Aluminum nitride ceramic substrate processing and sintering device

Abstract

The utility model discloses an aluminum nitride ceramic substrate processing sintering device which comprises a sintering furnace, an adjusting assembly is arranged at the upper end of the sintering furnace through a gas flowing assembly, the adjusting assembly comprises an exhaust pipe, a fixing pipe, a threaded pipe, a threaded sleeve, an adjusting pipe and a gas abutting plate, the exhaust pipe is fixedly installed on the top of the sintering furnace, and the fixing pipe is fixedly installed on the top of the adjusting pipe. The fixing pipe is fixedly installed on the exhaust pipe, the threaded pipe is connected to the fixing pipe, the threaded sleeve is in threaded connection to the threaded pipe, the adjusting pipe is connected with the threaded sleeve, the gas abutting plates are installed in the fixing pipe and the adjusting pipe respectively, and the gas flowing assembly comprises a sliding block, a ventilation block and a second spring. And the sliding blocks are installed in the fixed pipe and the adjusting pipe, the ventilation blocks are connected to the sliding blocks in a sliding mode, and the second springs are connected to the inner walls of the ventilation blocks, the fixed pipe and the adjusting pipe, so that the technical problem that according to an existing device design mentioned in the background technology, it is possibly difficult to adjust the gas flow speed is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of sintering devices, and more specifically, to a sintering device for processing an aluminum nitride ceramic substrate. Background Art

[0002] In the existing technology, the aluminum nitride ceramic substrate processing sintering device will produce gas during the sintering process. The flow rate of this gas needs to be precisely controlled to ensure the sintering quality and efficiency. However, the existing device design may have difficulties in adjusting the gas flow rate, resulting in the inability to adjust the gas emission rate according to process requirements. This may be due to the lack of an effective gas flow rate adjustment mechanism or insufficient control system design. The inability to adjust the gas flow rate may lead to unstable temperature and pressure during the sintering process, affecting the quality and production efficiency of the final product.

[0003] The aluminum nitride ceramic substrate processing sintering device may need to maintain the sealing of the internal environment during the sintering process to ensure the stability of process parameters and product quality. However, the existing device design may lack an effective sealing control mechanism and cannot achieve complete sealing of the internal environment when needed. This may be due to the lack of a sealing door or insufficient design of the sealing system. The failure to achieve a sealed state may cause external impurities to enter the device, affecting the sintering process and product quality.

[0004] The switch door design of the aluminum nitride ceramic substrate processing and sintering device should allow the operator to flexibly open and close it according to different process requirements. However, the existing device design may have limitations in the operation of the switch door, making it difficult for the operator to quickly or accurately control the opening and closing of the switch door. This may be due to the complex design of the switch door mechanism, inconvenient operation or lack of automatic control function. The inflexibility of the switch door may lead to low operating efficiency and affect production progress and equipment safety. Utility Model Content

[0005] 1. Technical issues to be solved

[0006] In view of the problems existing in the prior art, the utility model provides an aluminum nitride ceramic substrate processing and sintering device to solve the technical problem mentioned in the background technology that the existing device design may have difficulties in adjusting the gas flow rate.

[0007] (II) Technical solution

[0008] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a device for processing and sintering aluminum nitride ceramic substrates, comprising a sintering furnace, wherein an adjusting component is arranged at the upper end of the sintering furnace through an air flow component, wherein the adjusting component comprises an exhaust pipe, a fixed pipe, a threaded pipe, a threaded sleeve, an adjusting pipe and an air resistance plate, wherein the exhaust pipe is fixedly installed on the top of the sintering furnace, wherein the fixed pipe is fixedly installed on the exhaust pipe, wherein the threaded pipe is connected to the fixed pipe, wherein the threaded sleeve is threadedly connected to the threaded pipe, wherein the adjusting pipe is connected to the threaded sleeve, wherein the air resistance plate is respectively installed in the fixed pipe and the adjusting pipe, wherein the air flow component comprises a sliding block, a ventilation block and a second spring, wherein the sliding block is installed inside the fixed pipe and the adjusting pipe, wherein the ventilation block is slidably connected to the sliding block, wherein the second spring is connected to the ventilation block and the inner wall of the fixed pipe and the adjusting pipe, and wherein a use component is arranged on the sintering furnace.

[0009] The utility model is further configured that a movable sleeve is installed on the air-resisting plate on the fixed pipe, and the gas discharge process is completed by using the movable sleeve.

[0010] The utility model is further configured that a moving rod is installed on the air-retaining plate on the regulating tube, and the moving rod is fitted with the moving sleeve, so that the exhaust process of the gas is facilitated by using the moving rod.

[0011] The utility model is further configured such that a connecting rod is provided to connect the air resistance plate to the inner walls of the fixed tube and the adjusting tube, a first spring is sleeved on the outer side of the connecting rod, one end of the connecting rod is connected to a moving block, the moving block is fitted with the ventilation block, and the compression process of the first spring is completed through the coordinated use of various components.

[0012] The utility model is further configured such that ventilation holes are provided on the abutting block and the vent block, a third spring is provided between the threaded sleeve and the threaded tube, and limiting plates are installed on the fixed tube and the adjusting tube, and the limiting plates are in contact with the vent holes on the vent block, so that the adjustment process of the third spring can be completed through the coordinated use of various components.

[0013] The utility model is further configured such that the use component includes an observation window, a switch door and a handle, the observation window is arranged on the sintering furnace, the switch door is rotatably connected to the sintering furnace, and the handle is installed on the switch door, and the opening and closing process of the switch door is completed through the coordinated use of various components.

[0014] The utility model is further configured that a fixing frame is installed at one end of the sintering furnace, and a mounting seat is installed on the sintering furnace, so that the use process of the device is facilitated through the coordinated use of various components.

[0015] The utility model is further configured that a rotating rod is rotatably connected to the mounting seat, a clamping seat is installed on the switch door, the clamping seat is adapted to the rotating rod, and the clamping process of the switch door is completed through the coordinated use of various components.

[0016] (III) Beneficial effects

[0017] Compared with the prior art, the utility model provides a device for processing and sintering an aluminum nitride ceramic substrate, which has the following beneficial effects:

[0018] 1. The design of the regulating component enables the aluminum nitride ceramic substrate processing and sintering device to accurately adjust the flow rate of the exhaust gas. Through the synergistic effect of the exhaust pipe, fixed pipe, threaded pipe and regulating pipe, as well as the movement of the gas plate and the connecting rod, the operator can easily adjust the gas flow rate to meet different process requirements. This design improves the accuracy of gas flow rate control, helps to stabilize the temperature and pressure during the sintering process, thereby improving product quality and production efficiency.

[0019] 2. The design of the gas flow assembly ensures that the flow of gas in the sintering furnace is effectively controlled. The cooperation of the sliding block, the ventilation block and the spring enables flexible adjustment and stable discharge during the gas flow process. Through the movement of the sliding block and the ventilation block, and the elastic effect of the spring, the gas flow assembly can adapt to different gas flow rate requirements while maintaining the sealing and stability of the system, reducing the possibility of external impurities entering and ensuring the purity of the sintering process.

[0020] 3. The design of the used components provides convenient operation and observation functions for the aluminum nitride ceramic substrate processing sintering device. Through the cooperation of the observation window, the switch door and the handle, the operator can intuitively monitor the sintering process and quickly open or close the switch door when necessary. This design improves the convenience of operation, reduces the difficulty of operation, and helps to improve production efficiency and equipment safety. At the same time, the setting of the fixed frame and the mounting seat ensures the stability of the device, so that the cooperation of the rotating rod and the clamping seat can effectively control the opening and closing of the switch door, enhancing the overall reliability of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the overall structure of an aluminum nitride ceramic substrate processing and sintering device in the utility model;

[0022] Figure 2 It is a schematic diagram of the enlarged structure of A in the utility model;

[0023] Figure 3 It is a cross-sectional structural schematic diagram of the adjustment component in the utility model;

[0024] Figure 4It is a cross-sectional structural schematic diagram of the adjustment component in the utility model;

[0025] Figure 5 It is a schematic diagram of the enlarged structure of B in the utility model.

[0026] In the figure: 1, sintering furnace; 2, exhaust pipe; 3, fixed pipe; 4, threaded pipe; 5, threaded sleeve; 6, adjusting pipe; 7, air plate; 8, sliding block; 9, ventilation block; 10, second spring; 11, moving sleeve; 12, moving rod; 13, connecting rod; 14, first spring; 15, moving block; 16, vent hole; 17, third spring; 18, limiting plate; 19, observation window; 20, door opening and closing; 21, handle; 22, fixing bracket; 23, mounting seat; 24, rotating rod; 25, clamping seat. DETAILED DESCRIPTION

[0027] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present utility model will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0028] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meanings as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0029] In the present invention, unless otherwise specified, directions such as "up" and "down" are usually used in reference to the directions shown in the drawings, or in reference to the vertical, perpendicular or gravity direction; similarly, for ease of understanding and description, "left" and "right" are usually used in reference to the left and right shown in the drawings; "inside" and "outside" refer to the inside and outside relative to the outline of each component itself, but the above-mentioned directions are not used to limit the present invention.

[0030] See also Figure 1-5 , a device for processing and sintering an aluminum nitride ceramic substrate, comprising a sintering furnace 1, an adjusting component is arranged at the upper end of the sintering furnace 1 through a gas flow component, the adjusting component comprises an exhaust pipe 2, a fixed pipe 3, a threaded pipe 4, a threaded sleeve 5, an adjusting pipe 6 and an air resistance plate 7, the exhaust pipe 2 is fixedly installed on the top of the sintering furnace 1, the fixed pipe 3 is fixedly installed on the exhaust pipe 2, the threaded pipe 4 is connected to the fixed pipe 3, the threaded sleeve 5 is threadedly connected to the threaded pipe 4, the adjusting pipe 6 is connected to the threaded sleeve 5, the air resistance plate 7 is respectively installed in the fixed pipe 3 and the adjusting pipe 6, the gas flow component comprises a sliding block 8, a ventilation block 9 and a second spring 10, the sliding block 8 is installed inside the fixed pipe 3 and the adjusting pipe 6, the ventilation block 9 is slidably connected to the sliding block 8, the second spring 10 is connected to the ventilation block 9 and the inner wall of the fixed pipe 3 and the adjusting pipe 6, and a use component is arranged on the sintering furnace 1.

[0031] A moving sleeve 11 is installed on the air-resisting plate 7 on the fixed pipe 3 .

[0032] A moving rod 12 is installed on the air-retaining plate 7 on the regulating pipe 6 , and the moving rod 12 is fitted with the moving sleeve 11 .

[0033] The air-resisting plate 7 is connected to the inner walls of the fixed tube 3 and the regulating tube 6 by a connecting rod 13 , a first spring 14 is sleeved on the outer side of the connecting rod 13 , and one end of the connecting rod 13 is connected to a moving block 15 , which fits with the ventilation block 9 .

[0034] Both the abutting block 15 and the vent block 9 are provided with vent holes 16 , a third spring 17 is provided between the threaded sleeve 5 and the threaded tube 4 , and limiting plates 18 are installed on the fixed tube 3 and the adjusting tube 6 , and the limiting plates 18 are in contact with the vent holes 16 on the vent block 9 .

[0035] In this embodiment, when it is necessary to adjust the exhaust gas flow rate in the sintering furnace 1 during use, the adjusting tube 6 is manually rotated along the threaded tube 4 on the fixed tube 3 using the threaded sleeve 5 at the bottom. During the rotation process, the third spring 17 that abuts the threaded sleeve 5 and the threaded tube 4 is compressed, and during the movement of the adjusting tube 6, the abutting rod 12 is abutted against the abutting sleeve 11 at the fixed tube 3, and with continuous movement, the air abutting plates 7 at both ends are pushed to move in the fixed tube 3 and the adjusting tube 6 respectively. During the movement process, the first spring 14 is compressed and the connecting rod 13 is driven to move. Process, thereby driving the abutting block 15 to move, thereby pushing the vent 16 to slide along the sliding block 8. During its movement, the second spring 10 is compressed, so that the gas can flow out along the vent block 9 and the vent 16 on the abutting block 15. When it moves to a suitable gas flow rate, it stops moving. At this time, the rotation process of the regulating tube 6 is ended, and the compression process of the third spring 17 is released. The spiral rotation of the threaded sleeve 5 and the threaded tube 4 and the compression process of the third spring 17 are used to complete the gas flow rate adjustment process. When it needs to be adjusted to the initial position, the above operation is repeated.

[0036] See also Figure 1-2 As an implementation method of an aluminum nitride ceramic substrate processing and sintering device using a component: the component includes an observation window 19, a switch door 20 and a handle 21, the observation window 19 is set on the sintering furnace 1, the switch door 20 is rotatably connected to the sintering furnace 1, and the handle 21 is installed on the switch door 20.

[0037] A fixing frame 22 is installed at one end of the sintering furnace 1 , and a mounting seat 23 is installed on the sintering furnace 1 .

[0038] A rotating rod 24 is rotatably connected to the mounting seat 23 , and a clamping seat 25 is installed on the switch door 20 . The clamping seat 25 is matched with the rotating rod 24 .

[0039] More specifically, during use, the material is manually placed into the sintering furnace 1 to observe the processing process of the aluminum nitride ceramic substrate, and the processing process is observed using the observation window 19. When the switch door 20 needs to be opened, the rotating rod 24 is manually rotated along the mounting seat 23 to make it leave the clamping seat 25, thereby releasing the fixing process of the switch door 20, and the switch door 20 is manually rotated open to complete the operation process.

[0040] In summary, when the overall equipment is in use or running: during use, when it is necessary to adjust the exhaust gas flow rate in the sintering furnace 1, the adjusting tube 6 is manually rotated along the threaded tube 4 on the fixed tube 3 using the threaded sleeve 5 at the bottom. During the rotation process, the third spring 17 abutting against the threaded sleeve 5 and the threaded tube 4 is compressed, and during the movement of the adjusting tube 6, the abutting rod 12 is abutted against the abutting sleeve 11 at the fixed tube 3, and with continuous movement, the air abutting plates 7 at both ends are pushed to move in the fixed tube 3 and the adjusting tube 6 respectively. During the movement process, the first spring 14 is compressed and drives the connecting rod 13 The moving process is carried out, thereby driving the abutting block 15 to move, thereby pushing the vent 16 to slide along the sliding block 8. During its movement, the second spring 10 is compressed, so that the gas can flow out along the vent block 9 and the vent 16 on the abutting block 15. When it moves to a suitable gas flow rate, it stops moving. At this time, the rotation process of the regulating tube 6 is ended, and the compression process of the third spring 17 is released. The spiral rotation of the threaded sleeve 5 and the threaded tube 4 and the compression process of the third spring 17 are used to complete the gas flow rate adjustment process. When it needs to be adjusted to the initial position, the above operation is repeated.

[0041] During use, the material is manually placed into the sintering furnace 1 to observe the processing process of the aluminum nitride ceramic substrate, and the processing process is observed using the observation window 19. When the switch door 20 needs to be opened, the rotating rod 24 is manually rotated along the mounting seat 23 to make it leave the clamping seat 25, thereby releasing the fixing process of the switch door 20, and the switch door 20 is manually rotated to open to complete the operation process.

[0042] In all the schemes mentioned above, the connection between two parts can be selected according to actual conditions by welding, bolt and nut matching connection, bolt or screw connection or other well-known connection methods, which are not described here one by one. In the above, all fixed connections are preferably welded. Although the embodiments of the utility model have been shown and described, it can be understood by ordinary technicians in this field that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the utility model. The scope of the utility model is defined by the attached claims and their equivalents.

Claims

1. A device for processing and sintering an aluminum nitride ceramic substrate, comprising a sintering furnace (1), characterized in that: The upper end of the sintering furnace (1) is provided with an adjustment component through an air flow component, and the adjustment component comprises an exhaust pipe (2), a fixed pipe (3), a threaded pipe (4), a threaded sleeve (5), an adjustment pipe (6) and an air-resisting plate (7); the exhaust pipe (2) is fixedly mounted on the top of the sintering furnace (1); the fixed pipe (3) is fixedly mounted on the exhaust pipe (2); the threaded pipe (4) is connected to the fixed pipe (3); the threaded sleeve (5) is threadedly connected to the threaded pipe (4); the adjustment pipe (6) is threadedly connected to the threaded sleeve (5); and the adjustment pipe (6) is threadedly connected to the threaded sleeve (7). The two sleeves (5) are connected, the air-resisting plate (7) is respectively installed in the fixed pipe (3) and the regulating pipe (6), the air flow component includes a sliding block (8), a ventilation block (9) and a second spring (10), the sliding block (8) is installed inside the fixed pipe (3) and the regulating pipe (6), the ventilation block (9) is slidably connected to the sliding block (8), the second spring (10) is connected to the ventilation block (9) and the inner wall of the fixed pipe (3) and the regulating pipe (6), and the sintering furnace (1) is provided with a use component.

2. The aluminum nitride ceramic substrate processing and sintering device according to claim 1 is characterized in that: A movable sleeve (11) is installed on the air-resisting plate (7) on the fixed pipe (3).

3. The aluminum nitride ceramic substrate processing and sintering device according to claim 2 is characterized in that: A moving rod (12) is installed on the air-retaining plate (7) on the regulating pipe (6), and the moving rod (12) is fitted with a moving sleeve (11).

4. The aluminum nitride ceramic substrate processing and sintering device according to claim 3 is characterized in that: The air-resisting plate (7) is connected to the inner walls of the fixed tube (3) and the regulating tube (6) by a connecting rod (13), the outer side of which is sleeved with a first spring (14), one end of which is connected to a moving block (15), and the moving block (15) is fitted with the ventilation block (9).

5. The aluminum nitride ceramic substrate processing and sintering device according to claim 4 is characterized in that: The abutment block (15) and the ventilation block (9) are both provided with ventilation holes (16); a third spring (17) is provided between the threaded sleeve (5) and the threaded tube (4); and a limiting plate (18) is installed on the fixed tube (3) and the adjusting tube (6); the limiting plate (18) is in contact with the ventilation hole (16) on the ventilation block (9).

6. The aluminum nitride ceramic substrate processing and sintering device according to any one of claims 1 to 5, characterized in that: The use assembly comprises an observation window (19), a switch door (20) and a handle (21); the observation window (19) is arranged on the sintering furnace (1); the switch door (20) is rotatably connected to the sintering furnace (1); and the handle (21) is installed on the switch door (20).

7. The aluminum nitride ceramic substrate processing and sintering device according to claim 6 is characterized by: A fixing frame (22) is installed at one end of the sintering furnace (1), and a mounting seat (23) is installed on the sintering furnace (1).

8. The aluminum nitride ceramic substrate processing and sintering device according to claim 7 is characterized in that: A rotating rod (24) is rotatably connected to the mounting seat (23), and a clamping seat (25) is installed on the switch door (20), and the clamping seat (25) is matched with the rotating rod (24).

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