotor cavity refer to the drawings and the prior art. The structures of the Roots rotor assembly and the screw rotor assembly driven by a motor refer to the prior art.

[0092] In this embodiment, the integrated pump body 1 can be processed by casting, so as to facilitate obtaining the connecting channel 13.

[0093] In other embodiments, the one-piece pump body may also have three layers or more (ie, have three or more chambers).

[0094] The beneficial effects of the Roots screw fluid machinery of the third embodiment of the utility model are as follows: its one-piece pump body 1 is integrally formed, which significantly reduces the processing cost compared with the existing method of separately processing two pump bodies and then connecting them through pipelines; the connecting channel 13 connects the first rotor cavity 11 and the second rotor cavity 12, without the need for additional pipeline connection, and there will be no leakage problem; the first rotor cavity 11 and the second rotor cavity 12 are staggered along the axial projection of the first rotor cavity 11, that is, different from the coaxial first rotor cavity 11 and the second rotor cavity 12 of the existing compound pump, the Roots rotor and the screw rotor are driven by different motors, and the compression ratio of the vacuum pump is adjustable; the first rotor cavity 11 and the second rotor cavity 12 are distributed up and down, and compared with the horizontal parallel method or the structure of the existing coaxial distributed vacuum pump, the horizontal area occupied is smaller and the scope of application is wider.

[0095] Embodiment 4

[0096] See also Figure 6 and Figure 7 The main difference between the fourth embodiment and the third embodiment is that an extended pump body 2 is also provided.

[0097] In this embodiment, the length of the first rotor cavity 11 is smaller than that of the second rotor cavity 12, and the fluid machinery further comprises an extended pump body 2 (Roots extended pump body 2), and the extended pump body 2 is located at one end of the integrated pump body 1 close to the motor. By providing the extended pump body 2, the basic compression ratio can be adjusted to achieve more efficient or more adaptable compression.

[0098] In this embodiment, the sum of the lengths of the first rotor cavity 11 and the lengthened pump body 2 may be greater than, equal to, or less than the length of the screw rotor pump body.

[0099] In this embodiment, a positioning structure, a sealing structure and a threaded connection structure are formed between the integrated pump body 1 and the extended pump body 2. The positioning structure ensures the coaxiality between the first rotor cavity 11 and the extended pump body 2. The positioning structure can be in the form of a positioning hole and a positioning column.

[0100] In this embodiment, the positioning structure includes a plurality of positioning holes distributed circumferentially and positioning columns matched with the positioning holes, and the threaded connection structure includes a plurality of threaded holes distributed circumferentially on the integrated pump body 1, a plurality of through holes distributed circumferentially on the extended pump body 2, and a plurality of screws passing through the through holes and screwed into the threaded holes. It is preferred that the positioning holes, threaded holes, etc. are evenly distributed circumferentially, or they may be symmetrical but unevenly distributed. To facilitate the installation between the extended pump body 2 and the first rotor cavity 11, the positioning column is fixedly connected to the extended pump body 2, and the end of the positioning column facing the first rotor cavity 11 is conical.

[0101] In this embodiment, the Roots screw vacuum pump includes a Roots motor and a screw motor, the Roots rotor assembly includes a Roots rotor shaft and a Roots rotor, the screw rotor assembly includes a screw rotor shaft and a screw rotor, the Roots rotor shaft forms the motor shaft of the Roots motor, and the screw rotor shaft forms the motor shaft of the screw motor, thereby eliminating the coupling.

[0102] In this embodiment, the extended pump body 2 is generally annular, and in order to facilitate the installation of screws, an annular groove 21 is provided in the middle of the circumference of the extended pump body 2, and positioning holes, threaded holes, etc. are provided on the radial side walls of the annular groove 21. In other embodiments, the extended pump body 2 may be extended at both ends to form seat ears, and the seat ears may be provided with positioning holes, threaded holes, etc.

[0103] In this embodiment, the first rotor cavity 11 is fixedly connected to the housing of the first motor 4 , and the second rotor cavity 12 is fixedly connected to the housing of the second motor 6 , thereby achieving static sealing.

[0104] Embodiment 5

[0105] See also Figure 8 The difference between the fifth embodiment and the third embodiment mainly lies in the end cover 7 and the oil tank 8 and the second rotor assembly 5 in the second rotor cavity 12. In the first embodiment, two end covers (a first end cover for the first rotor cavity 11 and a second end cover for the second rotor cavity 12) and two oil tanks (a first oil tank for the first rotor cavity 11 and a second oil tank for the second rotor cavity 12) are provided, and a gear set is provided in the oil tank.

[0106] In this embodiment, the fluid machinery further includes an integrated end cover 7 and an integrated oil tank 8 , and the first rotor cavity 11 and the second rotor cavity 12 share the same end cover 7 and the same oil tank 88 .

[0107] In the prior art, two vacuum pumps of a vacuum pump unit, such as a Roots pump and a screw pump, are separately processed and assembled and then connected together through a pipeline. Therefore, in addition to separately processing the Roots pump body and the screw pump body, the Roots pump end cover 7, the Roots pump oil tank 8 and the screw pump end cover 7 and the screw pump oil tank 8 need to be processed. In this embodiment, only one integrated end cover 7 and one integrated oil tank 8 need to be processed, which reduces processing costs and improves processing efficiency.

[0108] In this embodiment, the second rotor of the second rotor assembly 5 in the second rotor cavity 12 is a Roots screw rotor, the part of the Roots screw rotor close to one end of the connecting channel 13 is a Roots segment 51 , and the part away from the connecting channel 13 is a screw segment 52 .

[0109] The above is only a specific implementation of the invention, but the protection scope of the invention is not limited thereto. Those skilled in the art should understand that the invention includes but is not limited to the contents described in the above specific implementation. Any modification that does not deviate from the functional and structural principles of the invention will be included in the scope of the claims.

Claims

1. An integrated pump body (1), characterized in that: The integrated pump body (1) comprises: A first rotor cavity (11) having an air inlet (14); The whole or radial part of the second rotor cavity (12); A connecting channel (13) connecting the first rotor cavity (11) and the second rotor cavity (12); Wherein, the axes of the first rotor cavity (11) and the second rotor cavity (12) are parallel.

2. The one-piece pump body (1) according to claim 1, characterized in that: The integrated pump body (1) includes the entire second rotor cavity (12), an air outlet is provided on the second rotor cavity (12), the first rotor cavity (11) is a Roots rotor cavity, and the second rotor cavity (12) is a screw rotor cavity or a Roots screw rotor cavity.

3. The one-piece pump body (1) according to claim 1, characterized in that: The first rotor cavity (11) is a Roots rotor cavity, the second rotor cavity (12) is a multi-stage dry rotor cavity, and the second rotor cavity (12) has a plurality of radial partitions.

4. The one-piece pump body (1) according to claim 3, characterized in that: The connecting channel (13) is connected to the first stage or the second stage of the second rotor cavity (12); the exhaust channel connecting each stage of the chamber of the second rotor cavity (12) is located in the partition between two adjacent stages of the rotor or in the radial outer side.

5. The one-piece pump body (1) according to any one of claims 1 to 4, characterized in that: The first rotor cavity (11) and the second rotor cavity (12) are arranged horizontally and distributed vertically; or, The first rotor cavity (11) and the second rotor cavity (12) are both arranged horizontally and in parallel horizontally; or, The first rotor cavity (11) and the second rotor cavity (12) are both arranged vertically.

6. The one-piece pump body (1) according to any one of claims 1 to 4, characterized in that: The integrated pump body (1) further comprises a connecting portion located between the first rotor cavity (11) and the second rotor cavity (12), the connecting portion being connected to the first rotor cavity (11) and the second rotor cavity (12), the connecting portion being opened to form the connecting channel (13).

7. Fluid machinery, characterized in that: The fluid machinery comprises an integrated pump body (1) as described in any one of claims 1 to 6, and the fluid machinery also comprises a first rotor assembly (3) located in the first rotor cavity (11), a second rotor assembly (5) located in the second rotor cavity (12), and one or two power sources for driving the first rotor assembly (3) and the second rotor assembly (5) simultaneously or separately.

8. The fluid machine according to claim 7, characterized in that: The integrated pump body (1) includes the entirety of the second rotor cavity (12).

9. The fluid machine according to claim 8, characterized in that: The fluid machinery further comprises an integrated end cover (7) and an integrated oil tank (8), the first rotor cavity (11) and the second rotor cavity (12) sharing the same end cover (7) and the same oil tank (8); and / or The length of the first rotor cavity (11) is smaller than that of the second rotor cavity (12), and the fluid machinery further comprises an extended pump body (2) which is coaxial with the first rotor cavity (11) and detachably connected; and / or, The first rotor shaft of the first rotor assembly (3) forms the motor shaft of the first motor (4), and the second rotor shaft of the first rotor assembly (3) forms the motor shaft of the second motor (6).

10. The fluid machine according to claim 7, characterized in that: The fluid machinery further comprises another part of the cavity of the second rotor cavity (12), and an exhaust port (15) is provided on the other part of the cavity.

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