Semiconductor space efficient filter with filter element self-cleaning function

Abstract

The utility model discloses a semiconductor space high-efficiency filter with a filter element self-cleaning function, which relates to the technical field of semiconductors and comprises a filter, a filter component is arranged in the filter, a cleaning component is arranged on one side of the filter, and two sides of the filter component are respectively arranged in the filter and the cleaning component. The filtering assembly comprises a rotating shaft; according to the utility model, through the arrangement of the cleaning assembly and the cleaning assembly, when the filter assembly needs to be cleaned, the filter assembly does not need to be disassembled, and the used side can enter the cleaning assembly by rotating the rotating shaft and changing the positions of the two sides of the filter assembly, so that the filter assembly does not need to be rewarded to be disassembled and replaced; the time needed by the filtering assembly is saved, the maintenance time of the device is shorter, the working efficiency is higher, triggering and closing of the cleaning assembly can be automatically delayed in the exchange process, manual start and stop by workers are not needed, and use is more convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and particularly relates to a high-efficiency semiconductor space filter with a self-cleaning function for a filter element. Background Technique

[0002] The utility model relates to the technical field of semiconductor cleaning, and particularly relates to a high-efficiency semiconductor space filter with a self-cleaning function for a filter element. The filter is mainly used for efficiently filtering air during the semiconductor manufacturing process to ensure the cleanliness requirements of the clean room.

[0003] For the filters in the prior art, when cleaning and maintaining, it is usually necessary to remove the filter element for replacement, or use circulating water flow inside the filter for cleaning. The cleaning process of the above filters all requires a certain amount of time. During this period, the workshop needs to stop work and wait for the cleaning to be completed, which will undoubtedly delay the production efficiency of the workshop.

[0004] In view of this, this application is specifically proposed. Content of the Utility Model

[0005] The purpose of the utility model is to provide a high-efficiency semiconductor space filter with a self-cleaning function for a filter element to solve the problems raised in the above background technique.

[0006] To solve the above technical problems, a high-efficiency semiconductor space filter with a self-cleaning function for a filter element provided by the utility model includes a filter. A filtering component is arranged in the filter. A cleaning component is arranged on one side of the filter. Both sides of the filtering component are respectively arranged in the filter and the cleaning component. The filtering component includes a rotating shaft. A filter screen and an activated carbon filter plate are fixedly connected to the rotating shaft. Grids are arranged in the middle of the filter screen and the activated carbon filter plate. One end of the rotating shaft passes out from the rear of the filter.

[0007] Further, an air inlet is opened on the front surface of the filter. A blower is arranged at the center of the back surface of the filter. The air suction end of the blower is communicated with the filter. The air outlet end of the blower is connected with an air outlet pipe.

[0008] Further, the filtering component further includes a stepper motor. The stepper motor is fixedly installed on the back surface of the filter. The rotating shaft is fixedly connected to the output shaft of the stepper motor.

[0009] Further, a trigger cavity is further opened in the filter. The other end of the rotating shaft is arranged in the trigger cavity. A trigger rod is arranged at the other end of the rotating shaft. A delay timing switch is further arranged in the trigger cavity. The delay timing switch is electrically connected to the cleaning component. There are two delay timing switches symmetrically arranged on both sides of the trigger rod. When the trigger rod rotates, it touches the delay timing switch.

[0010] Furthermore, the cleaning component includes a cleaning part. On one side of the cleaning part where a filter screen is provided, a circulation fan is installed on one inner wall of the cleaning part. Nozzles are symmetrically arranged on both sides of the circulation fan. On the other inner wall of the cleaning part, a cleaning component for cleaning the cleaning part is fixedly installed.

[0011] Furthermore, the cleaning component further includes a regeneration part. On one side of the regeneration part where an activated carbon filter plate is provided, a microwave regenerator is fixedly installed in the regeneration part.

[0012] Furthermore, a control panel is provided on the back of the filter, and the control panel is electrically connected to the stepping motor.

[0013] Furthermore, a photocatalytic lamp is provided in the filter. The photocatalytic lamp is located behind the activated carbon filter plate. There are multiple photocatalytic lamps, which are arranged at equal intervals around the inner wall of the filter.

[0014] Compared with the prior art, the beneficial effects of the present utility model are:

[0015] By providing the cleaning component and the cleaning component, when it is necessary to clean the filtering component, there is no need to remove the filtering component. The position of both sides of the filtering component can be swapped by rotating the rotating shaft, so that the used side enters the cleaning component. Thus, there is no need to remove and replace the filtering component, saving the time required for the filtering component, making the maintenance time of this device shorter, the working efficiency higher, and the cleaning component will be automatically triggered and closed during the swapping process, without the need for manual start and stop by the staff, making it more convenient to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The front view of a semiconductor space high-efficiency filter with a self-cleaning function for the filter element;

[0017] Figure 2 The rear view of a semiconductor space high-efficiency filter with a self-cleaning function for the filter element;

[0018] Figure 3 The sectional structure schematic diagram of the cleaning component of a semiconductor space high-efficiency filter with a self-cleaning function for the filter element;

[0019] Figure 4 The sectional structure schematic diagram of a semiconductor space high-efficiency filter with a self-cleaning function for the filter element;

[0020] Figure 5 The enlarged view of the trigger component of a semiconductor space high-efficiency filter with a self-cleaning function for the filter element.

[0021] In the figure: 1. Filter; 101. Air inlet; 102. Fan; 103. Air outlet pipe; 104. Trigger chamber; 2. Stepper motor; 201. Rotating shaft; 202. Filter screen; 203. Activated carbon filter plate; 204. Photocatalytic lamp; 3. Cleaning component; 301. Cleaning part; 3011. Sprayer; 3012. Circulating fan; 302. Regeneration part; 3021. Microwave regenerator; 4. Control panel; 5. Trigger rod; 501. Delay timing switch. Detailed implementation manner

[0022] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0023] Please refer to Figures 1-5 , the present invention provides a technical solution: including a filter 1, an air inlet 101 is opened on the front surface of the filter 1, a fan 102 is provided at the center of the back surface of the filter 1, the air suction end of the fan 102 is communicated with the filter 1, the air outlet end of the fan 102 is connected with an air outlet pipe 103, a filtering component is provided in the filter 1, a cleaning component 3 is provided on one side of the filter 1, and both sides of the filtering component are respectively arranged in the filter 1 and the cleaning component 3. The filtering component includes a rotating shaft 201, a filter screen 202 and an activated carbon filter plate 203 are fixedly connected to the rotating shaft 201, grids are arranged in the middle of the filter screen 202 and the activated carbon filter plate 203, and one end of the rotating shaft 201 passes through the back of the filter 1.

[0024] By adopting the above design, after the filter 1 operates for a certain period of time, when a certain amount of dust accumulates on the filter screen 202 in the filter 1 and a certain amount of particles are adsorbed by the activated carbon filter plate 203, and its filtration speed decreases, the end of the rotating shaft 201 protruding from the filter 1 can be rotated to swap the positions of both sides of the filter screen 202 and the activated carbon filter plate 203. Then, the used side enters the cleaning component 3, and the clean filter screen 202 and activated carbon filter plate 203 are transferred into the filter 1 for continued use. When replacing the filter screen 202 and the activated carbon filter plate 203, it is not necessary to remove and replace them, saving the time required for disassembling and assembling the filter screen 202 and the activated carbon filter plate 203. Furthermore, the time required for maintaining the filter 1 is reduced, thereby improving the working efficiency of the filter 1, making it more efficient. Moreover, for the used side of the filter screen 202 and the activated carbon filter plate 203, after being transferred into the cleaning component 3, the cleaning component 3 can be started to clean it. Thus, it is not necessary for the staff to carry tools to clean the filter screen 202 and the activated carbon filter plate 203, making the cleaning process of the filter screen 202 and the activated carbon filter plate 203 more convenient.

[0025] Specifically, referring to Figures 1-4 , the filtering component further includes a stepper motor 2. The stepper motor 2 is fixedly installed on the back of the filter 1. The rotating shaft 201 is fixedly connected to the output shaft of the stepper motor 2. A photocatalytic lamp 204 is provided in the filter 1. The photocatalytic lamp 204 is located behind the activated carbon filter plate 203. There are multiple photocatalytic lamps 204, which are arranged equidistantly around the inner wall of the filter 1.

[0026] By setting the stepper motor 2, it is not necessary for the staff to manually rotate during rotation. The positions of both sides of the filter screen 202 and the activated carbon filter plate 203 can be automatically swapped by starting and stopping the stepper motor 2 once, and the swapping process is more accurate. Additionally, a photocatalytic lamp 204 is provided behind the activated carbon filter plate 203 in the filter 1, so that the air filtered by the filter screen 202 and the activated carbon filter plate 203 can also be disinfected and sterilized by the photocatalytic lamp 204, thereby making the filtering effect of this device better.

[0027] More specifically, referring to Figures 1-4 , the cleaning component 3 includes a cleaning part 301. On one side of the cleaning part 301 where the filter screen 202 is provided, a circulation fan 3012 is installed on one inner wall of the cleaning part 301. Nozzles 3011 are symmetrically arranged on both sides of the circulation fan 3012. On the other inner wall of the cleaning part 301, a cleaning component 3 for the cleaning part 301 is fixedly installed. The cleaning component 3 further includes a regeneration part 302. On one side of the regeneration part 302 where the activated carbon filter plate 203 is provided, a microwave regenerator 3021 is fixedly installed in the regeneration part 302.

[0028] By adopting the above design, when the side of the filter screen 202 and the activated carbon filter plate 203 to be cleaned is transferred into the cleaning component 3, the spray head 3011 in the cleaning component 301 will spray water on the filter screen 202, and the circulation fan 3012 will blow air towards the filter screen 202 when spraying water, so as to blow off the dust or large particles on the filter screen 202 and clean its surface. Moreover, the water and ash mixture after cleaning will flow out from the cleaning component 301 and the cleaning component 3 uniformly and wait for centralized treatment. The microwave regenerator 3021 in the regeneration component 302 will emit microwave radiation. In the microwave field, the polar substance molecules adsorbed by the activated carbon filter plate 203 will be induced to generate dipole rotation polarization, so that the microwave energy can be quickly converted into heat energy, and the high-temperature activation conditions can be reached in a short time, and the decomposition, carbonization of organic substances and the activation reaction with high-temperature water molecules will occur, thereby realizing the effect of regenerating the activated carbon filter plate 203.

[0029] Refer to Figure 1 , Figure 4 and Figure 5 , further, a trigger cavity 104 is also provided in the filter 1, the other end of the rotating shaft 201 is arranged in the trigger cavity 104, a trigger rod 5 is arranged at the other end of the rotating shaft 201, a delay timing switch 501 is also arranged in the trigger cavity 104, the delay timing switch 501 is electrically connected to the cleaning component 3, the delay timing switch 501 has two symmetrical settings on both sides of the trigger rod 5, and the trigger rod 5 contacts the delay timing switch 501 when rotating.

[0030] By adopting the above design, after the stepping motor 2 starts and stops once and completes the replacement of both sides of the filter screen 202 and the activated carbon filter plate 203, the trigger rod 5 will rotate with the start and stop of the stepping motor 2. Furthermore, during the start and stop process, the delay timing switch 501 will be triggered by the trigger rod 5. Thus, by triggering the delay timing switch 501, the cleaning component 3 is automatically delayed to start, so that after the replacement is completed, the used side of the filter screen 202 and the activated carbon filter plate 203 can be automatically cleaned. Moreover, after the cleaning component 3 is started for a period of time, the delay timing switch 501 will automatically turn off the cleaning component 3, thereby improving the automation level of the device and making the use process more convenient.

[0031] In addition, refer to Figure 2, a control panel 4 is provided on the back of the filter 1. The control panel 4 is electrically connected to the stepper motor 2. The control panel 4 integrates a clock chip, a counter, control logic, a power management unit, and a user interface. During use, the staff sets timing parameters such as start time and repeat cycle through the user interface. The control logic receives these settings and configures the clock chip and the counter to trigger at the specified time. The clock chip runs continuously, providing accurate time information to the counter. The counter counts according to the clock signal. When the preset start time is reached, it sends a signal to the control logic. After receiving the signal, the control logic performs corresponding actions such as closing the relay or sending a start signal to the controlled device, thereby starting the device.

[0032] By adopting the above design, when in use, the staff can set the time in advance according to the air pollution index in the workshop, and control the stepper motor 2 to automatically start and stop once after a certain time through the control panel 4, swapping the positions of both sides of the filter screen 202 and the activated carbon filter plate 203, so that there is no need for the staff to manually start and stop the stepper motor 2 to swap both sides of the filter screen 202 and the activated carbon filter plate 203, thus making the operation of this device more convenient.

[0033] Working principle:

[0034] During use, the fan 102 can be started to drive air to rush into the filter 1 from the air inlet 101 and then be discharged through the air outlet pipe 103. When the air passes through the filter 1, it will come into contact with the filter screen 202 and the activated carbon filter plate 203 in sequence. When passing through the filter screen 202, large particles and dust will be filtered out. When passing through the activated carbon filter plate 203, small particles will be filtered out and odors will be purified. Then, after being irradiated and sterilized by the photocatalytic lamp 204, it will be discharged from the air outlet pipe 103.

[0035] During maintenance, the time can be set in advance in the control panel 4. After reaching the specified time, the control panel 4 will automatically start and stop the stepper motor 2 once, thus completing the swapping of both sides of the filter screen 202 and the activated carbon filter plate 203. During the swapping process, the trigger rod 5 will trigger the delay timing switch 501, delaying the start of the cleaning component 3. After the swapping is completed, the cleaning component 3 starts to clean the filter screen 202 and the activated carbon filter plate 203, and after the cleaning is completed, the delay timing switch 501 automatically closes the cleaning component 3. In this way, after being set, this device can automatically complete the cleaning operation of the filter screen 202 and the activated carbon filter plate 203 without manual operation, and there is no need to remove the filter screen 202 and the activated carbon filter plate 203 during the cleaning process, saving the time required for disassembling and assembling the filter screen 202 and the activated carbon filter plate 203, thus making the operation of this device more efficient.

Claims

1. A semiconductor space high efficiency filter (1) with a filter element self-cleaning function, comprising a filter (1), wherein a filter assembly is provided in the filter (1), characterized in that: A cleaning component (3) is arranged on one side of the filter (1), and two sides of the filter component are arranged in the filter (1) and the cleaning component (3) respectively. The filter component comprises a rotating shaft (201), and a filter screen (202) and an activated carbon filter plate (203) are fixedly connected to the rotating shaft (201). A grille is arranged in the middle of the filter screen (202) and the activated carbon filter plate (203), and one end of the rotating shaft (201) passes through the rear of the filter (1).

2. A semiconductor space high efficiency filter (1) with filter element self-cleaning function as claimed in claim 1, characterized in that: The front side of the filter (1) is provided with an air inlet (101), the back side of the filter (1) is provided with a fan (102) at the center, the air suction end of the fan (102) is connected to the filter (1), and the air outlet end of the fan (102) is connected to an air outlet pipe (103).

3. A semiconductor space high efficiency filter (1) with filter element self-cleaning function as claimed in claim 2, characterized in that: The filter assembly further comprises a stepper motor (2), wherein the stepper motor (2) is fixedly mounted on the back of the filter (1), and the rotating shaft (201) is fixedly connected to an output shaft of the stepper motor (2).

4. A semiconductor space high efficiency filter (1) with filter element self-cleaning function as claimed in claim 3, characterized in that: The filter (1) is further provided with a trigger chamber (104), the other end of the rotating shaft (201) being arranged in the trigger chamber (104), the other end of the rotating shaft (201) being provided with a trigger rod (5), the trigger chamber (104) being further provided with a delay timing switch (501), the delay timing switch (501) being electrically connected to the cleaning component (3), the delay timing switch (501) having two symmetrically arranged on both sides of the trigger rod (5), the trigger rod (5) being in conflict with the delay timing switch (501) when rotating.

5. A semiconductor space high efficiency filter (1) with filter element self-cleaning function as claimed in claim 4, characterized in that: The cleaning component (3) comprises a cleaning part (301), one side of the cleaning part (301) being provided with a filter screen (202), a circulation fan (3012) being installed on the inner wall of one side of the cleaning part (301), nozzles (3011) being symmetrically arranged on both sides of the circulation fan (3012), and a cleaning component (301) cleaning component (301) being fixedly installed on the inner wall of the other side of the cleaning part (301).

6. A semiconductor space high efficiency filter (1) with filter element self-cleaning function as claimed in claim 5, characterized in that: The cleaning component (3) further comprises a regeneration component (302), wherein one side of the activated carbon filter plate (203) is provided in the regeneration component (302), and a microwave regenerator (3021) is fixedly installed in the regeneration component (302).

7. A semiconductor space high efficiency filter (1) with filter element self-cleaning function as claimed in claim 6, characterized in that: A control panel (4) is provided on the back of the filter (1), and the control panel (4) is electrically connected to the stepping motor (2).

8. A semiconductor space high efficiency filter (1) with filter element self-cleaning function as claimed in claim 7, characterized in that: The filter (1) is provided with a photocatalytic lamp (204), the photocatalytic lamp (204) being located behind the activated carbon filter plate (203), and there are a plurality of photocatalytic lamps (204) which are arranged around the inner wall of the filter (1) at equal intervals.

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