Bearing jig and testing device

By using a multi-layer sealed structure load-bearing fixture in the chip test device, an independent dry gas environment is formed, and the problems of frost and dew condensation and inaccurate test temperature in the low-temperature environment in the prior art are solved, and better anti-frost and dew condensation effect and test accuracy are achieved.

CN222895992UActive Publication Date: 2025-05-23HANGZHOU CHANGCHUAN TECH CO LTD
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Patent Information

Application Number
CN202421569156.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-03
Publication Date
2025-05-23
Estimated Expiration
2034-07-03

AI Technical Summary

Technical Problem

In the existing chip low-temperature environment anti-frost and dew condensation testing technology, the space surrounded by a single-layer sealing ring is large, and the gas volume at the drying gas outlet is large, resulting in poor anti-frost and dew condensation effect. At the same time, increasing the temperature through heating devices may affect the test temperature, which in turn affects the test accuracy and yield.

Method used

A load-bearing fixture is provided, adopting a multi-layer sealing structure, including an inner sealing ring and an outer sealing ring, forming an independent multiple drying air environment, and drying the drying chamber and the test chamber of the fixture through the first exhaust port and the second exhaust port respectively, reducing the required drying gas intake amount in each space, avoiding frost and condensation without heating.

Benefits of technology

It effectively prevents frost and dew condensation in low-temperature environments, reduces the gas volume requirements of dry gas, ensures that the chip is tested normally under low-temperature conditions, and avoids the problem of inaccurate test temperature due to heating.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides a bearing jig and a testing device, and relates to the technical field of component sorting, the bearing jig and the testing device provided by the utility model comprise a jig body, an inner sealing ring, an outer sealing ring and a testing plate, the jig body is connected with the testing plate, the inner sealing ring and the outer sealing ring are both installed on the surface, facing the testing plate, of the jig body and are in sealing fit with the testing plate. The outer sealing ring is arranged on the outer side of the inner sealing ring in a surrounding mode and forms a drying cavity with the inner sealing ring in a spaced mode. The jig body is provided with a first exhaust port, a second exhaust port and a clamp mounting position located on the inner side of the inner sealing ring, and the first exhaust port is used for blowing drying gas to the drying cavity; the second exhaust port is formed in the clamp installation position and used for blowing dry air to the clamp installed on the clamp installation position. The bearing jig has the multiple independent dry gas environments, the dry gas inlet amount required by each environment is relatively low, the frosting and condensation phenomena are effectively prevented, and the temperature of the bearing jig does not need to be greatly increased through a heating device.
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Description

Technical Field

[0001] The utility model relates to the technical field of component sorting, in particular to a bearing fixture and a testing device. Background Art

[0002] In the existing chip sorting machine, a carrier fixture is installed at the bottom of the test seat, and the test board and fixture are fixed on the carrier fixture by means of threads or the like. The entire test process is as follows: When the transport device of the sorting machine transfers the chip to the feed position, the pressure measuring arm takes the chip at the feed position and puts it into the fixture for testing, while the transport device moves to the discharge position. After the pressure measuring arm completes the test phase of the chip, it takes it away and transfers it to the discharge position, and finally the transport device transfers the chip to the receiving bin to complete the test.

[0003] When testing in a low-temperature environment, the existing technology mainly adopts the method of heating the carrier fixture through the test seat to increase the overall temperature of the test environment, and uses a single circle of sponge to seal the area surrounded by the test board and the lower surface of the carrier fixture, which can prevent frost and condensation under low-temperature testing and enable the test process to proceed normally. However, the above methods have the following shortcomings:

[0004] 1. In the existing chip low-temperature environment anti-frost and condensation test technology, the space surrounded by the single-layer sealing ring is large, and the gas volume of the dry gas outlet is required to be large. If the gas volume of the dry gas fails to meet the requirements, the anti-frost and condensation effect will be poor;

[0005] 2. The existing chip anti-frost and condensation test technology in low-temperature environments significantly increases the temperature of the carrier fixture through heating devices, which may affect the test temperature and thus affect key indicators such as test accuracy and yield. Utility Model Content

[0006] The purpose of the utility model is to provide a load-bearing fixture and a testing device, which have multiple independent dry air environments, and the dry air intake required for each environment is relatively low, which effectively prevents frost and condensation, and does not require a heating device to significantly increase the temperature of the load-bearing fixture.

[0007] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0008] In a first aspect, the utility model provides a load-bearing fixture, comprising a fixture body, an inner sealing ring, an outer sealing ring and a test plate, wherein the fixture body is connected to the test plate, wherein:

[0009] The inner sealing ring and the outer sealing ring are both installed on the surface of the fixture body facing the test plate and are sealed with the test plate, and the outer sealing ring is arranged around the outer side of the inner sealing ring and is spaced apart from the inner sealing ring to form a drying chamber;

[0010] The fixture body has a first exhaust port, a second exhaust port and a fixture installation position located inside the inner sealing ring. The first exhaust port is used to blow dry air into the drying chamber; the second exhaust port is opened at the fixture installation position and is used to blow dry air to the fixture installed at the fixture installation position.

[0011] Further, the fixture body has a first air inlet channel, the first air inlet channel has a first air inlet port and the first exhaust port, the first air inlet port is opened on the outer side wall of the fixture body and is connected to the first exhaust port, the first exhaust port is opened on the surface of the fixture body facing the test plate, and the first exhaust port is located between the inner sealing ring and the outer sealing ring.

[0012] Further, the first air inlet channel includes a first horizontal channel and a first vertical channel communicating with the first horizontal channel;

[0013] The first horizontal channel is parallel to the surface of the fixture body facing the test plate, and one end of the first horizontal channel away from the first vertical channel is the first air inlet;

[0014] The first vertical channel is perpendicular to a surface of the fixture body facing the test board, and an end of the first vertical channel away from the first horizontal channel is the first exhaust port.

[0015] Furthermore, the first air inlet is provided with an air joint.

[0016] Furthermore, the fixture body has a second air inlet channel, the second air inlet channel has a second air inlet port and the second air outlet port, the second air inlet port is opened on a surface of the fixture body away from the test plate and is connected to the second air outlet port.

[0017] Further, the second air inlet channel includes a second vertical channel, a second horizontal channel and a third vertical channel;

[0018] The second horizontal channel is connected between the second vertical channel and the third vertical channel;

[0019] The end of the second vertical channel away from the second horizontal channel is the second air inlet;

[0020] The end of the third vertical channel facing away from the second horizontal channel is the second exhaust port.

[0021] Furthermore, the fixture body is further provided with a third exhaust port spaced apart from the second exhaust port, and the second exhaust port, the test cavity of the fixture and the third exhaust port are sequentially connected to form a passage for the circulation of dry air.

[0022] Furthermore, the fixture body has an air outlet channel, the air outlet channel has a third air inlet and the third exhaust port, the third air inlet is opened at the fixture installation position and is connected to the third exhaust port, and the third exhaust port is opened on the surface of the fixture body away from the test plate.

[0023] Furthermore, the support fixture further comprises a fixture installed at the fixture installation position, and the fixture is recessed with a test cavity communicated with the second exhaust port.

[0024] In the second aspect, the utility model also provides a testing device, including a test seat, a pressure measuring arm and the supporting fixture described in the above scheme, wherein the test seat is installed on the fixture body and the pressure measuring arm is used to pick up the chip and place it into the fixture at the fixture installation position for testing.

[0025] The load-bearing fixture and testing device provided by the utility model can produce the following beneficial effects:

[0026] When using the above-mentioned carrier fixture, dry gas can enter the drying chamber between the inner sealing ring and the outer sealing ring through the first exhaust port, and can also be blown into the test chamber of the fixture through the second exhaust port to ensure that the chip is in a dry environment.

[0027] Compared with the prior art, the support fixture provided by the first aspect of the utility model dries the drying chamber and the test chamber of the fixture through the first exhaust port and the second exhaust port respectively, the required dry air intake volume of each space is reduced, and multiple independent dry air environments are formed, which effectively prevents the frosting and condensation caused by the inevitable temperature difference due to the large area of ​​the support fixture in a non-dry environment, and does not need to significantly increase the temperature of the support fixture through a heating device. In addition, because the second exhaust port can be targeted to dry the test chamber on the fixture, it ensures the normal conduct of the test under low temperature conditions.

[0028] Compared with the prior art, the test device provided in the second aspect of the utility model includes a test seat, a pressure measuring arm and the supporting fixture provided in the first aspect of the utility model. When in use, the pressure measuring arm picks up the chip and places it into the fixture at the fixture installation position for testing. The supporting fixture thereon can form multiple independent dry air environments with good anti-frost and condensation effects, ensuring the normal testing of the chip under low temperature conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0030] Figure 1 An exploded diagram of a testing device provided in an embodiment of the utility model;

[0031] Figure 2 A top view of a testing device provided by an embodiment of the utility model;

[0032] Figure 3 for Figure 2 A-A cross-sectional view;

[0033] Figure 4 A three-dimensional structural schematic diagram of a test device (without a test board and a fixture) provided in an embodiment of the utility model;

[0034] Figure 5 A side view of a test device (without a test board) provided in an embodiment of the utility model;

[0035] Figure 6 for Figure 5 B-B cross-sectional view;

[0036] Figure 7 A three-dimensional structural schematic diagram of a test device (without a test board) provided in an embodiment of the utility model;

[0037] Figure 8 A schematic diagram of the three-dimensional structure of a testing device provided in an embodiment of the utility model.

[0038] Icons: 1- fixture body; 11- first air inlet channel; 111- first horizontal channel; 1111- first air inlet port; 112- first vertical channel; 1121- first exhaust port; 12- air joint; 13- second air inlet channel; 131- second vertical channel; 1311- second air inlet port; 132- second horizontal channel; 1321- main channel; 1322- branch channel; 133- second exhaust port; 14- air outlet channel; 141- fourth vertical channel; 1411- third air inlet port; 142- third horizontal channel; 143- third exhaust port; 2- inner sealing ring; 3- outer sealing ring; 4- test plate; 5- fixture; 6- test seat; 7- pressure measuring arm. DETAILED DESCRIPTION

[0039] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0040] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0041] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0042] The specific implementation of the present invention is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described here is only used to illustrate and explain the present invention, and is not used to limit the present invention.

[0043] The first aspect of the present invention provides a load-bearing fixture. Figures 1 to 4 As shown, it includes a fixture body 1, an inner sealing ring 2, an outer sealing ring 3 and a test board 4, and the fixture body 1 is connected to the test board 4, wherein: the inner sealing ring 2 and the outer sealing ring 3 are both installed on the surface of the fixture body 1 facing the test board 4 and are sealed with the test board 4, and the outer sealing ring 3 is arranged on the outer side of the inner sealing ring 2 and is separated from the inner sealing ring 2 to form a drying chamber; the fixture body 1 has a first exhaust port 1121, a second exhaust port 133 and a fixture installation position located on the inner side of the inner sealing ring 2, the first exhaust port 1121 is used to blow dry air into the drying chamber, and the second exhaust port 133 is opened at the fixture installation position and is used to blow dry air to the fixture 5 installed at the fixture installation position. The fixture 5 is recessed to form a test chamber connected to the second exhaust port 133, and the chip to be tested can be placed in the test chamber for testing.

[0044] like Figure 3 and Figure 4 As shown, in the supporting jig provided in the above embodiment, the right end face of the jig body 1 is provided with an inner sealing ring 2 and an outer sealing ring 3, and the inner sealing ring 2 and the outer sealing ring 3 divide the area on the right end face of the jig body 1 that needs to be dried into two parts, one part is the area enclosed by the inner sealing ring 2, and the jig body 1 in this area has a fixture mounting position for installing the fixture 5, and the other part is the area enclosed between the inner sealing ring 2 and the outer sealing ring 3, and a drying chamber is formed between this area and the jig body 1 and the test plate 4, and the first exhaust port 1121 and the second exhaust port 133 blow dry air into the drying chamber and the test chamber on the jig 5 respectively. Since the sum of the volumes of the above two areas is the space enclosed by a single-layer sealing ring in the prior art, the volumes of the drying chamber and the test chamber are relatively small, and the exhaust volume requirements for the first exhaust port 1121 and the second exhaust port 133 are relatively low. When the two exhaust ports have the same flow rate as the exhaust ports in the prior art, the dry gas will be more filled in the two chambers, reducing the gas volume requirements for the dry gas outlet. Moreover, since the volume of each cavity is small, the dry gas can quickly fill the two chambers, lowering the air dew point and preventing frost and condensation better, and thus there is no need to significantly increase the temperature of the supporting fixture through a heating device. In addition, since the second exhaust port 133 blows dry gas specifically to the test chamber on the inner fixture 5 of the inner sealing ring 2, the dry gas environment of the chip on the fixture 5 is smaller, and the dry gas can be targeted to dry the space around the chip to ensure the normal progress of the test.

[0045] In some embodiments, Figure 3 As shown, in order to facilitate the external dry gas to be guided to the first exhaust port 1121, the fixture body 1 has a first air inlet channel 11, and the first air inlet channel 11 has a first air inlet 1111 and a first exhaust port 1121. The first air inlet 1111 is opened on the outer wall of the fixture body 1 and communicates with the first exhaust port 1121. The first exhaust port 1121 is opened on the surface of the fixture body 1 facing the test plate 4. It can be understood that, as Figure 4 As shown, the first exhaust port 1121 is located between the inner sealing ring 2 and the outer sealing ring 3 .

[0046] External dry air can enter the first air inlet channel 11 through the first air inlet 1111 on the outer wall of the fixture body 1 , and finally be discharged from the first exhaust port 1121 into the drying chamber between the inner sealing ring 2 and the outer sealing ring 3 .

[0047] The first air inlet 1111 is disposed on the outer side wall of the fixture body 1 to facilitate the connection between an external air source and the fixture body 1 , and an air pipe interface of the external air source can be directly plugged into the first air inlet 1111 .

[0048] On the basis of the above embodiment, the first air inlet 1111 may be provided with an air connector 12, and the air pipe interface of the external air source may be directly plugged into the air connector 12, which is more convenient for connecting the fixture body 1 with the external air source.

[0049] In some embodiments, Figure 3 As shown, the first air inlet channel 11 includes a first horizontal channel 111 and a first vertical channel 112 communicating with the first horizontal channel 111, wherein:

[0050] The first horizontal channel 111 is parallel to the right end surface of the jig body 1 to reduce the thickness of the jig body 1 as much as possible. One end of the first horizontal channel 111 away from the first vertical channel 112 is a first air inlet 1111;

[0051] The first vertical channel 112 is perpendicular to the right end surface of the fixture body 1 to guide the dry air to the right end surface of the fixture body 1 . One end of the first vertical channel 112 away from the first horizontal channel 111 is a first exhaust port 1121 .

[0052] The first air inlet passage 11 has the advantages of simple structure and easy processing.

[0053] In some embodiments, in order to facilitate the external dry gas to be directed to the second exhaust port 133, as shown in FIG. Figures 2 to 4 As shown, the fixture body 1 has a second air inlet channel 13, and the second air inlet channel 13 has a second air inlet port 1311 and a second exhaust port 133; the second air inlet port 1311 is opened on the surface of the fixture body 1 away from the test board 4 and is connected with the second exhaust port 133, which is convenient for the layout of the air path; the surface of the fixture body 1 facing the fixture 5 has a fixture mounting position for installing the fixture 5, and the second exhaust port 133 is opened at the fixture mounting position, so that the dry gas discharged from the second exhaust port 133 can be directly blown into the test cavity of the fixture 5 to ensure the normal test of the chip.

[0054] When in use, external dry air can enter the second air inlet channel 13 through the second air inlet 1311 , and finally enter the test cavity of the fixture 5 from the second air outlet 133 .

[0055] Since the second air inlet 1311 and the second air outlet 133 are respectively disposed on two opposite surfaces of the fixture body 1, in some embodiments, the second air inlet channel 13 includes a second vertical channel 131, a second horizontal channel 132 and a third vertical channel, wherein:

[0056] The second horizontal channel 132 is connected between the second vertical channel 131 and the third vertical channel, and the second horizontal channel 132 serves to connect the second vertical channel 131 and the third vertical channel;

[0057] The end of the second vertical channel 131 away from the second horizontal channel 132 is a second air inlet 1311. Figure 3 As shown, it is used to guide the dry gas at the second air inlet 1311 to the right to the second horizontal channel 132;

[0058] The third vertical channel is connected to the end of the second horizontal channel 132 away from the second vertical channel 131. The end of the third vertical channel away from the second horizontal channel 132 is the second exhaust port 133. The third vertical channel is used to guide the dry gas in the second horizontal channel 132 to the surface of the fixture body 1 facing the clamp 5.

[0059] The second air inlet channel 13 has a simple structure, and blows the external dry air to the fixture 5 by entering and penetrating the fixture body 1 layer by layer.

[0060] Specifically, the second horizontal channel 132 is parallel to the surface of the jig body 1 facing the test board 4 to reduce the thickness of the jig body 1 as much as possible.

[0061] Reference Figure 5 and Figure 6 As shown, in order to improve the test efficiency, the test device is often equipped with two or even more fixtures 5. In this regard, in some embodiments, the second horizontal channel 132 includes a main channel 1321 and multiple branch channels 1322. One end of the main channel 1321 is connected to the second vertical channel 131, and the other end is connected to the multiple branch channels 1322. Each branch channel 1322 is connected to a third vertical channel at one end away from the main channel 1321.

[0062] When in use, the dry gas in the main channel 1321 can enter each branch channel 1322 respectively, and then enter each third vertical channel from each branch channel 1322, and blow into the test cavity of each fixture 5 from the second exhaust port 133 at the end of each third vertical channel.

[0063] The above arrangement allows the dry gas entering from the second air inlet 1311 to flow into the test chambers of different fixtures 5 in different branches, thereby blowing the dry gas to each fixture 5 accurately, ensuring smooth testing of the chips placed in each fixture 5 .

[0064] According to the different locations of the second air inlet 1311, the extension path of the main channel 1321 is also different. The main channel 1321 can extend in a straight line or in a straight line. Figure 6 The bent extension shown may also be a zigzag extension, that is, the extension path of the main channel 1321 may be multiple, and no excessive restrictions are made here.

[0065] Similarly, the extension path of each branch channel 1322 is related to the end position of the main channel 1321 and the position of the clamp 5, and the extension path can be in various shapes.

[0066] In some embodiments, Figure 2 As shown, the fixture body 1 is further provided with a third exhaust port 143 for exhausting the dry gas in the test cavity, so as to realize the circulation of the dry gas in the test cavity.

[0067] In some embodiments, Figure 2 , Figure 4 and Figure 6 As shown, the fixture body 1 has an air outlet channel 14, and the air outlet channel 14 has a third air inlet 1411 and a third air outlet 143; the third air inlet 1411 is opened at the fixture installation position and is connected to the third air outlet 143, so as to discharge the dry gas in the test chamber; the third air outlet 143 is opened on the surface of the fixture body 1 away from the test plate 4, so as to connect the third air outlet 143 with the external exhaust duct.

[0068] When in use, the dry gas in the test chamber can enter the gas outlet channel 14 through the third gas inlet 1411 and finally be discharged from the third gas outlet 143 .

[0069] Since the third air inlet 1411 and the third air outlet 143 are respectively disposed on two opposite surfaces of the fixture body 1, in some embodiments, such as Figure 2 , Figure 4 and Figure 6 As shown, the air outlet channel 14 includes a fourth vertical channel 141, a third horizontal channel 142 and a fifth vertical channel, wherein:

[0070] The third horizontal channel 142 is connected between the fourth vertical channel 141 and the fifth vertical channel, and the third horizontal channel 142 serves to connect the fourth vertical channel 141 and the fifth vertical channel;

[0071] The end of the fourth vertical channel 141 away from the third horizontal channel 142 is a third air inlet 1411, which is used to guide the dry air in the test chamber to the third horizontal channel 142;

[0072] The fifth vertical channel is connected to the end of the third horizontal channel 142 away from the fourth vertical channel 141 . The end of the fifth vertical channel away from the third horizontal channel 142 is the third exhaust port 143 . The fifth vertical channel is used to discharge the dry gas in the third horizontal channel 142 .

[0073] The air outlet channel 14 has a simple structure, and discharges the dry air in the test chamber by entering and penetrating the fixture body 1 layer by layer.

[0074] Specifically, the structure of the third horizontal channel 142 can be similar to that of the second horizontal channel 132. The third horizontal channel 142 includes a main gas outlet channel and a gas outlet branch channel. Each gas outlet branch channel is connected to a fourth vertical channel 141. When in use, the dry gas in each fourth vertical channel 141 enters the main gas outlet channel through each gas outlet branch channel one by one. The dry gas in the main gas outlet channel enters the fifth vertical channel and is then discharged through the third exhaust port 143.

[0075] It should be noted that the dry gas between the inner sealing ring 2 and the outer sealing ring 3 can overflow to the outside through the porous structure of the sealing ring itself. In this case, the material of the inner sealing ring 2 and the outer sealing ring 3 can be sponge; or the outer sealing ring 3 is provided with an exhaust hole for exhausting the dry gas. In the above two cases, the air pressure between the inner sealing ring 2 and the outer sealing ring 3 is greater than the external air pressure.

[0076] In addition, the shapes of the inner sealing ring 2 and the outer sealing ring 3 are not limited to one, and the two can be in the shape of a circular ring, an elliptical ring, a square ring, etc.

[0077] In at least one embodiment, Figure 7 As shown, the inner sealing ring 2 and the outer sealing ring 3 are arranged in a “U”-shaped structure, which is more suitable for the shape of the clamp 5 .

[0078] In some embodiments, the supporting fixture includes a test plate 4. When the test plate 4 is connected to the fixture body 1, the inner sealing ring 2 and the outer sealing ring 3 are clamped between the fixture body 1 and the test plate 4, and a drying chamber is formed between the surface of the fixture body 1 facing the test plate 4, the test plate 4, the inner sealing ring 2 and the outer sealing ring 3.

[0079] The second aspect of the present invention provides a testing device. Figure 8 As shown, the testing device provided by the embodiment of the second aspect of the utility model includes the above-mentioned carrying fixture.

[0080] Compared with the prior art, the testing device provided in the embodiment of the second aspect of the utility model can reduce the air intake of the air source of the inner cavity of the inner sealing ring and the air intake of the air source of the outer cavity, forming a double-layer dry gas structure, which effectively avoids frost and condensation during low-temperature testing.

[0081] In some embodiments, Figure 8 As shown, the test device further includes a test seat 6 and a pressure measuring arm 7. The test seat 6 is mounted on the fixture body 1, and the pressure measuring arm 7 is used to pick up the chip and put it into the test cavity of the fixture 5 for testing.

[0082] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A load-bearing fixture, characterized in that: The jig comprises a jig body (1), an inner sealing ring (2), an outer sealing ring (3) and a test plate (4), wherein the jig body (1) is connected to the test plate (4), wherein: The inner sealing ring (2) and the outer sealing ring (3) are both mounted on the surface of the fixture body (1) facing the test plate (4) and are in sealing cooperation with the test plate (4); the outer sealing ring (3) is arranged around the outer side of the inner sealing ring (2) and is spaced apart from the inner sealing ring (2) to form a drying chamber; The fixture body (1) comprises a first exhaust port (1121), a second exhaust port (133) and a fixture installation position located on the inner side of the inner sealing ring (2); the first exhaust port (1121) is used to blow dry air into the drying chamber; the second exhaust port (133) is opened at the fixture installation position and is used to blow dry air to the fixture (5) installed at the fixture installation position.

2. The carrying fixture according to claim 1, characterized in that: The jig body (1) has a first air inlet channel (11), the first air inlet channel (11) has a first air inlet port (1111) and a first air outlet port (1121), the first air inlet port (1111) is disposed on an outer side wall of the jig body (1) and is connected to the first air outlet port (1121), the first air outlet port (1121) is disposed on a surface of the jig body (1) facing the test plate (4), and the first air outlet port (1121) is located between the inner sealing ring (2) and the outer sealing ring (3).

3. The carrying fixture according to claim 2, characterized in that: The first air inlet channel (11) comprises a first horizontal channel (111) and a first vertical channel (112) communicating with the first horizontal channel (111); The first horizontal channel (111) is parallel to the surface of the fixture body (1) facing the test plate (4), and an end of the first horizontal channel (111) facing away from the first vertical channel (112) is the first air inlet (1111); The first vertical channel (112) is perpendicular to the surface of the fixture body (1) facing the test plate (4), and an end of the first vertical channel (112) away from the first horizontal channel (111) is the first exhaust port (1121).

4. The carrying fixture according to claim 2, characterized in that: The first air inlet (1111) is provided with an air connector (12).

5. The carrying fixture according to claim 1, characterized in that: The fixture body (1) has a second air inlet channel (13), the second air inlet channel (13) has a second air inlet port (1311) and a second air outlet port (133), the second air inlet port (1311) is disposed on a surface of the fixture body (1) facing away from the test plate (4) and is connected to the second air outlet port (133).

6. The carrying fixture according to claim 5, characterized in that: The second air inlet channel (13) comprises a second vertical channel (131), a second horizontal channel (132) and a third vertical channel; The second horizontal channel (132) is connected between the second vertical channel (131) and the third vertical channel; The end of the second vertical channel (131) facing away from the second horizontal channel (132) is the second air inlet (1311); The end of the third vertical channel facing away from the second horizontal channel (132) is the second exhaust port (133).

7. The carrying fixture according to any one of claims 1 to 6, characterized in that: The fixture body (1) is further provided with a third exhaust port (143) spaced apart from the second exhaust port (133); the second exhaust port (133), the test cavity of the fixture (5) and the third exhaust port (143) are sequentially connected to form a passage for the circulation of dry air.

8. The carrying fixture according to claim 7, characterized in that: The fixture body (1) has an air outlet channel (14), the air outlet channel (14) has a third air inlet (1411) and a third air outlet (143), the third air inlet (1411) is opened at the fixture installation position and communicates with the third air outlet (143), and the third air outlet (143) is opened on the surface of the fixture body (1) facing away from the test plate (4).

9. The carrying fixture according to any one of claims 1 to 6, characterized in that: It also comprises a fixture (5) installed at the fixture installation position, wherein the fixture (5) is recessed with a test cavity connected to the second exhaust port (133).

10. A testing device, characterized in that: It comprises a test seat (6), a pressure measuring arm (7) and a supporting fixture as claimed in any one of claims 1 to 9, wherein the test seat (6) is mounted on the fixture body (1), and the pressure measuring arm (7) is used to pick up the chip and place it into the fixture (5) at the fixture mounting position for testing.